{"product_id":"sef-z524mgxn-horiba-stec-z500-devicenet-gas-flow-meter","title":"SEF-Z524MGXN HORIBA STEC Z500 DeviceNet Gas Flow Meter","description":"\u003ch3\u003e\u003cstrong\u003eProduct Overview\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003e\u003cstrong\u003e\u003cspan style=\"color: #1a73e8;\"\u003eHORIBA STEC SEF-Z524MGXN\u003c\/span\u003e\u003c\/strong\u003e is a digital mass flow meter designed for precise gas flow measurement in semiconductor equipment.\u003c\/p\u003e\n\u003cp\u003eIt belongs to the \u003cstrong\u003e\u003cspan style=\"color: #1a73e8;\"\u003eHORIBA STEC SEC-Z500 \/ SEF-Z500 Series\u003c\/span\u003e\u003c\/strong\u003e. The device uses a digital \u003cstrong\u003eDeviceNet communication interface\u003c\/strong\u003e for equipment integration.\u003c\/p\u003e\n\u003cp\u003eThe SEF configuration measures gas flow without an integrated control valve. It provides real-time flow measurement across its configured full-scale range.\u003c\/p\u003e\n\u003cp\u003eIts 316L stainless steel wetted components support clean gas delivery systems. The polished internal surfaces suit demanding semiconductor process environments.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eKey Product Highlights:\u003c\/strong\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eProduct Type:\u003c\/strong\u003e Digital Mass Flow Meter (MFM)\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eModel:\u003c\/strong\u003e \u003cspan style=\"color: #1a73e8;\"\u003e\u003cstrong\u003eSEF-Z524MGXN\u003c\/strong\u003e\u003c\/span\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSeries:\u003c\/strong\u003e \u003cspan style=\"color: #1a73e8;\"\u003e\u003cstrong\u003eHORIBA STEC Z500\u003c\/strong\u003e\u003c\/span\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCommunication:\u003c\/strong\u003e DeviceNet Digital Interface\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eMeasurement Range:\u003c\/strong\u003e 0–100% of configured Full Scale\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eAccuracy:\u003c\/strong\u003e ±1.0% S.P. above 25% F.S.; ±0.25% F.S. at or below 25% F.S.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eResponse Time:\u003c\/strong\u003e ≤1 second\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eWetted Material:\u003c\/strong\u003e Polished 316L Stainless Steel\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePower Supply:\u003c\/strong\u003e DC 24 V, 4.0 VA\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ch3\u003e\u003cstrong\u003eTechnical Specifications\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003e\u003cstrong\u003eProduct Identification\u003c\/strong\u003e\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eBrand\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eHORIBA STEC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eModel\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003e\u003cspan style=\"color: #1a73e8;\"\u003eSEF-Z524MGXN\u003c\/span\u003e\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSeries\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eSEC-Z500 \/ SEF-Z500\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eProduct Type\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eDigital Mass Flow Meter (MFM)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eMeasurement Principle\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eThermal Mass Flow Measurement\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eCommunication Protocol\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eDeviceNet\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003e\u003cstrong\u003eFlow Measurement Performance\u003c\/strong\u003e\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eMeasurement Range\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e0–100% F.S.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eN₂ Conversion Flow Rate\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e22 \/ 30 \/ 50 SLM, depending on MR\/MG configuration\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eAccuracy\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e±1.0% S.P. above 25% F.S.; ±0.25% F.S. at or below 25% F.S.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eLinearity\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e≤ ±0.5% F.S.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eRepeatability\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e≤ ±0.2% F.S.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eResponse Time\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e≤ 1 second over the full measurement range\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eResolution\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eNot specified in the available model documentation\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eFrequency Response\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eNot separately specified; response time is ≤1 second\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003e\u003cstrong\u003eOperating Conditions and Mechanical Specifications\u003c\/strong\u003e\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eOperating Temperature\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e5 to 50°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eRecommended Temperature\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e15 to 45°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eOperating Differential Pressure\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e≤300 kPa(d) for SEF configuration\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eMaximum Operating Pressure\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e450 kPa(g)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePressure Resistance\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1,000 kPa(g)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eLeak Integrity\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e≤5 × 10⁻¹² Pa·m³\/s (He)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eWetted Material\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003ePolished 316L Stainless Steel\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eStandard Fitting\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1\/4-inch VCR equivalent\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eOptional Fitting\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1.125-inch IGS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eMounting Orientation\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eAny orientation\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003e\u003cstrong\u003eElectrical and Communication Specifications\u003c\/strong\u003e\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eDigital Interface\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eDeviceNet Protocol\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePower Supply\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eDC 24 V\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePower Consumption\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e4.0 VA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePower Standard\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eConforms to ODVA-related requirements\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eControl Valve\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eNot applicable; SEF is a mass flow meter\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003ch3\u003e\u003cstrong\u003eMeasurement Performance and Engineering Value\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003e\u003cstrong\u003e1. Accurate Gas Flow Measurement\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eThe SEF-Z524MGXN measures gas flow across 0–100% of its configured full-scale range.\u003c\/p\u003e\n\u003cp\u003eIts specified accuracy supports process monitoring and gas delivery verification. Engineers can use flow feedback to evaluate gas supply stability.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003e2. Stable Measurement Repeatability\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eRepeatability reaches ≤ ±0.2% F.S. This helps maintain consistent measurement results during repeated process cycles.\u003c\/p\u003e\n\u003cp\u003eLinearity remains within ±0.5% F.S. These characteristics support reliable flow monitoring in semiconductor production equipment.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003e3. Fast Measurement Response\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eThe specified response time is ≤1 second across the measurement range. This supports timely monitoring of changing gas flow conditions.\u003c\/p\u003e\n\u003cp\u003eThe actual system response also depends on piping volume, gas properties, and upstream pressure stability.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003e4. Clean Gas Path Construction\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003ePolished 316L stainless steel forms the wetted flow path. This material supports clean gas handling and chemical process compatibility.\u003c\/p\u003e\n\u003cp\u003eThe specified helium leak integrity is ≤5 × 10⁻¹² Pa·m³\/s. This specification helps evaluate sealing performance in gas delivery installations.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003eInstallation Guidelines\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eMounting Position:\u003c\/strong\u003e The unit supports installation in any orientation.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eGas Compatibility:\u003c\/strong\u003e Confirm the configured gas type before installation.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eFlow Direction:\u003c\/strong\u003e Follow the directional markings on the instrument body.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePipeline Connection:\u003c\/strong\u003e Match the fitting type and size before assembly.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSealing:\u003c\/strong\u003e Use compatible sealing components for the selected gas service.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePressure:\u003c\/strong\u003e Keep operating pressure within the specified limits.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eTemperature:\u003c\/strong\u003e Maintain ambient conditions between 5 and 50°C.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eElectrical Supply:\u003c\/strong\u003e Provide a suitable regulated 24 VDC supply.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eGrounding:\u003c\/strong\u003e Follow the equipment grounding and DeviceNet installation requirements.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eContamination Control:\u003c\/strong\u003e Keep the gas connections clean during installation.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e\u003cstrong\u003eImportant:\u003c\/strong\u003e Avoid applying excessive mechanical stress to the fittings. Confirm leak integrity before introducing process gases.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003eCommissioning, Diagnostics and Maintenance\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003e\u003cstrong\u003eInitial Commissioning\u003c\/strong\u003e\u003c\/p\u003e\n\u003col\u003e\n\u003cli\u003eVerify the complete model number and gas configuration.\u003c\/li\u003e\n\u003cli\u003eCheck the flow range against the equipment process requirements.\u003c\/li\u003e\n\u003cli\u003eConfirm the 24 VDC supply and electrical connections.\u003c\/li\u003e\n\u003cli\u003eCheck DeviceNet node configuration and network communication.\u003c\/li\u003e\n\u003cli\u003eVerify the gas supply pressure and differential pressure.\u003c\/li\u003e\n\u003cli\u003eIntroduce the specified gas under approved operating conditions.\u003c\/li\u003e\n\u003cli\u003eCompare the indicated flow against a suitable reference instrument.\u003c\/li\u003e\n\u003c\/ol\u003e\n\u003cp\u003e\u003cstrong\u003eMaintenance Recommendations\u003c\/strong\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eInspect gas fittings for leakage during scheduled maintenance.\u003c\/li\u003e\n\u003cli\u003eMonitor flow readings for unexpected deviations.\u003c\/li\u003e\n\u003cli\u003eCheck network communication when readings become unavailable.\u003c\/li\u003e\n\u003cli\u003eReview operating pressure when measurement stability changes.\u003c\/li\u003e\n\u003cli\u003eFollow HORIBA procedures for calibration and servicing.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eThe SEF model does not provide an integrated control valve. External gas regulation must meet the process requirements.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003eCompatibility and Model Selection\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003e\u003cstrong\u003e1. SEF vs. SEC Model Identification\u003c\/strong\u003e\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eModel\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eProduct Function\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eMain Application\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003e\u003cspan style=\"color: #1a73e8;\"\u003eSEF-Z524MGXN\u003c\/span\u003e\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eMass Flow Meter\u003c\/td\u003e\n\u003ctd\u003eGas flow measurement\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003e\u003cspan style=\"color: #1a73e8;\"\u003eSEC-Z524MGXN\u003c\/span\u003e\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eMass Flow Controller\u003c\/td\u003e\n\u003ctd\u003eGas flow measurement and control\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003eThe SEF model measures flow without an integrated control valve. The SEC model adds active flow regulation.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003e2. Full-Scale Range Selection\u003c\/strong\u003e\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eMR\/MG Configuration\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eN₂ Conversion Flow Rate\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e#6.5\u003c\/td\u003e\n\u003ctd\u003e22 SLM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e#07\u003c\/td\u003e\n\u003ctd\u003e30 SLM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e#08\u003c\/td\u003e\n\u003ctd\u003e50 SLM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003eThese values represent nitrogen conversion flow rates. Confirm the actual gas calibration and full-scale configuration before ordering.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003e3. Gas and Connection Compatibility\u003c\/strong\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eConfirm the gas type and corresponding calibration data.\u003c\/li\u003e\n\u003cli\u003eVerify the required full-scale flow range.\u003c\/li\u003e\n\u003cli\u003eMatch the DeviceNet interface with the equipment network.\u003c\/li\u003e\n\u003cli\u003eCheck whether the installation requires 1\/4-inch VCR or 1.125-inch IGS.\u003c\/li\u003e\n\u003cli\u003eConfirm the actual connector and wiring configuration.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e\u003cstrong\u003e4. Replacement and Cross-Reference Verification\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eSome equipment references list ASM part numbers 1110-705-01 and 1120-949-01.\u003c\/p\u003e\n\u003cp\u003eThese references require verification against the original equipment configuration. Do not assume direct interchangeability from the part number alone.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003eEnvironmental and Electrical Considerations\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eOperating Environment:\u003c\/strong\u003e 5–50°C ambient temperature.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eRecommended Environment:\u003c\/strong\u003e 15–45°C for normal operation.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePressure Resistance:\u003c\/strong\u003e 1,000 kPa(g) specified pressure resistance.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eGas Sealing:\u003c\/strong\u003e Helium leak integrity ≤5 × 10⁻¹² Pa·m³\/s.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eElectrical Noise:\u003c\/strong\u003e Follow DeviceNet cable routing and grounding practices.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eEMC Immunity:\u003c\/strong\u003e Specific immunity test levels require confirmation from the manufacturer.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eIngress Protection:\u003c\/strong\u003e Not specified in the available model information.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eResolution:\u003c\/strong\u003e Confirm the digital output resolution with the manufacturer.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ch3\u003e\u003cstrong\u003eCertifications and Compliance\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eCommunication:\u003c\/strong\u003e DeviceNet protocol.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eElectrical Requirements:\u003c\/strong\u003e 24 VDC, 4.0 VA.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eODVA:\u003c\/strong\u003e The specified power requirements reference ODVA standards.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eDeviceNet compatibility does not independently confirm product certification. Verify applicable regional approvals and certificates for the exact configuration.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003ePackage Contents\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003e1 × HORIBA STEC SEF-Z524MGXN Mass Flow Meter, according to the ordered configuration.\u003c\/li\u003e\n\u003cli\u003eProduct identification and configuration information, when supplied.\u003c\/li\u003e\n\u003cli\u003eAdditional accessories or documentation, subject to the order agreement.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eConnection cables, fittings, and calibration certificates require separate confirmation. Please contact us to verify the actual package contents before ordering.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003eFrequently Asked Questions\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003e\u003cstrong\u003eQ1: What is the main difference between SEF-Z524MGXN and SEC-Z524MGXN?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eSEF-Z524MGXN is a mass flow meter. It measures gas flow without an integrated control valve.\u003c\/p\u003e\n\u003cp\u003eSEC-Z524MGXN is a mass flow controller. It measures and actively regulates gas flow.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ2: How do I identify the correct full-scale flow range?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eCheck the MR\/MG configuration and gas calibration information. Common nitrogen conversion ranges include 22, 30, and 50 SLM.\u003c\/p\u003e\n\u003cp\u003eDo not select a replacement using the model prefix alone. Verify the original instrument's complete configuration.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ3: Can SEF-Z524MGXN directly replace another DeviceNet mass flow meter?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eNot necessarily. Check the gas type, full-scale range, fittings, power supply, and communication configuration.\u003c\/p\u003e\n\u003cp\u003eAlso verify the equipment mounting dimensions and connector pin assignments. These details can affect replacement compatibility.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ4: What should engineers check when the flow reading becomes unstable?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eStart by checking upstream pressure and gas supply stability. Inspect the fittings for leakage and verify the gas configuration.\u003c\/p\u003e\n\u003cp\u003eNext, check the 24 VDC supply and DeviceNet communication. Compare the reading with an appropriate reference instrument.\u003c\/p\u003e\n\u003cp\u003eA fluctuating reading does not automatically indicate an instrument failure. Investigate the complete gas delivery system first.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ5: What information should buyers provide when requesting a replacement?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eProvide the complete model number, serial number, gas type, and full-scale flow range.\u003c\/p\u003e\n\u003cp\u003eAlso provide the connection type and DeviceNet requirements. A clear nameplate photograph helps confirm the correct configuration.\u003c\/p\u003e\n\u003cp\u003eFor equipment replacements, provide the original part number and installation details. This reduces ordering errors and compatibility risks.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003eWhy Choose Ubest Automation?\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eUbest Automation supplies industrial automation components for semiconductor and process control applications.\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eProduct Supply:\u003c\/strong\u003e Support for HORIBA STEC mass flow meters and controllers.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eConfiguration Verification:\u003c\/strong\u003e Assistance with model numbers and technical specifications.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePre-Shipment Testing:\u003c\/strong\u003e Functional checks before dispatch, subject to product availability and test requirements.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eWarranty:\u003c\/strong\u003e 12-month warranty for applicable products.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eShipping:\u003c\/strong\u003e International delivery through DHL, FedEx, and UPS.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eTechnical Support:\u003c\/strong\u003e Assistance with product identification and replacement selection.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e\u003cstrong\u003eContact Ubest Automation for pricing, availability, and technical verification.\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eEmail:\u003c\/strong\u003e sales@ubestplc.com\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eWebsite:\u003c\/strong\u003e \u003ca href=\"https:\/\/www.ubestplc.com\"\u003ewww.ubestplc.com\u003c\/a\u003e\u003c\/p\u003e","brand":"HORIBA","offers":[{"title":"Default Title","offer_id":68018806554806,"sku":"SEF-Z524MGXN","price":203.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7863\/8774\/files\/SEC-E531_1.jpg?v=1794204630","url":"https:\/\/www.plcsparehub.com\/products\/sef-z524mgxn-horiba-stec-z500-devicenet-gas-flow-meter","provider":"Global PLC Spare Hub","version":"1.0","type":"link"}