SEC-8440F HORIBA STEC Heated Mass Flow Controller SEC-8000F Series

SEC-8440F | HORIBA STEC | SEC-8000F High Temperature Digital Mass Flow Controller

The HORIBA STEC SEC-8440F is a high-temperature digital mass flow controller designed for demanding semiconductor gas delivery systems. Its heated sensor section helps maintain stable measurement conditions when process gases tend to condense.

Within the SEC-8000F Series, this model combines thermal management, precision flow control, and digital communication. It supports applications involving corrosive or condensable gases, including metalorganic precursors and titanium tetrachloride (TiCl4).

Its electropolished SUS316L wetted surfaces and metal seals support demanding gas-handling requirements. A piezoelectric control valve provides normally open operation when power is removed.

01 | Engineering Configuration at a Glance

02 | Flow Performance and Measurement Characteristics

The available full-scale ranges cover low-flow and higher-flow process configurations. Select the range according to the required gas flow and operating conditions.

Engineering note: Accuracy uses two different reference bases. Above 30% FS, it references the setpoint. At or below 30% FS, it references full scale. Do not treat these values as interchangeable during measurement uncertainty calculations.

03 | Thermal Management and Gas-Wetted Construction

Condensation can affect flow measurement and restrict internal gas passages. The heated sensor section helps keep process gas above its condensation threshold.

The sensor heating configuration requires careful coordination with the process gas temperature profile. The heated section does not automatically guarantee that the complete upstream and downstream gas path remains condensation-free.

04 | Electrical Interface and Control Architecture

For analog integration, confirm the controller's input and output scaling before commissioning. For digital integration, verify F-Net compatibility, RS-485 wiring, connector pin assignments, and host communication settings.

05 | Process Integration: Where SEC-8440F Adds Value

• MOCVD gas delivery: Supports controlled delivery of temperature-sensitive precursor gases.
• ALD process systems: Helps manage gas flow where condensation can affect measurement stability.
• Metalorganic precursors: Heated sensing supports applications involving condensable process materials.
• TiCl4 delivery: Provides a heated measurement configuration for suitable process gas systems.
• Corrosive gas handling: SUS316L wetted surfaces and metal seals support compatible gas-service configurations.

Always verify material compatibility against the actual gas composition, concentration, temperature, and pressure. A heated MFC does not replace the need for compatible upstream regulators, tubing, valves, and exhaust arrangements.

06 | Installation and Commissioning Recommendations

1. Confirm the gas configuration. Match the selected full-scale range to the process gas and required flow.
2. Check the heated option. Verify whether the application requires HL or HM temperature settings.
3. Inspect the VCR connections. Use compatible fittings and follow the equipment manufacturer's sealing procedure.
4. Verify the gas path. Review upstream and downstream temperatures to identify potential condensation points.
5. Check the power rails. Confirm both +15 VDC and −15 VDC supplies before applying the setpoint.
6. Validate the control interface. Confirm analog scaling or RS-485 F-Net communication before process operation.
7. Perform a controlled leak test. Follow the facility's approved procedure for the actual process gas.

07 | Troubleshooting Insights for Process Engineers

• Unexpected flow drift: Check gas temperature, pressure stability, and the possibility of condensation in unheated piping.
• Slow flow response: Inspect gas supply stability, valve operating conditions, and upstream restrictions.
• Communication failure: Check RS-485 polarity, wiring continuity, host settings, and F-Net compatibility.
• Incorrect analog readings: Verify signal grounding, scaling, and the difference between setpoint and output ranges.
• Abnormal valve behavior: Remember that the valve is normally open when power is off. Include this state in shutdown and safety reviews.

Do not expose the heated sensor section to process gas until the required thermal conditions are established. Follow the equipment manufacturer's approved warm-up and startup procedure.

08 | Compliance and Product Handling

• RoHS compliant.
• Designed with reference to applicable SEMI requirements.
• Helium leak integrity specification: ≤5 × 10⁻¹² Pa·m³/s.
• Use appropriate handling procedures for corrosive, toxic, or condensable gases.
• Confirm the exact certification scope and applicable SEMI requirements against the supplied product documentation.

09 | Frequently Asked Questions

Q1: How should engineers select the correct full-scale range for a new process recipe?

Choose a range that accommodates the maximum required flow while preserving useful control resolution. Avoid selecting an unnecessarily large range, especially for low-flow precursor dosing. Confirm the actual gas conversion and recipe operating points before final selection.

Q2: Can this controller be installed directly beside an unheated gas line?

Not without evaluating the complete thermal profile. A heated sensor section cannot prevent condensation in a colder upstream fitting or downstream pipe. Review every potential cold spot between the gas source and process chamber.

Q3: What should technicians check when measured flow differs from an external reference instrument?

First, verify gas identity, calibration basis, reference conditions, and pressure stability. Then check the reference instrument's uncertainty and installation position. Comparing different gas calibration factors can produce misleading conclusions.

Q4: Does the normally open valve state provide process isolation during a power failure?

No. Normally open operation means the valve opens when power is removed. Engineers must assess the resulting gas flow path and provide independent isolation where the process safety design requires it.

Q5: What information should buyers provide when requesting a replacement or equivalent unit?

Provide the complete model number, full-scale range, HL or HM heating configuration, gas type, connection specification, and electrical interface. Include the existing system's communication requirements and installation constraints. These details help prevent configuration mismatches.

10 | Supply and Ordering Information

HORIBA STEC SEC-8440F is a specialized heated digital mass flow controller for demanding semiconductor gas applications.

• Brand: HORIBA STEC
• Model: SEC-8440F
• Series: SEC-8000F High Temperature Digital
• Product Type: Heated Digital Mass Flow Controller
• Configuration Confirmation: Please specify flow range, gas type, and heating option.

Contact our team with your model and application requirements. We can help confirm the product configuration, interface, and availability before ordering.

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