SEC-Z714MGX HORIBA STEC SEC-Z700X Pressure-Insensitive DeviceNet MFC
Manufacturer: HORIBA
Product No.: SEC-Z714MGX
Condition： In stock
Product Type: DeviceNet Adapter
Product Origin: USA
Payment: T/T, Western Union
Weight: 500g
Shipping port: Xiamen
Warranty: 12 months
Estimate delivery times: 12-26 days (International), 3-6 days (United States).
Return within 30 days of purchase. Duties & taxes are non-refundable.
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Product Introduction
The HORIBA STEC SEC-Z714MGX belongs to the advanced SEC-Z700X Series, engineering a pressure-insensitive design specifically for semiconductor tools and critical gas delivery systems. This digital mass flow controller integrates a high-speed on-board pressure sensor to eliminate upstream pressure transient disturbances across multi-line gas panels. Built with an electropolished SUS316L stainless steel body and metal-sealed wetted paths, the SEC-Z714MGX delivers exceptional leak integrity and multi-gas versatility for high-purity environments. Its piezoelectric actuator provides rapid response times and reliable control, making the SEC-Z714MGX an ideal choice for complex industrial automation frameworks.
Technical Specifications
| Parameter Category | Specification Details |
|---|---|
| Brand & Model | Brand: HORIBA STEC Model: SEC-Z714MGX Series: SEC-Z700X |
| Measurement Range | Full-Scale Flow Range: 10 SCCM to 10 SLM (N2 equivalent, MR/MG #R01–#06) Control Range / Turndown: 2–100% FS |
| Frequency Response | Response Time: ≤1 second (T98, full flow range) |
| Sensitivity & Accuracy | Accuracy: ±1.0% S.P. (>25% FS); ±0.25% FS (≤25% FS) Pressure Transient Sensitivity: ±(1.0% S.P. + 1.0% FS max) for #02–#10 |
| Linearity & Resolution | Linearity: ±0.5% FS Repeatability: ±0.2% FS |
| Temperature Range | Operating Temperature: 5–50°C (recommended 15–45°C) Temperature Coefficient: On-board pressure sensor ±1% FS (0–700 kPa(A)); Temperature accuracy ±2°C |
| Environmental Tolerance | Operating Differential Pressure: 50–300 kPa(d) Max Operating Pressure: 450 kPa(g) Pressure Resistance: 1000 kPa(g) Leak Integrity: ≤5×10-12 Pa·m3/s (He) |
| Interference Immunity | Digital noise filtering and ODVA conformance ensure robust electromagnetic compatibility in crowded tool racks. |
Installation Guide
- Inspect Package Contents: Verify that the SEC-Z714MGX unit, mating micro-connectors, and calibration sheets are intact upon unboxing.
- Verify Cleanliness: Maintain cleanroom protocol while handling metal-sealed VCR fittings to protect electropolished internal surfaces.
- Mount Securely: Install the SEC-Z714MGX onto your gas panel using the standard 1/4" VCR fittings with a 124 mm fitting distance.
- Establish Grounding: Connect the chassis ground to the tool frame to prevent ground loops and signal interference.
- Network Wiring: Wire the DeviceNet micro-connector according to ODVA polarity standards, supplying DC 24V power.
- Leak Testing: Perform a helium leak check on all inlet and outlet connections before introducing process gases.
Commissioning & Maintenance Convenience
- Auto-Zero Calibration: Execute initial zero adjustment through the digital interface without removing the SEC-Z714MGX from the gas line.
- Diagnostic Readouts: Monitor real-time flow, temperature, and upstream pressure directly via the integrated multi-display panel.
- Firmware Updating: Utilize standard DeviceNet communication tools to update configuration parameters or check operational logs.
- Preventive Checks: Inspect electrical micro-connectors periodically for secure seating and stable contact resistance.
Compatibility & Integration
| Integration Aspect | Compatibility Details |
|---|---|
| Communication Protocol | Fully compatible with DeviceNet™ networks via ODVA-conformant micro-connectors. |
| Gas Compatibility | Supports multiple gases including N2, Ar, H2, He, SF6, HBr, and WF6 through selectable conversion factors. |
| Physical Footprint | Compact dimensions of 126×64×29 mm (H×W×T) allow drop-in integration for standard SEC-Z700X gas boxes. |
Certifications & Compliance
- SEMI Standard: Compliant with SEMI F64-0701 specifications for mass flow controllers.
- Network Standard: Official ODVA conformance certification for DeviceNet interoperability.
- Environmental Regulation: Fully RoHS compliant for hazardous substance restrictions.
Package Contents
- One HORIBA STEC SEC-Z714MGX Mass Flow Controller
- Factory Inspection and Calibration Certificate
- DeviceNet Micro-Connector Pin Kit
- Quick Start Safety Documentation
Frequently Asked Questions (FAQ)
Q1: What causes a slow response time during pressure transients in multi-line gas systems?
Standard mass flow controllers experience flow surges when adjacent valves open or close. The SEC-Z714MGX resolves this by using an embedded pressure sensor to dynamically compensate for pressure fluctuations.
Q2: Can the SEC-Z714MGX handle corrosive gases like HBr or WF6?
Yes. The wetted materials feature SUS316L stainless steel combined with a Co-Ni alloy and electropolished inner surfaces to resist corrosive attack.
Q3: How do I configure the DeviceNet node address for the SEC-Z714MGX?
You can configure the MAC ID and baud rate using standard DeviceNet software configuration tools or explicit messaging commands over the network bus.
Q4: What maintenance steps are required if flow output drifts over time?
Verify that the inlet pressure remains stable within the 50–300 kPa(d) range and perform a zero calibration cycle using dry nitrogen.
Selection Guide
- Evaluate Gas Delivery Dynamics: Choose the SEC-Z714MGX when your process experiences frequent downstream pressure drops or cross-talk from neighboring MFCs.
- Match Flow Requirements: Ensure your normal operating point falls within the 10 SCCM to 10 SLM range to maintain optimal turndown accuracy.
- Verify Network Infrastructure: Confirm that your control architecture supports DeviceNet protocols before finalizing hardware selection.
Tags
Q: Are these parts 100% original and new?
A: Yes. Every component is guaranteed to be 100% original, brand-new, and factory-sealed. We also provide a 12-month comprehensive warranty for your peace of mind.
Q: How fast is the shipping to my country?
A: For in-stock items, we offer same-day dispatch. International express shipping (DHL/FedEx/UPS) typically delivers within 3–5 business days worldwide.
Q: Can I get a formal quotation with shipping costs?
A: Absolutely. Our sales team is ready to provide a detailed Proforma Invoice (PI) including the most competitive shipping rates for your location.
Q: Do you offer discounts for bulk orders?
A: We provide volume-based pricing for large projects or multiple-item orders. Please contact us to get our Best Price Guarantee.
12-Month Comprehensive Warranty
Every part supplied by Global PLC Spare Hub is covered by a 12-month warranty from the date of invoice.
- Coverage: Functional defects and hardware failures under normal operating conditions.
- Commitment: We provide immediate repair, replacement, or a full refund for any verified defective components to minimize your operational downtime.
Returns & Exchange Policy
We offer a 30-day return policy to ensure you receive the exact part your system requires.
- Eligibility: Returns are accepted for uninstalled items in their original, factory-sealed packaging.
- RMA Process: Please contact our support team to obtain a Return Merchandise Authorization (RMA) number before shipping.
- Fast Processing: Refunds or exchanges are processed within 3–5 business days after the returned item passes our technical inspection.
Need Technical Assistance?Not sure if this part is compatible with your system? [Consult our Engineers] before purchasing to ensure 100% compatibility.
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