901P-41010-0142 MKS 901P MicroPirani Loadlock Vacuum Transducer
Manufacturer: MKS Instruments
Product No.: 901P-41010-0142
Condition： In stock
Product Type: Vacuum Pressure Transducer
Product Origin: USA
Payment: T/T, Western Union
Weight: 500g
Shipping port: Xiamen
Warranty: 12 months
Estimate delivery times: 12-26 days (International), 3-6 days (United States).
Return within 30 days of purchase. Duties & taxes are non-refundable.
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901P-41010-0142 MKS 901P MicroPirani™ & Piezo Loadlock Vacuum Pressure Transducer
The 901P-41010-0142 is a dual-sensor MEMS vacuum pressure transducer engineered by MKS Instruments for high-throughput semiconductor loadlock and atmospheric-to-high-vacuum chamber control. By combining a MicroPirani™ thermal conductivity sensor with a MEMS Piezo differential diaphragm, the 901P Series eliminates the gas-composition dependency near atmospheric pressure that limits standalone Pirani gauges.
This integrated architecture delivers continuous absolute pressure measurement from 1.0 × 10-5 to 1500 Torr alongside true differential pressure monitoring from -760 to +760 Torr for safe, rapid loadlock venting and roughing cycles.
Part Number & Configuration Architecture
| Part Code Segment | Configuration Definition | Engineering & Application Role |
|---|---|---|
| 901P | MKS 901P Loadlock Transducer Series | Dual MEMS MicroPirani™ + Piezo differential transducer platform for continuous vacuum-to-atmosphere control. |
| -41010 | Hardware Interface & Flange Configuration | Defines the 304 stainless steel vacuum flange (such as compact KF16 with 2.8 cc internal volume), electrical connector, and communication bus profile. |
| -0142 | Factory Firmware, Relay & Output Variant | Specifies OEM-tailored digital communication settings, analog scaling, and optional SPDT relay assignment. |
Metrological Accuracy & Sensor Performance
-
MicroPirani™ Absolute Sensor (MEMS Thermal Conductivity):
- Total Measurement Span: 1.0 × 10-5 to 1500 Torr
- 5 × 10-4 to 1 × 10-3 Torr: ±10% of reading
- 1 × 10-3 to 100 Torr: ±5% of reading (±2% repeatability)
- 100 Torr to Atmosphere: ±25% of reading (automatically compensated by Piezo sensor)
-
Piezo Differential Sensor (MEMS Diaphragm):
- Total Differential Span: -760 to +760 Torr (Zero stability: ±0.1% of 760 Torr Full Scale)
- -760 to -100 Torr: ±1% of reading (±1% repeatability up to +10 Torr)
- -100 to -10 Torr: ±8% of reading
- -10 to +10 Torr: ±10% of reading
- +10 to 100 Torr: ±5% of reading
Electrical, Mechanical & Environmental Specifications
| Subsystem | Parameter | Verified Technical Data |
|---|---|---|
| Digital Interface | Protocol & Baud Rate | RS485 / RS232 (4800 to 230,400 Baud) |
| Analog Outputs | Absolute & Differential | 1 to 9 VDC (1 VDC/decade, 16-bit, ≤100 Ω); Optional Output 2: 5 VDC = 0 Torr (12-bit) |
| Control Relays | Set Points & Rating | Up to 3 SPDT relays (optional); 1 A @ 30 VAC/DC resistive; ≤100 msec response |
| Set Point Ranges | Trigger Thresholds | Absolute: 5.0 × 10-4 to 1000 Torr; Differential: -760 to +100 Torr |
| Gas Calibration | Supported Media | Air, Argon, Helium, Nitrogen, H2, H2O vapor, CO2, Xenon, Neon |
| Power Supply | Input Voltage & Draw | 9 to 30 VDC; < 1.2 W max (RS232/RS485) / < 2 W max (EtherCAT variant) |
| Wetted Materials | Sensor & Flange Construction | Silicon, SiO2, Si3N4, Gold, Low-Outgassing Epoxy, 304 Stainless Steel, Viton® |
| Physical & Limits | Volume, Mass & Overpressure | 2.8 cc internal volume (KF16); 170 g weight; 1500 Torr absolute overpressure limit |
| Thermal & Compliance | Operating, Bakeout & Certs | 0°C to 40°C operating; 85°C max non-operating bakeout; CE Compliant |
Warranty Protection & Global Express Dispatch
- 12-Month Hardware Warranty: Every 901P-41010-0142 unit is backed by a full 12-month warranty protecting MEMS sensor responsiveness, digital bus communications, and zero-point stability.
- Global Air Courier Logistics: Packaged in cleanroom-grade ESD protection and dispatched worldwide via FedEx, UPS, or DHL to support urgent fab maintenance schedules.
Vacuum Engineering FAQ & Selection Guidance
-
Q: Why does combining a Piezo differential sensor with a MicroPirani™ eliminate loadlock door-interlock delays?
A: Standard thermal conductivity gauges lose sensitivity near 760 Torr and drift with ambient barometric changes, whereas the MEMS Piezo sensor measures exact differential pressure across the loadlock door for immediate, safe slit-valve or door actuation.
-
Q: How do I configure gas-type compensation when switching loadlock purge gases from Nitrogen to Argon or Helium?
A: Send the calibration gas command over the RS485/RS232 digital interface to load internal thermal conductivity curves for Argon, Helium, or CO2, preventing false pressure readings during backfill.
-
Q: What precaution must engineers observe during chamber bakeout cycles?
A: Keep transducer temperatures strictly at or below 85°C (185°F) with DC power disconnected, as exceeding this limit damages the internal MEMS electronics and Viton® seals.
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Q: When should I specify the 901P series over a single-sensor MicroPirani™ transducer?
A: Choose the 901P-41010-0142 whenever your process requires repeatable 1% accuracy between 100 Torr and atmosphere or differential pressure interlocks against local barometric fluctuations.
-
Q: How can maintenance technicians verify sensor health without removing the gauge from the vacuum manifold?
A: Query the digital status registers via RS485/RS232 to inspect transducer internal temperature, operating hours, zero-adjust offsets, and execute a remote LED and relay diagnostic test.
Tags
Q: Are these parts 100% original and new?
A: Yes. Every component is guaranteed to be 100% original, brand-new, and factory-sealed. We also provide a 12-month comprehensive warranty for your peace of mind.
Q: How fast is the shipping to my country?
A: For in-stock items, we offer same-day dispatch. International express shipping (DHL/FedEx/UPS) typically delivers within 3–5 business days worldwide.
Q: Can I get a formal quotation with shipping costs?
A: Absolutely. Our sales team is ready to provide a detailed Proforma Invoice (PI) including the most competitive shipping rates for your location.
Q: Do you offer discounts for bulk orders?
A: We provide volume-based pricing for large projects or multiple-item orders. Please contact us to get our Best Price Guarantee.
12-Month Comprehensive Warranty
Every part supplied by Global PLC Spare Hub is covered by a 12-month warranty from the date of invoice.
- Coverage: Functional defects and hardware failures under normal operating conditions.
- Commitment: We provide immediate repair, replacement, or a full refund for any verified defective components to minimize your operational downtime.
Returns & Exchange Policy
We offer a 30-day return policy to ensure you receive the exact part your system requires.
- Eligibility: Returns are accepted for uninstalled items in their original, factory-sealed packaging.
- RMA Process: Please contact our support team to obtain a Return Merchandise Authorization (RMA) number before shipping.
- Fast Processing: Refunds or exchanges are processed within 3–5 business days after the returned item passes our technical inspection.
Need Technical Assistance?Not sure if this part is compatible with your system? [Consult our Engineers] before purchasing to ensure 100% compatibility.
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