{"product_id":"sec-z714mgx-horiba-stec-sec-z700x-pressure-insensitive-devicenet-mfc","title":"SEC-Z714MGX HORIBA STEC SEC-Z700X Pressure-Insensitive DeviceNet MFC","description":"\u003ch3\u003e\u003cstrong\u003eProduct Introduction\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe \u003cspan style=\"color: #0056b3;\"\u003e\u003cstrong\u003eHORIBA STEC\u003c\/strong\u003e\u003c\/span\u003e \u003cspan style=\"color: #d9534f;\"\u003e\u003cstrong\u003eSEC-Z714MGX\u003c\/strong\u003e\u003c\/span\u003e belongs to the advanced \u003cspan style=\"color: #0056b3;\"\u003e\u003cstrong\u003eSEC-Z700X\u003c\/strong\u003e\u003c\/span\u003e Series, engineering a pressure-insensitive design specifically for semiconductor tools and critical gas delivery systems. This digital mass flow controller integrates a high-speed on-board pressure sensor to eliminate upstream pressure transient disturbances across multi-line gas panels. Built with an electropolished SUS316L stainless steel body and metal-sealed wetted paths, the \u003cspan style=\"color: #d9534f;\"\u003e\u003cstrong\u003eSEC-Z714MGX\u003c\/strong\u003e\u003c\/span\u003e delivers exceptional leak integrity and multi-gas versatility for high-purity environments. Its piezoelectric actuator provides rapid response times and reliable control, making the \u003cspan style=\"color: #d9534f;\"\u003e\u003cstrong\u003eSEC-Z714MGX\u003c\/strong\u003e\u003c\/span\u003e an ideal choice for complex industrial automation frameworks.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003eTechnical Specifications\u003c\/strong\u003e\u003c\/h3\u003e\n\u003ctable border=\"1\" cellpadding=\"8\" cellspacing=\"0\" width=\"100%\"\u003e\n  \u003cthead\u003e\n    \u003ctr\u003e\n      \u003cth align=\"left\"\u003e\u003cstrong\u003eParameter Category\u003c\/strong\u003e\u003c\/th\u003e\n      \u003cth align=\"left\"\u003e\u003cstrong\u003eSpecification Details\u003c\/strong\u003e\u003c\/th\u003e\n    \u003c\/tr\u003e\n  \u003c\/thead\u003e\n  \u003ctbody\u003e\n    \u003ctr\u003e\n      \u003ctd\u003e\u003cstrong\u003eBrand \u0026amp; Model\u003c\/strong\u003e\u003c\/td\u003e\n      \u003ctd\u003eBrand: \u003cspan style=\"color: #0056b3;\"\u003e\u003cstrong\u003eHORIBA STEC\u003c\/strong\u003e\u003c\/span\u003e\u003cbr\u003eModel: \u003cspan style=\"color: #d9534f;\"\u003e\u003cstrong\u003eSEC-Z714MGX\u003c\/strong\u003e\u003c\/span\u003e\u003cbr\u003eSeries: \u003cspan style=\"color: #0056b3;\"\u003e\u003cstrong\u003eSEC-Z700X\u003c\/strong\u003e\u003c\/span\u003e\n\u003c\/td\u003e\n    \u003c\/tr\u003e\n    \u003ctr\u003e\n      \u003ctd\u003e\u003cstrong\u003eMeasurement Range\u003c\/strong\u003e\u003c\/td\u003e\n      \u003ctd\u003eFull-Scale Flow Range: \u003cstrong\u003e10 SCCM to 10 SLM\u003c\/strong\u003e (N2 equivalent, MR\/MG #R01–#06)\u003cbr\u003eControl Range \/ Turndown: \u003cstrong\u003e2–100% FS\u003c\/strong\u003e\n\u003c\/td\u003e\n    \u003c\/tr\u003e\n    \u003ctr\u003e\n      \u003ctd\u003e\u003cstrong\u003eFrequency Response\u003c\/strong\u003e\u003c\/td\u003e\n      \u003ctd\u003eResponse Time: \u003cstrong\u003e≤1 second\u003c\/strong\u003e (T98, full flow range)\u003c\/td\u003e\n    \u003c\/tr\u003e\n    \u003ctr\u003e\n      \u003ctd\u003e\u003cstrong\u003eSensitivity \u0026amp; Accuracy\u003c\/strong\u003e\u003c\/td\u003e\n      \u003ctd\u003eAccuracy: \u003cstrong\u003e±1.0% S.P.\u003c\/strong\u003e (\u0026gt;25% FS); \u003cstrong\u003e±0.25% FS\u003c\/strong\u003e (≤25% FS)\u003cbr\u003ePressure Transient Sensitivity: \u003cstrong\u003e±(1.0% S.P. + 1.0% FS max)\u003c\/strong\u003e for #02–#10\u003c\/td\u003e\n    \u003c\/tr\u003e\n    \u003ctr\u003e\n      \u003ctd\u003e\u003cstrong\u003eLinearity \u0026amp; Resolution\u003c\/strong\u003e\u003c\/td\u003e\n      \u003ctd\u003eLinearity: \u003cstrong\u003e±0.5% FS\u003c\/strong\u003e\u003cbr\u003eRepeatability: \u003cstrong\u003e±0.2% FS\u003c\/strong\u003e\n\u003c\/td\u003e\n    \u003c\/tr\u003e\n    \u003ctr\u003e\n      \u003ctd\u003e\u003cstrong\u003eTemperature Range\u003c\/strong\u003e\u003c\/td\u003e\n      \u003ctd\u003eOperating Temperature: \u003cstrong\u003e5–50°C\u003c\/strong\u003e (recommended 15–45°C)\u003cbr\u003eTemperature Coefficient: On-board pressure sensor \u003cstrong\u003e±1% FS\u003c\/strong\u003e (0–700 kPa(A)); Temperature accuracy \u003cstrong\u003e±2°C\u003c\/strong\u003e\n\u003c\/td\u003e\n    \u003c\/tr\u003e\n    \u003ctr\u003e\n      \u003ctd\u003e\u003cstrong\u003eEnvironmental Tolerance\u003c\/strong\u003e\u003c\/td\u003e\n      \u003ctd\u003eOperating Differential Pressure: \u003cstrong\u003e50–300 kPa(d)\u003c\/strong\u003e\u003cbr\u003eMax Operating Pressure: \u003cstrong\u003e450 kPa(g)\u003c\/strong\u003e\u003cbr\u003ePressure Resistance: \u003cstrong\u003e1000 kPa(g)\u003c\/strong\u003e\u003cbr\u003eLeak Integrity: \u003cstrong\u003e≤5×10\u003csup\u003e-12\u003c\/sup\u003e Pa·m\u003csup\u003e3\u003c\/sup\u003e\/s\u003c\/strong\u003e (He)\u003c\/td\u003e\n    \u003c\/tr\u003e\n    \u003ctr\u003e\n      \u003ctd\u003e\u003cstrong\u003eInterference Immunity\u003c\/strong\u003e\u003c\/td\u003e\n      \u003ctd\u003eDigital noise filtering and \u003cstrong\u003eODVA conformance\u003c\/strong\u003e ensure robust electromagnetic compatibility in crowded tool racks.\u003c\/td\u003e\n    \u003c\/tr\u003e\n  \u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003ch3\u003e\u003cstrong\u003eInstallation Guide\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cul\u003e\n  \u003cli\u003e\n\u003cstrong\u003eInspect Package Contents:\u003c\/strong\u003e Verify that the \u003cspan style=\"color: #d9534f;\"\u003e\u003cstrong\u003eSEC-Z714MGX\u003c\/strong\u003e\u003c\/span\u003e unit, mating micro-connectors, and calibration sheets are intact upon unboxing.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eVerify Cleanliness:\u003c\/strong\u003e Maintain cleanroom protocol while handling \u003cstrong\u003emetal-sealed VCR fittings\u003c\/strong\u003e to protect electropolished internal surfaces.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eMount Securely:\u003c\/strong\u003e Install the \u003cspan style=\"color: #d9534f;\"\u003e\u003cstrong\u003eSEC-Z714MGX\u003c\/strong\u003e\u003c\/span\u003e onto your gas panel using the standard \u003cstrong\u003e1\/4\" VCR fittings\u003c\/strong\u003e with a \u003cstrong\u003e124 mm\u003c\/strong\u003e fitting distance.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eEstablish Grounding:\u003c\/strong\u003e Connect the chassis ground to the tool frame to prevent ground loops and signal interference.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eNetwork Wiring:\u003c\/strong\u003e Wire the \u003cstrong\u003eDeviceNet micro-connector\u003c\/strong\u003e according to ODVA polarity standards, supplying \u003cstrong\u003eDC 24V\u003c\/strong\u003e power.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eLeak Testing:\u003c\/strong\u003e Perform a helium leak check on all inlet and outlet connections before introducing process gases.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ch3\u003e\u003cstrong\u003eCommissioning \u0026amp; Maintenance Convenience\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cul\u003e\n  \u003cli\u003e\n\u003cstrong\u003eAuto-Zero Calibration:\u003c\/strong\u003e Execute initial zero adjustment through the digital interface without removing the \u003cspan style=\"color: #d9534f;\"\u003e\u003cstrong\u003eSEC-Z714MGX\u003c\/strong\u003e\u003c\/span\u003e from the gas line.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eDiagnostic Readouts:\u003c\/strong\u003e Monitor real-time flow, temperature, and upstream pressure directly via the integrated \u003cstrong\u003emulti-display panel\u003c\/strong\u003e.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eFirmware Updating:\u003c\/strong\u003e Utilize standard \u003cstrong\u003eDeviceNet\u003c\/strong\u003e communication tools to update configuration parameters or check operational logs.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003ePreventive Checks:\u003c\/strong\u003e Inspect electrical micro-connectors periodically for secure seating and stable contact resistance.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ch3\u003e\u003cstrong\u003eCompatibility \u0026amp; Integration\u003c\/strong\u003e\u003c\/h3\u003e\n\u003ctable border=\"1\" cellpadding=\"8\" cellspacing=\"0\" width=\"100%\"\u003e\n  \u003cthead\u003e\n    \u003ctr\u003e\n      \u003cth align=\"left\"\u003e\u003cstrong\u003eIntegration Aspect\u003c\/strong\u003e\u003c\/th\u003e\n      \u003cth align=\"left\"\u003e\u003cstrong\u003eCompatibility Details\u003c\/strong\u003e\u003c\/th\u003e\n    \u003c\/tr\u003e\n  \u003c\/thead\u003e\n  \u003ctbody\u003e\n    \u003ctr\u003e\n      \u003ctd\u003e\u003cstrong\u003eCommunication Protocol\u003c\/strong\u003e\u003c\/td\u003e\n      \u003ctd\u003eFully compatible with \u003cstrong\u003eDeviceNet™\u003c\/strong\u003e networks via ODVA-conformant micro-connectors.\u003c\/td\u003e\n    \u003c\/tr\u003e\n    \u003ctr\u003e\n      \u003ctd\u003e\u003cstrong\u003eGas Compatibility\u003c\/strong\u003e\u003c\/td\u003e\n      \u003ctd\u003eSupports multiple gases including \u003cstrong\u003eN2, Ar, H2, He, SF6, HBr, and WF6\u003c\/strong\u003e through selectable conversion factors.\u003c\/td\u003e\n    \u003c\/tr\u003e\n    \u003ctr\u003e\n      \u003ctd\u003e\u003cstrong\u003ePhysical Footprint\u003c\/strong\u003e\u003c\/td\u003e\n      \u003ctd\u003eCompact dimensions of \u003cstrong\u003e126×64×29 mm\u003c\/strong\u003e (H×W×T) allow drop-in integration for standard \u003cspan style=\"color: #0056b3;\"\u003e\u003cstrong\u003eSEC-Z700X\u003c\/strong\u003e\u003c\/span\u003e gas boxes.\u003c\/td\u003e\n    \u003c\/tr\u003e\n  \u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003ch3\u003e\u003cstrong\u003eCertifications \u0026amp; Compliance\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cul\u003e\n  \u003cli\u003e\n\u003cstrong\u003eSEMI Standard:\u003c\/strong\u003e Compliant with \u003cstrong\u003eSEMI F64-0701\u003c\/strong\u003e specifications for mass flow controllers.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eNetwork Standard:\u003c\/strong\u003e Official \u003cstrong\u003eODVA conformance\u003c\/strong\u003e certification for DeviceNet interoperability.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eEnvironmental Regulation:\u003c\/strong\u003e Fully \u003cstrong\u003eRoHS compliant\u003c\/strong\u003e for hazardous substance restrictions.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ch3\u003e\u003cstrong\u003ePackage Contents\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cul\u003e\n  \u003cli\u003eOne \u003cspan style=\"color: #0056b3;\"\u003e\u003cstrong\u003eHORIBA STEC\u003c\/strong\u003e\u003c\/span\u003e \u003cspan style=\"color: #d9534f;\"\u003e\u003cstrong\u003eSEC-Z714MGX\u003c\/strong\u003e\u003c\/span\u003e Mass Flow Controller\u003c\/li\u003e\n  \u003cli\u003eFactory Inspection and Calibration Certificate\u003c\/li\u003e\n  \u003cli\u003eDeviceNet Micro-Connector Pin Kit\u003c\/li\u003e\n  \u003cli\u003eQuick Start Safety Documentation\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ch3\u003e\u003cstrong\u003eFrequently Asked Questions (FAQ)\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ1: What causes a slow response time during pressure transients in multi-line gas systems?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eStandard mass flow controllers experience flow surges when adjacent valves open or close. The \u003cspan style=\"color: #d9534f;\"\u003e\u003cstrong\u003eSEC-Z714MGX\u003c\/strong\u003e\u003c\/span\u003e resolves this by using an embedded pressure sensor to dynamically compensate for pressure fluctuations.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ2: Can the \u003cspan style=\"color: #d9534f;\"\u003e\u003cstrong\u003eSEC-Z714MGX\u003c\/strong\u003e\u003c\/span\u003e handle corrosive gases like HBr or WF6?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eYes. The wetted materials feature \u003cstrong\u003eSUS316L stainless steel\u003c\/strong\u003e combined with a \u003cstrong\u003eCo-Ni alloy\u003c\/strong\u003e and electropolished inner surfaces to resist corrosive attack.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ3: How do I configure the DeviceNet node address for the \u003cspan style=\"color: #d9534f;\"\u003e\u003cstrong\u003eSEC-Z714MGX\u003c\/strong\u003e\u003c\/span\u003e?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eYou can configure the MAC ID and baud rate using standard \u003cstrong\u003eDeviceNet\u003c\/strong\u003e software configuration tools or explicit messaging commands over the network bus.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ4: What maintenance steps are required if flow output drifts over time?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eVerify that the inlet pressure remains stable within the \u003cstrong\u003e50–300 kPa(d)\u003c\/strong\u003e range and perform a zero calibration cycle using dry nitrogen.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003eSelection Guide\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cul\u003e\n  \u003cli\u003e\n\u003cstrong\u003eEvaluate Gas Delivery Dynamics:\u003c\/strong\u003e Choose the \u003cspan style=\"color: #d9534f;\"\u003e\u003cstrong\u003eSEC-Z714MGX\u003c\/strong\u003e\u003c\/span\u003e when your process experiences frequent downstream pressure drops or cross-talk from neighboring MFCs.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eMatch Flow Requirements:\u003c\/strong\u003e Ensure your normal operating point falls within the \u003cstrong\u003e10 SCCM to 10 SLM\u003c\/strong\u003e range to maintain optimal turndown accuracy.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eVerify Network Infrastructure:\u003c\/strong\u003e Confirm that your control architecture supports \u003cstrong\u003eDeviceNet\u003c\/strong\u003e protocols before finalizing hardware selection.\u003c\/li\u003e\n\u003c\/ul\u003e","brand":"HORIBA","offers":[{"title":"Default Title","offer_id":68047503327414,"sku":"SEC-Z714MGX","price":136.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7863\/8774\/files\/SEC-Z714MGX_1.jpg?v=1794462152","url":"https:\/\/www.plcsparehub.com\/products\/sec-z714mgx-horiba-stec-sec-z700x-pressure-insensitive-devicenet-mfc","provider":"Global PLC Spare Hub","version":"1.0","type":"link"}