{"product_id":"sec-z512kx-horiba-stec-sec-z500x-mass-flow-controller","title":"SEC-Z512KX HORIBA STEC SEC-Z500X Mass Flow Controller","description":"\u003ch3\u003e\u003cstrong\u003eSEC-Z512KX | HORIBA STEC SEC-Z500X Ultra-Low-Flow Mass Flow Controller\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe \u003cstrong\u003eHORIBA STEC SEC-Z512KX\u003c\/strong\u003e is an ultra-low-flow mass flow controller from the \u003cstrong\u003eSEC-Z500X Digital\/Analog Series\u003c\/strong\u003e. It is designed for semiconductor process applications that require precise control of very small gas flows, with fixed full-scale ranges of 1 SCCM or 2 SCCM on an N2-equivalent basis.\u003c\/p\u003e\n\u003cp\u003eThis configuration combines a piezoelectric control valve, analog setpoint and output signals, and RS-485 F-Net communication. Its compact body and 106 mm fitting distance support integration into gas delivery assemblies where installation space and low-flow stability are important.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e01 | Low-Flow Control Performance\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eAt full scale, the SEC-Z512KX provides a specified accuracy of ±1.0% FS and repeatability of ±0.2% FS. Its control range extends from 2% to 100% FS, allowing operation across a broad portion of the selected measurement range.\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePerformance Parameter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSpecification\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFull-Scale Flow Range\u003c\/td\u003e\n\u003ctd\u003e1 SCCM or 2 SCCM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFlow Reference\u003c\/td\u003e\n\u003ctd\u003eN2 equivalent\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eRange Configuration\u003c\/td\u003e\n\u003ctd\u003eFixed range, single gas\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAccuracy\u003c\/td\u003e\n\u003ctd\u003e±1.0% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eRepeatability\u003c\/td\u003e\n\u003ctd\u003e±0.2% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eLinearity\u003c\/td\u003e\n\u003ctd\u003e±0.5% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eControl Range\u003c\/td\u003e\n\u003ctd\u003e2–100% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eResponse Time\u003c\/td\u003e\n\u003ctd\u003e≤1 second (T98, full flow range)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eValve Actuator\u003c\/td\u003e\n\u003ctd\u003ePiezoelectric\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eValve Configuration\u003c\/td\u003e\n\u003ctd\u003eNormally open or normally closed\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003e\u003cstrong\u003eEngineering note:\u003c\/strong\u003e The 1 SCCM and 2 SCCM options are fixed full-scale configurations, not user-selectable operating ranges. Confirm the required range and calibrated gas before ordering.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e02 | Gas Compatibility and Pressure Conditions\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe controller is calibrated for one specified gas and one fixed flow range. Gas selection is therefore part of the ordering configuration. The N2-equivalent flow reference should not be interpreted as universal calibration for every process gas.\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eParameter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSpecification\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eCalibrated Gas\u003c\/td\u003e\n\u003ctd\u003eSpecified at order; single-gas calibration\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOperating Differential Pressure\u003c\/td\u003e\n\u003ctd\u003e50–300 kPa(d)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMaximum Operating Pressure\u003c\/td\u003e\n\u003ctd\u003e450 kPa(g)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePressure Resistance\u003c\/td\u003e\n\u003ctd\u003e1000 kPa(g)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eWetted Materials\u003c\/td\u003e\n\u003ctd\u003eSUS316L stainless steel\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eInternal Surface\u003c\/td\u003e\n\u003ctd\u003ePolished, standard\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSeal Options\u003c\/td\u003e\n\u003ctd\u003eMetal or elastomer\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eLeak Integrity\u003c\/td\u003e\n\u003ctd\u003e≤5 × 10⁻¹² Pa·m³\/s (He)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003eFor semiconductor gas delivery systems, verify the gas identity, pressure differential, seal material, and upstream supply conditions together. These factors affect whether the controller matches the intended process installation.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e03 | Analog and Digital Integration\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe SEC-Z512KX supports both analog signal control and digital communication. Engineers can select the appropriate interface based on the gas panel architecture and control-system requirements.\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eAnalog setpoint:\u003c\/strong\u003e 0.1–5 VDC\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eAnalog output:\u003c\/strong\u003e 0–5 VDC\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eDigital interface:\u003c\/strong\u003e RS-485 F-Net protocol\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCommunication speed:\u003c\/strong\u003e 38,400 bps\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eConnectors:\u003c\/strong\u003e D-Sub 9-pin and RJ-45\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eBefore commissioning, check the host controller's signal configuration, communication settings, connector pin assignment, and grounding arrangement. Do not assume that an RS-485 physical connection guarantees compatibility with a different communication protocol.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e04 | Mechanical Design and Installation Envelope\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe compact housing measures 126 × 64 × 29 mm (H × W × T). The specified connection is a 1\/4-inch VCR male fitting with a 106 mm fitting distance.\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eMechanical Parameter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSpecification\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOverall Dimensions\u003c\/td\u003e\n\u003ctd\u003e126 × 64 × 29 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eConnection Type\u003c\/td\u003e\n\u003ctd\u003e1\/4-inch VCR male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFitting Distance\u003c\/td\u003e\n\u003ctd\u003e106 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHeated Configuration\u003c\/td\u003e\n\u003ctd\u003eStandard unheated version\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOperating Temperature\u003c\/td\u003e\n\u003ctd\u003e5–50°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eRecommended Temperature\u003c\/td\u003e\n\u003ctd\u003e15–45°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003eCheck the available panel space and fitting center distance before replacing an installed controller. Also verify that the mating VCR connections and sealing arrangement match the existing gas line.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e05 | Electrical Supply Requirements\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe controller requires bipolar DC power. Confirm that both supply rails remain within specification under operating load.\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePower Parameter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSpecification\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePositive Supply\u003c\/td\u003e\n\u003ctd\u003e+15 VDC ±5%\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePositive Supply Current\u003c\/td\u003e\n\u003ctd\u003e150 mA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eNegative Supply\u003c\/td\u003e\n\u003ctd\u003e-15 VDC ±5%\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eNegative Supply Current\u003c\/td\u003e\n\u003ctd\u003e150 mA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003eDuring startup checks, verify supply polarity and voltage stability before applying the flow setpoint. Incorrect power wiring or insufficient supply capacity can prevent normal operation and complicate fault diagnosis.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e06 | Semiconductor Process Applications\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe SEC-Z512KX is intended for applications where gas flow requirements fall within its ultra-low fixed ranges. Typical process areas include:\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eDoping processes:\u003c\/strong\u003e Controlled delivery of process gases in low-flow applications.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eIon implantation:\u003c\/strong\u003e Gas supply control for equipment requiring a very small calibrated flow.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eThin-film deposition:\u003c\/strong\u003e Low-flow gas management in semiconductor process equipment.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eGas distribution panels:\u003c\/strong\u003e Compact integration into precision gas delivery assemblies.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ch3\u003e\u003cstrong\u003e07 | Selection and Commissioning Checks\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eUse the following checks when specifying or replacing this controller:\u003c\/p\u003e\n\u003col\u003e\n\u003cli\u003e\n\u003cstrong\u003eConfirm the full-scale range:\u003c\/strong\u003e Select the 1 SCCM or 2 SCCM version according to the process requirement.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eConfirm gas calibration:\u003c\/strong\u003e Match the calibrated gas to the actual process gas specified for the application.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCheck pressure conditions:\u003c\/strong\u003e Keep the operating differential pressure within the specified 50–300 kPa(d) range.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eVerify the interface:\u003c\/strong\u003e Confirm analog signal levels or RS-485 F-Net communication requirements.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCheck mechanical fit:\u003c\/strong\u003e Verify the 1\/4-inch VCR male connection and 106 mm fitting distance.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eConfirm seal selection:\u003c\/strong\u003e Match metal or elastomer seals to the gas system's material requirements.\u003c\/li\u003e\n\u003c\/ol\u003e\n\u003cp\u003eThese checks help reduce replacement errors caused by differences in gas calibration, range, connection dimensions, and control-system interfaces.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e8 | Product Identification and Ordering Data\u003c\/strong\u003e\u003c\/h3\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eManufacturer\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eHORIBA STEC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eModel\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eSEC-Z512KX\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSeries\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eSEC-Z500X Digital\/Analog\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eProduct Type\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eMass Flow Controller (MFC)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eFlow Range\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1 SCCM or 2 SCCM, N2 equivalent\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eValve Technology\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003ePiezoelectric actuator\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eCommunication\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eAnalog and RS-485 F-Net\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eCompliance\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eRoHS compliant; SEMI standards\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003ch3\u003e\u003cstrong\u003eFrequently Asked Questions\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003e\u003cstrong\u003eQ1: Can the SEC-Z512KX be recalibrated for a different process gas after installation?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eThe supplied configuration is specified for single-gas, single-range calibration. Do not assume that changing the gas setting in the host system will provide an equivalent calibrated flow. Confirm the manufacturer's supported recalibration options before planning a gas conversion.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ2: What should be checked if the measured flow does not reach the commanded setpoint?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eCheck the actual inlet and outlet pressure conditions first. Then verify the selected full-scale range, gas calibration, analog setpoint level, and supply voltage. A pressure differential outside the specified operating window can limit the controller's ability to achieve the requested flow.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ3: How should engineers evaluate flow instability at very low setpoints?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eCheck whether the requested flow is within the 2–100% FS control range. Inspect upstream pressure stability and gas supply conditions, then review signal noise and grounding. At ultra-low flow rates, small disturbances in the gas supply or electrical signal can become significant relative to the setpoint.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ4: What precautions are recommended when replacing this unit in an existing gas panel?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eCompare the calibrated gas, fixed range, VCR fitting orientation, fitting distance, seal material, and electrical interface with the installed unit. Confirm the normally open or normally closed valve configuration where relevant to the equipment design. A matching model designation alone should not replace a full configuration check.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ5: When should the unheated version be reconsidered for a process installation?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eEvaluate the process gas, ambient temperature, installation environment, and required thermal stability. This model is specified as the standard unheated version, with an operating temperature of 5–50°C. If the process requires temperature control of the controller body or gas path, confirm the appropriate heated configuration with the manufacturer.\u003cstrong\u003e\u003c\/strong\u003e\u003c\/p\u003e","brand":"HORIBA","offers":[{"title":"Default Title","offer_id":68046517731510,"sku":"SEC-Z512KX","price":163.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7863\/8774\/files\/SEC-Z512KX_1_57daa8b7-acb8-4dc6-a348-730e447b9949.jpg?v=1794456002","url":"https:\/\/www.plcsparehub.com\/products\/sec-z512kx-horiba-stec-sec-z500x-mass-flow-controller","provider":"Global PLC Spare Hub","version":"1.0","type":"link"}