SEC-Z517 HORIBA STEC SEC-Z500X EtherCAT Mass Flow Controller

HORIBA STEC SEC-Z517 | SEC-Z500X EtherCAT Mass Flow Controller

The SEC-Z517 from HORIBA STEC is a digital mass flow controller within the SEC-Z500X EtherCAT Series. It regulates process gas flow through high-speed digital communication and precision piezoelectric valve control.

This model targets semiconductor manufacturing equipment requiring fast gas delivery and repeatable flow regulation. Its EtherCAT interface supports integration with real-time equipment control architectures.

The controller covers full-scale flow ranges from 10 SCCM to 5.5 SLM. Its multi-gas and multi-range configuration supports different process gas requirements.

With a response time of T98 ≤1 second, the SEC-Z517 supports rapid flow adjustments. Its low-flow accuracy specification also supports applications requiring precise gas delivery.

01. Product Identity & Configuration

Manufacturer	HORIBA STEC
Model	SEC-Z517
Product Series	SEC-Z500X
Communication Version	EtherCAT
Product Type	Digital Mass Flow Controller (MFC)
Control Element	Piezoelectric Actuator Valve
Gas Configuration	Multi-Gas / Multi-Range
Heating Configuration	Standard Unheated Version
Electrical Supply	24 VDC, 6.8 VA

02. Flow Measurement & Control Performance

Flow accuracy and response speed directly affect process gas delivery. The following specifications define the SEC-Z517 control performance.

Parameter	Specification
Full-Scale Flow Range	10 SCCM to 5.5 SLM
Reference Gas	N2 equivalent
Range Configuration	MR / MG selectable
Control Range	2% to 100% FS
Turndown Ratio	50:1
Accuracy Above 25% FS	±1.0% of setpoint
Accuracy at or Below 25% FS	±0.25% FS
Repeatability	±0.2% FS
Linearity	±0.5% FS
Response Time	≤1 second, T98

Engineering Interpretation

• Low-Flow Accuracy: The ±0.25% FS specification applies at setpoints of 25% FS or below.
• Normal Operating Range: Above 25% FS, accuracy changes to ±1.0% of setpoint.
• Repeatability: ±0.2% FS supports consistent flow regulation across repeated operating cycles.
• Linearity: ±0.5% FS describes deviation from the specified linear flow relationship.
• Response: T98 ≤1 second indicates the specified full-range response performance.

Selection Tip: Evaluate accuracy using the actual operating setpoint. Do not compare percentage-of-setpoint accuracy directly with percentage-of-full-scale accuracy.

03. Gas Compatibility & Process Wetted Construction

The SEC-Z517 supports multiple process gases through selectable gas and range configurations.

Specified Gas Compatibility

• Nitrogen (N2)
• Argon (Ar)
• Hydrogen (H2)
• Helium (He)
• Oxygen (O2)
• Sulfur Hexafluoride (SF6)
• Hydrogen Bromide (HBr)
• Tungsten Hexafluoride (WF6)
• Other supported gases subject to configuration

Wetted Materials & Sealing

Wetted Material	SUS316L Stainless Steel
Internal Surface	Polished finish, standard
Seal Options	Metal or elastomer
Valve Technology	Piezoelectric actuator
Valve Configuration	Normally open or normally closed
Leak Integrity	≤5 × 10⁻¹² Pa·m³/s (He)

Process Engineering Consideration: Gas compatibility depends on the selected wetted materials and seal configuration. Confirm chemical compatibility before ordering corrosive or reactive gas applications.

04. Pressure & Operating Conditions

Stable gas delivery requires suitable differential pressure and sufficient upstream pressure control.

Operating Parameter	Specified Value
Operating Differential Pressure	50–300 kPa(d)
Maximum Operating Pressure	450 kPa(g)
Pressure Resistance	1000 kPa(g)
Operating Temperature	5°C to 50°C
Recommended Temperature	15°C to 45°C
Heated Function	Not included in standard configuration

Important Pressure Distinction:

• Differential pressure represents the pressure difference across the controller.
• Maximum operating pressure specifies the permitted operating pressure limit.
• Pressure resistance describes a separate pressure withstand rating.
• Do not use the pressure resistance value as a continuous operating pressure.

05. EtherCAT Communication & Electrical Interface

The SEC-Z500X EtherCAT Series uses digital communication for integration with automated semiconductor equipment.

• Protocol: EtherCAT® industrial Ethernet communication.
• Network Ports: IN and OUT RJ-45 interfaces.
• Conformance: EtherCAT Technology Group (ETG) conformant.
• Power Supply: DC 24 V.
• Power Consumption: 6.8 VA.

Integration Considerations

• Connect the IN port to the upstream EtherCAT network device.
• Use the OUT port according to the network topology.
• Verify EtherCAT device recognition during commissioning.
• Confirm the controller's process configuration before enabling flow control.
• Check communication status before diagnosing process-side flow deviations.

The wider body accommodates the EtherCAT electronic configuration. Confirm mechanical clearance when replacing equipment within existing gas panels.

06. Mechanical Dimensions & Installation Interface

Overall Height	126 mm
Overall Width	82 mm
Overall Thickness	29 mm
Dimensional Order	H × W × T
Gas Connection	1/4-inch VCR male
Fitting Distance	124 mm

Installation Checklist

1. Confirm the mounting space and fitting center distance.
2. Verify the 1/4-inch VCR male connection requirements.
3. Check gas line cleanliness before connecting the controller.
4. Confirm the selected seal material matches the process gas.
5. Verify upstream and downstream pressure conditions.
6. Connect the 24 VDC supply and EtherCAT network correctly.
7. Check for external leakage before introducing process gas.
8. Verify the configured gas type and flow range.

Follow the applicable HORIBA STEC installation instructions and semiconductor gas handling procedures. Use qualified personnel for hazardous gas connections.

07. Semiconductor Process Applications

The HORIBA STEC SEC-Z517 targets equipment requiring digital gas flow control and fast communication.

Application	Engineering Requirement
Semiconductor Etching	Precise process gas delivery and rapid flow adjustment.
Thin-Film Deposition	Repeatable gas flow during process recipe execution.
Advanced Process Equipment	EtherCAT integration with real-time control architectures.
Multi-Gas Delivery Systems	Selectable gas configurations for different process recipes.
Automated Gas Panels	Digital communication and compact installation interfaces.

08. Compliance & Product Standards

• RoHS: RoHS compliant.
• EtherCAT: EtherCAT Technology Group conformance.
• Semiconductor Standards: SEMI standards compliance as specified for the product.

Confirm the applicable SEMI standard numbers and certification documents against the exact product configuration. Do not assume additional safety or hazardous-area approvals.

09. Configuration Verification Before Purchasing

Ordering the correct flow controller requires more than matching the model number. Process gas, flow range, pressure, and communication configuration affect selection.

• Model: Confirm SEC-Z517.
• Series: Confirm SEC-Z500X EtherCAT version.
• Gas Type: Specify the actual process gas.
• Full-Scale Range: Confirm the required SCCM or SLM range.
• Range Selection: Verify the MR/MG configuration.
• Valve Type: Confirm normally open or normally closed operation.
• Seal Material: Select metal or compatible elastomer.
• Fittings: Verify 1/4-inch VCR male connections.
• Pressure: Confirm differential and maximum operating pressure.
• Communication: Confirm EtherCAT compatibility with the host controller.

Purchasing Advice: Request the complete configuration details before ordering. Two controllers with similar flow ranges may have different gas, seal, and valve configurations.

10. Frequently Asked Questions

Q1: How does gas selection affect the SEC-Z517 flow measurement?

Different gases have different physical properties and flow characteristics. The controller requires the correct gas configuration for accurate flow regulation. Do not assume an N2-equivalent range provides identical actual flow performance for every gas. Confirm the gas-specific calibration and configuration before commissioning.

Q2: What happens if the operating differential pressure falls below 50 kPa(d)?

The specified operating differential pressure range starts at 50 kPa(d). Insufficient differential pressure can prevent the controller from achieving the requested flow. Check upstream supply pressure, downstream backpressure, and restrictions in the gas line before changing the controller.

Q3: Why should engineers check the normally open or normally closed valve configuration?

The valve's default mechanical state affects gas shutoff behavior during certain power or control conditions. The correct selection depends on the equipment safety design. Verify the specified valve configuration against the gas panel's shutdown philosophy. Do not assume both configurations provide identical fail-safe behavior.

Q4: Can the SEC-Z517 replace an existing analog mass flow controller directly?

Not necessarily. The SEC-Z517 uses EtherCAT communication and RJ-45 network interfaces. An analog controller may use different electrical connections and control signals. Check the host controller, network topology, mounting dimensions, gas fittings, and process configuration before replacement.

Q5: What should engineers investigate when the displayed flow fluctuates despite stable pressure?

Start by checking gas purity, upstream regulation, and downstream restrictions. Inspect fittings for contamination or leakage. Then verify the gas configuration, flow range, and EtherCAT communication status. Compare actual operating conditions with the specified accuracy and repeatability limits before suspecting internal valve failure.

11. Product Supply & Technical Support

Looking for the HORIBA STEC SEC-Z517 EtherCAT Mass Flow Controller?

• Brand: HORIBA STEC
• Model: SEC-Z517
• Series: SEC-Z500X EtherCAT
• Product Type: Digital Mass Flow Controller
• Flow Range: 10 SCCM to 5.5 SLM
• Communication: EtherCAT
• Warranty: 12 months, subject to sales terms.
• Inspection: Product inspection before shipment.
• Shipping: DHL, FedEx, UPS, and other supported carriers.

Contact our sales team for pricing, availability, and delivery information. Provide your gas type, required flow range, and fitting configuration for accurate model verification.

Tags