631F11T8FH MKS Baratron 631F Heated Capacitance Manometer

Manufacturer: MKS Instruments
Product No.: 631F11T8FH
Condition： In stock
Product Type: Vacuum Capacitance Manometer
Product Origin: USA
Payment: T/T, Western Union
Weight: 500g
Shipping port: Xiamen
Warranty: 12 months

Quantity

Selected quantity: 1

Estimate delivery times: 12-26 days (International), 3-6 days (United States).

Return within 30 days of purchase. Duties & taxes are non-refundable.

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631F11T8FH MKS Baratron® 631F Heated Absolute Capacitance Manometer

The 631F11T8FH is a self-contained, high-temperature Baratron® capacitance manometer built by MKS Instruments for aggressive semiconductor vacuum processes. Operating at a stabilized internal sensor temperature of 150°C, it prevents process byproduct condensation during metal etching and nitride film chemical vapor deposition (CVD).

Its compact, integrated electronics package reduces required tool footprint by at least 40% and eliminates noise-inducing interconnecting cables. Constructed with corrosion-resistant Inconel®/Incoloy® wetted surfaces, the 631F delivers 0.50% of Reading accuracy across a 10 Torr full-scale range.

Model Number Decoding & Configuration Tree

Base Product Family (631F): MKS Baratron® Heated Absolute Capacitance Manometer
- Full Scale Range (11): 10 Torr Absolute Pressure
- Pressure Unit (T): Calibrated Output in Torr
- Vacuum Fitting (8): 8 VCR Female (1/2-inch Swagelok VCR Female with long tube stub)
- Measurement Accuracy (F): 0.50% of Reading
- Sensor Control Temperature (H): Heated internally to 150°C

Technical Specifications Matrix

Domain	Parameter	Engineering Specification
Identification	Brand & Model	MKS 631F11T8FH (631F Series)
Measurement	Type & Full Scale	Absolute Vacuum/Pressure Transducer; 10 Torr Full Scale
Metrological Performance	Accuracy & Resolution	0.50% of Reading accuracy; 0.01% of Full Scale resolution
Thermal Stability	Sensor Temp & Warm-up	150°C internal control; ≤ 4 hours cold-start thermal stabilization
Thermal Drift Coefficients	Zero & Span Drift	Zero: 0.004% FS/°C; Span: 0.02% Reading/°C
Dynamic & Mechanical	Response, Overpressure & Volume	50 msec response; 45 psia overpressure limit; 6.3 cc internal volume
Process Interface	Fitting & Wetted Materials	8 VCR Female; corrosion-resistant Inconel® or Incoloy® nickel alloys
Electrical & Signal	Power, Output & Connector	±15 VDC (±5%) @ 1.0 A max; 0–10 VDC analog output via 15-pin D-sub
Control Relays	Pressure & Heater Protection	2 UL solid-state pressure trip relays (0.20 A @ 30 VDC); 1 UL heater relay
Ambient & Compliance	Environment & Standards	15–50°C ambient (50 ft/min airflow above 45°C); CE Compliant

Warranty Coverage & Global Express Shipping

12-Month Comprehensive Warranty: Every 631F11T8FH unit carries a 12-month warranty covering sensor zero stability, heater regulation, and electronics integrity under specified process conditions.
Global Air Freight Dispatch: Shipped worldwide in shock-isolated ESD packaging via FedEx, UPS, or DHL to minimize semiconductor fab tool downtime.

Semiconductor Process FAQ & Selection Guidance

Q: How do I adjust the dual pressure trip relays without evacuating the process chamber?

A: The Type 631F allows independent potentiometer adjustment at atmospheric pressure, eliminating auxiliary vacuum pump setups during tool commissioning.
Q: Why is the 4-hour warm-up period mandatory before executing zero calibration?

A: Re-zeroing prior to full 150°C thermal equilibrium across the Inconel® diaphragm introduces thermal expansion offsets that skew low-pressure readings.
Q: When should engineers choose a 150°C heated model over an unheated capacitance manometer?

A: Specify 150°C heating in nitride CVD or halogen metal etch lines where condensable ammonium salts or polymer precursors otherwise coat the diaphragm.
Q: What cooling airflow is required when mounting this manometer inside a dense gas box?

A: Provide at least 50 ft/min of forced ambient airflow whenever enclosure temperatures reach 45°C to 50°C to prevent fail-safe over-temperature shutdowns.
Q: Does a 45 psia atmospheric vent event permanently shift the 10 Torr span calibration?

A: No, the welded Inconel® sensor withstands up to 45 psia overpressure without mechanical diaphragm deformation, preserving long-term repeatability across chamber vent cycles.

12-Month Comprehensive Warranty

Every part supplied by Global PLC Spare Hub is covered by a 12-month warranty from the date of invoice.

Coverage: Functional defects and hardware failures under normal operating conditions.
Commitment: We provide immediate repair, replacement, or a full refund for any verified defective components to minimize your operational downtime.

Returns & Exchange Policy

We offer a 30-day return policy to ensure you receive the exact part your system requires.

Eligibility: Returns are accepted for uninstalled items in their original, factory-sealed packaging.
RMA Process: Please contact our support team to obtain a Return Merchandise Authorization (RMA) number before shipping.
Fast Processing: Refunds or exchanges are processed within 3–5 business days after the returned item passes our technical inspection.

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