Aera

The Aera® series by Hitachi Metals / Advanced Energy delivers high-precision mass flow controllers (MFCs) and mass flow meters (MFMs) tailored for semiconductor, CVD/PVD thin-film deposition, and industrial vacuum coating processes. Built around micro-bore thermal mass sensors and 316L stainless steel gas-wetted flow paths, this portfolio ensures ultra-fast response times (≤1s) with low RF interference susceptibility and minimal long-term zero drift. From economical elastomer-sealed models (FC-R7700) to high-integrity, metal-sealed architectures (FC-R7800) and advanced multi-gas digital platforms (FC-DR980 / HG200 / Transformer®), Aera devices accommodate wide dynamic flow ranges from 10 SCCM up to 200 SLM. Designed for drop-in compatibility with VCR® metal-gasket fittings, standard D-Sub pinouts, and fieldbus protocol communications, our stock provides reliable gas metering and tight dynamic valve control for mission-critical industrial spares replacement.  

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FC-770A AERA FC-7700 Series Analog Mass Flow Controller FC-770A AERA FC-7700 Series Analog Mass Flow Controller
FC-770A AERA FC-7700 Series Analog Mass Flow Controller
Sale price$148.00
FC-D982 AERA High-Flow Piezoelectric MFC Metal-Sealed Digital Controller FC-D982 AERA High-Flow Piezoelectric MFC Metal-Sealed Digital Controller
FC-D982 AERA High-Flow Piezoelectric MFC Metal-Sealed Digital Controller
Sale price$147.00
FC-R7700 AERA Analog Gas Flow Controller | FC-R7700 Series FC-R7700 AERA Analog Gas Flow Controller | FC-R7700 Series
FC-R7700 AERA Analog Gas Flow Controller | FC-R7700 Series
Sale price$136.00
FC-D980 AERA FC-D980 Series Multi-Gas Mass Flow Controller FC-D980 AERA FC-D980 Series Multi-Gas Mass Flow Controller
FC-D980 AERA FC-D980 Series Multi-Gas Mass Flow Controller
Sale price$118.00