E28H11TDE2B MKS Instruments 600 Series Etch Pressure Transducer

MKS Instruments E28H11TDE2B – 100°C Heated Etch Baratron Sensor

The E28H11TDE2B is a 100°C heated absolute pressure sensor from the MKS Instruments E28H 600 Series. It uses capacitance diaphragm technology to measure low absolute pressures with high repeatability.

Designed for semiconductor etch applications, this sensor maintains a controlled sensor temperature to support stable pressure measurement. Its integrated patented etch baffle features a sump design that helps protect the sensing area in demanding process environments.

The unit provides a 0–10 VDC analog output and has no built-in trip points. A heater status LED provides a local indication of heater operation. The NW16 ISO-KF fitting supports connection to compatible vacuum lines.

01 | Configuration Breakdown

The ordering code identifies the sensor family, pressure range, fitting, electrical connection, and configuration options. The following breakdown is based on the supplied configuration information. Calibration-related suffix definitions require confirmation against the official MKS ordering code documentation.

Code Segment	Configuration	Supplied Interpretation
E28H	Product family	100°C heated E28H etch Baratron sensor
11T	Pressure range	10 Torr full scale
D	Fitting	NW16 ISO-KF connection
E	Configuration option	Supplied code description associates this segment with accuracy and calibration options. Exact meaning requires confirmation.
2	Electrical connector	15-pin D-sub with thread locks
B	Calibration option	Supplied code description indicates horizontal calibration, conflicting with the product specification stating vertical calibration.

Configuration verification: The supplied technical specification states vertical calibration. The suffix explanation identifies horizontal calibration for the E and B segments. These details are inconsistent and should be checked against the manufacturer's complete ordering record before replacement or installation.

02 | Measurement Performance

Parameter	Specification
Measurement Type	Absolute pressure
Full Scale Range	10 Torr
Sensor Temperature	Controlled at 100°C
Accuracy	0.25% of Reading, including non-linearity, hysteresis, and non-repeatability
Resolution	0.001% of Full Scale
Warm-up Time	2 hours
Calibration Orientation	Vertical, according to the supplied technical specification
Heater Status	LED indicator
Trip Points	None; analog output only

03 | Electrical Interface and Signal Output

Parameter	Specification
Power Supply	±15 VDC, ±5%
Maximum Current	0.60 A
Analog Output	0 to +10 VDC
Output Load	Greater than 10 kΩ
Connector	15-pin D-sub with thread locks
Signal Type	Analog voltage output

The 0–10 VDC output allows connection to compatible process monitoring and control equipment. Confirm the receiving instrument's input range and grounding requirements before wiring.

04 | Vacuum Connection and Sensor Construction

Parameter	Specification
Fitting	NW16 ISO-KF
Wetted Materials	Inconel
Internal Volume	6.3 cc
Overpressure Limit	45 psia (310 kPa) or 120% of Full Scale, whichever is greater
Etch Baffle	Integrated patented sump design
Patent Reference	US Patent No. 5,822,685

The integrated sump-style etch baffle is designed for etch process environments. Inconel wetted construction provides the specified material interface for process exposure. Process compatibility should still be evaluated against the actual gas chemistry and operating conditions.

05 | Thermal and Mechanical Data

Parameter	Specification
Operating Temperature	15 to 40°C
Zero Temperature Coefficient	0.002% FS/°C
Span Temperature Coefficient	0.02% of Reading/°C
Diameter	3.15 in (80.0 mm)
Body Height	3.87 in (98.4 mm)
Stem Length	1.38 in (35.1 mm)

06 | Engineering Selection and Installation Notes

• Pressure range: Confirm that the 10 Torr full-scale range matches the process pressure window. Avoid selecting a range solely from the maximum system pressure.
• Mounting orientation: Verify the required calibration orientation before installation. The supplied specification states vertical calibration.
• Heater operation: Allow approximately two hours for warm-up before relying on measurement performance.
• Electrical compatibility: Check the ±15 VDC supply, current capacity, 0–10 VDC input, and 15-pin connector arrangement.
• Vacuum interface: Confirm that the system uses an NW16 ISO-KF connection and that the sealing components are compatible.
• Process exposure: Review gas chemistry, deposits, and cleaning procedures before using the sensor in an etch chamber.

07 | Replacement Compatibility

The E28H11TDE2B is specified as interchangeable with earlier MKS Baratron manometer families, including:

• MKS 128 Series
• MKS 628A Series
• MKS 628B Series
• MKS 628D Series
• MKS E28B Series
• MKS E28D Series
• MKS E28F Series

Interchangeability should not be treated as automatic plug-and-play compatibility. Before replacing an installed unit, compare the pressure range, fitting, mounting orientation, connector pinout, power supply, output signal, and calibration requirements.

08 | Compliance and Supply Information

• Manufacturer: MKS Instruments
• Series: E28H / 600 Series
• Model: E28H11TDE2B
• Compliance: CE compliant
• Condition: New & Original in Factory Packing
• Warranty: Factory Warranty: 12 Months
• Shipping: FedEx, UPS, and DHL available

09 | Global PLC Spare HUB Engineering Insight

When selecting the E28H11TDE2B, engineers should pay particular attention to its heated sensor design and installation orientation. The 100°C controlled sensor temperature, 10 Torr measurement range, and 0–10 VDC output define its main integration requirements.

The integrated etch baffle is an important configuration feature for semiconductor process applications. For replacement projects, verify the complete model code and electrical interface rather than relying on the series name alone. The calibration-orientation discrepancy in the supplied suffix description should also be resolved before ordering.

10 | Frequently Asked Questions

Q1: What information should be provided when requesting a replacement quotation?

Provide the complete model number, equipment application, pressure range, fitting type, connector details, and a photo of the installed nameplate. These details help verify the required configuration before shipment.

Q2: Can this sensor be installed in a system that currently uses a different Baratron model?

Potentially. The listed legacy families are identified as interchangeable, but the actual installation must be checked for mechanical, electrical, and calibration compatibility. A matching pressure range alone is not sufficient.

Q3: What should be checked if the pressure reading drifts after installation?

Check warm-up time, mounting orientation, supply stability, grounding, process contamination, and the receiving instrument's input configuration. Compare the output against a suitable reference before adjusting system controls.

Q4: Is a 10 Torr sensor suitable for every low-pressure etch process?

No. The correct range depends on the normal operating pressure, process transients, and required measurement resolution. Review the expected pressure window and control-system requirements before selecting the range.

Q5: Does the E28H11TDE2B provide relay alarms for pressure limits?

No. The supplied specification identifies this model as analog-output only, with no trip points. If the application requires independent alarm switching, use a compatible external controller or monitoring system.

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