HORIBA SEF-Z514MGX Digital Gas Flow Meter with DeviceNet

Product Overview

HORIBA STEC SEF-Z514MGX is a digital mass flow meter from the SEC-Z500X / SEF-Z500X Series. It measures gas flow rates in semiconductor process equipment and precision gas delivery systems.

The device uses digital flow measurement technology and supports DeviceNet™ communication. Its multi-range and multi-gas configuration supports different process gas requirements.

The SEF-Z514MGX provides a 0–100% full-scale measurement range. Its response time reaches 1 second across the specified flow range. The polished 316L stainless steel gas path supports clean gas delivery applications.

Engineers can select different full-scale ranges through the MR/MG configuration. Special software allows users to change gas types and full-scale settings. This flexibility simplifies equipment configuration and process integration.

• Manufacturer: HORIBA STEC
• Product Series: SEC-Z500X / SEF-Z500X
• Model: SEF-Z514MGX
• Product Type: Digital Mass Flow Meter
• Communication: DeviceNet™ Protocol
• Measurement Range: 0–100% F.S.
• Maximum Listed Full Scale: 10 SLM
• Wetted Material: Polished 316L Stainless Steel

Technical Specifications

Parameter	Specification
Manufacturer	HORIBA STEC
Model	SEF-Z514MGX
Series	SEC-Z500X / SEF-Z500X
Product Type	Digital Mass Flow Meter
Measurement Principle	Thermal Mass Flow Measurement
Full-Scale Flow Rate	10 SCCM to 10 SLM, depending on MR/MG configuration
Measurement Range	0–100% F.S.
Accuracy	±1.0% S.P. above 25% F.S.; ±0.25% F.S. at or below 25% F.S.
Response Time	≤ 1 second
Linearity	≤ ±0.5% F.S.
Repeatability	≤ ±0.2% F.S.
Operating Temperature	5 to 50°C
Recommended Temperature	15 to 45°C
Operating Differential Pressure	≤ 300 kPa(d)
Maximum Operating Pressure	450 kPa(g)
Pressure Resistance	1000 kPa(g)
Leak Integrity	≤ 5 × 10⁻¹² Pa·m³/s (He)
Digital Interface	DeviceNet™ Protocol
Power Supply	DC 24 V
Power Consumption	4.0 VA
Wetted Materials	Polished 316L Stainless Steel
Standard Fitting	1/4-inch VCR equivalent
Optional Fittings	1.125-inch IGS / 1.5-inch IGS
Mounting Orientation	Any orientation

Full-Scale Flow Range Configuration

The SEF-Z514MGX supports multiple nitrogen-equivalent full-scale configurations. The MR/MG code determines the applicable measurement range.

MR/MG Code	N₂ Full-Scale Flow Rate
#R01	10 SCCM
#R1.5	17.5 SCCM
#01	30 SCCM
#1.5	55 SCCM
#02	100 SCCM
#2.5	175 SCCM
#03	300 SCCM
#3.5	550 SCCM
#04	1 SLM
#4.5	1.75 SLM
#05	3 SLM
#5.5	5.5 SLM
#06	10 SLM

Configuration Note: These values represent nitrogen-equivalent full-scale rates. Confirm the installed MR/MG code before ordering.

Measurement Performance and Engineering Features

• Measurement Accuracy: The specified accuracy supports precise gas flow monitoring. It follows the SEMI E56-1296 accuracy framework.
• Fast Response: The response time remains within 1 second across the specified flow range. This supports dynamic process monitoring.
• Measurement Stability: Linearity reaches ±0.5% F.S. Repeatability reaches ±0.2% F.S.
• Multi-Gas Configuration: Special software supports gas-type and full-scale setting changes. Verify gas compatibility before changing configuration.
• Pressure Integrity: The specified pressure resistance reaches 1000 kPa(g). The maximum operating pressure remains 450 kPa(g).
• Clean Gas Path: Polished 316L stainless steel contacts the process gas. This construction suits semiconductor gas delivery systems.
• Digital Integration: DeviceNet™ provides communication with compatible industrial control networks. ODVA conformity supports standardized network integration.

Installation Guide

Correct installation protects measurement accuracy and maintains gas delivery stability. Follow these engineering recommendations during equipment integration.

1. Check the Model: Confirm the SEF-Z514MGX model and its MR/MG flow range.
2. Verify Gas Compatibility: Confirm gas type, material compatibility, and process cleanliness.
3. Inspect Connections: Check the 1/4-inch VCR-equivalent fittings before installation.
4. Prepare the Pipeline: Remove particles, moisture, and contamination from the gas line.
5. Install the Meter: Connect the process fittings using suitable installation procedures. The unit supports any mounting orientation.
6. Check Pressure Conditions: Keep differential pressure within the specified operating limits.
7. Connect Power: Provide a compatible 24 VDC supply. Verify the electrical connections before energizing.
8. Connect DeviceNet: Wire the communication interface according to the network design.
9. Perform Leak Testing: Check all process connections before introducing the operating gas.
10. Verify Measurement: Compare the indicated flow against a suitable reference instrument.

Commissioning and Maintenance

Proper commissioning helps engineers establish stable gas flow measurements. Use the following checks during startup and routine maintenance.

• Initial Configuration: Verify the gas type and MR/MG full-scale setting.
• Power Verification: Confirm stable 24 VDC power and correct electrical polarity.
• Network Verification: Check DeviceNet node settings and communication status.
• Zero-Flow Inspection: Verify the zero-flow reading under suitable process conditions.
• Reference Comparison: Compare measurements against a calibrated reference instrument.
• Pressure Monitoring: Check upstream and downstream pressure conditions.
• Leak Inspection: Inspect fittings and connections during scheduled maintenance.
• Configuration Control: Record changes to gas type and full-scale settings.

Maintenance Recommendation: Avoid unauthorized internal adjustments. Follow HORIBA STEC procedures for calibration and servicing.

Compatibility and Application Notes

The HORIBA STEC SEF-Z514MGX supports gas flow measurement in precision gas delivery applications.

• Semiconductor manufacturing gas supply systems
• Thin-film deposition and process gas monitoring
• Vacuum process equipment gas delivery systems
• Gas distribution panels and supply modules
• Industrial process gas monitoring equipment
• DeviceNet-compatible automation systems

Important Compatibility Considerations:

• Match the gas type and full-scale range with the process requirements.
• Confirm the DeviceNet interface before connecting the control network.
• Check the available power supply and network specifications.
• Verify fitting dimensions before replacing an installed flow meter.
• Do not assume SEC controller functions exist in the SEF meter.

Model Distinction: SEF-Z514MGX is the mass flow meter model. SEC-Z514MGX is the corresponding mass flow controller model. The controller includes flow-control functionality, while the meter measures flow.

Certifications and Standards

• Communication Standard: DeviceNet™ Protocol.
• Network Conformity: ODVA-conformant communication model.
• Accuracy Framework: SEMI E56-1296.
• Electrical Supply: ODVA-compliant 24 VDC power specification.

Specific product safety certificates and regional approvals require confirmation against the supplied unit documentation. Please request supporting documents when your project requires additional certification.

Package Contents

• 1 × HORIBA STEC SEF-Z514MGX Digital Mass Flow Meter
• 1 × Standard product identification label
• Product documentation, subject to the supplied package configuration

Note: Fittings, cables, connectors, and accessories depend on the confirmed order configuration. Please verify the packing list before purchase.

Frequently Asked Questions (FAQ)

Q1: What is the difference between SEF-Z514MGX and SEC-Z514MGX?

A: SEF-Z514MGX measures gas mass flow. SEC-Z514MGX provides mass flow measurement and control. Select the SEF model for measurement applications.

Q2: What flow ranges does the SEF-Z514MGX support?

A: Its nitrogen-equivalent full-scale options range from 10 SCCM to 10 SLM. The MR/MG code identifies the selected range.

Q3: Can engineers change the gas type after installation?

A: Yes, special software supports gas-type and full-scale setting changes. Confirm the gas conversion data before modifying process settings.

Q4: Does the SEF-Z514MGX support DeviceNet communication?

A: Yes, this model supports DeviceNet™ communication. Check network configuration and electrical requirements before integration.

Q5: What should engineers check before replacing an existing flow meter?

A: Compare the model, gas type, full-scale range, fittings, pressure conditions, and communication interface. Matching only the external dimensions may cause measurement errors.

Q6: How should buyers select the correct MR/MG flow range?

A: Select a range that covers the normal operating flow. Avoid choosing an unnecessarily large full-scale range. Low operating percentages can reduce effective measurement resolution.

Q7: Can the SEF-Z514MGX directly regulate gas flow?

A: No, the SEF model functions as a mass flow meter. Choose the SEC-Z514MGX when the application requires an integrated control valve.

Q8: What causes unstable flow readings during commissioning?

A: Incorrect gas settings, unstable pressure, contamination, and electrical interference can affect measurements. Check these conditions before replacing the instrument.

Q9: Can the meter operate in any mounting orientation?

A: Yes, the specified mounting orientation is unrestricted. Maintain clean gas connections and follow the installation requirements.

Q10: What information should buyers provide when requesting a quotation?

A: Provide the complete model, MR/MG code, gas type, required flow range, fitting type, and DeviceNet requirements. These details help confirm the correct configuration.

Ordering Information and Technical Support

We supply industrial automation components for semiconductor equipment and precision gas control applications.

• Brand: HORIBA STEC
• Model: SEF-Z514MGX
• Series: SEC-Z500X / SEF-Z500X
• Product: Digital Mass Flow Meter
• Warranty: 12 months
• Shipping: FedEx, DHL, and UPS options
• Product Condition: New and original, subject to order confirmation

Contact our sales team for pricing, lead time, configuration verification, and technical assistance. Please include your required MR/MG code and gas specifications with your inquiry.

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