626C21TDE MKS Instruments Baratron Unheated Absolute Capacitance Manometer
Manufacturer: MKS Instruments
Product No.: 626C21TDE
Condition： In stock
Product Type: Absolute Capacitance Manometer
Product Origin: USA
Payment: T/T, Western Union
Weight: 500g
Shipping port: Xiamen
Warranty: 12 months
Estimate delivery times: 12-26 days (International), 3-6 days (United States).
Return within 30 days of purchase. Duties & taxes are non-refundable.
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626C21TDE Unheated Capacitance Manometer Architecture
The 626C21TDE is an ambient-temperature absolute capacitance manometer belonging to the MKS Instruments Baratron 626C Series. Designed for semiconductor etch chambers, physical vapor deposition (PVD) tools, and high-purity vacuum systems, this sensor operates without internal thermal heaters while delivering gas-composition-independent total pressure measurements. Constructed with an all-Inconel and Incoloy nickel alloy wetted pathway, the instrument withstands aggressive process byproducts across a 20 Torr full-scale operating range.
Model Code & Suffix Configuration Tree
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626C21TDE Nomenclature Breakdown:
- Base Model Family (626C): Ambient temperature general-purpose absolute pressure capacitance manometer.
- Full Scale Range (21T): 20 Torr (26.66 mbar / 2.67 kPa) nominal pressure ceiling.
- Process Fitting (D): 1/2-inch (12.7 mm) outside diameter straight stub tube connection.
- Electrical Interface (E): 15-pin High-Density D-subminiature male connector delivering a linear 0 to 10 VDC output signal.
Comprehensive Technical & Metrology Specifications
| Specification Domain | Parameter | Engineering Metric |
| Manufacturer & Line | Brand / Series | MKS Instruments / Baratron 626C Series |
| Model Identifier | Part Number | 626C21TDE |
| Pressure Metrology | Range & Overpressure | 20 Torr full scale; 45 psia (310 kPa) absolute overpressure limit |
| Signal & Power | Excitation & Output | ±15 VDC (±5%) @ 35 mA; 0 to 10 VDC linear analog output into >10 kΩ |
| Resolution & Drift | Thermal Stability | 0.005% FS/°C zero temp coefficient; 0.04% of Reading/°C span coefficient |
| Physical Construction | Wetted Materials & Volume | Inconel and Incoloy nickel alloys; internal sensing volume of 6.3 cm³ |
| Environmental | Operating Range & Compliance | 0°C to 50°C ambient; CE compliant to EMC Directive 2004/108/EC |
Warranty Protection & Global Express Logistics
- 12-Month Hardware Warranty: Every 626C21TDE pressure transducer is backed by a full 12-month warranty covering mechanical integrity and calibration precision.
- Expedited Worldwide Dispatch: Fast, secure delivery options via industry-leading carriers including FedEx, UPS, and DHL, packed in shock-resistant industrial containers.
Engineering FAQ & Application Selection Guide
Q1: When should an engineer choose the unheated 626C series over a heated 45°C Baratron model?
A1: Select the unheated 626C21TDE when process gases do not generate condensable byproducts and ambient tool rack temperatures remain stable within ±2°C.
Q2: How does the 1/2-inch stub tube fitting (D suffix) integrate into existing vacuum manifolds?
A2: The 1/2-inch straight outside diameter stub allows technicians to weld the sensor directly into stainless steel gas delivery lines or utilize compression gland fittings.
Q3: Why is strict adherence to the ±15 VDC power supply tolerance critical for output linearity?
A3: Voltage fluctuations exceeding the ±5% supply window introduce common-mode offsets into the internal bridge circuit, shifting the 0 to 10 VDC scaling accuracy.
Q4: What zero stability can operators expect during routine tool calibration cycles?
A4: With a zero temperature coefficient of 0.005% FS/°C, minimal baseline drift occurs during standard 0°C to 50°C cabinet thermal transitions once warmed up.
Q5: How does the 6.3 cm³ internal volume impact response time in dynamic pressure loops?
A5: The ultra-small internal cavity minimizes gas trapping, allowing the diaphragm to respond almost instantaneously to rapid pressure transients in fast-acting valve loops.
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Q: Are these parts 100% original and new?
A: Yes. Every component is guaranteed to be 100% original, brand-new, and factory-sealed. We also provide a 12-month comprehensive warranty for your peace of mind.
Q: How fast is the shipping to my country?
A: For in-stock items, we offer same-day dispatch. International express shipping (DHL/FedEx/UPS) typically delivers within 3–5 business days worldwide.
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A: Absolutely. Our sales team is ready to provide a detailed Proforma Invoice (PI) including the most competitive shipping rates for your location.
Q: Do you offer discounts for bulk orders?
A: We provide volume-based pricing for large projects or multiple-item orders. Please contact us to get our Best Price Guarantee.
12-Month Comprehensive Warranty
Every part supplied by Global PLC Spare Hub is covered by a 12-month warranty from the date of invoice.
- Coverage: Functional defects and hardware failures under normal operating conditions.
- Commitment: We provide immediate repair, replacement, or a full refund for any verified defective components to minimize your operational downtime.
Returns & Exchange Policy
We offer a 30-day return policy to ensure you receive the exact part your system requires.
- Eligibility: Returns are accepted for uninstalled items in their original, factory-sealed packaging.
- RMA Process: Please contact our support team to obtain a Return Merchandise Authorization (RMA) number before shipping.
- Fast Processing: Refunds or exchanges are processed within 3–5 business days after the returned item passes our technical inspection.
Need Technical Assistance?Not sure if this part is compatible with your system? [Consult our Engineers] before purchasing to ensure 100% compatibility.
