SEF-Z524MGXN HORIBA STEC Z500 DeviceNet Gas Flow Meter

Product Overview

HORIBA STEC SEF-Z524MGXN is a digital mass flow meter designed for precise gas flow measurement in semiconductor equipment.

It belongs to the HORIBA STEC SEC-Z500 / SEF-Z500 Series. The device uses a digital DeviceNet communication interface for equipment integration.

The SEF configuration measures gas flow without an integrated control valve. It provides real-time flow measurement across its configured full-scale range.

Its 316L stainless steel wetted components support clean gas delivery systems. The polished internal surfaces suit demanding semiconductor process environments.

Key Product Highlights:

• Product Type: Digital Mass Flow Meter (MFM)
• Model: SEF-Z524MGXN
• Series: HORIBA STEC Z500
• Communication: DeviceNet Digital Interface
• Measurement Range: 0–100% of configured Full Scale
• Accuracy: ±1.0% S.P. above 25% F.S.; ±0.25% F.S. at or below 25% F.S.
• Response Time: ≤1 second
• Wetted Material: Polished 316L Stainless Steel
• Power Supply: DC 24 V, 4.0 VA

Technical Specifications

Product Identification

Brand	HORIBA STEC
Model	SEF-Z524MGXN
Series	SEC-Z500 / SEF-Z500
Product Type	Digital Mass Flow Meter (MFM)
Measurement Principle	Thermal Mass Flow Measurement
Communication Protocol	DeviceNet

Flow Measurement Performance

Measurement Range	0–100% F.S.
N₂ Conversion Flow Rate	22 / 30 / 50 SLM, depending on MR/MG configuration
Accuracy	±1.0% S.P. above 25% F.S.; ±0.25% F.S. at or below 25% F.S.
Linearity	≤ ±0.5% F.S.
Repeatability	≤ ±0.2% F.S.
Response Time	≤ 1 second over the full measurement range
Resolution	Not specified in the available model documentation
Frequency Response	Not separately specified; response time is ≤1 second

Operating Conditions and Mechanical Specifications

Operating Temperature	5 to 50°C
Recommended Temperature	15 to 45°C
Operating Differential Pressure	≤300 kPa(d) for SEF configuration
Maximum Operating Pressure	450 kPa(g)
Pressure Resistance	1,000 kPa(g)
Leak Integrity	≤5 × 10⁻¹² Pa·m³/s (He)
Wetted Material	Polished 316L Stainless Steel
Standard Fitting	1/4-inch VCR equivalent
Optional Fitting	1.125-inch IGS
Mounting Orientation	Any orientation

Electrical and Communication Specifications

Digital Interface	DeviceNet Protocol
Power Supply	DC 24 V
Power Consumption	4.0 VA
Power Standard	Conforms to ODVA-related requirements
Control Valve	Not applicable; SEF is a mass flow meter

Measurement Performance and Engineering Value

1. Accurate Gas Flow Measurement

The SEF-Z524MGXN measures gas flow across 0–100% of its configured full-scale range.

Its specified accuracy supports process monitoring and gas delivery verification. Engineers can use flow feedback to evaluate gas supply stability.

2. Stable Measurement Repeatability

Repeatability reaches ≤ ±0.2% F.S. This helps maintain consistent measurement results during repeated process cycles.

Linearity remains within ±0.5% F.S. These characteristics support reliable flow monitoring in semiconductor production equipment.

3. Fast Measurement Response

The specified response time is ≤1 second across the measurement range. This supports timely monitoring of changing gas flow conditions.

The actual system response also depends on piping volume, gas properties, and upstream pressure stability.

4. Clean Gas Path Construction

Polished 316L stainless steel forms the wetted flow path. This material supports clean gas handling and chemical process compatibility.

The specified helium leak integrity is ≤5 × 10⁻¹² Pa·m³/s. This specification helps evaluate sealing performance in gas delivery installations.

Installation Guidelines

• Mounting Position: The unit supports installation in any orientation.
• Gas Compatibility: Confirm the configured gas type before installation.
• Flow Direction: Follow the directional markings on the instrument body.
• Pipeline Connection: Match the fitting type and size before assembly.
• Sealing: Use compatible sealing components for the selected gas service.
• Pressure: Keep operating pressure within the specified limits.
• Temperature: Maintain ambient conditions between 5 and 50°C.
• Electrical Supply: Provide a suitable regulated 24 VDC supply.
• Grounding: Follow the equipment grounding and DeviceNet installation requirements.
• Contamination Control: Keep the gas connections clean during installation.

Important: Avoid applying excessive mechanical stress to the fittings. Confirm leak integrity before introducing process gases.

Commissioning, Diagnostics and Maintenance

Initial Commissioning

1. Verify the complete model number and gas configuration.
2. Check the flow range against the equipment process requirements.
3. Confirm the 24 VDC supply and electrical connections.
4. Check DeviceNet node configuration and network communication.
5. Verify the gas supply pressure and differential pressure.
6. Introduce the specified gas under approved operating conditions.
7. Compare the indicated flow against a suitable reference instrument.

Maintenance Recommendations

• Inspect gas fittings for leakage during scheduled maintenance.
• Monitor flow readings for unexpected deviations.
• Check network communication when readings become unavailable.
• Review operating pressure when measurement stability changes.
• Follow HORIBA procedures for calibration and servicing.

The SEF model does not provide an integrated control valve. External gas regulation must meet the process requirements.

Compatibility and Model Selection

1. SEF vs. SEC Model Identification

Model	Product Function	Main Application
SEF-Z524MGXN	Mass Flow Meter	Gas flow measurement
SEC-Z524MGXN	Mass Flow Controller	Gas flow measurement and control

The SEF model measures flow without an integrated control valve. The SEC model adds active flow regulation.

2. Full-Scale Range Selection

MR/MG Configuration	N₂ Conversion Flow Rate
#6.5	22 SLM
#07	30 SLM
#08	50 SLM

These values represent nitrogen conversion flow rates. Confirm the actual gas calibration and full-scale configuration before ordering.

3. Gas and Connection Compatibility

• Confirm the gas type and corresponding calibration data.
• Verify the required full-scale flow range.
• Match the DeviceNet interface with the equipment network.
• Check whether the installation requires 1/4-inch VCR or 1.125-inch IGS.
• Confirm the actual connector and wiring configuration.

4. Replacement and Cross-Reference Verification

Some equipment references list ASM part numbers 1110-705-01 and 1120-949-01.

These references require verification against the original equipment configuration. Do not assume direct interchangeability from the part number alone.

Environmental and Electrical Considerations

• Operating Environment: 5–50°C ambient temperature.
• Recommended Environment: 15–45°C for normal operation.
• Pressure Resistance: 1,000 kPa(g) specified pressure resistance.
• Gas Sealing: Helium leak integrity ≤5 × 10⁻¹² Pa·m³/s.
• Electrical Noise: Follow DeviceNet cable routing and grounding practices.
• EMC Immunity: Specific immunity test levels require confirmation from the manufacturer.
• Ingress Protection: Not specified in the available model information.
• Resolution: Confirm the digital output resolution with the manufacturer.

Certifications and Compliance

• Communication: DeviceNet protocol.
• Electrical Requirements: 24 VDC, 4.0 VA.
• ODVA: The specified power requirements reference ODVA standards.

DeviceNet compatibility does not independently confirm product certification. Verify applicable regional approvals and certificates for the exact configuration.

Package Contents

• 1 × HORIBA STEC SEF-Z524MGXN Mass Flow Meter, according to the ordered configuration.
• Product identification and configuration information, when supplied.
• Additional accessories or documentation, subject to the order agreement.

Connection cables, fittings, and calibration certificates require separate confirmation. Please contact us to verify the actual package contents before ordering.

Frequently Asked Questions

Q1: What is the main difference between SEF-Z524MGXN and SEC-Z524MGXN?

SEF-Z524MGXN is a mass flow meter. It measures gas flow without an integrated control valve.

SEC-Z524MGXN is a mass flow controller. It measures and actively regulates gas flow.

Q2: How do I identify the correct full-scale flow range?

Check the MR/MG configuration and gas calibration information. Common nitrogen conversion ranges include 22, 30, and 50 SLM.

Do not select a replacement using the model prefix alone. Verify the original instrument's complete configuration.

Q3: Can SEF-Z524MGXN directly replace another DeviceNet mass flow meter?

Not necessarily. Check the gas type, full-scale range, fittings, power supply, and communication configuration.

Also verify the equipment mounting dimensions and connector pin assignments. These details can affect replacement compatibility.

Q4: What should engineers check when the flow reading becomes unstable?

Start by checking upstream pressure and gas supply stability. Inspect the fittings for leakage and verify the gas configuration.

Next, check the 24 VDC supply and DeviceNet communication. Compare the reading with an appropriate reference instrument.

A fluctuating reading does not automatically indicate an instrument failure. Investigate the complete gas delivery system first.

Q5: What information should buyers provide when requesting a replacement?

Provide the complete model number, serial number, gas type, and full-scale flow range.

Also provide the connection type and DeviceNet requirements. A clear nameplate photograph helps confirm the correct configuration.

For equipment replacements, provide the original part number and installation details. This reduces ordering errors and compatibility risks.

Why Choose Ubest Automation?

Ubest Automation supplies industrial automation components for semiconductor and process control applications.

• Product Supply: Support for HORIBA STEC mass flow meters and controllers.
• Configuration Verification: Assistance with model numbers and technical specifications.
• Pre-Shipment Testing: Functional checks before dispatch, subject to product availability and test requirements.
• Warranty: 12-month warranty for applicable products.
• Shipping: International delivery through DHL, FedEx, and UPS.
• Technical Support: Assistance with product identification and replacement selection.

Contact Ubest Automation for pricing, availability, and technical verification.

Email: sales@ubestplc.com

Website: www.ubestplc.com

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