{"product_id":"mks-626b52tee-626b-baratron-500-torr-vacuum-capacitance-manometer","title":"MKS 626B52TEE 626B Baratron 500 Torr Vacuum Capacitance Manometer","description":"\u003ch3\u003eOverview\u003c\/h3\u003e\n\u003cp\u003eThe \u003cspan style=\"color: #0056b3;\"\u003e\u003cstrong\u003eMKS Instruments 626B52TEE\u003c\/strong\u003e\u003c\/span\u003e is a premium \u003cspan style=\"color: #0056b3;\"\u003e\u003cstrong\u003eBaratron® 626B Series\u003c\/strong\u003e\u003c\/span\u003e ambient temperature absolute pressure capacitance manometer. This high-precision sensor measures vacuum pressure independently of gas composition across a 500 Torr full scale range. Engineered with an all-welded Inconel® and Incoloy® sensor cavity, the unit delivers high reliability in demanding industrial vacuum processes.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003eKey Features and Architectural Advantages\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eGas-Independent Accuracy:\u003c\/strong\u003e Delivers true absolute pressure readings regardless of process gas composition.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCorrosion-Resistant Construction:\u003c\/strong\u003e Wetted materials feature high-grade Inconel® and Incoloy® alloys for robust process compatibility.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eHigh Overpressure Protection:\u003c\/strong\u003e Withstands overpressure spikes up to 45 psia without internal sensor damage.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eStandard 15-Pin Interface:\u003c\/strong\u003e Features a 15-pin male D-subminiature connector for seamless system integration.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eLinear Analog Output:\u003c\/strong\u003e Provides a high-resolution 0 to +10 VDC output into loads of 10 kΩ or greater.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ch3\u003e\u003cstrong\u003eTechnical Specifications\u003c\/strong\u003e\u003c\/h3\u003e\n\u003ctable border=\"1\" cellpadding=\"6\" cellspacing=\"0\" style=\"border-collapse: collapse; width: 100%;\"\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eBrand\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan style=\"color: #0056b3;\"\u003e\u003cstrong\u003eMKS Instruments\u003c\/strong\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eModel Number\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan style=\"color: #0056b3;\"\u003e\u003cstrong\u003e626B52TEE\u003c\/strong\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eProduct Series\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan style=\"color: #0056b3;\"\u003e\u003cstrong\u003eBaratron® Type 626B Series\u003c\/strong\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eDevice Type\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eAbsolute Pressure Capacitance Manometer \/ Vacuum Transducer\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eFull Scale Range\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e500 Torr (Range Code 52T)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eLowest Suggested Pressure\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e2.5 × 10⁻¹ Torr (reading); 2.5 Torr (control)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eUsable Resolution\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1 × 10⁻⁴ of Full Scale (0.05 Torr)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eAccuracy \u0026amp; Linearity\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e±0.25% of Reading (includes non-linearity, hysteresis, non-repeatability)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eOutput Signal\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e0 to +10 VDC into ≥10 kΩ load\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eInput Power\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e±15 VDC (±5%) @ 35 mA maximum\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eFrequency Response\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eTime constant \u0026lt; 20 milliseconds\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eFitting Type\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eSwagelok® 8-VCO Female (Fittings Code E)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eWetted Materials\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eInconel® and Incoloy® (optional fittings 300-series stainless steel)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eInternal Volume (Px side)\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e6.3 cc\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eOverpressure Limit\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e45 psia (310 kPa) without damage\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eOperating Temperature\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e0 °C to 50 °C (32 °F to 122 °F) ambient\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eTemperature Coefficients\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eZero: 0.005% F.S.\/°C; Span: 0.04% of Reading\/°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eEMC Immunity \u0026amp; Compliance\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eCE compliant (EMC Directive 2004\/108\/EC); RoHS Directive 2002\/95\/EC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003ch3\u003e\u003cstrong\u003eSystem Compatibility and Electrical Interface\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe \u003cspan style=\"color: #0056b3;\"\u003e\u003cstrong\u003e626B52TEE\u003c\/strong\u003e\u003c\/span\u003e manometer connects easily with MKS power supplies, signal conditioners, and standard PLC analog input channels. The unit operates on a standard ±15 VDC power supply. Use fully metal-braided shielded cables grounded at both ends to maintain noise immunity and CE compliance.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003eTypical Industrial Applications\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003eSemiconductor wafer processing and plasma etching chambers.\u003c\/li\u003e\n\u003cli\u003eThin-film solar cell deposition and vacuum coating equipment.\u003c\/li\u003e\n\u003cli\u003ePharmaceutical freeze-drying and vacuum distillation lines.\u003c\/li\u003e\n\u003cli\u003eIndustrial heat treating vacuum furnaces and leak detection systems.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ch3\u003e\u003cstrong\u003eInstallation, Diagnostics, and Maintenance Guidelines\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eMounting Orientation:\u003c\/strong\u003e Install the transducer vertically with the process port facing downward to minimize particulate contamination inside the cell.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eWarm-Up Requirement:\u003c\/strong\u003e Allow a 15-minute warm-up period after applying power to ensure thermal stabilization before zero adjustments.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eZero Calibration:\u003c\/strong\u003e Pump down the system below 1 × 10⁻⁴ of Full Scale. Adjust the zero potentiometer until the signal reads exactly 0.000 VDC.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eFault Diagnostics:\u003c\/strong\u003e A constant output exceeding +10 VDC indicates power rail imbalance or extreme overpressure conditioning. Check cable shield continuity if voltage drift occurs.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ch3\u003e\u003cstrong\u003ePackaging, Commercial Guarantees, and Logistics\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003ePackage Includes:\u003c\/strong\u003e Standard factory-sealed packaging with protective port cover.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eWarranty Terms:\u003c\/strong\u003e Covered by a comprehensive 12-month operational warranty.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eOrder Processing:\u003c\/strong\u003e Ships rapidly within 24 to 48 hours following order confirmation.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eGlobal Delivery:\u003c\/strong\u003e Express worldwide dispatch via FedEx, UPS, and DHL.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ch3\u003e\u003cstrong\u003eGlobal PLC Spare HUB's Insight\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eOur field application engineers frequently integrate the \u003cspan style=\"color: #0056b3;\"\u003e\u003cstrong\u003eMKS 626B52TEE\u003c\/strong\u003e\u003c\/span\u003e into critical vacuum chamber retrofits. In one chemical vapor deposition (CVD) project, RF interference caused analog signal jitter on unshielded cabling. Replacing the cabling with an overall metal-braided shielded cable grounded at both ends instantly restored precise signal control. We recommend installing an isolation valve upstream of the 8-VCO fitting to isolate the gauge during chamber high-pressure vents.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003eSelection Guide and Purchasing Considerations\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003ePressure Range Verification:\u003c\/strong\u003e Choose 500 Torr models when process control occurs predominantly between 2.5 Torr and 500 Torr.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eFitting Selection:\u003c\/strong\u003e Ensure the Swagelok 8-VCO female connector matches your chamber vacuum manifold to prevent seal leaks.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePower Supply Requirements:\u003c\/strong\u003e Verify your controller provides clean ±15 VDC power with ripple under 1%.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ch3\u003e\u003cstrong\u003eFrequently Asked Questions (FAQ)\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003e\u003cstrong\u003eWhat does the 52T range code mean in the 626B52TEE model?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eThe 52T code designates a Full Scale measurement range of 500 Torr.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eCan the MKS 626B52TEE measure pressure directly during gas purge operations?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eYes, capacitance manometers measure true total pressure regardless of gas composition or mixture ratios.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eWhy is a 15-minute warm-up period required before operation?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eThe warm-up time allows internal electronic components and sensor cavity geometry to reach thermal equilibrium.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eHow can I fix baseline zero drift during continuous vacuum runs?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003ePerform zero alignment at base vacuum pressure after the 15-minute warm-up period using the zero adjustment screw.\u003c\/p\u003e\n\u003cp\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0722\/7863\/8774\/files\/626B.png?v=1793609967\" alt=\"\"\u003e\u003c\/p\u003e","brand":"MKS Instruments","offers":[{"title":"Default Title","offer_id":67981998293174,"sku":"626B52TEE","price":135.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7863\/8774\/files\/626B13TBE-1_5a08d674-3071-4470-aadb-7a7f100d32a2.jpg?v=1793676845","url":"https:\/\/www.plcsparehub.com\/products\/mks-626b52tee-626b-baratron-500-torr-vacuum-capacitance-manometer","provider":"Global PLC Spare Hub","version":"1.0","type":"link"}