{"product_id":"sec-z517-horiba-stec-sec-z500x-ethercat-mass-flow-controller","title":"SEC-Z517 HORIBA STEC SEC-Z500X EtherCAT Mass Flow Controller","description":"\u003ch3\u003e\u003cstrong\u003eHORIBA STEC SEC-Z517 | SEC-Z500X EtherCAT Mass Flow Controller\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong\u003e\u003cspan style=\"color:#1565C0;\"\u003eSEC-Z517\u003c\/span\u003e\u003c\/strong\u003e from \u003cstrong\u003eHORIBA STEC\u003c\/strong\u003e is a digital mass flow controller within the \u003cstrong\u003eSEC-Z500X EtherCAT Series\u003c\/strong\u003e. It regulates process gas flow through high-speed digital communication and precision piezoelectric valve control.\u003c\/p\u003e\n\n\u003cp\u003eThis model targets semiconductor manufacturing equipment requiring fast gas delivery and repeatable flow regulation. Its EtherCAT interface supports integration with real-time equipment control architectures.\u003c\/p\u003e\n\n\u003cp\u003eThe controller covers full-scale flow ranges from \u003cstrong\u003e10 SCCM to 5.5 SLM\u003c\/strong\u003e. Its multi-gas and multi-range configuration supports different process gas requirements.\u003c\/p\u003e\n\n\u003cp\u003eWith a response time of \u003cstrong\u003eT98 ≤1 second\u003c\/strong\u003e, the SEC-Z517 supports rapid flow adjustments. Its low-flow accuracy specification also supports applications requiring precise gas delivery.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e01. Product Identity \u0026amp; Configuration\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eManufacturer\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eHORIBA STEC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eModel\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003e\u003cspan style=\"color:#1565C0;\"\u003eSEC-Z517\u003c\/span\u003e\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eProduct Series\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eSEC-Z500X\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eCommunication Version\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eEtherCAT\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eProduct Type\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eDigital Mass Flow Controller (MFC)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eControl Element\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003ePiezoelectric Actuator Valve\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eGas Configuration\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eMulti-Gas \/ Multi-Range\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eHeating Configuration\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eStandard Unheated Version\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eElectrical Supply\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e24 VDC, 6.8 VA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003ch3\u003e\u003cstrong\u003e02. Flow Measurement \u0026amp; Control Performance\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eFlow accuracy and response speed directly affect process gas delivery. The following specifications define the SEC-Z517 control performance.\u003c\/p\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eParameter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSpecification\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFull-Scale Flow Range\u003c\/td\u003e\n\u003ctd\u003e10 SCCM to 5.5 SLM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eReference Gas\u003c\/td\u003e\n\u003ctd\u003eN2 equivalent\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eRange Configuration\u003c\/td\u003e\n\u003ctd\u003eMR \/ MG selectable\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eControl Range\u003c\/td\u003e\n\u003ctd\u003e2% to 100% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eTurndown Ratio\u003c\/td\u003e\n\u003ctd\u003e50:1\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAccuracy Above 25% FS\u003c\/td\u003e\n\u003ctd\u003e±1.0% of setpoint\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAccuracy at or Below 25% FS\u003c\/td\u003e\n\u003ctd\u003e±0.25% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eRepeatability\u003c\/td\u003e\n\u003ctd\u003e±0.2% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eLinearity\u003c\/td\u003e\n\u003ctd\u003e±0.5% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eResponse Time\u003c\/td\u003e\n\u003ctd\u003e≤1 second, T98\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003cp\u003e\u003cstrong\u003eEngineering Interpretation\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eLow-Flow Accuracy:\u003c\/strong\u003e The ±0.25% FS specification applies at setpoints of 25% FS or below.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eNormal Operating Range:\u003c\/strong\u003e Above 25% FS, accuracy changes to ±1.0% of setpoint.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eRepeatability:\u003c\/strong\u003e ±0.2% FS supports consistent flow regulation across repeated operating cycles.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eLinearity:\u003c\/strong\u003e ±0.5% FS describes deviation from the specified linear flow relationship.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eResponse:\u003c\/strong\u003e T98 ≤1 second indicates the specified full-range response performance.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003e\u003cstrong\u003eSelection Tip:\u003c\/strong\u003e Evaluate accuracy using the actual operating setpoint. Do not compare percentage-of-setpoint accuracy directly with percentage-of-full-scale accuracy.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e03. Gas Compatibility \u0026amp; Process Wetted Construction\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong\u003e\u003cspan style=\"color:#1565C0;\"\u003eSEC-Z517\u003c\/span\u003e\u003c\/strong\u003e supports multiple process gases through selectable gas and range configurations.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eSpecified Gas Compatibility\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003eNitrogen (N2)\u003c\/li\u003e\n\u003cli\u003eArgon (Ar)\u003c\/li\u003e\n\u003cli\u003eHydrogen (H2)\u003c\/li\u003e\n\u003cli\u003eHelium (He)\u003c\/li\u003e\n\u003cli\u003eOxygen (O2)\u003c\/li\u003e\n\u003cli\u003eSulfur Hexafluoride (SF6)\u003c\/li\u003e\n\u003cli\u003eHydrogen Bromide (HBr)\u003c\/li\u003e\n\u003cli\u003eTungsten Hexafluoride (WF6)\u003c\/li\u003e\n\u003cli\u003eOther supported gases subject to configuration\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003e\u003cstrong\u003eWetted Materials \u0026amp; Sealing\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eWetted Material\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eSUS316L Stainless Steel\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eInternal Surface\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003ePolished finish, standard\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSeal Options\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eMetal or elastomer\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eValve Technology\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003ePiezoelectric actuator\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eValve Configuration\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eNormally open or normally closed\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eLeak Integrity\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e≤5 × 10⁻¹² Pa·m³\/s (He)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003cp\u003e\u003cstrong\u003eProcess Engineering Consideration:\u003c\/strong\u003e Gas compatibility depends on the selected wetted materials and seal configuration. Confirm chemical compatibility before ordering corrosive or reactive gas applications.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e04. Pressure \u0026amp; Operating Conditions\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eStable gas delivery requires suitable differential pressure and sufficient upstream pressure control.\u003c\/p\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eOperating Parameter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSpecified Value\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOperating Differential Pressure\u003c\/td\u003e\n\u003ctd\u003e50–300 kPa(d)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMaximum Operating Pressure\u003c\/td\u003e\n\u003ctd\u003e450 kPa(g)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePressure Resistance\u003c\/td\u003e\n\u003ctd\u003e1000 kPa(g)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOperating Temperature\u003c\/td\u003e\n\u003ctd\u003e5°C to 50°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eRecommended Temperature\u003c\/td\u003e\n\u003ctd\u003e15°C to 45°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHeated Function\u003c\/td\u003e\n\u003ctd\u003eNot included in standard configuration\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003cp\u003e\u003cstrong\u003eImportant Pressure Distinction:\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003eDifferential pressure represents the pressure difference across the controller.\u003c\/li\u003e\n\u003cli\u003eMaximum operating pressure specifies the permitted operating pressure limit.\u003c\/li\u003e\n\u003cli\u003ePressure resistance describes a separate pressure withstand rating.\u003c\/li\u003e\n\u003cli\u003eDo not use the pressure resistance value as a continuous operating pressure.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ch3\u003e\u003cstrong\u003e05. EtherCAT Communication \u0026amp; Electrical Interface\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong\u003eSEC-Z500X EtherCAT Series\u003c\/strong\u003e uses digital communication for integration with automated semiconductor equipment.\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eProtocol:\u003c\/strong\u003e EtherCAT® industrial Ethernet communication.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eNetwork Ports:\u003c\/strong\u003e IN and OUT RJ-45 interfaces.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eConformance:\u003c\/strong\u003e EtherCAT Technology Group (ETG) conformant.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePower Supply:\u003c\/strong\u003e DC 24 V.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePower Consumption:\u003c\/strong\u003e 6.8 VA.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003e\u003cstrong\u003eIntegration Considerations\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003eConnect the IN port to the upstream EtherCAT network device.\u003c\/li\u003e\n\u003cli\u003eUse the OUT port according to the network topology.\u003c\/li\u003e\n\u003cli\u003eVerify EtherCAT device recognition during commissioning.\u003c\/li\u003e\n\u003cli\u003eConfirm the controller's process configuration before enabling flow control.\u003c\/li\u003e\n\u003cli\u003eCheck communication status before diagnosing process-side flow deviations.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eThe wider body accommodates the EtherCAT electronic configuration. Confirm mechanical clearance when replacing equipment within existing gas panels.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e06. Mechanical Dimensions \u0026amp; Installation Interface\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eOverall Height\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e126 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eOverall Width\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e82 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eOverall Thickness\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e29 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eDimensional Order\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eH × W × T\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eGas Connection\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1\/4-inch VCR male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eFitting Distance\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e124 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003cp\u003e\u003cstrong\u003eInstallation Checklist\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003col\u003e\n\u003cli\u003eConfirm the mounting space and fitting center distance.\u003c\/li\u003e\n\u003cli\u003eVerify the 1\/4-inch VCR male connection requirements.\u003c\/li\u003e\n\u003cli\u003eCheck gas line cleanliness before connecting the controller.\u003c\/li\u003e\n\u003cli\u003eConfirm the selected seal material matches the process gas.\u003c\/li\u003e\n\u003cli\u003eVerify upstream and downstream pressure conditions.\u003c\/li\u003e\n\u003cli\u003eConnect the 24 VDC supply and EtherCAT network correctly.\u003c\/li\u003e\n\u003cli\u003eCheck for external leakage before introducing process gas.\u003c\/li\u003e\n\u003cli\u003eVerify the configured gas type and flow range.\u003c\/li\u003e\n\u003c\/ol\u003e\n\n\u003cp\u003eFollow the applicable HORIBA STEC installation instructions and semiconductor gas handling procedures. Use qualified personnel for hazardous gas connections.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e07. Semiconductor Process Applications\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong\u003e\u003cspan style=\"color:#1565C0;\"\u003eHORIBA STEC SEC-Z517\u003c\/span\u003e\u003c\/strong\u003e targets equipment requiring digital gas flow control and fast communication.\u003c\/p\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eApplication\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eEngineering Requirement\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSemiconductor Etching\u003c\/td\u003e\n\u003ctd\u003ePrecise process gas delivery and rapid flow adjustment.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eThin-Film Deposition\u003c\/td\u003e\n\u003ctd\u003eRepeatable gas flow during process recipe execution.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAdvanced Process Equipment\u003c\/td\u003e\n\u003ctd\u003eEtherCAT integration with real-time control architectures.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMulti-Gas Delivery Systems\u003c\/td\u003e\n\u003ctd\u003eSelectable gas configurations for different process recipes.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAutomated Gas Panels\u003c\/td\u003e\n\u003ctd\u003eDigital communication and compact installation interfaces.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003ch3\u003e\u003cstrong\u003e08. Compliance \u0026amp; Product Standards\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eRoHS:\u003c\/strong\u003e RoHS compliant.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eEtherCAT:\u003c\/strong\u003e EtherCAT Technology Group conformance.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSemiconductor Standards:\u003c\/strong\u003e SEMI standards compliance as specified for the product.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eConfirm the applicable SEMI standard numbers and certification documents against the exact product configuration. Do not assume additional safety or hazardous-area approvals.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e09. Configuration Verification Before Purchasing\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eOrdering the correct flow controller requires more than matching the model number. Process gas, flow range, pressure, and communication configuration affect selection.\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eModel:\u003c\/strong\u003e Confirm SEC-Z517.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSeries:\u003c\/strong\u003e Confirm SEC-Z500X EtherCAT version.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eGas Type:\u003c\/strong\u003e Specify the actual process gas.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eFull-Scale Range:\u003c\/strong\u003e Confirm the required SCCM or SLM range.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eRange Selection:\u003c\/strong\u003e Verify the MR\/MG configuration.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eValve Type:\u003c\/strong\u003e Confirm normally open or normally closed operation.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSeal Material:\u003c\/strong\u003e Select metal or compatible elastomer.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eFittings:\u003c\/strong\u003e Verify 1\/4-inch VCR male connections.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePressure:\u003c\/strong\u003e Confirm differential and maximum operating pressure.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCommunication:\u003c\/strong\u003e Confirm EtherCAT compatibility with the host controller.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003e\u003cstrong\u003ePurchasing Advice:\u003c\/strong\u003e Request the complete configuration details before ordering. Two controllers with similar flow ranges may have different gas, seal, and valve configurations.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e10. Frequently Asked Questions\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ1: How does gas selection affect the SEC-Z517 flow measurement?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eDifferent gases have different physical properties and flow characteristics. The controller requires the correct gas configuration for accurate flow regulation. Do not assume an N2-equivalent range provides identical actual flow performance for every gas. Confirm the gas-specific calibration and configuration before commissioning.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ2: What happens if the operating differential pressure falls below 50 kPa(d)?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eThe specified operating differential pressure range starts at 50 kPa(d). Insufficient differential pressure can prevent the controller from achieving the requested flow. Check upstream supply pressure, downstream backpressure, and restrictions in the gas line before changing the controller.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ3: Why should engineers check the normally open or normally closed valve configuration?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eThe valve's default mechanical state affects gas shutoff behavior during certain power or control conditions. The correct selection depends on the equipment safety design. Verify the specified valve configuration against the gas panel's shutdown philosophy. Do not assume both configurations provide identical fail-safe behavior.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ4: Can the SEC-Z517 replace an existing analog mass flow controller directly?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eNot necessarily. The SEC-Z517 uses EtherCAT communication and RJ-45 network interfaces. An analog controller may use different electrical connections and control signals. Check the host controller, network topology, mounting dimensions, gas fittings, and process configuration before replacement.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ5: What should engineers investigate when the displayed flow fluctuates despite stable pressure?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eStart by checking gas purity, upstream regulation, and downstream restrictions. Inspect fittings for contamination or leakage. Then verify the gas configuration, flow range, and EtherCAT communication status. Compare actual operating conditions with the specified accuracy and repeatability limits before suspecting internal valve failure.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e11. Product Supply \u0026amp; Technical Support\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eLooking for the \u003cstrong\u003e\u003cspan style=\"color:#1565C0;\"\u003eHORIBA STEC SEC-Z517\u003c\/span\u003e\u003c\/strong\u003e EtherCAT Mass Flow Controller?\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eBrand:\u003c\/strong\u003e HORIBA STEC\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eModel:\u003c\/strong\u003e SEC-Z517\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSeries:\u003c\/strong\u003e SEC-Z500X EtherCAT\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eProduct Type:\u003c\/strong\u003e Digital Mass Flow Controller\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eFlow Range:\u003c\/strong\u003e 10 SCCM to 5.5 SLM\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCommunication:\u003c\/strong\u003e EtherCAT\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eWarranty:\u003c\/strong\u003e 12 months, subject to sales terms.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eInspection:\u003c\/strong\u003e Product inspection before shipment.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eShipping:\u003c\/strong\u003e DHL, FedEx, UPS, and other supported carriers.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eContact our sales team for pricing, availability, and delivery information. Provide your gas type, required flow range, and fitting configuration for accurate model verification.\u003c\/p\u003e","brand":"HORIBA","offers":[{"title":"Default Title","offer_id":68027788361910,"sku":"SEC-Z517","price":125.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7863\/8774\/files\/SEC-Z517_1_9bd1206f-2993-4ecd-98e9-b9152ee53668.jpg?v=1794281282","url":"https:\/\/www.plcsparehub.com\/products\/sec-z517-horiba-stec-sec-z500x-ethercat-mass-flow-controller","provider":"Global PLC Spare Hub","version":"1.0","type":"link"}