{"product_id":"horiba-stec-sef-z514kx-mass-flow-meter-sec-z500x-series","title":"HORIBA STEC SEF-Z514KX Mass Flow Meter SEC-Z500X Series","description":"\n\u003ch3\u003e\u003cb\u003eProduct Overview\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong style=\"color:#1677b8;\"\u003eHORIBA STEC SEF-Z514KX\u003c\/strong\u003e is a digital mass flow meter for precise gas flow measurement. It belongs to the SEC-Z500X series and supports configurable multi-gas applications.\u003c\/p\u003e\n\n\u003cp\u003eThe instrument measures gas flow across a full-scale range of \u003cstrong\u003e1\/2 SCCM\u003c\/strong\u003e. Its digital architecture provides stable measurement and reliable communication through the \u003cstrong\u003eDeviceNet interface\u003c\/strong\u003e.\u003c\/p\u003e\n\n\u003cp\u003eThe SEF-Z514KX supports different gas types and measurement ranges through dedicated configuration software. Users can select MR\/MG numbers based on the gas type and required flow range. The software also provides N2 conversion for inspection measurements using nitrogen gas.\u003c\/p\u003e\n\n\u003cp\u003eIts polished 316L stainless steel wetted components support demanding gas delivery systems. The instrument offers flexible installation and integration into industrial gas control equipment.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003eTechnical Specifications\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003ctable\u003e\n  \u003ctbody\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eManufacturer\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eHORIBA STEC\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eModel\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong style=\"color:#1677b8;\"\u003eSEF-Z514KX\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSeries\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eSEC-Z500X\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eProduct Type\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eDigital Mass Flow Meter\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eRelated Controller Model\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eSEC-Z514KX\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eFull-Scale Flow Rate\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1\/2 SCCM (N2 conversion flow rate)\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eFlow Measurement Range\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e0–100% F.S.\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eFlow Control Range\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e2–100% F.S. (related SEC controller specification)\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eAccuracy\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e±1.0% F.S.\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eLinearity\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e≤ ±0.5% F.S.\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eRepeatability\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e≤ ±0.2% F.S.\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eResponse Time\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e≤ 1 second across the full flow range\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eOperating Temperature\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e5 to 50°C\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eRecommended Temperature\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e15 to 45°C\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eOperating Differential Pressure\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e≤ 300 kPa(d)\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eMaximum Operating Pressure\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e450 kPa(g)\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePressure Resistance\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1000 kPa(g)\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eLeak Integrity\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e≤ 5 × 10⁻¹² Pa·m³\/s (He)\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eDigital Communication\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eDeviceNet™ Protocol\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eWetted Materials\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e316L stainless steel, polished surface\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePower Supply\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eDC 24 V, 4.0 VA\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eStandard Connection\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1\/4-inch VCR equivalent\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eOptional Connections\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1.125-inch IGS \/ 1.5-inch IGS\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eValve Configuration\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eO: Normally Open \/ C: Normally Closed (related controller option)\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eMounting Orientation\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eFree orientation\u003c\/td\u003e\n\u003c\/tr\u003e\n  \u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003ch3\u003e\u003cb\u003eKey Features and Engineering Advantages\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n  \u003cli\u003e\n\u003cstrong\u003eConfigurable Gas Measurement:\u003c\/strong\u003e Supports multiple gas types and measurement ranges through dedicated software.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eLow-Flow Measurement:\u003c\/strong\u003e Provides a 1\/2 SCCM full-scale N2 conversion range.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eFast Response:\u003c\/strong\u003e Achieves a response time of one second or less.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eMeasurement Stability:\u003c\/strong\u003e Provides ±0.2% F.S. repeatability and ±0.5% F.S. linearity.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eDigital Communication:\u003c\/strong\u003e Supports DeviceNet integration with compatible control systems.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eCorrosion-Resistant Wetted Parts:\u003c\/strong\u003e Uses polished 316L stainless steel for gas-contact surfaces.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eHigh Leak Integrity:\u003c\/strong\u003e Meets the specified helium leak rate of 5 × 10⁻¹² Pa·m³\/s or less.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eFlexible Installation:\u003c\/strong\u003e Supports different mounting orientations and connection configurations.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ch3\u003e\u003cb\u003eConfiguration Software and Gas Selection\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong\u003eHORIBA STEC configuration software\u003c\/strong\u003e simplifies gas and range selection. Users enter the gas type and required flow range. The software then identifies the appropriate MR\/MG numbers.\u003c\/p\u003e\n\n\u003cp\u003eThe software also includes an N2 conversion function. This function supports flow measurements with nitrogen during receiving inspections.\u003c\/p\u003e\n\n\u003cp\u003eHORIBA STEC offers software operation seminars for users. Contact an authorized HORIBA STEC representative for training information.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003eInstallation Guidelines\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n  \u003cli\u003eVerify the model number and gas configuration before installation.\u003c\/li\u003e\n  \u003cli\u003eConfirm the process gas matches the selected MR\/MG configuration.\u003c\/li\u003e\n  \u003cli\u003eCheck the connection type against the installed gas line.\u003c\/li\u003e\n  \u003cli\u003eUse compatible VCR or specified IGS connection components.\u003c\/li\u003e\n  \u003cli\u003eKeep gas lines clean and free from moisture or particles.\u003c\/li\u003e\n  \u003cli\u003eObserve the specified pressure and temperature limits.\u003c\/li\u003e\n  \u003cli\u003eConnect the DeviceNet network using compatible communication hardware.\u003c\/li\u003e\n  \u003cli\u003eVerify the 24 VDC supply before energizing the instrument.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ch3\u003e\u003cb\u003eCommissioning and Maintenance\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003eCorrect configuration is essential for accurate gas flow measurement. Follow these engineering checks during commissioning:\u003c\/p\u003e\n\n\u003cul\u003e\n  \u003cli\u003e\n\u003cstrong\u003eGas Configuration:\u003c\/strong\u003e Confirm the selected gas type and MR\/MG number.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eRange Verification:\u003c\/strong\u003e Check the full-scale value against the process requirement.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003ePressure Check:\u003c\/strong\u003e Verify differential and operating pressure conditions.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eCommunication Test:\u003c\/strong\u003e Confirm DeviceNet communication with the host controller.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eZero Verification:\u003c\/strong\u003e Check the zero-flow output under stable process conditions.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eLeak Inspection:\u003c\/strong\u003e Inspect all gas connections after installation.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003ePeriodic Inspection:\u003c\/strong\u003e Review measurement stability and process connections.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eUse approved procedures for cleaning and servicing gas-contact components. Avoid unauthorized changes to factory calibration parameters.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003eCompatibility and Integration\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n  \u003cli\u003e\n\u003cstrong\u003eRelated Series:\u003c\/strong\u003e HORIBA STEC SEC-Z500X.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eRelated Model:\u003c\/strong\u003e SEC-Z514KX mass flow controller.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eNetwork Interface:\u003c\/strong\u003e DeviceNet-compatible communication systems.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eConfiguration:\u003c\/strong\u003e HORIBA STEC gas and range configuration software.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003ePower:\u003c\/strong\u003e Compatible 24 VDC supply conforming to ODVA standards.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eProcess Connections:\u003c\/strong\u003e 1\/4-inch VCR equivalent, with specified IGS options.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eVerify the communication configuration, connector pinout, gas calibration, and process fittings before system integration. Do not assume compatibility based only on the series name.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003eSoftware and Communication Accessories\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe configuration setup may require the following accessories:\u003c\/p\u003e\n\n\u003ctable\u003e\n  \u003ctbody\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eComputer\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eWindows-based PC for configuration software.\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eConfiguration Software\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eHORIBA STEC software for gas and range selection.\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eCommunications Converter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eSerial communication converter for RS-485 connections.\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eConversion Adapter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eCA-DP9RJ45 conversion adapter.\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eRS232C Cable\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eConnects the PC to the communications converter.\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eLAN Cable\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eSupports SEC-Z500X communication connections.\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eUSB Serial Converter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eRequired for computers without a serial port.\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eLabel Printer\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eOptional accessory for configuration identification.\u003c\/td\u003e\n\u003c\/tr\u003e\n  \u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003cp\u003e\u003cstrong\u003eSoftware Operating System:\u003c\/strong\u003e Japanese or English Windows 2000, XP, or Vista. These are the operating systems specified in the supplied documentation. Confirm software compatibility before using a modern PC.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003eCertifications and Compliance\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n  \u003cli\u003e\n\u003cstrong\u003eCommunication Standard:\u003c\/strong\u003e DeviceNet™ protocol.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003ePower Standard:\u003c\/strong\u003e ODVA-compliant 24 VDC supply requirements.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eWetted Material:\u003c\/strong\u003e 316L stainless steel.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eAgency Approvals:\u003c\/strong\u003e No specific hazardous-area or safety certification appears in the supplied specifications.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eRequest the applicable manufacturer documentation when your project requires specific regulatory approvals.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003ePackaging and Supply Information\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n  \u003cli\u003eHORIBA STEC SEF-Z514KX mass flow meter.\u003c\/li\u003e\n  \u003cli\u003eStandard product identification and manufacturer documentation, subject to supply configuration.\u003c\/li\u003e\n  \u003cli\u003eConfiguration accessories and communication cables require separate confirmation.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003e\u003cstrong\u003eProduct Condition:\u003c\/strong\u003e New \u0026amp; Original in Factory Packing.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eWarranty:\u003c\/strong\u003e Factory Warranty: 12 Months.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eShipping:\u003c\/strong\u003e FedEx, UPS, and DHL international delivery options.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eLead Time:\u003c\/strong\u003e Contact our sales team for current stock and shipping arrangements.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003eGlobal PLC Spare HUB Review\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong style=\"color:#1677b8;\"\u003eHORIBA STEC SEF-Z514KX\u003c\/strong\u003e suits low-flow gas measurement applications requiring configurable gas ranges. Its DeviceNet interface supports integration with industrial automation networks.\u003c\/p\u003e\n\n\u003cp\u003eEngineers should verify gas calibration and full-scale selection before ordering. The related SEC-Z514KX controller has separate valve and control specifications. Confirm the required instrument type before selecting either model.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003eFrequently Asked Questions (FAQ)\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003e\u003cstrong\u003e1. What is the main function of the HORIBA STEC SEF-Z514KX?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eThe SEF-Z514KX measures gas mass flow within its configured measurement range. It supports low-flow applications and DeviceNet communication.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003e2. What is the difference between SEF-Z514KX and SEC-Z514KX?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eThe SEF-Z514KX is a mass flow meter. The SEC-Z514KX is a mass flow controller with an integrated control valve. Select the meter for monitoring and the controller for active flow regulation.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003e3. How should engineers select the correct gas configuration?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eFirst, identify the process gas and required flow range. Then verify the corresponding MR\/MG number through HORIBA STEC configuration software. Incorrect gas selection can cause measurement errors.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003e4. What should buyers check before ordering this model?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eConfirm the 1\/2 SCCM full-scale range, gas type, connection size, DeviceNet requirements, and operating pressure. Also verify whether the application requires a meter or controller. These checks help prevent installation and compatibility issues.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003e5. Can the SEF-Z514KX connect directly to a modern industrial PC?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eDeviceNet integration requires compatible network hardware and software. The documented configuration software also lists legacy Windows operating systems and serial communication accessories. Confirm current PC and converter compatibility before commissioning.\u003c\/p\u003e","brand":"HORIBA","offers":[{"title":"Default Title","offer_id":68018803310774,"sku":"SEF-Z514KX","price":163.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7863\/8774\/files\/SEC-Z562MGX_1.jpg?v=1794204424","url":"https:\/\/www.plcsparehub.com\/products\/horiba-stec-sef-z514kx-mass-flow-meter-sec-z500x-series","provider":"Global PLC Spare Hub","version":"1.0","type":"link"}