{"product_id":"sef-z524mgx-horiba-stec-sec-z500x-digital-mass-flow-meter","title":"SEF-Z524MGX HORIBA STEC SEC-Z500X Digital Mass Flow Meter","description":"\n\u003ch3\u003e\u003cb\u003eSEF-Z524MGX | High-Capacity Gas Measurement Platform\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003e\u003cstrong\u003eHORIBA STEC SEF-Z524MGX\u003c\/strong\u003e is a digital mass flow meter from the \u003cstrong\u003eSEC-Z500X series\u003c\/strong\u003e. It measures gas flow without an integrated control valve. Its architecture supports multi-gas and multi-range measurement in industrial gas delivery systems.\u003c\/p\u003e\n\n\u003cp\u003eThis model supports several full-scale configurations through selectable MR\/MG numbers. Available N2 conversion ranges include 22 SLM, 30 SLM, and 50 SLM. Engineers can select the appropriate range according to process requirements.\u003c\/p\u003e\n\n\u003cp\u003eThe instrument combines DeviceNet communication, precision flow measurement, and polished 316L stainless steel wetted components. Its compact measurement architecture suits semiconductor equipment and precision gas supply applications.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e01. Measurement Architecture \u0026amp; Configuration Matrix\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003cth\u003eConfiguration Item\u003c\/th\u003e\n\u003cth\u003eAvailable Specification\u003c\/th\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eManufacturer\u003c\/td\u003e\n\u003ctd\u003eHORIBA STEC, Japan\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eModel Number\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSEF-Z524MGX\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eProduct Family\u003c\/td\u003e\n\u003ctd\u003eSEC-Z500X Series\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eInstrument Classification\u003c\/td\u003e\n\u003ctd\u003eDigital Mass Flow Meter\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eRelated Controller\u003c\/td\u003e\n\u003ctd\u003eSEC-Z524MGX\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFlow Measurement Principle\u003c\/td\u003e\n\u003ctd\u003eMass flow measurement\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eControl Valve\u003c\/td\u003e\n\u003ctd\u003eNot included in the SEF meter configuration\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFull-Scale Configuration\u003c\/td\u003e\n\u003ctd\u003eMR\/MG selectable ranges\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMR\/MG #6.5\u003c\/td\u003e\n\u003ctd\u003e22 SLM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMR\/MG #07\u003c\/td\u003e\n\u003ctd\u003e30 SLM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMR\/MG #08\u003c\/td\u003e\n\u003ctd\u003e50 SLM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFlow Measurement Range\u003c\/td\u003e\n\u003ctd\u003e0–100% F.S.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eGas Conversion Reference\u003c\/td\u003e\n\u003ctd\u003eN2 conversion flow rate\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003ch3\u003e\u003cb\u003e02. Measurement Performance \u0026amp; Operating Limits\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003cth\u003ePerformance Parameter\u003c\/th\u003e\n\u003cth\u003eTechnical Specification\u003c\/th\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMeasurement Accuracy Above 25% F.S.\u003c\/td\u003e\n\u003ctd\u003e±1.0% S.P.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMeasurement Accuracy At or Below 25% F.S.\u003c\/td\u003e\n\u003ctd\u003e±0.25% F.S.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eLinearity\u003c\/td\u003e\n\u003ctd\u003e≤ ±0.5% F.S.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eRepeatability\u003c\/td\u003e\n\u003ctd\u003e≤ ±0.2% F.S.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eResponse Time\u003c\/td\u003e\n\u003ctd\u003e≤ 1 second across the full flow range\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOperating Temperature\u003c\/td\u003e\n\u003ctd\u003e5 to 50°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eRecommended Temperature\u003c\/td\u003e\n\u003ctd\u003e15 to 45°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOperating Differential Pressure\u003c\/td\u003e\n\u003ctd\u003e≤ 300 kPa(d) for SEF configuration\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMaximum Operating Pressure\u003c\/td\u003e\n\u003ctd\u003e450 kPa(g)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePressure Resistance\u003c\/td\u003e\n\u003ctd\u003e1000 kPa(g)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHelium Leak Integrity\u003c\/td\u003e\n\u003ctd\u003e≤ 5 × 10⁻¹² Pa·m³\/s\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003cp\u003e\u003cstrong\u003eEngineering Note:\u003c\/strong\u003e F.S. means full scale. S.P. means set point. Confirm the applicable accuracy specification when evaluating low-flow measurement performance.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e03. Mechanical Construction \u0026amp; Electrical Interface\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eWetted Material\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e316L stainless steel\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSurface Finish\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003ePolished wetted surfaces\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eStandard Process Connection\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1.5-inch IGS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eOptional Connections\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1\/4-inch VCR equivalent \/ 1.125-inch IGS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eCommunication Protocol\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eDeviceNet™\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePower Supply\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eDC 24 V\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePower Consumption\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e4.0 VA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePower Standard\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eConforming to ODVA standards\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eMounting Orientation\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eFlexible orientation\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003ch3\u003e\u003cb\u003e04. Gas Configuration \u0026amp; Application Flexibility\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe SEC-Z500X platform supports multiple gas and measurement range configurations. Dedicated configuration software helps engineers identify suitable MR\/MG numbers.\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eGas Selection:\u003c\/strong\u003e Enter the process gas type into the configuration software.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eRange Selection:\u003c\/strong\u003e Specify the required full-scale flow rate.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eMR\/MG Identification:\u003c\/strong\u003e Select the corresponding configuration number.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eN2 Conversion:\u003c\/strong\u003e Use the nitrogen conversion function during receiving inspections.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eConfiguration Verification:\u003c\/strong\u003e Confirm the selected gas and range before commissioning.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eHORIBA STEC also provides software operation seminars. Contact a HORIBA STEC representative for training information and software support.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e05. Installation \u0026amp; Commissioning Recommendations\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003eProper installation helps maintain measurement accuracy and process stability. Engineers should verify the following items before startup.\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eProcess Compatibility:\u003c\/strong\u003e Confirm the gas type and configured flow range.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eConnection Inspection:\u003c\/strong\u003e Match the 1.5-inch IGS fitting with the process piping.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eClean Gas Lines:\u003c\/strong\u003e Remove particles and contaminants before connecting the instrument.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePressure Verification:\u003c\/strong\u003e Maintain differential pressure within the specified operating limits.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eTemperature Control:\u003c\/strong\u003e Prefer the recommended 15–45°C operating range.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eElectrical Wiring:\u003c\/strong\u003e Verify 24 VDC power and DeviceNet wiring.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eLeak Testing:\u003c\/strong\u003e Inspect process connections using an approved leak-testing procedure.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eInitial Verification:\u003c\/strong\u003e Check zero-flow readings and measurement stability.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ch3\u003e\u003cb\u003e06. Maintenance \u0026amp; Diagnostic Considerations\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n\u003cli\u003eMonitor measurement deviations during normal production.\u003c\/li\u003e\n\u003cli\u003eCompare actual readings against the configured full-scale range.\u003c\/li\u003e\n\u003cli\u003eCheck DeviceNet communication status when readings become unavailable.\u003c\/li\u003e\n\u003cli\u003eInspect gas fittings when unexpected pressure changes occur.\u003c\/li\u003e\n\u003cli\u003eReview gas configuration after changing the process gas.\u003c\/li\u003e\n\u003cli\u003eFollow manufacturer procedures for calibration and internal servicing.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eUnverified gas configurations can affect measurement accuracy. Avoid changing calibration parameters without authorized technical procedures.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e07. System Integration \u0026amp; Model Selection\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003cth\u003eModel \/ Component\u003c\/th\u003e\n\u003cth\u003eFunction\u003c\/th\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSEF-Z524MGX\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eMass flow measurement without an integrated control valve\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSEC-Z524MGX\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eMass flow regulation with an integrated control valve\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSEC-Z500X Series\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003ePlatform for configurable gas flow measurement and control\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eDeviceNet Network\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eDigital communication with compatible automation equipment\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003e24 VDC Supply\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eElectrical power for the instrument\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003cp\u003eFor measurement-only applications, select the SEF configuration. For applications requiring active flow regulation, evaluate the corresponding SEC controller.\u003c\/p\u003e\n\n\u003cp\u003eBefore replacement, verify the MR\/MG number, gas calibration, process fitting, electrical connector, and communication settings. Similar model numbers do not guarantee direct interchangeability.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e08. Compliance \u0026amp; Documentation\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eCommunication:\u003c\/strong\u003e DeviceNet™ protocol.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePower Requirements:\u003c\/strong\u003e ODVA-standard 24 VDC supply.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eWetted Construction:\u003c\/strong\u003e Polished 316L stainless steel.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePressure Integrity:\u003c\/strong\u003e Specified helium leak integrity and pressure resistance.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eRegulatory Approvals:\u003c\/strong\u003e Specific hazardous-area and safety certifications require confirmation from manufacturer documentation.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ch3\u003e\u003cb\u003e09. Packaging \u0026amp; Commercial Supply\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n\u003cli\u003eHORIBA STEC SEF-Z524MGX mass flow meter.\u003c\/li\u003e\n\u003cli\u003eProduct identification and applicable manufacturer documentation, subject to supply configuration.\u003c\/li\u003e\n\u003cli\u003eAdditional communication accessories require separate confirmation.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003e\u003cstrong\u003eProduct Condition:\u003c\/strong\u003e New \u0026amp; Original in Factory Packing.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eWarranty:\u003c\/strong\u003e Factory Warranty: 12 Months.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eShipping Options:\u003c\/strong\u003e FedEx, UPS, and DHL.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eAvailability:\u003c\/strong\u003e Contact our sales team for current stock and delivery schedules.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e10. Global PLC Spare HUB | Engineering Review\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong\u003eSEF-Z524MGX\u003c\/strong\u003e addresses gas measurement requirements across several high-flow configurations. Its 22, 30, and 50 SLM options provide practical range selection for different process conditions.\u003c\/p\u003e\n\n\u003cp\u003eDeviceNet communication simplifies integration with compatible automation networks. The polished 316L stainless steel gas path supports demanding industrial gas applications.\u003c\/p\u003e\n\n\u003cp\u003eFrom an engineering perspective, range selection deserves particular attention. A suitable full-scale configuration helps maintain measurement resolution and operating accuracy. Engineers should also verify gas conversion data before accepting replacement equipment.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e11. Technical FAQ | Selection, Integration \u0026amp; Field Experience\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003e\u003cstrong\u003e1. How does full-scale selection affect measurement performance?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eFull-scale selection determines the instrument's measurement span. An unnecessarily large range can reduce useful measurement utilization. Select a range that accommodates normal operating flow and expected process peaks.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003e2. What should engineers consider when replacing an existing gas flow instrument?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eCheck the original gas calibration, MR\/MG number, process connection, pressure conditions, and communication configuration. Mechanical compatibility alone does not establish measurement equivalence. Confirm these parameters before approving a replacement.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003e3. Why can actual flow readings differ after changing the process gas?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eDifferent gases have different physical properties. The instrument requires the correct gas-specific configuration. Engineers should verify the gas selection and conversion settings before comparing measurement results.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003e4. How should engineers investigate unstable readings during operation?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eStart by checking gas supply pressure and process stability. Then inspect connections for leakage and review DeviceNet communication. Also verify that the configured measurement range matches actual operating conditions.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003e5. Is the 50 SLM configuration always the best choice for a new installation?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eNo. The highest range does not automatically provide the best measurement performance. Evaluate normal flow, peak demand, process variation, and required accuracy. Confirm the appropriate MR\/MG configuration with the manufacturer before purchasing.\u003c\/p\u003e\n","brand":"HORIBA","offers":[{"title":"Default Title","offer_id":68018816581814,"sku":"SEF-Z524MGX","price":198.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7863\/8774\/files\/SEC-Z562MGX_1_a0fd0e54-a08b-4ee4-89a5-cce1a5c085b8.jpg?v=1794205236","url":"https:\/\/www.plcsparehub.com\/products\/sef-z524mgx-horiba-stec-sec-z500x-digital-mass-flow-meter","provider":"Global PLC Spare Hub","version":"1.0","type":"link"}