628H13TDE1B MKS Instruments 600 Series Precision Absolute Transducer

MKS Instruments 628H13TDE1B | 100°C Heated Baratron Absolute Pressure Transducer

The MKS Instruments 628H13TDE1B is a heated capacitance manometer from the 628H Series within the MKS 600 Series.

This model measures absolute pressure across a 1000 Torr full-scale range. Its internal sensor maintains a controlled temperature of 100°C. The heated architecture supports demanding semiconductor and vacuum process environments.

The instrument combines a 0.25% reading accuracy specification with 0.001% full-scale resolution. Its analog output provides a 0 to +10 VDC pressure signal. A 15-pin D-sub connector supports electrical integration with compatible monitoring equipment.

The 628H13TDE1B also features vertical calibration and Inconel wetted construction. Its compact housing supports integration into semiconductor process equipment and vacuum measurement assemblies.

01 | Instrument Specification at a Glance

Manufacturer	MKS Instruments
Model Number	628H13TDE1B
Product Series	628H Series
Product Family	600 Series
Product Type	Heated Baratron Absolute Pressure Transducer
Measurement Principle	Capacitance Manometer
Measurement Mode	Absolute Pressure
Full-Scale Range	1000 Torr
Sensor Temperature	100°C
Calibration Orientation	Vertical
Pressure Output	0 to +10 VDC
Process Connection	NW16 ISO-KF, subject to model-code verification
Wetted Material	Inconel
Compliance	CE

02 | Measurement Performance & Resolution

The 628H series supports multiple pressure ranges and measurement configurations. The specified 1000 Torr version provides the following performance characteristics.

Parameter	Specification
Full-Scale Range	1000 Torr
Measurement Accuracy	±0.25% of Reading
Accuracy Components	Non-linearity, hysteresis, and non-repeatability included
Resolution	0.001% FS
Equivalent Resolution	0.01 Torr at 1000 Torr FS
Warm-Up Time	2 hours
Calibration Position	Vertical

Measurement Accuracy: The ±0.25% reading specification includes non-linearity, hysteresis, and non-repeatability. It applies to the 1–25,000 Torr range configurations.

At a 1000 Torr full-scale range, 0.001% FS resolution corresponds to 0.01 Torr. Resolution and accuracy represent different measurement characteristics.

03 | 628H Series: Available Pressure Range Architecture

The 628H family covers a broad pressure range for different vacuum and process measurement requirements.

Range Group	Available Full-Scale Ranges
Ultra-Low Pressure	0.05, 0.1, 0.25 Torr
Low Pressure	1, 2, 10, 20 Torr
Medium Pressure	100, 1000 Torr
High Pressure	2000, 5000, 10000 Torr
Extended Pressure	15000, 20000, 25000 Torr

Range-Dependent Performance:

• 1–25,000 Torr: Accuracy is 0.25% of reading.
• 0.25, 0.1, and 0.05 Torr: Accuracy is 0.50% of reading.
• 0.05 Torr Range: Resolution is 0.002% FS.
• Other Listed Ranges: Resolution is 0.001% FS.

The 628H13TDE1B specifically uses the 1000 Torr configuration. Do not apply the lowest-range specifications to this model.

04 | Model Suffix & Configuration Breakdown

The complete model number identifies the instrument family, pressure range, connection, accuracy class, calibration configuration, and electrical connector.

Code Segment	Configuration	Engineering Description
628H	Product Series	100°C heated absolute Baratron pressure transducer
13T	Pressure Range	1000 Torr full scale
D	Fitting Code	Supplied code description indicates 8 VCR female
E	Accuracy Class	±0.25% of reading
1	Configuration	Standard configuration with vertical calibration
B	Electrical Connector	15-pin D-sub with thread locks

Complete Model: 628H13TDE1B

Configuration Verification: The supplied model description contains a fitting discrepancy. The product specification lists NW16 ISO-KF, while the supplied suffix explanation assigns code D to 8 VCR female. Confirm the actual factory configuration before ordering or connecting the instrument.

05 | Thermal Management & Temperature Compensation

The internal heating system maintains the sensing element at 100°C. This controlled thermal environment supports measurement stability under changing process conditions.

Controlled Sensor Temperature	100°C
Ambient Operating Temperature	15–50°C
Warm-Up Time	2 hours for ranges from 1 to 25,000 Torr
Warm-Up Below 1 Torr	4 hours
Zero Temperature Coefficient	0.002% FS/°C for 1–25,000 Torr
Zero Coefficient, 0.1 and 0.25 Torr	0.01% FS/°C
Zero Coefficient, 0.05 Torr	0.02% FS/°C
Span Temperature Coefficient	0.02% of Reading/°C

Temperature compensation values depend on the selected pressure range. The 1000 Torr configuration uses the 0.002% FS/°C zero coefficient.

06 | Electrical Connection & Signal Architecture

Input Power	±15 VDC ±5%
Maximum Current	0.60 A
Analog Output	0 to +10 VDC
Output Load	Greater than 10 kΩ
Electrical Connector	15-pin D-sub
Connector Locking	Thread-locking screws
Integrated Relay Outputs	None
Pressure Signal	Analog voltage output

The instrument provides an analog pressure signal without integrated relay trip points. Connect it to a compatible analog input module.

Check the receiving input impedance before commissioning. The load must exceed 10 kΩ for the specified output condition.

07 | Optional Indicators & Semiconductor Switches

The 628H product family offers optional status indicators and semiconductor switch functions. These options are separate from the standard configuration described for the 628H13TDE1B.

Optional Function	Operation
Temperature Status	Switch turns ON when the instrument reaches operating temperature
Temperature LED	Green when the sensor reaches temperature
Heater Status	Switch turns OFF when heater failure occurs
Heater LED	Green during normal operation; blinking red during heater failure
Maximum Switch Current	120 mA
Maximum ON Resistance	20 Ω at 120 mA and 50°C
Maximum Open-Circuit Voltage	28 V

The supplied 628H13TDE1B configuration specifies no heater status LED. Confirm optional switches and indicators separately when the application requires external status monitoring.

08 | Process Connection & Mechanical Construction

Wetted Material	Inconel
Internal Volume	6.3 cc
Specified Fitting	NW16 ISO-KF
Alternative Fitting Options	1/2-inch OD tube, 8 VCR female, 8 VCO female, NW25 KF, 1.33-inch OD CF, 2.75-inch OD CF
Body Diameter	3.15 in (80.0 mm)
Body Height	3.87 in (98.4 mm)
Stem Length	1.38 in (35.1 mm)

The Inconel wetted construction supports demanding process gas measurement environments. The compact housing simplifies installation in space-constrained equipment.

Evaluate fitting geometry before selecting replacement hardware. NW16 ISO-KF and 8 VCR connections require different mating components.

09 | Pressure Limits & Mechanical Protection

Overpressure Limit	45 psia (310 kPa) or 120% FS, whichever is greater
Full-Scale Pressure	1000 Torr
Internal Volume	6.3 cc

The overpressure specification defines a protection limit, not a normal operating target. Avoid pressure spikes beyond the specified limit.

For a 1000 Torr configuration, the stated 45 psia threshold exceeds 120% of full scale. Design pressure protection around the applicable manufacturer rating.

10 | Installation & Commissioning Recommendations

Mechanical Preparation

1. Verify the 1000 Torr full-scale configuration.
2. Confirm vertical calibration requirements.
3. Check the actual fitting against the installation drawing.
4. Inspect the sealing surfaces and vacuum connection.
5. Confirm process gas compatibility with Inconel.
6. Allow sufficient clearance around the heated body.

Electrical Preparation

1. Provide a regulated ±15 VDC power supply.
2. Verify the voltage polarity and ±5% tolerance.
3. Secure the 15-pin D-sub connector.
4. Connect the analog output to a compatible voltage input.
5. Check the receiving impedance above 10 kΩ.

Startup and Calibration Checks

1. Power the instrument and allow two hours for warm-up.
2. Maintain stable ambient conditions within 15–50°C.
3. Verify the vertical installation orientation.
4. Check zero output under suitable reference conditions.
5. Compare pressure readings against a calibrated reference.
6. Record baseline readings for future maintenance comparisons.

11 | Maintenance & Application Troubleshooting

• Zero Shift: Check thermal stabilization, mounting orientation, and reference pressure conditions.
• Signal Saturation: Verify actual pressure and analog input scaling.
• Slow Startup: Allow the specified warm-up period before evaluating measurement performance.
• Vacuum Leakage: Inspect the KF or VCR mating surfaces and sealing components.
• Unexpected Pressure Changes: Check chamber pressure behavior and process-line isolation.

Use a traceable pressure reference during calibration verification. Avoid changing the instrument's calibration without approved service procedures.

12 | Typical Industrial & Semiconductor Applications

• Semiconductor Process Chambers: Absolute pressure monitoring in controlled manufacturing environments.
• Vacuum Systems: Pressure measurement in vacuum equipment and process lines.
• Thin-Film Processing: Pressure feedback for deposition equipment.
• Thermal Processing: Pressure monitoring in elevated-temperature manufacturing systems.
• Gas Delivery Equipment: Pressure measurement in compatible gas distribution assemblies.

The 100°C heated sensor design supports applications requiring controlled sensing temperature. Engineers should verify gas compatibility, pressure limits, and fitting configuration before installation.

13 | Compliance & Package Verification

Compliance

• CE compliant according to the supplied product specification.

Package Contents

• 1 × MKS Instruments 628H13TDE1B Heated Baratron Pressure Transducer.
• Product identification and model information.
• Applicable technical documentation, subject to order confirmation.

Confirm cables, mounting accessories, connection adapters, and optional indicators separately. Do not assume optional accessories are included in the standard package.

14 | Professional FAQ: Engineering Selection & Field Application

Q1: Why does vertical calibration matter when installing this pressure transducer?

Calibration orientation defines the instrument's specified reference position. A different mounting position may introduce measurement deviations. Maintain the vertical orientation unless the manufacturer approves another configuration.

Q2: How should engineers interpret the overpressure protection specification?

The instrument uses the greater value between 45 psia and 120% of full scale. This rating does not authorize continuous operation at the protection limit. Use suitable pressure regulation and isolation devices.

Q3: Is the 628H13TDE1B suitable for applications requiring pressure alarm relays?

The specified configuration provides analog output only. It has no integrated relay trip points. Use an external pressure controller or PLC to implement alarm thresholds and interlocks.

Q4: When should buyers select a 1000 Torr range instead of a 100 Torr range?

Review the maximum expected chamber pressure and normal operating window. A 100 Torr range provides a smaller full-scale measurement span. A 1000 Torr range accommodates higher pressure conditions. Select a range that balances measurement requirements and process operating limits.

Q5: What should maintenance engineers record during periodic performance checks?

Record zero readings, reference pressure comparisons, ambient temperature, and startup time. Also document the supply voltage and analog output condition. Historical measurements help identify gradual drift and installation-related problems.

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