{"product_id":"sec-z522-horiba-stec-sec-z500x-high-accuracy-mass-flow-controller","title":"SEC-Z522 HORIBA STEC SEC-Z500X High-Accuracy Mass Flow Controller","description":"\u003ch3\u003e\u003cstrong\u003eHORIBA STEC SEC-Z522 | Medium-Flow Precision Control Platform\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong\u003e\u003cspan style=\"color: #1677b8;\"\u003eSEC-Z522\u003c\/span\u003e\u003c\/strong\u003e is a medium-flow Mass Flow Controller (MFC) from the \u003cstrong\u003eHORIBA STEC SEC-Z500X Digital\/Analog Series\u003c\/strong\u003e. It regulates process gas delivery through precision flow measurement and piezoelectric valve control.\u003c\/p\u003e\n\n\u003cp\u003eIts specified full-scale range covers \u003cstrong\u003e22 to 50 SLM\u003c\/strong\u003e, based on nitrogen-equivalent flow and the applicable MR\/MG #6.5–#08 configurations. The controller supports multi-gas and multi-range operation for semiconductor process equipment.\u003c\/p\u003e\n\n\u003cp\u003eThe design combines analog setpoint control with digital RS-485 F-Net communication. Its response time reaches T98 within one second across the specified full-flow range. This performance supports process sequences that require controlled gas delivery and repeatable flow transitions.\u003c\/p\u003e\n\n\u003cp\u003eThe standard configuration uses an unheated construction and SUS316L wetted surfaces. A 1\/4-inch VCR male connection supports integration into compatible high-purity gas delivery assemblies.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e01 | Performance Profile and Flow Accuracy\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe SEC-Z522 provides a 2–100% FS control range. Its accuracy specification uses separate limits for higher-flow and lower-flow operating regions.\u003c\/p\u003e\n\n\u003ctable\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePerformance Parameter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSpecification\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eManufacturer\u003c\/td\u003e\n\u003ctd\u003eHORIBA STEC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eModel\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSEC-Z522\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eProduct Series\u003c\/td\u003e\n\u003ctd\u003eSEC-Z500X Digital\/Analog\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eProduct Type\u003c\/td\u003e\n\u003ctd\u003eMass Flow Controller (MFC)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFull-Scale Flow Range\u003c\/td\u003e\n\u003ctd\u003e22–50 SLM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eReference Gas\u003c\/td\u003e\n\u003ctd\u003eN2 equivalent\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eApplicable Configuration\u003c\/td\u003e\n\u003ctd\u003eMR\/MG #6.5–#08\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAccuracy Above 25% FS\u003c\/td\u003e\n\u003ctd\u003e±1.0% S.P.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAccuracy At or Below 25% FS\u003c\/td\u003e\n\u003ctd\u003e±0.25% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eRepeatability\u003c\/td\u003e\n\u003ctd\u003e±0.2% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eLinearity\u003c\/td\u003e\n\u003ctd\u003e±0.5% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eResponse Time\u003c\/td\u003e\n\u003ctd\u003e≤1 second (T98)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eControl Range\u003c\/td\u003e\n\u003ctd\u003e2–100% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/table\u003e\n\n\u003cp\u003e\u003cstrong\u003eEngineering Interpretation:\u003c\/strong\u003e Accuracy depends on the operating point. Above 25% FS, the specification references setpoint percentage. At or below 25% FS, it references full scale. Engineers should use the correct reference when calculating allowable flow deviation.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e02 | Gas Compatibility and Process Conditions\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThis controller supports multiple process gases and corresponding flow-range configurations. Gas selection must match the calibrated instrument specification.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eSpecified gas examples:\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003eNitrogen (N2)\u003c\/li\u003e\n\u003cli\u003eArgon (Ar)\u003c\/li\u003e\n\u003cli\u003eHydrogen (H2)\u003c\/li\u003e\n\u003cli\u003eHelium (He)\u003c\/li\u003e\n\u003cli\u003eSulfur Hexafluoride (SF6)\u003c\/li\u003e\n\u003cli\u003eHydrogen Bromide (HBr)\u003c\/li\u003e\n\u003cli\u003eTungsten Hexafluoride (WF6)\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ctable\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eProcess Parameter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSpecification\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOperating Differential Pressure\u003c\/td\u003e\n\u003ctd\u003e200–300 kPa(d)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMaximum Operating Pressure\u003c\/td\u003e\n\u003ctd\u003e450 kPa(g)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePressure Resistance\u003c\/td\u003e\n\u003ctd\u003e1000 kPa(g)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOperating Temperature\u003c\/td\u003e\n\u003ctd\u003e5–50°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eRecommended Temperature\u003c\/td\u003e\n\u003ctd\u003e15–45°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHeated Configuration\u003c\/td\u003e\n\u003ctd\u003eUnheated standard version\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/table\u003e\n\n\u003cp\u003e\u003cstrong\u003eGas Selection Note:\u003c\/strong\u003e N2-equivalent flow does not establish identical calibration for every gas. Confirm the actual gas, full-scale range, and factory calibration before installation.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e03 | Valve Technology and Wetted Construction\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe SEC-Z522 uses a \u003cstrong\u003epiezoelectric actuator\u003c\/strong\u003e for proportional valve control. The available valve configuration includes normally open and normally closed options.\u003c\/p\u003e\n\n\u003ctable\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eComponent\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eConstruction or Configuration\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eValve Actuator\u003c\/td\u003e\n\u003ctd\u003ePiezoelectric\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eValve Configuration\u003c\/td\u003e\n\u003ctd\u003eNormally open or normally closed\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eWetted Material\u003c\/td\u003e\n\u003ctd\u003eSUS316L stainless steel\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eInternal Surface\u003c\/td\u003e\n\u003ctd\u003ePolished inner surface, standard\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSeal Options\u003c\/td\u003e\n\u003ctd\u003eMetal or elastomer\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eStandard Thermal Configuration\u003c\/td\u003e\n\u003ctd\u003eUnheated\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eLeak Integrity\u003c\/td\u003e\n\u003ctd\u003e≤5 × 10⁻¹² Pa·m³\/s (He)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/table\u003e\n\n\u003cp\u003eThe polished SUS316L flow path supports high-purity gas handling requirements. Seal selection requires careful review of gas chemistry, operating pressure, and process compatibility.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e04 | Electrical Interface and Communication Architecture\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe instrument supports both analog signal integration and digital communication. Engineers can select the appropriate interface according to the host controller and equipment architecture.\u003c\/p\u003e\n\n\u003ctable\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eElectrical Parameter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSpecification\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAnalog Setpoint\u003c\/td\u003e\n\u003ctd\u003e0.1–5 VDC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAnalog Output\u003c\/td\u003e\n\u003ctd\u003e0–5 VDC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eDigital Interface\u003c\/td\u003e\n\u003ctd\u003eRS-485\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eCommunication Protocol\u003c\/td\u003e\n\u003ctd\u003eF-Net\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eCommunication Speed\u003c\/td\u003e\n\u003ctd\u003e38,400 bps\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eConnector Interfaces\u003c\/td\u003e\n\u003ctd\u003eD-Sub 9-pin and RJ-45\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePositive Supply\u003c\/td\u003e\n\u003ctd\u003e+15 VDC ±5%, 150 mA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eNegative Supply\u003c\/td\u003e\n\u003ctd\u003e-15 VDC ±5%, 150 mA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/table\u003e\n\n\u003cp\u003e\u003cstrong\u003eIntegration Considerations:\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003eVerify analog output compatibility with the host controller input.\u003c\/li\u003e\n\u003cli\u003eCheck the analog setpoint range before connecting the control signal.\u003c\/li\u003e\n\u003cli\u003eConfirm RS-485 wiring polarity and F-Net communication settings.\u003c\/li\u003e\n\u003cli\u003eVerify connector pin assignments against the applicable wiring documentation.\u003c\/li\u003e\n\u003cli\u003eCheck positive and negative supply rails under operating conditions.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ch3\u003e\u003cstrong\u003e05 | Mechanical Envelope and Process Connection\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe compact body supports installation in semiconductor gas distribution equipment. Its extended fitting distance requires attention during manifold and piping layout design.\u003c\/p\u003e\n\n\u003ctable\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eMechanical Parameter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSpecification\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHeight\u003c\/td\u003e\n\u003ctd\u003e126 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eWidth\u003c\/td\u003e\n\u003ctd\u003e64 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eThickness\u003c\/td\u003e\n\u003ctd\u003e29 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOverall Dimensions\u003c\/td\u003e\n\u003ctd\u003e126 × 64 × 29 mm (H × W × T)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eProcess Connection\u003c\/td\u003e\n\u003ctd\u003e1\/4-inch VCR male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFitting Distance\u003c\/td\u003e\n\u003ctd\u003e124 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/table\u003e\n\n\u003cp\u003eCheck the available installation space before selecting the mounting position. Confirm fitting alignment and connection clearance during gas panel design.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e06 | Semiconductor Process Applications\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong\u003eHORIBA STEC SEC-Z522\u003c\/strong\u003e addresses medium-flow gas delivery requirements in semiconductor manufacturing equipment.\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eChemical Vapor Deposition (CVD):\u003c\/strong\u003e Regulates process gas delivery according to equipment recipes.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eEtching Systems:\u003c\/strong\u003e Controls compatible process gases during defined etching sequences.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eBulk Gas Panels:\u003c\/strong\u003e Supports controlled distribution of selected process gases.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eGas Delivery Assemblies:\u003c\/strong\u003e Provides analog and digital interfaces for equipment integration.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eMulti-Gas Processes:\u003c\/strong\u003e Supports specified gas configurations when calibration and material compatibility are confirmed.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ch3\u003e\u003cstrong\u003e07 | Installation and Commissioning Checklist\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eCorrect installation requires coordinated mechanical, electrical, and gas-system checks.\u003c\/p\u003e\n\n\u003col\u003e\n\u003cli\u003eVerify the complete model number and calibrated gas configuration.\u003c\/li\u003e\n\u003cli\u003eConfirm the required full-scale flow range.\u003c\/li\u003e\n\u003cli\u003eCheck upstream and downstream pressure conditions.\u003c\/li\u003e\n\u003cli\u003eInspect the SUS316L wetted surfaces and specified seal configuration.\u003c\/li\u003e\n\u003cli\u003eVerify 1\/4-inch VCR male connection compatibility.\u003c\/li\u003e\n\u003cli\u003eConfirm the available 124 mm fitting distance.\u003c\/li\u003e\n\u003cli\u003eConnect the required ±15 VDC power supplies.\u003c\/li\u003e\n\u003cli\u003eCheck analog signal wiring or RS-485 communication settings.\u003c\/li\u003e\n\u003cli\u003eIntroduce the specified process gas under approved operating conditions.\u003c\/li\u003e\n\u003cli\u003eVerify flow response and setpoint tracking before production operation.\u003c\/li\u003e\n\u003c\/ol\u003e\n\n\u003cp\u003eUse suitable high-purity gas handling procedures during installation. Follow the equipment manufacturer's instructions for leak testing and process-line purging.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e08 | Maintenance and Troubleshooting Considerations\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eRoutine maintenance should focus on flow stability, gas compatibility, electrical integrity, and process-line cleanliness.\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eFlow deviation:\u003c\/strong\u003e Check actual gas selection, pressure conditions, and calibration configuration.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSlow response:\u003c\/strong\u003e Inspect supply stability, process pressure, and communication settings.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eUnstable readings:\u003c\/strong\u003e Check grounding, signal wiring, gas supply fluctuations, and electrical noise.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCommunication failure:\u003c\/strong\u003e Verify RS-485 polarity, baud rate, F-Net settings, and connector condition.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eLeak concerns:\u003c\/strong\u003e Inspect VCR connections and compatible sealing components using approved procedures.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eTemperature variation:\u003c\/strong\u003e Maintain the recommended 15–45°C environment whenever practical.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eDo not change gas calibration or valve configuration without confirming the applicable manufacturer specifications.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e09 | Compliance and Product Standards\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eRoHS:\u003c\/strong\u003e RoHS compliant.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eIndustry Standards:\u003c\/strong\u003e SEMI standards.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eSpecific SEMI standard numbers and individual certification references were not provided. Confirm the applicable compliance documents for the intended equipment and installation.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e10 | Frequently Asked Questions\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ1: How does the 2–100% FS control range affect process recipe configuration?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eThe specified range defines the available control span relative to the configured full-scale value. Recipe engineers should check the minimum operating setpoint against the required process flow. Avoid assuming that every gas configuration provides identical usable flow limits.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ2: Why should engineers verify the seal material before introducing HBr or WF6?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eGas chemistry can affect sealing materials and long-term leak integrity. Confirm chemical compatibility for the selected metal or elastomer seal. Also review moisture exposure and the approved gas handling procedure before commissioning.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ3: What could cause a flow deviation after replacing an existing controller?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eCommon investigation points include an incorrect gas calibration, mismatched full-scale range, different pressure conditions, and signal scaling errors. Compare the replacement configuration with the original instrument records before changing process parameters.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ4: When should an engineer choose RS-485 instead of analog control?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eRS-485 suits equipment architectures that require digital communication through F-Net. Analog control suits systems with compatible voltage-based setpoint and feedback interfaces. Check the host controller architecture and communication requirements before selecting the connection method.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ5: What practical checks help prevent installation problems in a semiconductor gas panel?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eReview fitting clearance, VCR alignment, gas purity, pressure differential, and electrical connector access. Confirm the 124 mm fitting distance during mechanical design. Also verify the selected gas calibration and valve configuration before introducing process gases.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e11 | Procurement and Technical Support\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eGlobal PLC Spare HUB supports industrial automation and semiconductor process equipment spare-part sourcing.\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eModel Verification:\u003c\/strong\u003e Assistance with part number and configuration identification.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eTechnical Support:\u003c\/strong\u003e Help reviewing flow range, gas selection, and interface specifications.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eWarranty:\u003c\/strong\u003e 12-month warranty coverage.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eShipping:\u003c\/strong\u003e DHL, FedEx, and UPS international shipping options.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eOrder Processing:\u003c\/strong\u003e Typically 24–48 hours after order confirmation.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eContact our team for pricing, availability, and technical assistance regarding the \u003cstrong\u003e\u003cspan style=\"color: #1677b8;\"\u003eHORIBA STEC SEC-Z522\u003c\/span\u003e SEC-Z500X Mass Flow Controller\u003c\/strong\u003e.\u003c\/p\u003e","brand":"HORIBA","offers":[{"title":"Default Title","offer_id":68027777220790,"sku":"SEC-Z522","price":145.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7863\/8774\/files\/SEC-Z522_1.jpg?v=1794280927","url":"https:\/\/www.plcsparehub.com\/products\/sec-z522-horiba-stec-sec-z500x-high-accuracy-mass-flow-controller","provider":"Global PLC Spare Hub","version":"1.0","type":"link"}