E27H.1TBD5B Heated Etch Pressure Transducer – MKS E27H 0.1 Torr

MKS E27H.1TBD5B | Heated Etch Sensor Baratron

MKS Instruments E27H.1TBD5B is a heated absolute pressure transducer designed for demanding semiconductor etch processes.

It belongs to the E27H (600 Series) and features a dedicated etch sensor configuration. Its integrated sump helps manage process byproduct deposition inside the pressure sensing assembly.

The sensor operates at a controlled temperature of 45°C. This heated construction helps reduce condensation and deposition on sensitive internal surfaces.

This configuration provides a 0.1 Torr full-scale range with horizontal calibration. It combines a 0–10 VDC analog output, Inconel wetted materials, and an 8 VCR female process connection.

Key Engineering Characteristics

• Manufacturer: MKS Instruments
• Complete Model: E27H.1TBD5B
• Product Family: E27H, 600 Series
• Product Type: Heated Etch Sensor Baratron
• Measurement: Absolute Pressure
• Full Scale: 0.1 Torr (approximately 13.3 Pa)
• Sensor Temperature: 45°C
• Calibration Orientation: Horizontal
• Etch Protection: Integrated Sump Etch Baffle
• Accuracy: 0.15% of Reading
• Electrical Output: 0–10 VDC
• Process Connection: 8 VCR Female

01 | Configuration Breakdown – Decode the Complete Model

The complete ordering code identifies the instrument's measurement range, process connection, calibration, electrical interface, and accuracy configuration.

Model Segment	Configuration	Engineering Description
E27H	Product Series	Heated etch sensor Baratron configuration
.1T	Pressure Range	0.1 Torr full scale
B	Process Fitting	8 VCR female connection
D	Calibration Option	Horizontal calibration, standard configuration
5	Electrical Connector	15-pin D-sub with thread locks
B	Accuracy Grade	0.15% of Reading

Configuration Interpretation:

• E27H: Identifies the heated etch sensor product family.
• .1T: Defines the 0.1 Torr measurement range.
• B: Specifies the 8 VCR female process connection.
• D: Identifies the horizontal calibration configuration.
• 5: Specifies the threaded 15-pin D-sub connector.
• B: Identifies the 0.15% reading accuracy grade.

Always verify the complete ordering code against the instrument nameplate. Confirm the suffix interpretation against the applicable MKS configuration documentation before ordering.

02 | Pressure Measurement Specifications

The instrument measures absolute pressure within a low-pressure range. Its measurement architecture supports process pressure monitoring in semiconductor etch equipment.

Measurement Parameter	Specification
Measurement Type	Absolute Pressure
Full-Scale Range	0.1 Torr
Equivalent Pressure	Approximately 13.3 Pa
Accuracy	0.15% of Reading
Resolution	0.001% of Full Scale
Non-Linearity	Included in specified accuracy
Hysteresis	Included in specified accuracy
Non-Repeatability	Included in specified accuracy
Warm-Up Time	4 Hours
Calibration Orientation	Horizontal

Resolution Calculation:

0.1 Torr × 0.001% = 0.000001 Torr.

This equals approximately 0.000133 Pa. Resolution does not represent absolute measurement accuracy.

Accuracy Interpretation:

The specified 0.15% accuracy applies to the pressure reading. It includes non-linearity, hysteresis, and non-repeatability.

At 0.05 Torr, the corresponding 0.15% accuracy value is 0.000075 Torr. This calculation represents the stated percentage of reading.

03 | Heated Etch Sensor and Integrated Sump Technology

The defining feature of this configuration is its integrated etch baffle and sump structure.

Etch processes can generate reaction byproducts during plasma processing. Some byproducts may deposit on internal surfaces as process conditions change.

Accumulated deposits can restrict pressure communication and affect long-term measurement reliability. The E27H configuration addresses this challenge through a dedicated etch sensor design.

Integrated Etch Baffle:

• Features an integrated sump structure.
• Uses a patented design, US Patent No. 5,822,685.
• Helps manage byproduct accumulation within the sensor assembly.
• Supports pressure measurement in demanding etch environments.

45°C Heated Sensor:

• Maintains a controlled sensor temperature of 45°C.
• Helps reduce condensation of process byproducts.
• Supports more stable internal thermal conditions.
• Reduces the risk of deposition affecting sensitive sensing surfaces.

Engineering Value:

The sump and heated construction address different aspects of process contamination. The sump manages accumulated byproducts, while heating helps reduce condensation.

Actual service life depends on process chemistry, deposition rate, operating pressure, and maintenance conditions.

04 | Thermal Performance and Environmental Limits

Thermal conditions influence low-pressure measurement stability. The following parameters define the operating environment and temperature sensitivity.

Thermal Parameter	Specification
Sensor Temperature	45°C Controlled
Ambient Operating Temperature	15 to 40°C
Warm-Up Time	4 Hours
Zero Temperature Coefficient	0.005% FS/°C
Span Temperature Coefficient	0.02% of Reading/°C

Temperature Management Recommendations:

• Maintain ambient temperature between 15 and 40°C.
• Allow four hours for thermal stabilization after startup.
• Avoid sudden temperature changes around the sensor.
• Check zero stability after the warm-up period.
• Evaluate span variation when ambient temperature changes.

The 45°C value refers to the controlled sensor temperature. It does not represent the permitted ambient temperature.

05 | Electrical Interface and Analog Signal

The instrument provides an analog voltage output for external pressure monitoring systems. Its 15-pin D-sub connector uses threaded locking hardware.

Electrical Parameter	Specification
Power Supply	±15 VDC
Supply Tolerance	±5%
Maximum Current	0.25 A
Analog Output	0 to +10 VDC
Output Load	>10 kΩ
Connector	15-pin D-sub
Connector Locking	Thread Locks
Trip Points	None
Heater Status LED	Not Available

Analog Scaling Reference

Assuming a linear 0–10 VDC output across the 0–0.1 Torr range:

Output Voltage	Equivalent Pressure
0 V	0 Torr
2.5 V	0.025 Torr
5 V	0.05 Torr
7.5 V	0.075 Torr
10 V	0.1 Torr

Use the manufacturer's transfer function for final system scaling. Confirm zero and span behavior during commissioning.

PLC and Control System Integration:

• Use a compatible 0–10 V analog input channel.
• Provide the required bipolar ±15 VDC power supply.
• Maintain input impedance above 10 kΩ.
• Verify connector pin assignments before wiring.
• Secure the D-sub connector using its locking screws.
• Check grounding and shielding arrangements.

06 | Process Connection and Mechanical Construction

The pressure boundary uses Inconel wetted materials. The instrument features an 8 VCR female process connection.

Mechanical Parameter	Specification
Wetted Materials	Inconel
Process Fitting	8 VCR Female
Internal Volume	6.3 cc
Body Diameter	3.15 in (80.0 mm)
Body Height	3.87 in (98.4 mm)
Stem Length	1.38 in (35.1 mm)
Mounting Calibration	Horizontal

Installation Considerations:

• Confirm the horizontal mounting orientation.
• Check the available clearance around the sensor body.
• Match the process connection with the existing VCR assembly.
• Inspect sealing surfaces before installation.
• Prevent mechanical loading on the pressure connection.
• Confirm process material compatibility before operation.

07 | Installation and Commissioning Workflow

Mechanical Preparation

1. Verify the complete model and measurement range.
2. Confirm the installation requires horizontal calibration.
3. Inspect the 8 VCR female fitting.
4. Check the process line for contamination.
5. Install suitable VCR sealing components.
6. Secure the instrument without excessive mechanical stress.

Electrical Preparation

1. Verify the ±15 VDC power supply.
2. Confirm supply polarity and voltage tolerance.
3. Inspect the 15-pin D-sub connector.
4. Check the analog output wiring.
5. Verify the receiving input impedance.
6. Secure the connector locking screws.

Commissioning Sequence

1. Apply the specified power supply.
2. Allow at least four hours for thermal stabilization.
3. Confirm the ambient temperature remains within limits.
4. Check the zero output under suitable reference conditions.
5. Apply known pressure points using calibrated equipment.
6. Compare measured output with expected values.
7. Verify pressure scaling in the receiving control system.
8. Record the commissioning results for future reference.

08 | Maintenance and Process Contamination Management

Etch applications require additional attention to process byproduct accumulation. Routine maintenance should consider both pressure performance and contamination conditions.

Recommended Inspection Points:

• Monitor pressure readings for gradual deviation.
• Check process line conditions for excessive deposition.
• Inspect external connections for leakage.
• Verify thermal stabilization after equipment startup.
• Review zero and span verification records.
• Follow MKS procedures for internal cleaning and servicing.

Maintenance Warning:

Do not open or mechanically clean the sensing assembly without approved service procedures. Incorrect handling can damage sensitive internal components.

09 | Compatibility and Replacement Selection

The E27H family supports replacement applications involving earlier Baratron manometer families, including 127, 627, and E27 configurations.

This interchangeability statement does not guarantee compatibility for every legacy installation.

Legacy Family	Replacement Verification
127 Series	Check pressure range, mounting, and electrical interface.
627 Series	Verify heating configuration and process connection.
E27 Series	Compare sensor design, calibration, and signal requirements.

Before Ordering, Confirm:

• Original pressure range and pressure measurement type.
• Horizontal calibration requirement.
• Etch process and byproduct exposure conditions.
• 8 VCR female fitting compatibility.
• ±15 VDC power availability.
• 0–10 VDC analog input compatibility.
• 15-pin D-sub connector and wiring configuration.
• Required accuracy and thermal specifications.

For legacy equipment, compare the complete model codes rather than relying on family names alone.

10 | Compliance, Packaging and Supply Terms

Compliance Information

• CE compliant.
• Manufacturer: MKS Instruments.
• Product family: E27H, 600 Series.

Applicable declarations and supporting documents depend on the supplied configuration.

Standard Package Reference

• 1 × MKS Instruments E27H.1TBD5B Heated Etch Sensor Baratron.
• Product identification information, where supplied.
• Additional accessories and documentation, subject to order confirmation.

Power cables, mating connectors, and calibration certificates require separate confirmation.

Warranty Terms

• Warranty Period: 12 months for applicable products.
• Coverage: Manufacturing or product quality issues covered by the agreed warranty terms.
• Support: Contact our sales team for inspection and warranty procedures.
• Verification: Warranty eligibility follows the confirmed order and supply agreement.

International Shipping

• FedEx: International express delivery.
• UPS: International parcel and express services.
• DHL: International express delivery.

Shipping methods and dispatch schedules depend on stock status and destination.

11 | Frequently Asked Questions

Q1: Why does an etch process require a dedicated pressure sensor design?

Etch processes can generate reactive gases and solid byproducts. These materials may accumulate inside pressure sensing passages.

A dedicated etch configuration helps manage deposition through its integrated sump and heated sensor design. This reduces contamination-related measurement risks.

Q2: What is the engineering purpose of the integrated sump?

The integrated sump provides a designated area for managing process byproduct accumulation. It forms part of the patented etch baffle design.

Engineers should still evaluate process chemistry and deposition rates. The sump does not eliminate every contamination or maintenance requirement.

Q3: Can the instrument operate with an external Ethernet monitoring system?

The supplied electrical specification identifies a 0–10 VDC analog output through a 15-pin D-sub connector.

External Ethernet monitoring requires a compatible PLC, data acquisition device, or communication gateway. Verify the exact communication options of the ordered configuration before integration.

Q4: What should engineers investigate if pressure response becomes slower after extended etch operation?

Check the process pressure line for byproduct accumulation and possible restrictions. Review the pressure connection and system isolation valves.

Also verify thermal stabilization and compare the output against a calibrated reference. Do not immediately replace the sensor before checking the complete pressure path.

Q5: How should buyers select between E27H and a standard heated Baratron?

Consider the process chemistry and expected byproduct deposition first. Standard heated models may suit cleaner pressure measurement environments.

The E27H configuration offers an integrated etch baffle and sump for deposition-prone applications. Buyers should also confirm the 0.1 Torr range, horizontal calibration, and electrical configuration.

For replacement projects, provide the original nameplate and equipment model. This helps verify the correct configuration before purchase.

Why Choose Ubest Automation?

Ubest Automation supplies industrial instrumentation and automation components for semiconductor and process industries.

• Product Sourcing: Support for MKS Instruments pressure measurement products.
• Model Verification: Assistance with ordering codes and technical configurations.
• Pre-Shipment Inspection: Product checks before dispatch, subject to availability and testing requirements.
• Warranty: 12-month warranty for applicable products.
• Global Delivery: FedEx, UPS, and DHL shipping options.
• Technical Support: Assistance with replacement identification and interface verification.

Request a Quotation for MKS E27H.1TBD5B.

Send us the complete model number and equipment requirements. Our team can assist with configuration verification, pricing, and delivery arrangements.

Email: sales@ubestplc.com

Website: www.ubestplc.com

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