627B11TDC2P MKS Instruments Baratron 627B Series Absolute Capacitance Manometer

Manufacturer: MKS Instruments
Product No.: 627B11TDC2P
Condition： In stock
Product Type: Absolute Capacitance Manometer
Product Origin: USA
Payment: T/T, Western Union
Weight: 500g
Shipping port: Xiamen
Warranty: 12 months

Quantity

Selected quantity: 1

Estimate delivery times: 12-26 days (International), 3-6 days (United States).

Return within 30 days of purchase. Duties & taxes are non-refundable.

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627B11TDC2P Heated Capacitance Manometer Overview

The 627B11TDC2P is a temperature-regulated absolute capacitance manometer from the MKS Instruments Baratron 627B Series. Engineered for semiconductor etch, chemical vapor deposition (CVD), and high-purity vacuum process chambers, this sensor maintains its internal diaphragm assembly at a constant 45°C. Thermal regulation eliminates zero drift caused by ambient temperature swings and prevents process gas condensation on the sensing element. Constructed with an all-Inconel 600 wetted path, the transducer delivers gas-composition-independent total pressure readings across a 10 Torr full-scale range.

Model Code & Configuration Breakdown

627B11TDC2P Architecture Tree:
- Base Series (627B): 45°C constant-temperature heated absolute capacitance manometer (form-fit-function compatible with 627D / 627F / 627H upgrades).
- Full Scale Range (11T): 10 Torr (1.33 × 10³ Pa / 13.33 mbar) measurement ceiling.
- Vacuum Fitting (D): NW-16-KF (KF16) quick-release vacuum flange.
- Electrical Interface (C): 15-pin Type "D" (DB15) male connector equipped with slide locks.
- Accuracy Class (2): 0.12% of Reading precision at pressures ≥ 1.0 Torr (1.33 × 10² Pa).
- Diagnostic Option (P): Integrated heater temperature status and heater failure diagnostic LEDs with horizontal calibration.

Technical & Metrology Specifications

Specification Category	Parameter	Engineering Value
Identification	Manufacturer & Series	MKS Instruments / Baratron 627B Series
Identification	Part Number	627B11TDC2P
Metrology	Full Scale Pressure	10 Torr (1.33 × 10³ Pa / 13.33 mbar)
Metrology	Measurement Accuracy	0.12% of Reading (≥ 1.0 Torr / 1.33 × 10² Pa)
Thermal Control	Sensor Operating Temp	45°C active constant temperature control
Thermal Control	Warm-Up Stabilization	2 to 4 hours for full thermal equilibrium
Materials	Wetted & Enclosure Alloys	Inconel 600 wetted diaphragm; cleanroom-grade stainless steel housing
Electrical	Input Power & Output	±15 VDC (≤ 250 mA); 0 to 10 VDC linear analog output
Diagnostics	Visual Status Indicators	Heater Temperature Ready & Heater Failure LEDs

Warranty & Global Logistics

12-Month Warranty Coverage: Every 627B11TDC2P pressure transducer carries a comprehensive 12-month warranty protecting against manufacturing and calibration defects.
Express International Shipping: Rapid global dispatch via FedEx, UPS, and DHL with shock-isolated cleanroom packaging to preserve diaphragm zero-point stability during transit.

Engineering FAQ & Selection Guide

Q1: How do process engineers select between a 45°C heated 627B sensor and an unheated ambient manometer?

A1: Choose the 45°C heated 627B11TDC2P whenever your vacuum process involves condensable precursor vapors, low-vapor-pressure byproducts, or facility HVAC fluctuations exceeding ±2°C.

Q2: What is the operational significance of the "P" option diagnostic LEDs during tool startup?

A2: The status LEDs immediately alert technicians if the internal heater circuit opens or fails to reach 45°C, preventing false pressure readings before wafer processing begins.

Q3: Why is the 2 to 4 hour warm-up period mandatory before executing a zero-point adjustment?

A3: The Inconel sensor body and tensioned diaphragm require full thermal soak at 45°C; zeroing the transducer prematurely introduces severe baseline offset once thermal equilibrium settles.

Q4: Can this 627B11TDC2P drop directly into an existing 627D or 627F tool slot?

A4: Yes, provided the mounting orientation matches its horizontal factory calibration, as the NW-16-KF port, DB15 slide-lock pinout, and 0–10 VDC scaling remain identical.

Q5: How should technicians mount the NW-16-KF flange to protect the internal diaphragm from particulate contamination?

A5: Install the transducer with the vacuum port facing downward or horizontally using a clean centering ring with an integrated stainless steel sintered filter screen.

12-Month Comprehensive Warranty

Every part supplied by Global PLC Spare Hub is covered by a 12-month warranty from the date of invoice.

Coverage: Functional defects and hardware failures under normal operating conditions.
Commitment: We provide immediate repair, replacement, or a full refund for any verified defective components to minimize your operational downtime.

Returns & Exchange Policy

We offer a 30-day return policy to ensure you receive the exact part your system requires.

Eligibility: Returns are accepted for uninstalled items in their original, factory-sealed packaging.
RMA Process: Please contact our support team to obtain a Return Merchandise Authorization (RMA) number before shipping.
Fast Processing: Refunds or exchanges are processed within 3–5 business days after the returned item passes our technical inspection.

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