SEC-8470F HORIBA STEC High Temperature Mass Flow Controller

HORIBA STEC SEC-8470F | SEC-8000F High Temperature Digital Mass Flow Controller

The SEC-8470F is a high-temperature digital mass flow controller from the HORIBA STEC SEC-8000F Series. It regulates high-flow process gases in semiconductor manufacturing equipment.

Unlike standard unheated mass flow controllers, this model incorporates a heated sensor section. The heating function helps manage gases that may condense or change behavior at lower temperatures.

The controller supports a nitrogen-equivalent full-scale flow rate of 150 SLM. Its sensor temperature options cover 80–120°C, depending on the selected configuration.

The unit combines a piezoelectric control valve, electropolished SUS316L wetted surfaces, and metal seals. Its electrical interfaces support analog control and RS-485 F-Net communication.

These characteristics make the SEC-8470F suitable for high-flow gas delivery systems. Typical installations include large MOCVD reactors and heated bulk gas lines.

01 | Product Architecture at a Glance

Manufacturer	HORIBA STEC
Model	SEC-8470F
Product Series	SEC-8000F
Series Classification	High Temperature Digital
Product Type	Heated Mass Flow Controller (MFC)
Full-Scale Flow	150 SLM, N2 equivalent
Sensor Heating	Yes
Heating Options	HL: 80–100°C; HM: 100–120°C
Control Valve	Piezoelectric actuator
Valve Default State	Normally open when power is off
Communication	Analog and RS-485 F-Net

02 | High-Flow Performance & Control Accuracy

The SEC-8470F provides a 150 SLM full-scale flow capacity. Its control range covers 2% to 100% of full scale.

Performance Parameter	Specification
Full-Scale Flow Rate	150 SLM
Reference Gas	Nitrogen (N2) equivalent
Control Range	2%–100% FS
Turndown Ratio	50:1
Accuracy Above 30% FS	±1.0% of setpoint
Accuracy at or Below 30% FS	±0.3% FS
Repeatability	±0.3% FS
Linearity	±0.5% FS
Response Time	≤1 second, T98

Engineering Interpretation

• High-Flow Capacity: The 150 SLM rating supports high-volume process gas delivery.
• Low-Setpoint Accuracy: The specification changes at the 30% FS threshold.
• Repeatability: ±0.3% FS describes consistency across repeated control operations.
• Linearity: ±0.5% FS describes deviation from the specified linear flow relationship.
• Dynamic Response: T98 ≤1 second specifies the response performance.
• Control Range: The 2%–100% FS range provides a 50:1 turndown ratio.

Practical Selection Example: At 150 SLM full scale, 30% FS equals 45 SLM. The low-setpoint accuracy specification applies at or below this threshold.

Do not confuse percentage of setpoint with percentage of full scale. These accuracy references use different calculation bases.

03 | Thermal Management for Process Gas Delivery

The defining feature of the SEC-8470F is its heated sensor configuration. It supports applications involving corrosive or condensable process gases.

Thermal Section	Temperature Specification
Sensor Section – HL Type	80–100°C
Sensor Section – HM Type	100–120°C
Valve Section	5–45°C
Heating Configuration	Heated sensor section

Why Sensor Heating Matters

• Helps maintain the sensor above the condensation temperature of compatible process gases.
• Reduces the risk of condensation inside the heated measurement section.
• Supports stable measurement conditions for suitable high-temperature gas applications.
• Provides different heating ranges for different process requirements.

Important Configuration Note: The sensor and valve sections have different temperature limits. The valve section must remain within 5–45°C.

Do not assume the entire controller operates at 80–120°C. Verify the selected HL or HM configuration before installation.

04 | Process Wetted Materials & Gas Compatibility

Material selection is important when handling corrosive, reactive, or condensable gases. The supplied construction specification identifies electropolished SUS316L stainless steel and metal seals.

Wetted Body Material	SUS316L stainless steel
Internal Surface Finish	Electropolished, standard
Seal Material	Metal
Leak Integrity	≤5 × 10⁻¹² Pa·m³/s (He)
Gas Application	High-temperature process gases
Typical Gas Conditions	Corrosive or condensable gases requiring heating

Material Selection Considerations

• Electropolished surfaces support clean process gas contact.
• SUS316L provides a stainless steel wetted construction.
• Metal seals avoid reliance on standard elastomer sealing materials.
• Helium leak integrity supports demanding gas containment requirements.

Engineering Warning: SUS316L and metal seals do not guarantee compatibility with every corrosive gas. Confirm chemical compatibility, gas purity requirements, and process temperature before selection.

05 | Pressure Envelope & Gas Line Design

Correct pressure conditions are essential for stable high-flow regulation. The following values define the supplied pressure specifications.

Pressure Parameter	Specification
Operating Differential Pressure	50–300 kPa(d)
Maximum Operating Pressure	300 kPa(d)
Pressure Resistance	1000 kPa(G)

Pressure Design Notes

• Maintain the specified differential pressure during normal operation.
• Check upstream supply pressure under actual flow conditions.
• Evaluate downstream backpressure and piping restrictions.
• Keep operating pressure within the manufacturer's permitted limits.
• Do not use the pressure resistance rating as a continuous operating limit.

The supplied pressure data uses different reference notations. Confirm the exact pressure definitions and test conditions against the manufacturer documentation before final engineering approval.

06 | Electrical Interface & Control Integration

The SEC-8000F Series supports analog process control and digital communication through its RS-485 F-Net interface.

Analog Interface

Setpoint Signal	0.1–5 VDC
Flow Output Signal	0–5 VDC

Digital Communication

Communication Protocol	RS-485 F-Net
Communication Speed	38,400 bps
Connector Interface	D-Sub 9-pin and RJ-45

Power Supply Requirements

Positive Supply	+15 VDC ±5%, 150 mA
Negative Supply	-15 VDC ±5%, 150 mA

Integration Considerations

• Verify the analog setpoint range before connecting the equipment controller.
• Confirm the output signal scaling within the host control system.
• Check RS-485 wiring and communication parameters.
• Confirm the F-Net protocol implementation and device compatibility.
• Verify connector pin assignments against the applicable wiring documentation.
• Check both positive and negative supply rails during commissioning.

Important: RS-485 describes the electrical communication interface. F-Net defines the specified communication protocol. Do not assume generic Modbus RTU compatibility.

07 | Mechanical Connection & Installation

The SEC-8470F uses a 1/2-inch VCR connection for high-flow gas line integration.

Installation Checklist

1. Confirm the 1/2-inch VCR connection specification.
2. Check the gas line cleanliness before installation.
3. Use compatible metal gasket and fitting components.
4. Verify the installation direction and flow path.
5. Check mounting arrangements and maintenance clearance.
6. Confirm the sensor heating option before energization.
7. Maintain the valve section within its specified temperature range.
8. Inspect all gas connections for leakage.
9. Verify analog and RS-485 wiring before process startup.

Use suitable VCR installation procedures and manufacturer-approved sealing components. Avoid contamination during connection assembly.

Replacement Advice: Check the fitting size and center distance before replacing an existing controller. A matching flow rating does not guarantee mechanical interchangeability.

08 | Process Applications & Equipment Integration

The HORIBA STEC SEC-8470F is intended for high-flow gas delivery where sensor heating is necessary.

Application	Engineering Requirement
Large MOCVD Reactors	High-capacity process gas regulation.
Heated Bulk Gas Lines	Temperature-controlled gas measurement conditions.
Corrosive Gas Delivery	Compatible wetted materials and metal sealing.
Condensable Gas Systems	Heated sensor operation to manage condensation risk.
Semiconductor Gas Panels	High-flow control with analog and digital interfaces.

For these applications, engineers should evaluate gas chemistry, flow demand, pressure stability, and thermal conditions together.

09 | Compliance & Product Standards

• RoHS: RoHS compliant.
• Industry Standards: SEMI standards compliance.

Confirm the applicable SEMI standard numbers and supporting declarations against the exact product documentation. Do not assume additional hazardous-area or safety certifications.

10 | Configuration & Replacement Verification

Before ordering the SEC-8470F, confirm the complete process configuration. The heating range, gas compatibility, and electrical interface affect replacement suitability.

Pre-Purchase Verification

• Model: SEC-8470F.
• Series: SEC-8000F High Temperature Digital.
• Flow Capacity: 150 SLM, N2 equivalent.
• Heating Type: HL or HM.
• Gas Compatibility: Confirm the actual process gas.
• Sealing: Verify metal seal configuration.
• Connection: Confirm 1/2-inch VCR fittings.
• Communication: Verify analog and RS-485 F-Net requirements.
• Power: Confirm dual ±15 VDC supply availability.
• Valve Behavior: Confirm normally open operation when power is off.
• Pressure: Check differential and maximum operating conditions.

Critical Selection Point: Do not substitute an unheated MFC solely because it has the same nominal flow capacity. Heating capability is a functional requirement for the specified process conditions.

11 | Five Professional Engineering FAQs

Q1: How should engineers choose between the HL and HM heating configurations?

The HL configuration covers 80–100°C. The HM configuration covers 100–120°C. Selection depends on the process gas temperature requirements and condensation characteristics. Engineers should evaluate the gas vapor behavior, line temperature, and process operating conditions before choosing either option.

Q2: Why is the valve section limited to 5–45°C when the sensor reaches 120°C?

The sensor and valve sections have separate thermal operating limits. The heated design targets the measurement section rather than the entire assembly. Excessive valve-section temperature may affect its operating conditions. Maintain suitable thermal separation and cabinet ventilation during installation.

Q3: What does normally open when power is off mean for gas system safety?

The piezoelectric valve has a normally open default state without power. Gas flow may therefore remain possible after power loss. Engineers must evaluate the upstream isolation valve and system shutdown sequence. Never rely on this controller alone for emergency gas isolation.

Q4: How can engineers diagnose unstable flow after replacing the controller?

First, verify the selected heating configuration and allow the sensor to reach its specified operating temperature. Then check the gas calibration, differential pressure, and setpoint scaling. Inspect the VCR connections and electrical supply rails. Finally, compare the analog output with the host controller reading.

Q5: Can the SEC-8470F operate through RS-485 without using its analog interface?

The supplied specifications identify both analog signals and RS-485 F-Net communication. However, the available operating modes and command functions require confirmation from the communication manual. Check the host controller's F-Net support, device configuration, and wiring requirements before designing a digital-only connection.

12 | Ordering Information & Technical Support

Looking for the HORIBA STEC SEC-8470F High Temperature Mass Flow Controller?

Brand	HORIBA STEC
Model	SEC-8470F
Series	SEC-8000F
Product Type	Heated Digital Mass Flow Controller
Flow Capacity	150 SLM
Heating Range	80–120°C, configuration dependent
Communication	Analog / RS-485 F-Net
Warranty	12 months, subject to sales terms
Pre-Shipment Inspection	Available before delivery
Shipping Options	DHL, FedEx, UPS, and other supported carriers

Contact our sales team for current pricing, availability, and delivery information. Include your process gas, heating option, and connection requirements when requesting a quotation.

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