The Aera® series by Hitachi Metals / Advanced Energy delivers high-precision mass flow controllers (MFCs) and mass flow meters (MFMs) tailored for semiconductor, CVD/PVD thin-film deposition, and industrial vacuum coating processes. Built around micro-bore thermal mass sensors and 316L stainless steel gas-wetted flow paths, this portfolio ensures ultra-fast response times (≤1s) with low RF interference susceptibility and minimal long-term zero drift. From economical elastomer-sealed models (FC-R7700) to high-integrity, metal-sealed architectures (FC-R7800) and advanced multi-gas digital platforms (FC-DR980 / HG200 / Transformer®), Aera devices accommodate wide dynamic flow ranges from 10 SCCM up to 200 SLM. Designed for drop-in compatibility with VCR® metal-gasket fittings, standard D-Sub pinouts, and fieldbus protocol communications, our stock provides reliable gas metering and tight dynamic valve control for mission-critical industrial spares replacement.
