SEC-E441X HORIBA STEC Economy Series 200 SLM Gas Flow Control MFC

SEC-E441X | High-Flow Gas Control with Economy Solenoid Technology

The HORIBA STEC SEC-E441X is a high-flow mass flow controller from the SEC-E Economy Solenoid Valve Series. It regulates non-corrosive gas flow in industrial gas delivery systems.

Its maximum full-scale capacity reaches 200 SLM (N2 equivalent). The solenoid valve design supports economical gas flow control for applications with high-volume supply requirements.

The controller uses an analog electrical interface for setpoint and flow output signals. Its normally closed valve provides a defined valve state when power is removed.

With SUS316 stainless steel wetted components and fluorine-based sealing materials, the SEC-E441X supports integration into compatible bulk gas supply and pump purge systems.

01 | Product Identity and Core Specifications

Manufacturer	HORIBA STEC
Model	SEC-E441X
Product Series	SEC-E Economy Solenoid Valve Series
Product Type	Analog Mass Flow Controller (MFC)
Maximum Full-Scale Flow	200 SLM
Flow Reference Gas	N2 equivalent
Supported Gas Category	Non-corrosive gases
Control Range	5% to 100% FS
Accuracy	±1% FS
Repeatability	±0.5% FS
Linearity	±0.5% FS
Response Time	≤2 seconds (T98, typical)
Valve Technology	Solenoid valve
Power-Off Valve State	Normally closed
Heating Configuration	Standard unheated version

02 | Gas Path Construction and Pressure Limits

The gas-contact assembly combines stainless steel and polymer materials. These components support the specified non-corrosive gas applications.

Wetted Stainless Steel	SUS316 stainless steel
Additional Wetted Materials	Fluorine rubber, PTFE, magnetic stainless steel
Seal Materials	Fluorine rubber (Viton) / PTFE
Operating Differential Pressure	200–350 kPa(d)
Maximum Inlet Pressure	350 kPa(G)
Pressure Resistance	1 MPa(G)
Helium Leak Integrity	≤1 × 10⁻⁹ Pa·m³/s

Material selection note: Verify gas compatibility with the wetted materials and seals. Do not use this model for corrosive gases without explicit manufacturer approval.

03 | Analog Control and Electrical Requirements

Setpoint Signal	0.25–5 VDC
Flow Output Signal	0–5 VDC
Electrical Connector	D-Sub connector
Positive Supply	+15 VDC ±5%, 50 mA
Negative Supply	-15 VDC ±5%, 200 mA
Power Consumption	3.9 VA

• The analog setpoint provides an external flow command.
• The voltage output represents the controller's flow signal.
• The D-Sub interface connects the controller to compatible control equipment.
• The bipolar power supply requires suitable positive and negative voltage rails.

04 | Operating Conditions and Performance Envelope

Operating Temperature	5°C to 45°C
Accuracy Guarantee Temperature	15°C to 35°C
Standard Configuration	Unheated
Applicable Gas Category	Non-corrosive gases

The controller operates within a 5°C to 45°C temperature range. Its specified accuracy applies within the narrower 15°C to 35°C range.

05 | Why Engineers Select the SEC-E441X

• 200 SLM Flow Capacity: Handles high-volume gas delivery requirements within its specified configuration.
• Economy Solenoid Design: Provides a cost-conscious approach to high-flow gas regulation.
• Normally Closed Valve: Closes the solenoid valve when electrical power is removed.
• Analog Signal Interface: Supports voltage-based setpoint and flow monitoring.
• Stainless Steel Gas Path: Uses SUS316 stainless steel and compatible sealing materials.
• Defined Pressure Envelope: Provides specified differential and inlet pressure limits for system design.
• Helium Leak Specification: Supports evaluation of gas-path sealing performance.

06 | High-Flow Application Scenarios

Bulk Gas Supply	Regulates high-volume non-corrosive gas delivery in compatible supply systems.
Pump Purge Systems	Controls purge gas flow for suitable industrial and semiconductor equipment.
Gas Distribution Panels	Provides analog flow regulation within compatible gas delivery assemblies.
Industrial Gas Equipment	Supports high-flow gas supply where the specified materials and pressure limits apply.
Process Equipment	Provides voltage-controlled gas flow regulation for compatible machinery.

07 | Installation and System Integration

1. Confirm Gas Compatibility: Verify the process gas against the approved material and calibration configuration.
2. Check Flow Capacity: Confirm that 200 SLM suits the required operating flow.
3. Verify Pressure Conditions: Maintain the specified differential and inlet pressure limits.
4. Inspect Gas Connections: Confirm the connection specification before assembling the piping.
5. Connect Analog Signals: Match the setpoint and output wiring with the equipment interface.
6. Verify Power Rails: Check positive and negative supply voltages before energizing the unit.
7. Configure Control Logic: Match the PLC or controller scaling with the specified voltage ranges.
8. Check Valve Operation: Verify normally closed behavior during power removal.
9. Perform Leak Testing: Follow approved procedures before introducing process gas.

08 | Commissioning and Preventive Maintenance

• Zero-Flow Check: Verify the output under the manufacturer's specified zero-flow conditions.
• Signal Calibration: Check the analog setpoint and feedback scaling.
• Flow Verification: Compare the output against a suitable calibrated flow reference.
• Pressure Monitoring: Check actual inlet and outlet pressure conditions.
• Valve Inspection: Investigate delayed response or unstable flow behavior.
• Leak Inspection: Examine gas connections after installation and maintenance.
• Power Inspection: Monitor both supply rails for voltage stability.
• Environmental Control: Maintain the recommended accuracy temperature range where precision is critical.

09 | Compatibility and Replacement Considerations

The SEC-E441X uses an analog interface and a normally closed solenoid valve. Replacement selection requires electrical, mechanical, and process compatibility checks.

• Confirm the SEC-E Economy Solenoid Valve Series designation.
• Verify the 200 SLM N2-equivalent full-scale configuration.
• Match the process gas with the specified wetted materials.
• Check the analog voltage ranges and D-Sub connector arrangement.
• Confirm the bipolar power supply requirements.
• Verify pressure conditions and gas connection dimensions.
• Check the normally closed valve requirement.
• Confirm the accuracy requirements at the actual operating temperature.

Important: The supplied specifications identify a 3/8-inch Swagelok connection as a key feature. Confirm the exact fitting configuration before ordering or replacing the unit.

10 | Compliance and Technical Standards

• SEMI Standards: Compliance with SEMI standards is indicated in the supplied product information.
• Gas Compatibility: Specified for non-corrosive gas applications.
• Leak Integrity: Helium leak specification of ≤1 × 10⁻⁹ Pa·m³/s.

Specific SEMI standard numbers and supporting certificates require manufacturer documentation. Verify project-specific compliance requirements before installation.

11 | Ordering and Supply Information

• Brand: HORIBA STEC
• Model: SEC-E441X
• Series: SEC-E Economy Solenoid Valve
• Product Type: High-Flow Mass Flow Controller
• Full-Scale Capacity: 200 SLM, N2 equivalent
• Condition: New & Original in Factory Packing
• Warranty: Factory Warranty: 12 Months
• Shipping: FedEx, UPS, and DHL available

Package Contents: One SEC-E441X mass flow controller. Confirm connection accessories and other configuration-specific items before ordering.

12 | Global PLC Spare HUB – Application Insight

The HORIBA STEC SEC-E441X targets high-flow applications that require economical analog gas regulation. Its 200 SLM capacity makes pressure management and upstream supply design important selection factors.

Engineers should pay particular attention to the 5% FS lower control limit. At a 200 SLM full-scale setting, this represents a nominal lower control boundary of 10 SLM.

The accuracy specification uses full scale as its reference. At 200 SLM, ±1% FS corresponds to ±2 SLM under the specified accuracy conditions. This distinction matters when evaluating low-flow process requirements.

The normally closed solenoid valve also affects system behavior during power interruption. Engineers should evaluate the resulting gas isolation behavior within the complete equipment safety design.

13 | Frequently Asked Questions

Q1: Is the SEC-E441X suitable for applications requiring very low flow rates?

Its specified control range starts at 5% FS. For a 200 SLM configuration, this equals 10 SLM. Applications below this boundary require a different full-scale configuration or another suitable controller.

Q2: How does the normally closed valve affect equipment shutdown design?

The valve closes when electrical power is removed. Engineers should consider this behavior when designing shutdown sequences and restart procedures. Verify whether additional isolation devices or safety measures are necessary.

Q3: Can the controller connect directly to a PLC analog output and input?

Its 0.25–5 VDC setpoint and 0–5 VDC output support compatible voltage interfaces. Check PLC signal ranges, common references, grounding, and D-Sub pin assignments. Do not assume direct wiring without checking the electrical documentation.

Q4: Why can actual flow accuracy differ from the nominal ±1% FS specification?

Operating temperature, gas calibration, pressure differential, and installation conditions can influence system performance. The stated accuracy guarantee applies from 15°C to 35°C. Use a suitable reference instrument during commissioning to verify actual performance.

Q5: When should buyers choose a 200 SLM controller instead of a smaller model?

Choose the full-scale range according to normal operating flow and required control margin. Avoid excessive oversizing because full-scale accuracy affects absolute flow deviation. For example, a 200 SLM model may not suit a process that normally operates below 10 SLM.

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