MKS 626B52TEE 626B Baratron 500 Torr Vacuum Capacitance Manometer

Manufacturer: MKS Instruments
Product No.: 626B52TEE
Condition： In stock
Product Type: Vacuum Capacitance Manometer
Product Origin: USA
Payment: T/T, Western Union
Weight: 500g
Shipping port: Xiamen
Warranty: 12 months

Quantity

Selected quantity: 1

Estimate delivery times: 12-26 days (International), 3-6 days (United States).

Return within 30 days of purchase. Duties & taxes are non-refundable.

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Overview

The MKS Instruments 626B52TEE is a premium Baratron® 626B Series ambient temperature absolute pressure capacitance manometer. This high-precision sensor measures vacuum pressure independently of gas composition across a 500 Torr full scale range. Engineered with an all-welded Inconel® and Incoloy® sensor cavity, the unit delivers high reliability in demanding industrial vacuum processes.

Key Features and Architectural Advantages

Gas-Independent Accuracy: Delivers true absolute pressure readings regardless of process gas composition.
Corrosion-Resistant Construction: Wetted materials feature high-grade Inconel® and Incoloy® alloys for robust process compatibility.
High Overpressure Protection: Withstands overpressure spikes up to 45 psia without internal sensor damage.
Standard 15-Pin Interface: Features a 15-pin male D-subminiature connector for seamless system integration.
Linear Analog Output: Provides a high-resolution 0 to +10 VDC output into loads of 10 kΩ or greater.

Technical Specifications

Brand	MKS Instruments
Model Number	626B52TEE
Product Series	Baratron® Type 626B Series
Device Type	Absolute Pressure Capacitance Manometer / Vacuum Transducer
Full Scale Range	500 Torr (Range Code 52T)
Lowest Suggested Pressure	2.5 × 10⁻¹ Torr (reading); 2.5 Torr (control)
Usable Resolution	1 × 10⁻⁴ of Full Scale (0.05 Torr)
Accuracy & Linearity	±0.25% of Reading (includes non-linearity, hysteresis, non-repeatability)
Output Signal	0 to +10 VDC into ≥10 kΩ load
Input Power	±15 VDC (±5%) @ 35 mA maximum
Frequency Response	Time constant < 20 milliseconds
Fitting Type	Swagelok® 8-VCO Female (Fittings Code E)
Wetted Materials	Inconel® and Incoloy® (optional fittings 300-series stainless steel)
Internal Volume (Px side)	6.3 cc
Overpressure Limit	45 psia (310 kPa) without damage
Operating Temperature	0 °C to 50 °C (32 °F to 122 °F) ambient
Temperature Coefficients	Zero: 0.005% F.S./°C; Span: 0.04% of Reading/°C
EMC Immunity & Compliance	CE compliant (EMC Directive 2004/108/EC); RoHS Directive 2002/95/EC

System Compatibility and Electrical Interface

The 626B52TEE manometer connects easily with MKS power supplies, signal conditioners, and standard PLC analog input channels. The unit operates on a standard ±15 VDC power supply. Use fully metal-braided shielded cables grounded at both ends to maintain noise immunity and CE compliance.

Typical Industrial Applications

Semiconductor wafer processing and plasma etching chambers.
Thin-film solar cell deposition and vacuum coating equipment.
Pharmaceutical freeze-drying and vacuum distillation lines.
Industrial heat treating vacuum furnaces and leak detection systems.

Installation, Diagnostics, and Maintenance Guidelines

Mounting Orientation: Install the transducer vertically with the process port facing downward to minimize particulate contamination inside the cell.
Warm-Up Requirement: Allow a 15-minute warm-up period after applying power to ensure thermal stabilization before zero adjustments.
Zero Calibration: Pump down the system below 1 × 10⁻⁴ of Full Scale. Adjust the zero potentiometer until the signal reads exactly 0.000 VDC.
Fault Diagnostics: A constant output exceeding +10 VDC indicates power rail imbalance or extreme overpressure conditioning. Check cable shield continuity if voltage drift occurs.

Packaging, Commercial Guarantees, and Logistics

Package Includes: Standard factory-sealed packaging with protective port cover.
Warranty Terms: Covered by a comprehensive 12-month operational warranty.
Order Processing: Ships rapidly within 24 to 48 hours following order confirmation.
Global Delivery: Express worldwide dispatch via FedEx, UPS, and DHL.

Global PLC Spare HUB's Insight

Our field application engineers frequently integrate the MKS 626B52TEE into critical vacuum chamber retrofits. In one chemical vapor deposition (CVD) project, RF interference caused analog signal jitter on unshielded cabling. Replacing the cabling with an overall metal-braided shielded cable grounded at both ends instantly restored precise signal control. We recommend installing an isolation valve upstream of the 8-VCO fitting to isolate the gauge during chamber high-pressure vents.

Selection Guide and Purchasing Considerations

Pressure Range Verification: Choose 500 Torr models when process control occurs predominantly between 2.5 Torr and 500 Torr.
Fitting Selection: Ensure the Swagelok 8-VCO female connector matches your chamber vacuum manifold to prevent seal leaks.
Power Supply Requirements: Verify your controller provides clean ±15 VDC power with ripple under 1%.

Frequently Asked Questions (FAQ)

What does the 52T range code mean in the 626B52TEE model?

The 52T code designates a Full Scale measurement range of 500 Torr.

Can the MKS 626B52TEE measure pressure directly during gas purge operations?

Yes, capacitance manometers measure true total pressure regardless of gas composition or mixture ratios.

Why is a 15-minute warm-up period required before operation?

The warm-up time allows internal electronic components and sensor cavity geometry to reach thermal equilibrium.

How can I fix baseline zero drift during continuous vacuum runs?

Perform zero alignment at base vacuum pressure after the 15-minute warm-up period using the zero adjustment screw.

12-Month Comprehensive Warranty

Every part supplied by Global PLC Spare Hub is covered by a 12-month warranty from the date of invoice.

Coverage: Functional defects and hardware failures under normal operating conditions.
Commitment: We provide immediate repair, replacement, or a full refund for any verified defective components to minimize your operational downtime.

Returns & Exchange Policy

We offer a 30-day return policy to ensure you receive the exact part your system requires.

Eligibility: Returns are accepted for uninstalled items in their original, factory-sealed packaging.
RMA Process: Please contact our support team to obtain a Return Merchandise Authorization (RMA) number before shipping.
Fast Processing: Refunds or exchanges are processed within 3–5 business days after the returned item passes our technical inspection.

Need Technical Assistance?Not sure if this part is compatible with your system? [Consult our Engineers] before purchasing to ensure 100% compatibility.