SEC-Z514 HORIBA STEC Digital Mass Flow Controller | SEC-Z500X DeviceNet Series

SEC-Z514 | DeviceNet Mass Flow Control for Semiconductor Gas Systems

The HORIBA STEC SEC-Z514 is a digital mass flow controller from the SEC-Z500X DeviceNet Series. It regulates gas flow in semiconductor manufacturing equipment and precision gas delivery systems.

The controller combines multi-gas capability with DeviceNet digital communication. It supports selectable full-scale flow ranges from 10 SCCM to 5.5 SLM, based on N2-equivalent flow specifications.

Its piezoelectric control valve provides accurate flow regulation. The controller achieves ±1.0% S.P. accuracy above 25% FS and ±0.25% FS at lower flow conditions.

The compact housing measures 126 × 64 × 29 mm. Its DeviceNet interface supports selectable communication speeds for integration into compatible fieldbus architectures.

01 | Performance and Configuration Data

Manufacturer	HORIBA STEC
Model	SEC-Z514
Product Series	SEC-Z500X (DeviceNet)
Product Type	Digital Mass Flow Controller (MFC)
Full-Scale Flow Range	10 SCCM to 5.5 SLM
Flow Reference	N2 equivalent
Flow Range Selection	MR / MG selectable
Control Range	2% to 100% FS
Accuracy Above 25% FS	±1.0% S.P.
Accuracy At or Below 25% FS	±0.25% FS
Repeatability	±0.2% FS
Linearity	±0.5% FS
Response Time	≤1 second (T98, full flow range)
Valve Technology	Piezoelectric actuator
Valve Configuration	Normally open or normally closed
Heated Configuration	Standard unheated version

02 | Gas Handling and Pressure Conditions

The SEC-Z514 supports multiple process gases. Engineers must select the correct gas configuration and flow range for each application.

Supported Gas Types	N2, Ar, H2, He, O2, SF6, HBr, WF6, and others
Operating Differential Pressure	50–300 kPa(d)
Maximum Operating Pressure	450 kPa(g)
Pressure Resistance	1,000 kPa(g)
Wetted Materials	SUS316L stainless steel
Internal Surface	Polished stainless steel, standard configuration
Seal Options	Metal or elastomer
Leak Integrity	≤5 × 10⁻¹² Pa·m³/s (He)

Gas compatibility note: Confirm the specified gas, seal material, and pressure conditions before ordering. Do not assume identical performance across all gas configurations.

03 | DeviceNet Communication and Electrical Interface

• Communication Protocol: DeviceNet™ digital fieldbus.
• Network Conformance: ODVA conformance tested.
• Connector: Micro-connector.
• Selectable Baud Rates: 125, 250, and 500 kbps.
• Power Supply: 24 VDC.
• Power Consumption: 4.0 VA.
• Electrical Standard: ODVA standard.

DeviceNet communication supports digital integration with compatible equipment controllers. Engineers can incorporate the flow controller into networked gas delivery architectures.

04 | Mechanical Design and Environmental Limits

Dimensions	126 × 64 × 29 mm (H × W × T)
Connection Type	1/4-inch VCR male
Operating Temperature	5°C to 50°C
Recommended Temperature	15°C to 45°C
Heating Configuration	Unheated

• Compact dimensions support installation in space-limited gas panels.
• SUS316L wetted surfaces support demanding gas delivery applications.
• Polished internal surfaces suit precision gas handling requirements.
• VCR connections provide a defined interface for compatible gas piping.

05 | Engineering Advantages and Functional Value

Precision Flow Regulation	Specified accuracy supports controlled gas delivery in semiconductor processes.
Multi-Gas Capability	Supports different process gases through suitable gas-specific configurations.
Digital Fieldbus Integration	DeviceNet communication supports network-based equipment control.
Fast Flow Response	T98 response reaches one second or less across the full flow range.
Compact Installation	The compact body helps optimize gas panel space.
Flexible Valve Selection	Normally open and normally closed actuator configurations are available.
Gas Path Material Options	Metal and elastomer seals support different configuration requirements.

06 | Semiconductor and Industrial Applications

• Semiconductor Manufacturing: Controls process gas delivery in compatible production equipment.
• Gas Panels: Regulates gas flow within precision gas distribution assemblies.
• Tool Gas Delivery: Supports controlled gas supply to semiconductor process tools.
• DeviceNet Equipment Networks: Integrates flow control into fieldbus-based automation systems.
• Specialty Gas Systems: Supports selected gases through appropriate material and calibration configurations.

07 | Installation and Commissioning Procedure

1. Verify the Gas Configuration: Confirm gas type, full-scale range, and MR/MG selection.
2. Inspect Mechanical Connections: Check the 1/4-inch VCR interface and sealing surfaces.
3. Confirm Material Compatibility: Match wetted materials and seals with the process gas.
4. Check Pressure Conditions: Keep differential and operating pressure within specified limits.
5. Connect Electrical Power: Verify the 24 VDC supply and 4.0 VA power requirement.
6. Configure DeviceNet: Select the required baud rate and verify network settings.
7. Check Valve Configuration: Confirm normally open or normally closed operation.
8. Perform Leak Testing: Follow the equipment manufacturer's approved gas system procedure.
9. Verify Flow Performance: Compare actual flow readings with the specified operating range.

08 | Maintenance and Diagnostic Recommendations

• Flow Verification: Compare measured flow against a suitable calibrated reference instrument.
• Zero Stability: Check the zero-flow condition before evaluating measurement deviations.
• Pressure Monitoring: Verify upstream and downstream pressure conditions.
• Network Diagnostics: Check DeviceNet communication status and baud-rate consistency.
• Valve Assessment: Investigate unstable flow, slow response, or abnormal control behavior.
• Leak Inspection: Check gas connections after installation and maintenance.
• Calibration Management: Follow the applicable HORIBA STEC calibration procedures.

09 | Compatibility and Selection Checklist

The SEC-Z514 requires configuration matching before system integration. Engineers should evaluate the complete gas delivery circuit.

• Confirm the SEC-Z500X DeviceNet product family.
• Match the required gas type and N2-equivalent full-scale range.
• Verify the MR/MG range selection.
• Check the 1/4-inch VCR male connection.
• Choose the correct metal or elastomer seal option.
• Confirm the normally open or normally closed valve configuration.
• Verify the DeviceNet baud rate and network architecture.
• Check available 24 VDC power capacity.
• Confirm operating pressure and temperature requirements.

10 | Standards, Compliance and Quality Information

• RoHS: RoHS compliant.
• ODVA: DeviceNet conformance tested.
• SEMI: SEMI standards compliance indicated in the supplied specifications.

Confirm the applicable SEMI standard numbers and certification documents for project approval. ODVA conformance testing relates to the DeviceNet interface. It does not establish every system-level certification.

11 | Product Supply and Packaging

• Manufacturer: HORIBA STEC
• Model: SEC-Z514
• Series: SEC-Z500X DeviceNet
• Product Type: Digital Mass Flow Controller
• Condition: New & Original in Factory Packing
• Warranty: Factory Warranty: 12 Months
• Shipping: FedEx, UPS, and DHL available

Standard Package: One SEC-Z514 mass flow controller. Seal options, connection accessories, and other configuration-specific items require order confirmation.

12 | Global PLC Spare HUB – Engineering Insight

The HORIBA STEC SEC-Z514 combines precision flow regulation with DeviceNet communication. Its performance specifications support engineering evaluation for semiconductor gas delivery applications.

One important selection consideration involves the difference between accuracy expressed as a percentage of setpoint and accuracy expressed as a percentage of full scale. Engineers should evaluate both specifications across the intended operating range.

At low flow settings, the ±0.25% FS specification becomes particularly important. The 2% FS lower control limit also deserves attention during process design.

Gas compatibility requires more than selecting a nominal flow range. Gas properties, seal materials, pressure differential, and calibration configuration all affect the final selection.

13 | Frequently Asked Questions

Q1: Why should engineers distinguish setpoint accuracy from full-scale accuracy?

These specifications use different reference values. Setpoint accuracy relates to the commanded flow. Full-scale accuracy relates to the controller's rated range. This distinction helps engineers assess actual flow deviation at different operating points.

Q2: What should be considered when selecting an unheated flow controller?

Evaluate the process gas, ambient temperature, condensation risk, and installation conditions. Some specialty gases require specific temperature management. Confirm process suitability before choosing the standard unheated configuration.

Q3: How can a DeviceNet network issue affect gas flow control?

Communication faults can interrupt command transmission or equipment status monitoring. Check network termination, node addressing, baud-rate settings, and power distribution. Also verify the equipment's configured communication fault response.

Q4: Why is the seal material important in semiconductor gas delivery systems?

Seal compatibility affects chemical resistance and leak integrity. Certain process gases require specific sealing materials. Confirm gas compatibility and manufacturer recommendations before finalizing the order.

Q5: What information should purchasers provide when requesting an SEC-Z514 quotation?

Provide the gas type, full-scale flow range, MR/MG selection, seal material, valve configuration, and DeviceNet requirements. Include operating pressure and connection details. These parameters help suppliers identify the correct configuration and reduce ordering errors.

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