{"product_id":"ufc-9660-high-temperature-analog-mfc-by-unit-instruments-9660-series","title":"UFC-9660 High-Temperature Analog MFC by UNIT Instruments 9660 Series","description":"\u003ch3\u003e\u003cstrong\u003eUFC-9660 | High-Temperature Metal-Seal Mass Flow Controller\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe \u003cstrong\u003eUFC-9660\u003c\/strong\u003e from UNIT Instruments is a high-temperature analog mass flow controller in the 9660 Series. It is designed for semiconductor processes requiring heated gas delivery and stable flow regulation.\u003c\/p\u003e\n\u003cp\u003eIts heated construction supports operating temperatures up to 150°C. This design helps prevent condensation when handling process gases that may condense inside conventional gas delivery lines.\u003c\/p\u003e\n\u003cp\u003eThe controller combines a metal-sealed gas path, proportional electromagnetic solenoid valve, and remote electronics architecture. It uses a 0–5 VDC analog command and monitor interface.\u003c\/p\u003e\n\u003cp\u003eTypical applications include CVD, epitaxial deposition, and heated delivery systems for condensable source materials.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e01 | Thermal Control: Keeping Process Gas in the Required State\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eTemperature management is a key consideration when selecting the UFC-9660. Certain semiconductor precursor gases can condense when their temperature falls below the required process condition.\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eOperating temperature:\u003c\/strong\u003e 0–150°C (32–302°F), high-temperature model.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eHeated configuration:\u003c\/strong\u003e Heated enclosure.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eProcess suitability:\u003c\/strong\u003e Heated delivery of condensable gases.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eTypical processes:\u003c\/strong\u003e CVD, epitaxial deposition, and liquid or solid source vapor delivery.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eFor heated gas systems, the temperature profile must remain consistent across the source, delivery line, valve, and flow controller. A cold section can become a condensation point even when the controller itself is heated.\u003c\/p\u003e\n\u003cp\u003eDuring system design, verify the required temperature for the specific process gas. Also confirm the heating configuration and temperature limits of the installed remote electronics.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e02 | Metal-Seal Gas Path and Wetted Materials\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe 9660 Series uses a metal-sealed construction for demanding semiconductor gas delivery applications. A W-seal configuration is specified for downported versions.\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eWetted materials:\u003c\/strong\u003e 316L stainless steel, K-M45, 304 stainless steel, and 7Mo+.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSealing:\u003c\/strong\u003e Metal seal.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eDownported configuration:\u003c\/strong\u003e W-seal.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eStandard surface finish:\u003c\/strong\u003e 10 micro-inch Ra.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eOptional surface finish:\u003c\/strong\u003e 4 micro-inch Ra.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eLeak integrity:\u003c\/strong\u003e 1 × 10\u003csup\u003e-10\u003c\/sup\u003e atm-cc\/sec He.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eSurface finish and wetted material selection influence gas cleanliness and process compatibility. For sensitive precursor applications, verify the actual material combination and surface finish before ordering.\u003c\/p\u003e\n\u003cp\u003eThe listed leak integrity is a helium leak specification. It should not be interpreted as a guarantee of compatibility with every process gas or installation condition.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e03 | Pressure Envelope and Flow Regulation\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003ePressure capability must be evaluated alongside the required differential pressure. Maximum inlet pressure, proof pressure, and operating differential pressure describe different operating conditions.\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eMaximum pressure:\u003c\/strong\u003e 3,500 kPa (500 psi).\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eProof pressure:\u003c\/strong\u003e 10,500 kPa (1,500 psi).\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eTypical differential pressure:\u003c\/strong\u003e 1.33–350 kPa (10 torr–50 psid).\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eControl range:\u003c\/strong\u003e 2–100% of full scale.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePressure coefficient:\u003c\/strong\u003e 0.007% of reading per psi (N₂).\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eDo not use the proof pressure as a normal operating set point. Confirm the pressure limits of the complete gas delivery assembly, including fittings, regulators, valves, and downstream equipment.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e04 | Analog Control and Remote Electronics\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe UFC-9660 analog configuration uses a 0–5 VDC interface for setpoint and monitor signals. Its remote electronics arrangement separates the electronic module from the flow body.\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eSetpoint signal:\u003c\/strong\u003e 0–5 VDC.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eMonitor signal:\u003c\/strong\u003e 0–5 VDC.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eElectrical connection:\u003c\/strong\u003e Card-edge connector.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eRemote electronics width:\u003c\/strong\u003e 1-1\/8 inches.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eAnalog family power:\u003c\/strong\u003e ±15 VDC.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eVerify the connector pin assignment and signal reference before integrating the controller with a process tool. The 0–5 VDC signal range alone does not establish connector or pinout compatibility.\u003c\/p\u003e\n\u003cp\u003eThe 9561 and 9565 digital variants use different electrical specifications. Their power requirements and digital performance figures should not be applied to this analog model.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e05 | Flow Performance and Dynamic Response\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe following performance values include both analog 9660 specifications and family-level data. Confirm the exact flow range and performance limits against the UFC-9660 configuration supplied.\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eFamily-level flow range:\u003c\/strong\u003e 10 sccm–30 slm, N₂ equivalent.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eAnalog 9660 accuracy:\u003c\/strong\u003e ±1% FS.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eFamily-level repeatability:\u003c\/strong\u003e ±0.15% FS.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eFamily-level linearity:\u003c\/strong\u003e ±0.5% FS.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eFamily-level zero stability:\u003c\/strong\u003e Less than 0.6% FS per year.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eControl range:\u003c\/strong\u003e 2–100% FS.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eFast-start response:\u003c\/strong\u003e Less than 2 seconds, per SEMI E17-91.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSoft-start rate:\u003c\/strong\u003e Linear ramp at 20% per second.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eAccuracy expressed as a percentage of full scale differs from accuracy expressed as a percentage of setpoint. This distinction is important when evaluating low-flow operation.\u003c\/p\u003e\n\u003cp\u003eThe digital 9561\/9565 accuracy figures are separate specifications. They are not interchangeable with the analog 9660 accuracy rating.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e06 | Mechanical Configuration and Mounting\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe UFC-9660 uses a remote electronics design. Flow body dimensions depend on the selected mounting and port configuration.\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eRemote electronics dimensions:\u003c\/strong\u003e 3.50 × 4.00 × 1.47 inches (89 × 102 × 37 mm).\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eDownported flow body overall length:\u003c\/strong\u003e 105.2 mm.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eWeight:\u003c\/strong\u003e 1.2 kg (2.65 lb).\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eMounting configurations:\u003c\/strong\u003e Horizontal mounting, including HOV\/HOS configurations.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eCheck the port orientation and mounting arrangement against the existing process tool. The overall length listed above applies to the downported C\/W configuration, not necessarily every flow body option.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e07 | Semiconductor Process Applications\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe high-temperature architecture is intended for gas delivery systems where temperature control is part of process reliability.\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eCVD:\u003c\/strong\u003e Heated delivery of compatible precursor gases to deposition chambers.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eEpitaxial deposition:\u003c\/strong\u003e Flow regulation in heated process gas systems.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCondensable gas delivery:\u003c\/strong\u003e Maintaining gas temperature to reduce condensation risk.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eLiquid source vapor delivery:\u003c\/strong\u003e Supporting heated delivery systems for vaporized source materials.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSolid source vapor delivery:\u003c\/strong\u003e Regulating compatible gases in heated source delivery arrangements.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eGas compatibility, material selection, and operating temperature must be confirmed for each process. The UFC-9660 should be selected according to the actual gas composition and tool configuration.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e08 | Technical Specifications\u003c\/strong\u003e\u003c\/h3\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSpecification\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eDetails\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eModel\u003c\/td\u003e\n\u003ctd\u003eUFC-9660\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eBrand\u003c\/td\u003e\n\u003ctd\u003eUNIT Instruments\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSeries\u003c\/td\u003e\n\u003ctd\u003e9660 Series\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eProduct type\u003c\/td\u003e\n\u003ctd\u003eHigh-temperature metal-seal analog MFC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFlow range\u003c\/td\u003e\n\u003ctd\u003e10 sccm–30 slm, N₂ equivalent (family-level)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAccuracy\u003c\/td\u003e\n\u003ctd\u003e±1% FS (analog 9660)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eRepeatability\u003c\/td\u003e\n\u003ctd\u003e±0.15% FS (family-level)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eLinearity\u003c\/td\u003e\n\u003ctd\u003e±0.5% FS (family-level)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eZero stability\u003c\/td\u003e\n\u003ctd\u003e\u0026lt;0.6% FS\/year (family-level)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eResponse\u003c\/td\u003e\n\u003ctd\u003e\u0026lt;2 seconds fast start, per SEMI E17-91\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSoft start\u003c\/td\u003e\n\u003ctd\u003e20% per second linear ramp\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eControl range\u003c\/td\u003e\n\u003ctd\u003e2–100% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOperating temperature\u003c\/td\u003e\n\u003ctd\u003e0–150°C (32–302°F)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eTemperature coefficient, zero\u003c\/td\u003e\n\u003ctd\u003e0.05% FS\/°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eTemperature coefficient, span\u003c\/td\u003e\n\u003ctd\u003e0.1% FS\/°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePressure coefficient\u003c\/td\u003e\n\u003ctd\u003e0.007% reading\/psi (N₂)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMaximum pressure\u003c\/td\u003e\n\u003ctd\u003e3,500 kPa (500 psi)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eProof pressure\u003c\/td\u003e\n\u003ctd\u003e10,500 kPa (1,500 psi)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eDifferential pressure\u003c\/td\u003e\n\u003ctd\u003e1.33–350 kPa (10 torr–50 psid typical)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eWetted materials\u003c\/td\u003e\n\u003ctd\u003e316L SS \/ K-M45 \/ 304 \/ 7Mo+\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSurface finish\u003c\/td\u003e\n\u003ctd\u003e10 micro-inch Ra standard; 4 micro-inch optional\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSeal type\u003c\/td\u003e\n\u003ctd\u003eMetal seal; W-seal for downported version\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eElectrical interface\u003c\/td\u003e\n\u003ctd\u003e0–5 VDC setpoint and monitor\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eConnector\u003c\/td\u003e\n\u003ctd\u003eCard-edge connector\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eElectronics\u003c\/td\u003e\n\u003ctd\u003eRemote electronics, 1-1\/8 inches wide\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePower supply\u003c\/td\u003e\n\u003ctd\u003e±15 VDC (analog family)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFlow body length\u003c\/td\u003e\n\u003ctd\u003e105.2 mm overall, downported C\/W\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eRemote electronics dimensions\u003c\/td\u003e\n\u003ctd\u003e89 × 102 × 37 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eWeight\u003c\/td\u003e\n\u003ctd\u003e1.2 kg (2.65 lb)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eCompliance\u003c\/td\u003e\n\u003ctd\u003eCE; NIST-traceable; SEMI E12\/E16\/E17\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003ch3\u003e\u003cstrong\u003e09 | Field Engineering FAQ\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003e\u003cstrong\u003eQ1: Why can a heated MFC still experience unstable flow when the gas source temperature is correct?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eA correct source temperature does not guarantee a uniform temperature throughout the delivery path. Check for cold spots around fittings, valves, adapters, and chamber connections. Review temperature sensor locations and insulation. Confirm that the controller and connecting lines reach their required operating temperatures before evaluating flow stability.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ2: What should engineers investigate when a process chamber shows deposition variation despite a stable analog command?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eCheck actual gas delivery conditions rather than relying only on the command signal. Review upstream pressure fluctuations, downstream backpressure, gas temperature, and calibration gas settings. Also compare the monitor signal with an independent process measurement where available. A stable command does not prove that the delivered mass flow remains constant.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ3: Can the UFC-9660 be mounted in the same orientation as an existing standard-temperature MFC?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eNot without checking the mechanical configuration. Confirm whether the replacement uses HOV or HOS mounting, and verify the port direction and flow body dimensions. Downported and other port arrangements may have different mechanical requirements. Check the equipment drawing before modifying the gas panel.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ4: What commissioning sequence helps reduce problems after replacing a high-temperature controller?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eFirst, verify the gas path and electrical connections. Perform the required leak test before introducing process gas. Bring the heated assembly to its specified operating temperature, then establish the required pressure differential. Check zero, analog scaling, and several stable flow points. Follow the equipment manufacturer's approved startup and purge procedures.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ5: What information is needed to identify the correct UFC-9660 replacement configuration?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eProvide the complete nameplate information, full-scale flow range, process gas, port orientation, mounting arrangement, and electrical connector details. Include the required operating temperature and pressure conditions. For condensable gases, identify the source and delivery temperature requirements. These details help prevent a mechanically similar but functionally unsuitable replacement.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e10 | Configuration Verification Before Ordering\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe 9660 Series includes different configurations and related digital models. Specifications can vary by electronics type, flow range, port arrangement, and temperature option.\u003c\/p\u003e\n\u003cp\u003eBefore ordering, confirm the following details:\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eExact model: UFC-9660.\u003c\/li\u003e\n\u003cli\u003eAnalog electronics configuration.\u003c\/li\u003e\n\u003cli\u003eRequired N₂-equivalent full-scale flow range.\u003c\/li\u003e\n\u003cli\u003eGas type and calibration requirements.\u003c\/li\u003e\n\u003cli\u003eHeated operating temperature.\u003c\/li\u003e\n\u003cli\u003eMetal seal and port configuration.\u003c\/li\u003e\n\u003cli\u003eHorizontal mounting arrangement, including HOV\/HOS where applicable.\u003c\/li\u003e\n\u003cli\u003eCard-edge connector and electrical requirements.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eDo not use the digital 9561\/9565 specifications or the 9500 remote-electronics flow range as substitutes for UFC-9660 configuration data.\u003cstrong\u003e\u003c\/strong\u003e\u003c\/p\u003e","brand":"UNIT Instruments","offers":[{"title":"Default Title","offer_id":68027996864694,"sku":"UFC-9660","price":163.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7863\/8774\/files\/UFC-8161_2.jpg?v=1794289029","url":"https:\/\/www.plcsparehub.com\/products\/ufc-9660-high-temperature-analog-mfc-by-unit-instruments-9660-series","provider":"Global PLC Spare Hub","version":"1.0","type":"link"}