HORIBA SEC-Z514MGX Z500 Series Digital Mass Flow Controller

Product Overview

The HORIBA SEC-Z514MGX is a digital mass flow controller from the Z500 Series. It provides precise gas flow regulation for semiconductor manufacturing and industrial process systems.

This model combines thermal mass flow measurement with an integrated control valve. Its variable PID control system delivers a full-scale response within one second. Engineers can use it to maintain stable gas delivery during process transitions.

The SEC-Z514MGX supports DeviceNet communication and a 24 VDC power supply. Its wetted components use polished 316L stainless steel. These features support reliable operation in demanding gas delivery environments.

HORIBA also offers the SEF-Z514MGX as the corresponding mass flow meter configuration. The SEC model regulates flow, while the SEF model measures flow without integrated control valve regulation.

Technical Specifications

Brand	HORIBA STEC
Series	Z500 Series / Z500X
Controller Model	SEC-Z514MGX
Meter Model	SEF-Z514MGX
Product Type	Digital Mass Flow Controller / Mass Flow Meter
Communication	DeviceNet Protocol
Power Supply	24 VDC, 4.0 VA
Wetted Materials	Polished 316L Stainless Steel
Operating Temperature	5 to 50°C
Recommended Temperature	15 to 45°C
Standard Fitting	1/4-inch VCR equivalent
Mounting Orientation	Free orientation

Flow Range and Measurement Performance

The SEC-Z514MGX supports multiple nitrogen-equivalent full-scale flow configurations. Actual flow capacity depends on the selected range and process gas.

Range Code	N2 Equivalent Full Scale
#R01	10 SCCM
#R1.5	17.5 SCCM
#01	30 SCCM
#1.5	55 SCCM
#02	100 SCCM
#2.5	175 SCCM
#03	300 SCCM
#3.5	550 SCCM
#04	1 SLM
#4.5	1.75 SLM
#05	3 SLM
#5.5	5.5 SLM
#06	10 SLM

Measurement and Control Characteristics

• Control Range: 2–100% of full scale.
• Measurement Range: 0–100% of full scale for the SEF meter.
• Accuracy Above 25% F.S.: ±1.0% of setpoint.
• Accuracy At or Below 25% F.S.: ±0.25% of full scale.
• Response Time: ≤1 second across the full flow range.
• Linearity: ≤±0.5% of full scale.
• Repeatability: ≤±0.2% of full scale.
• Closed-Valve Leakage: ≤2% of full scale.

Pressure and Environmental Ratings

Operating Differential Pressure	50–300 kPa(d)
High-Flow Differential Pressure	100–300 kPa(d) for #5.5 and #06
SEF Differential Pressure	≤300 kPa(d)
Maximum Operating Pressure	450 kPa(g)
Pressure Resistance	1000 kPa(g)
Helium Leak Integrity	≤5 × 10⁻¹² Pa·m³/s

Engineering Note: The differential pressure requirements vary by flow range. Verify upstream and downstream pressure conditions before installation.

Electrical and Communication Features

• Digital Interface: DeviceNet protocol.
• Power Input: 24 VDC.
• Power Consumption: 4.0 VA.
• Control Method: Variable PID control.
• Valve Configuration: Normally open or normally closed.

The supplied configuration determines the available communication and electrical options. Confirm the complete model code before integrating the unit with a PLC or gas delivery controller.

Model Configuration Breakdown

The SEC-Z514MGX model code identifies the product family and configuration. The following options require confirmation against the manufacturer's complete ordering information.

• SEC: Mass flow controller configuration.
• SEF: Mass flow meter configuration.
• Z514MGX: Model designation within the Z500 family.
• Flow Range: Selected through the corresponding range configuration.
• Valve Action: Normally open (O) or normally closed (C).
• Fitting: Standard 1/4-inch VCR equivalent.

Optional fitting configurations include 1.125-inch IGS and 1.5-inch IGS. Confirm the selected fitting and valve action before ordering.

Installation Guidelines

1. Verify the Model: Check the model code, gas type, flow range, and valve action.
2. Inspect Connections: Examine the fittings and sealing surfaces before assembly.
3. Confirm Gas Compatibility: Verify wetted material compatibility with the process gas.
4. Check Pressure: Maintain the specified differential pressure during operation.
5. Connect Power: Provide a regulated 24 VDC supply within the equipment requirements.
6. Connect DeviceNet: Verify network wiring, node address, and communication settings.
7. Check Gas Lines: Perform an appropriate leak test before introducing process gas.
8. Start Operation: Apply the approved startup procedure and inspect flow stability.

Commissioning and Maintenance

Proper commissioning helps maintain measurement accuracy and stable gas delivery. Engineers should verify the following conditions:

• Confirm the correct gas conversion and full-scale range.
• Check zero-flow readings before applying the process gas.
• Verify the DeviceNet connection and controller communication.
• Compare actual flow readings with a suitable reference instrument.
• Inspect pressure stability during low-flow and high-flow operation.
• Check valve response when changing flow setpoints.
• Inspect fittings and seals during scheduled maintenance.

Do not adjust PID parameters without reviewing the application requirements. Avoid introducing contamination during gas-line maintenance. Follow the manufacturer's procedures for calibration and internal servicing.

System Compatibility and Application

The HORIBA SEC-Z514MGX supports gas flow control systems that require DeviceNet communication and compatible 24 VDC power.

Typical application areas include:

• Semiconductor Manufacturing: Precise gas delivery for process chambers and gas panels.
• Thin-Film Deposition: Stable gas flow during deposition processes.
• Etching Systems: Controlled delivery of compatible process gases.
• Industrial Gas Systems: Flow regulation in automated gas distribution equipment.
• Research Equipment: Gas measurement and control in laboratory process systems.

Before system integration, verify the PLC interface, DeviceNet configuration, gas compatibility, fitting dimensions, and pressure requirements. RS-485 and analog interfaces depend on the specific product configuration. Do not assume their availability on every SEC-Z514MGX unit.

Certifications and Compliance

The supplied technical information identifies DeviceNet communication and ODVA-conforming power requirements. It does not establish specific safety or hazardous-area certifications.

Request the applicable manufacturer's declaration and product documentation when your installation requires regulatory approval. Verify the exact configuration before specifying compliance requirements.

Package Contents

• 1 × HORIBA SEC-Z514MGX Digital Mass Flow Controller, according to the ordered configuration.
• Product identification and model information.
• Standard accessories, only when included in the confirmed order.

For the SEF-Z514MGX configuration, the supplied unit is a mass flow meter. Confirm the package contents and accessories with the supplier before purchase.

Frequently Asked Questions

Q1: What is the difference between SEC-Z514MGX and SEF-Z514MGX?

The SEC-Z514MGX combines mass flow measurement with an integrated control valve. The SEF-Z514MGX measures mass flow without providing the same integrated flow regulation function.

Q2: How should engineers select the correct flow range?

First, identify the process gas and required operating flow. Then select a nitrogen-equivalent full-scale range that accommodates normal operating conditions. Avoid choosing a range that places most operating points near the minimum control limit.

Q3: Why can actual flow differ from the nitrogen-equivalent rating?

The listed ranges use nitrogen as the reference gas. Different gases have different physical properties and conversion requirements. Engineers should confirm the correct gas calibration before commissioning.

Q4: What should engineers check when the controller responds slowly?

Start by checking differential pressure and gas supply stability. Next, inspect DeviceNet communication and the requested setpoint. Confirm the selected gas configuration and verify that the process line has no restrictions. These checks help isolate pneumatic and control-related problems.

Q5: Can the SEC-Z514MGX connect directly to any PLC?

No. The PLC must support a compatible DeviceNet interface or use an appropriate network gateway. Engineers should also verify node addressing, communication parameters, power requirements, and control data mapping.

Q6: How should buyers choose between normally open and normally closed valves?

Consider the required gas-line behavior during power loss or control interruption. Normally open and normally closed configurations provide different default valve positions. Select the option that matches the process safety philosophy and equipment design.

Q7: What information should buyers provide when requesting a quotation?

Provide the complete model number, process gas, required full-scale flow, valve action, fitting type, and communication interface. Also specify the operating pressure and temperature. These details help prevent configuration mismatches.

Why Choose Global PLC Spare HUB?

Global PLC Spare HUB supports industrial automation users with component selection and sourcing assistance.

• Technical Support: Assistance with model identification and configuration checks.
• Product Sourcing: Support for industrial control and process instrumentation requirements.
• 12-Month Warranty: Warranty coverage according to the confirmed sales terms.
• Shipping Options: International shipping through FedEx, UPS, and DHL.
• Dispatch Arrangement: Typical shipping arrangement within 24–48 hours, subject to stock confirmation and order processing.

Request a Quote Today

Looking for the HORIBA SEC-Z514MGX or SEF-Z514MGX? Contact Global PLC Spare HUB with your required gas, flow range, and connection details. Our team can assist with model verification and quotation inquiries.

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