E28H.1TBF5B MKS Instruments E28H Series Etch Sensor Baratron

Product Overview | E28H.1TBF5B Etch-Optimized Baratron

MKS Instruments E28H.1TBF5B is a 100°C heated absolute capacitance manometer in the E28H Series, part of the MKS 600 Series. It combines a low-pressure 0.1 Torr measurement range with an integrated etch baffle designed for demanding semiconductor process environments.

The sensor maintains its measuring element at a controlled temperature of 100°C. This thermal design supports stable pressure measurement in processes where corrosive gases and reaction by-products can affect exposed sensor surfaces. Its patented integrated sump helps limit deposition on the sensing diaphragm.

The instrument provides a 0 to +10 VDC analog output and uses a 15-pin D-sub connector with thread locks. It has no trip-point outputs or heater-status LED in the specified configuration.

Etch Process Design | Measurement Stability and Protection

The E28H design addresses a practical challenge in semiconductor etch applications: process deposits can accumulate inside pressure measurement equipment and affect long-term performance.

• Integrated etch baffle: The patented sump structure helps manage process by-products before they reach the sensing diaphragm.
• 100°C temperature control: The heated sensor supports controlled measurement conditions during compatible etch processes.
• Inconel wetted materials: The specified wetted construction is intended for demanding process gas environments. Confirm chemical compatibility against the actual gas mixture.
• Low-pressure measurement: The 0.1 Torr full-scale range supports applications requiring sensitive absolute-pressure monitoring.
• Horizontal calibration: The instrument is calibrated in a horizontal orientation. Installation should preserve the specified reference position.

Technical Specifications

Parameter	Specification
Manufacturer	MKS Instruments
Model	E28H.1TBF5B
Product series	E28H / 600 Series
Product type	100°C Heated Etch Sensor Baratron
Measurement type	Absolute pressure
Full-scale range	0.1 Torr
Sensor temperature	Controlled at 100°C
Accuracy	0.50% of reading, including non-linearity, hysteresis, and non-repeatability
Resolution	0.001% of full scale
Warm-up time	4 hours
Calibration orientation	Horizontal
Power supply	±15 VDC (±5%)
Maximum current	0.60 A
Analog output	0 to +10 VDC
Output load	Greater than 10 kΩ
Electrical connector	15-pin D-sub with thread locks
Trip points	None; analog output only
Heater status LED	Not included
Overpressure limit	45 psia (310 kPa) or 120% of full scale, whichever is greater
Internal volume	6.3 cc
Process fitting	8 VCR female
Wetted materials	Inconel
Operating temperature	15 to 40°C
Zero temperature coefficient	0.01% FS/°C
Span temperature coefficient	0.02% of reading/°C
Dimensions	Diameter: 3.15 in (80.0 mm); body height: 3.87 in (98.4 mm); stem: 1.38 in (35.1 mm)
Compliance	CE compliant

Configuration Breakdown | E28H.1TBF5B

The ordering code identifies the sensor family, measurement range, process connection, electrical interface, accuracy class, and calibration orientation.

Code segment	Configuration	Engineering interpretation
E28H	Etch sensor model family	100°C heated e-Baratron absolute capacitance manometer with an integrated etch protection structure.
1T	0.1 Torr range	Defines the instrument's full-scale pressure range.
B	8 VCR female	Specifies the Swagelok-compatible 8 VCR female process connection.
F	15-pin D-sub	Analog electrical interface with thread-locking hardware.
5	0.50% reading accuracy	Defines the stated measurement accuracy class.
B	Horizontal calibration	Identifies the calibration orientation used for the instrument.

Ordering note: Verify the complete suffix against the instrument nameplate and the applicable MKS documentation before replacement. Matching the model family alone does not establish electrical, mechanical, or process compatibility.

Installation and Commissioning Considerations

• Mounting orientation: Install the sensor in its specified horizontal calibration orientation. An incorrect mounting position can affect measurement performance.
• Thermal stabilization: Allow approximately four hours for warm-up before relying on measurement readings. Avoid treating early startup values as stabilized process data.
• Power verification: Confirm a regulated ±15 VDC supply within ±5% and ensure the circuit can support the maximum 0.60 A current requirement.
• Signal integration: Configure the receiving controller or data acquisition channel for a 0 to +10 VDC analog signal. Check that its input impedance exceeds 10 kΩ.
• Process connection: Confirm the 8 VCR female fitting matches the chamber port and mating hardware. Follow the applicable high-purity vacuum fitting procedures.
• Gas compatibility: Review process chemistry and temperature conditions before exposing the Inconel wetted surfaces to corrosive gases.

Maintenance and Field Diagnostics

For low-pressure etch applications, stable readings depend on more than sensor accuracy. Process deposits, installation conditions, electrical grounding, and thermal stabilization can all affect the measurement loop.

• Slow response or pressure drift: Check for process-side contamination, changing chamber conditions, and incomplete thermal stabilization before adjusting the control system.
• Unexpected zero offset: Verify the installation orientation, supply voltage, signal reference, and actual chamber pressure conditions.
• Unstable analog signal: Inspect connector engagement, cable shielding, grounding, and controller input configuration.
• Repeated process-side contamination: Review etch chemistry, chamber cleaning intervals, and the condition of the integrated baffle. Do not assume the baffle eliminates all maintenance requirements.
• Replacement verification: Compare the complete suffix, fitting, output interface, calibration orientation, and pressure range before installing a replacement.

Compatibility and Replacement Guidance

MKS identifies the E28H as interchangeable with earlier 128, 628A/B/D, and E28B/D/F Baratron manometers. This provides a useful starting point when evaluating legacy equipment replacement.

However, interchangeability should be confirmed for the specific installation. Check the pressure range, process fitting, connector pinout, supply requirements, analog signal scaling, calibration orientation, and process material compatibility. A family-level replacement statement does not guarantee that every suffix configuration is a direct drop-in substitute.

Package and Supply Information

• Product: MKS Instruments E28H.1TBF5B Heated Etch Sensor Baratron
• Configuration: 0.1 Torr, 8 VCR female, 15-pin D-sub, 0.50% reading accuracy, horizontal calibration
• Warranty: 12 months
• Shipping methods: FedEx, UPS, or DHL
• Package contents: Sensor unit and standard accessories supplied with the confirmed order configuration. Please confirm accessory requirements before ordering.

Frequently Asked Questions

Q1: What should engineers verify before replacing an older Baratron with this E28H model?

Compare the full-scale range, process fitting, connector pinout, power supply, output scaling, and mounting orientation. Also confirm that the replacement suits the process gas chemistry. Do not rely on model-family interchangeability alone.

Q2: Is a 0.1 Torr full-scale sensor suitable for every low-pressure etch chamber?

No. The selected range should cover the chamber's normal operating pressure and expected transients. A range that is too high may sacrifice useful signal resolution, while a range that is too low may expose the sensor to unsuitable pressure excursions. Review normal pressure, control limits, and upset conditions together.

Q3: How should maintenance teams distinguish sensor problems from chamber process changes?

Compare the Baratron output with an independent pressure reference or a verified chamber measurement. Check the analog loop and thermal stabilization first. If the electrical signal remains stable while the reference pressure changes, investigate the chamber and process conditions before condemning the sensor.

Q4: What additional equipment is needed to use this model in a control system?

The receiving system needs a compatible ±15 VDC power source and a 0 to +10 VDC analog input with an impedance above 10 kΩ. Confirm the connector pin assignment and signal common requirements from the applicable wiring documentation before commissioning.

Q5: When should a buyer choose an etch sensor rather than a standard heated Baratron?

Consider an etch-specific design when process chemistry and reaction by-products create a meaningful risk of deposits around the sensing diaphragm. The integrated sump is intended to help manage this exposure. Selection should still account for gas compatibility, chamber cleaning practices, pressure range, and maintenance strategy.

Why Source E28H.1TBF5B from Global PLC Spare HUB?

Global PLC Spare HUB supports industrial automation and semiconductor process equipment sourcing. We provide model and suffix verification to help reduce ordering errors in replacement projects.

• 12-month warranty: Warranty coverage is provided according to the confirmed order terms.
• International shipping: FedEx, UPS, and DHL shipping options are available.
• Technical order review: Confirm the range, fitting, connector, and calibration orientation before purchase.
• Application support: Share your existing model and installation details for a replacement compatibility review.

Contact our team with the complete part number E28H.1TBF5B for pricing, availability, and technical confirmation.

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