{"product_id":"sec-8440f-horiba-stec-heated-mass-flow-controller-sec-8000f-series","title":"SEC-8440F HORIBA STEC Heated Mass Flow Controller SEC-8000F Series","description":"\u003ch3\u003e\u003cstrong\u003eSEC-8440F | HORIBA STEC | SEC-8000F High Temperature Digital Mass Flow Controller\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe \u003cspan style=\"color: #1673b9;\"\u003e\u003cstrong\u003eHORIBA STEC SEC-8440F\u003c\/strong\u003e\u003c\/span\u003e is a high-temperature digital mass flow controller designed for demanding semiconductor gas delivery systems. Its heated sensor section helps maintain stable measurement conditions when process gases tend to condense.\u003c\/p\u003e\n\u003cp\u003eWithin the \u003cspan style=\"color: #1673b9;\"\u003e\u003cstrong\u003eSEC-8000F Series\u003c\/strong\u003e\u003c\/span\u003e, this model combines thermal management, precision flow control, and digital communication. It supports applications involving corrosive or condensable gases, including metalorganic precursors and titanium tetrachloride (TiCl4).\u003c\/p\u003e\n\u003cp\u003eIts electropolished SUS316L wetted surfaces and metal seals support demanding gas-handling requirements. A piezoelectric control valve provides normally open operation when power is removed.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e01 | Engineering Configuration at a Glance\u003c\/strong\u003e\u003c\/h3\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eManufacturer\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eHORIBA STEC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eModel\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan style=\"color: #1673b9;\"\u003e\u003cstrong\u003eSEC-8440F\u003c\/strong\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eProduct Series\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eSEC-8000F High Temperature Digital\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eProduct Type\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eHeated Digital Mass Flow Controller (MFC)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSensor Configuration\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eHeated sensor section, HL or HM type\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eControl Valve\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003ePiezoelectric actuator, normally open when power is off\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eGas Connections\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1\/4-inch VCR\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eCommunication\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eAnalog interface and RS-485 F-Net\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eTypical Applications\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eMOCVD, ALD, and heated corrosive gas delivery\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003ch3\u003e\u003cstrong\u003e02 | Flow Performance and Measurement Characteristics\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe available full-scale ranges cover low-flow and higher-flow process configurations. Select the range according to the required gas flow and operating conditions.\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eFull-Scale Flow Options\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e5, 10, 20, 30, 50, 100, 200, 300, 500 SCCM; 1 and 2 SLM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eReference Gas\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eN2 equivalent\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eAccuracy\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e±1.0% S.P. above 30% FS; ±0.3% FS at or below 30% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eRepeatability\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e±0.2% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eResponse Time\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e≤1 second (T98)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eControl Range\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e2–100% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eLinearity\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e±0.5% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003e\u003cstrong\u003eEngineering note:\u003c\/strong\u003e Accuracy uses two different reference bases. Above 30% FS, it references the setpoint. At or below 30% FS, it references full scale. Do not treat these values as interchangeable during measurement uncertainty calculations.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e03 | Thermal Management and Gas-Wetted Construction\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eCondensation can affect flow measurement and restrict internal gas passages. The heated sensor section helps keep process gas above its condensation threshold.\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eHL Heated Type\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e80–100°C sensor section\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eHM Heated Type\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e100–120°C sensor section\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eValve Section\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e5–45°C ambient operating range\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eWetted Material\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eSUS316L stainless steel\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSurface Finish\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eElectropolished inner surface as standard\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSeal Construction\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eMetal seals\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eLeak Integrity\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e≤5 × 10⁻¹² Pa·m³\/s (He)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003eThe sensor heating configuration requires careful coordination with the process gas temperature profile. The heated section does not automatically guarantee that the complete upstream and downstream gas path remains condensation-free.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e04 | Electrical Interface and Control Architecture\u003c\/strong\u003e\u003c\/h3\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eAnalog Setpoint\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e0.1–5 VDC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eAnalog Output\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e0–5 VDC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eDigital Communication\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eRS-485, F-Net protocol\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eCommunication Speed\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e38,400 bps\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eConnectors\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eD-Sub 9-pin and RJ-45\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePositive Supply\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e+15 VDC ±5%, 150 mA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eNegative Supply\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e−15 VDC ±5%, 150 mA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eActuator\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003ePiezoelectric valve\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePower-Off Valve State\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eNormally open\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003eFor analog integration, confirm the controller's input and output scaling before commissioning. For digital integration, verify F-Net compatibility, RS-485 wiring, connector pin assignments, and host communication settings.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e05 | Process Integration: Where SEC-8440F Adds Value\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eMOCVD gas delivery:\u003c\/strong\u003e Supports controlled delivery of temperature-sensitive precursor gases.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eALD process systems:\u003c\/strong\u003e Helps manage gas flow where condensation can affect measurement stability.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eMetalorganic precursors:\u003c\/strong\u003e Heated sensing supports applications involving condensable process materials.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eTiCl4 delivery:\u003c\/strong\u003e Provides a heated measurement configuration for suitable process gas systems.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCorrosive gas handling:\u003c\/strong\u003e SUS316L wetted surfaces and metal seals support compatible gas-service configurations.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eAlways verify material compatibility against the actual gas composition, concentration, temperature, and pressure. A heated MFC does not replace the need for compatible upstream regulators, tubing, valves, and exhaust arrangements.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e06 | Installation and Commissioning Recommendations\u003c\/strong\u003e\u003c\/h3\u003e\n\u003col\u003e\n\u003cli\u003e\n\u003cstrong\u003eConfirm the gas configuration.\u003c\/strong\u003e Match the selected full-scale range to the process gas and required flow.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCheck the heated option.\u003c\/strong\u003e Verify whether the application requires HL or HM temperature settings.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eInspect the VCR connections.\u003c\/strong\u003e Use compatible fittings and follow the equipment manufacturer's sealing procedure.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eVerify the gas path.\u003c\/strong\u003e Review upstream and downstream temperatures to identify potential condensation points.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCheck the power rails.\u003c\/strong\u003e Confirm both +15 VDC and −15 VDC supplies before applying the setpoint.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eValidate the control interface.\u003c\/strong\u003e Confirm analog scaling or RS-485 F-Net communication before process operation.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePerform a controlled leak test.\u003c\/strong\u003e Follow the facility's approved procedure for the actual process gas.\u003c\/li\u003e\n\u003c\/ol\u003e\n\u003ch3\u003e\u003cstrong\u003e07 | Troubleshooting Insights for Process Engineers\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eUnexpected flow drift:\u003c\/strong\u003e Check gas temperature, pressure stability, and the possibility of condensation in unheated piping.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSlow flow response:\u003c\/strong\u003e Inspect gas supply stability, valve operating conditions, and upstream restrictions.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCommunication failure:\u003c\/strong\u003e Check RS-485 polarity, wiring continuity, host settings, and F-Net compatibility.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eIncorrect analog readings:\u003c\/strong\u003e Verify signal grounding, scaling, and the difference between setpoint and output ranges.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eAbnormal valve behavior:\u003c\/strong\u003e Remember that the valve is normally open when power is off. Include this state in shutdown and safety reviews.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eDo not expose the heated sensor section to process gas until the required thermal conditions are established. Follow the equipment manufacturer's approved warm-up and startup procedure.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e08 | Compliance and Product Handling\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003eRoHS compliant.\u003c\/li\u003e\n\u003cli\u003eDesigned with reference to applicable SEMI requirements.\u003c\/li\u003e\n\u003cli\u003eHelium leak integrity specification: ≤5 × 10⁻¹² Pa·m³\/s.\u003c\/li\u003e\n\u003cli\u003eUse appropriate handling procedures for corrosive, toxic, or condensable gases.\u003c\/li\u003e\n\u003cli\u003eConfirm the exact certification scope and applicable SEMI requirements against the supplied product documentation.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ch3\u003e\u003cstrong\u003e09 | Frequently Asked Questions\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003e\u003cstrong\u003eQ1: How should engineers select the correct full-scale range for a new process recipe?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eChoose a range that accommodates the maximum required flow while preserving useful control resolution. Avoid selecting an unnecessarily large range, especially for low-flow precursor dosing. Confirm the actual gas conversion and recipe operating points before final selection.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ2: Can this controller be installed directly beside an unheated gas line?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eNot without evaluating the complete thermal profile. A heated sensor section cannot prevent condensation in a colder upstream fitting or downstream pipe. Review every potential cold spot between the gas source and process chamber.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ3: What should technicians check when measured flow differs from an external reference instrument?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eFirst, verify gas identity, calibration basis, reference conditions, and pressure stability. Then check the reference instrument's uncertainty and installation position. Comparing different gas calibration factors can produce misleading conclusions.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ4: Does the normally open valve state provide process isolation during a power failure?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eNo. Normally open operation means the valve opens when power is removed. Engineers must assess the resulting gas flow path and provide independent isolation where the process safety design requires it.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ5: What information should buyers provide when requesting a replacement or equivalent unit?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eProvide the complete model number, full-scale range, HL or HM heating configuration, gas type, connection specification, and electrical interface. Include the existing system's communication requirements and installation constraints. These details help prevent configuration mismatches.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e10 | Supply and Ordering Information\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003e\u003cspan style=\"color: #1673b9;\"\u003e\u003cstrong\u003eHORIBA STEC SEC-8440F\u003c\/strong\u003e\u003c\/span\u003e is a specialized heated digital mass flow controller for demanding semiconductor gas applications.\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eBrand:\u003c\/strong\u003e HORIBA STEC\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eModel:\u003c\/strong\u003e SEC-8440F\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSeries:\u003c\/strong\u003e SEC-8000F High Temperature Digital\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eProduct Type:\u003c\/strong\u003e Heated Digital Mass Flow Controller\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eConfiguration Confirmation:\u003c\/strong\u003e Please specify flow range, gas type, and heating option.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eContact our team with your model and application requirements. We can help confirm the product configuration, interface, and availability before ordering.\u003c\/p\u003e","brand":"HORIBA","offers":[{"title":"Default Title","offer_id":68027797700790,"sku":"SEC-8440F","price":115.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7863\/8774\/files\/SEC-Z512KX_1_4bde9f9d-6b31-4957-8d51-ad3cd43a30ed.jpg?v=1794281860","url":"https:\/\/www.plcsparehub.com\/products\/sec-8440f-horiba-stec-heated-mass-flow-controller-sec-8000f-series","provider":"Global PLC Spare Hub","version":"1.0","type":"link"}