HORIBA STEC SEF-Z514KX Mass Flow Meter SEC-Z500X Series

Product Overview

The HORIBA STEC SEF-Z514KX is a digital mass flow meter for precise gas flow measurement. It belongs to the SEC-Z500X series and supports configurable multi-gas applications.

The instrument measures gas flow across a full-scale range of 1/2 SCCM. Its digital architecture provides stable measurement and reliable communication through the DeviceNet interface.

The SEF-Z514KX supports different gas types and measurement ranges through dedicated configuration software. Users can select MR/MG numbers based on the gas type and required flow range. The software also provides N2 conversion for inspection measurements using nitrogen gas.

Its polished 316L stainless steel wetted components support demanding gas delivery systems. The instrument offers flexible installation and integration into industrial gas control equipment.

Technical Specifications

Manufacturer	HORIBA STEC
Model	SEF-Z514KX
Series	SEC-Z500X
Product Type	Digital Mass Flow Meter
Related Controller Model	SEC-Z514KX
Full-Scale Flow Rate	1/2 SCCM (N2 conversion flow rate)
Flow Measurement Range	0–100% F.S.
Flow Control Range	2–100% F.S. (related SEC controller specification)
Accuracy	±1.0% F.S.
Linearity	≤ ±0.5% F.S.
Repeatability	≤ ±0.2% F.S.
Response Time	≤ 1 second across the full flow range
Operating Temperature	5 to 50°C
Recommended Temperature	15 to 45°C
Operating Differential Pressure	≤ 300 kPa(d)
Maximum Operating Pressure	450 kPa(g)
Pressure Resistance	1000 kPa(g)
Leak Integrity	≤ 5 × 10⁻¹² Pa·m³/s (He)
Digital Communication	DeviceNet™ Protocol
Wetted Materials	316L stainless steel, polished surface
Power Supply	DC 24 V, 4.0 VA
Standard Connection	1/4-inch VCR equivalent
Optional Connections	1.125-inch IGS / 1.5-inch IGS
Valve Configuration	O: Normally Open / C: Normally Closed (related controller option)
Mounting Orientation	Free orientation

Key Features and Engineering Advantages

• Configurable Gas Measurement: Supports multiple gas types and measurement ranges through dedicated software.
• Low-Flow Measurement: Provides a 1/2 SCCM full-scale N2 conversion range.
• Fast Response: Achieves a response time of one second or less.
• Measurement Stability: Provides ±0.2% F.S. repeatability and ±0.5% F.S. linearity.
• Digital Communication: Supports DeviceNet integration with compatible control systems.
• Corrosion-Resistant Wetted Parts: Uses polished 316L stainless steel for gas-contact surfaces.
• High Leak Integrity: Meets the specified helium leak rate of 5 × 10⁻¹² Pa·m³/s or less.
• Flexible Installation: Supports different mounting orientations and connection configurations.

Configuration Software and Gas Selection

The HORIBA STEC configuration software simplifies gas and range selection. Users enter the gas type and required flow range. The software then identifies the appropriate MR/MG numbers.

The software also includes an N2 conversion function. This function supports flow measurements with nitrogen during receiving inspections.

HORIBA STEC offers software operation seminars for users. Contact an authorized HORIBA STEC representative for training information.

Installation Guidelines

• Verify the model number and gas configuration before installation.
• Confirm the process gas matches the selected MR/MG configuration.
• Check the connection type against the installed gas line.
• Use compatible VCR or specified IGS connection components.
• Keep gas lines clean and free from moisture or particles.
• Observe the specified pressure and temperature limits.
• Connect the DeviceNet network using compatible communication hardware.
• Verify the 24 VDC supply before energizing the instrument.

Commissioning and Maintenance

Correct configuration is essential for accurate gas flow measurement. Follow these engineering checks during commissioning:

• Gas Configuration: Confirm the selected gas type and MR/MG number.
• Range Verification: Check the full-scale value against the process requirement.
• Pressure Check: Verify differential and operating pressure conditions.
• Communication Test: Confirm DeviceNet communication with the host controller.
• Zero Verification: Check the zero-flow output under stable process conditions.
• Leak Inspection: Inspect all gas connections after installation.
• Periodic Inspection: Review measurement stability and process connections.

Use approved procedures for cleaning and servicing gas-contact components. Avoid unauthorized changes to factory calibration parameters.

Compatibility and Integration

• Related Series: HORIBA STEC SEC-Z500X.
• Related Model: SEC-Z514KX mass flow controller.
• Network Interface: DeviceNet-compatible communication systems.
• Configuration: HORIBA STEC gas and range configuration software.
• Power: Compatible 24 VDC supply conforming to ODVA standards.
• Process Connections: 1/4-inch VCR equivalent, with specified IGS options.

Verify the communication configuration, connector pinout, gas calibration, and process fittings before system integration. Do not assume compatibility based only on the series name.

Software and Communication Accessories

The configuration setup may require the following accessories:

Computer	Windows-based PC for configuration software.
Configuration Software	HORIBA STEC software for gas and range selection.
Communications Converter	Serial communication converter for RS-485 connections.
Conversion Adapter	CA-DP9RJ45 conversion adapter.
RS232C Cable	Connects the PC to the communications converter.
LAN Cable	Supports SEC-Z500X communication connections.
USB Serial Converter	Required for computers without a serial port.
Label Printer	Optional accessory for configuration identification.

Software Operating System: Japanese or English Windows 2000, XP, or Vista. These are the operating systems specified in the supplied documentation. Confirm software compatibility before using a modern PC.

Certifications and Compliance

• Communication Standard: DeviceNet™ protocol.
• Power Standard: ODVA-compliant 24 VDC supply requirements.
• Wetted Material: 316L stainless steel.
• Agency Approvals: No specific hazardous-area or safety certification appears in the supplied specifications.

Request the applicable manufacturer documentation when your project requires specific regulatory approvals.

Packaging and Supply Information

• HORIBA STEC SEF-Z514KX mass flow meter.
• Standard product identification and manufacturer documentation, subject to supply configuration.
• Configuration accessories and communication cables require separate confirmation.

Product Condition: New & Original in Factory Packing.

Warranty: Factory Warranty: 12 Months.

Shipping: FedEx, UPS, and DHL international delivery options.

Lead Time: Contact our sales team for current stock and shipping arrangements.

Global PLC Spare HUB Review

The HORIBA STEC SEF-Z514KX suits low-flow gas measurement applications requiring configurable gas ranges. Its DeviceNet interface supports integration with industrial automation networks.

Engineers should verify gas calibration and full-scale selection before ordering. The related SEC-Z514KX controller has separate valve and control specifications. Confirm the required instrument type before selecting either model.

Frequently Asked Questions (FAQ)

1. What is the main function of the HORIBA STEC SEF-Z514KX?

The SEF-Z514KX measures gas mass flow within its configured measurement range. It supports low-flow applications and DeviceNet communication.

2. What is the difference between SEF-Z514KX and SEC-Z514KX?

The SEF-Z514KX is a mass flow meter. The SEC-Z514KX is a mass flow controller with an integrated control valve. Select the meter for monitoring and the controller for active flow regulation.

3. How should engineers select the correct gas configuration?

First, identify the process gas and required flow range. Then verify the corresponding MR/MG number through HORIBA STEC configuration software. Incorrect gas selection can cause measurement errors.

4. What should buyers check before ordering this model?

Confirm the 1/2 SCCM full-scale range, gas type, connection size, DeviceNet requirements, and operating pressure. Also verify whether the application requires a meter or controller. These checks help prevent installation and compatibility issues.

5. Can the SEF-Z514KX connect directly to a modern industrial PC?

DeviceNet integration requires compatible network hardware and software. The documented configuration software also lists legacy Windows operating systems and serial communication accessories. Confirm current PC and converter compatibility before commissioning.

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