{"product_id":"fc-d982-aera-high-flow-piezoelectric-mfc-metal-sealed-digital-controller","title":"FC-D982 AERA High-Flow Piezoelectric MFC Metal-Sealed Digital Controller","description":"\u003ch3\u003e\u003cstrong\u003eFC-D982 | AERA | FC-D980 Series High-Flow Digital Mass Flow Controller\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe \u003cspan style=\"color: #1673b9;\"\u003e\u003cstrong\u003eAERA FC-D982\u003c\/strong\u003e\u003c\/span\u003e is a high-flow digital mass flow controller designed for semiconductor gas delivery and process equipment. It belongs to the \u003cspan style=\"color: #1673b9;\"\u003e\u003cstrong\u003eFC-D980 Series\u003c\/strong\u003e\u003c\/span\u003e, which combines digital control, piezoelectric actuation, and all-metal sealing.\u003c\/p\u003e\n\u003cp\u003eWith a full-scale capacity of 30–50 slm, the FC-D982 serves applications that require higher gas throughput. Its double VAR type 316L stainless steel construction supports demanding ultra-clean gas systems. Engineers can select standard 1\/4-inch or 3\/8-inch VCR connections according to the installation configuration.\u003c\/p\u003e\n\u003cp\u003eThe controller also supports field-programmable multi-gas operation. It stores up to eight gases, with up to 11 calibration points per gas. This configuration gives process engineers greater flexibility when managing different gas recipes.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e01 | Model Positioning: High-Flow FC-D980 Configuration\u003c\/strong\u003e\u003c\/h3\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eManufacturer\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eAERA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eModel\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan style=\"color: #1673b9;\"\u003e\u003cstrong\u003eFC-D982\u003c\/strong\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eProduct Family\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eFC-D980 Series\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eProduct Type\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eDigital Mass Flow Controller (MFC)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eControl Technology\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eDigital control with piezoelectric valve\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eFlow Capacity\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e30–50 slm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eGas Configuration\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eField-programmable multi-gas\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSealing Design\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eAll-metal seals\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eConnection Options\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1\/4-inch or 3\/8-inch VCR\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003ch3\u003e\u003cstrong\u003e02 | Measurement Performance: Accuracy Across the Operating Range\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe FC-D982 specifies accuracy in two separate flow regions. Engineers should use the appropriate reference basis when calculating process uncertainty.\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eFull-Scale Flow Range\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e30–50 slm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eAccuracy at 25–100% FS\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eWithin ±1% of setpoint\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eAccuracy at 2–25% FS\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eWithin ±0.25% of full scale\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eRepeatability\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eWithin ±0.2% of full scale\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eResponse Time\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eLess than 1 second to within ±2% of setpoint\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eControl Range\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e2–100% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eZero Stability\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eLess than 0.5% FS over one year\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003e\u003cstrong\u003ePerformance interpretation:\u003c\/strong\u003e The accuracy specification changes its reference basis at 25% FS. The upper operating region uses setpoint-based accuracy. The lower region uses full-scale-based accuracy.\u003c\/p\u003e\n\u003cp\u003eFor example, a 50 slm configuration has a lower-region accuracy specification referenced to 50 slm full scale. Engineers should not interpret ±0.25% FS as ±0.25% of the commanded flow.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e03 | Gas Management: Flexible Multi-Gas Configuration\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe digital architecture supports multiple gas configurations within one controller.\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eGas storage:\u003c\/strong\u003e Stores up to eight gas configurations.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCalibration data:\u003c\/strong\u003e Supports up to 11 calibration points per gas.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eGas selection:\u003c\/strong\u003e Allows field-programmable gas configuration.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eProcess flexibility:\u003c\/strong\u003e Supports equipment that uses multiple gas recipes.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eGas selection and calibration data must match the actual process gas. Do not assume that one gas calibration automatically provides accurate measurement for another gas.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e04 | Wetted Construction: Ultra-Clean Gas Path\u003c\/strong\u003e\u003c\/h3\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eWetted Material\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eDouble VAR type 316L stainless steel\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSurface Treatment\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eElectropolished and ultra-cleaned\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSurface Finish\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1 Ra (0.025 µm), as specified\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSealing Method\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eAll-metal seals\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eFitting Options\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1\/4-inch or 3\/8-inch VCR\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eHelium Leak Rate\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1 × 10⁻¹⁰ atm·cc\/sec maximum\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003eThe double VAR 316L construction and electropolished surface support clean gas delivery. Metal sealing avoids reliance on elastomer seals in the specified gas-wetted sealing configuration.\u003c\/p\u003e\n\u003cp\u003eBefore installation, verify the gas compatibility of all wetted components. Stainless steel and metal seals do not guarantee compatibility with every corrosive gas or process condition.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e05 | Pressure and Environmental Operating Window\u003c\/strong\u003e\u003c\/h3\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eOperating Differential Pressure\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e28–40 psiD (194–275 kPaD)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eMaximum Operating Pressure\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e70 psig (490 kPaG)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eProof Pressure\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e140 psig (981 kPaG)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eOperating Temperature\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e5–45°C (41–113°F)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eHeated Configuration\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eNo; standard unheated version\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003eMaintain the specified differential pressure during operation. The maximum operating pressure and proof pressure describe different limits. Proof pressure does not represent an allowable continuous operating condition.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e06 | Electrical Control and Valve Architecture\u003c\/strong\u003e\u003c\/h3\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eAnalog Setpoint\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e0–5 VDC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eAnalog Output\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e0–5 VDC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eDigital Interface\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eRS-485\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eConnector\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e20-pin Honda connector\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePositive Supply\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e+15 VDC ±2%, 120 mA minimum\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eNegative Supply\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e−15 VDC ±2%, 50 mA minimum\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eMaximum Power\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1.3 W\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eValve Technology\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003ePiezoelectric actuator\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eValve Configuration\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eNormally open or normally closed\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003eThe specified valve configuration can be normally open or normally closed. Confirm the actual valve option before connecting the controller to a process gas supply.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e07 | Mechanical Envelope and Installation Interface\u003c\/strong\u003e\u003c\/h3\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eHeight\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e142 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eWidth\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e38 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eDepth\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e183.8 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePort-to-Port Dimension\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e183.8 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eWeight\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1.8 kg (3.9 lb)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003eCheck the outline drawing before modifying the gas panel. Confirm port orientation, service clearance, fitting size, and mounting position. The 3\/8-inch VCR option may affect the required installation space.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e08 | Semiconductor Process Applications\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eCVD:\u003c\/strong\u003e Controls process gas delivery in chemical vapor deposition equipment.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePVD:\u003c\/strong\u003e Supports gas-flow control in physical vapor deposition systems.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eEtching:\u003c\/strong\u003e Provides controlled gas delivery for plasma etch processes.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eDiffusion:\u003c\/strong\u003e Supports gas supply in semiconductor thermal processing equipment.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eIon implantation:\u003c\/strong\u003e Provides flow control for compatible gas delivery systems.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSputtering:\u003c\/strong\u003e Supports gas regulation in sputtering process equipment.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ch3\u003e\u003cstrong\u003e09 | Commissioning and Maintenance: Practical Checks\u003c\/strong\u003e\u003c\/h3\u003e\n\u003col\u003e\n\u003cli\u003e\n\u003cstrong\u003eVerify the full-scale range.\u003c\/strong\u003e Confirm that the installed unit matches the process flow requirement.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCheck the gas selection.\u003c\/strong\u003e Confirm the programmed gas and calibration data before applying a setpoint.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eConfirm the valve option.\u003c\/strong\u003e Identify normally open or normally closed operation from the unit configuration.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eInspect the VCR connections.\u003c\/strong\u003e Match the fitting size and sealing hardware to the gas panel.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCheck pressure conditions.\u003c\/strong\u003e Maintain the required differential pressure during flow verification.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eValidate electrical signals.\u003c\/strong\u003e Confirm supply polarity, analog scaling, and RS-485 communication.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eVerify zero stability.\u003c\/strong\u003e Check zero output under the manufacturer's specified conditions before evaluating low-flow performance.\u003c\/li\u003e\n\u003c\/ol\u003e\n\u003cp\u003eFor process troubleshooting, separate gas-supply problems from controller-related problems. Check inlet pressure, outlet pressure, gas selection, and signal scaling before adjusting the flow-control system.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e10 | Compliance and Product Identification\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eRoHS:\u003c\/strong\u003e Compliant as specified.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSEMI reference:\u003c\/strong\u003e SEMI E17-91.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSeries architecture:\u003c\/strong\u003e Digital, piezoelectric, metal-sealed FC-D980 family.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eConfiguration:\u003c\/strong\u003e Standard unheated version.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eConfirm the applicable compliance documentation and product revision before using the unit in a regulated equipment qualification process.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e11 | Frequently Asked Questions\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003e\u003cstrong\u003eQ1: What is the practical difference between a 30 slm and a 50 slm configuration?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eThe selected full-scale range determines the measurement and control span. A 30 slm unit may suit a process with lower maximum demand. A 50 slm unit provides greater capacity when the recipe requires higher flow. Compare actual operating points rather than selecting solely by maximum process demand.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ2: Can the stored gas configurations be changed during equipment operation?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eThe controller supports field-programmable gas configurations. However, the safe procedure for changing gases depends on the equipment control system and process recipe. Confirm the gas-selection command, transition sequence, and interlocks before implementing changes during production.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ3: How should engineers evaluate low-flow performance during acceptance testing?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eUse a calibrated reference instrument with suitable uncertainty at the intended test point. Stabilize gas pressure and temperature first. Then compare readings against the full-scale-based accuracy limit applicable below 25% FS. Avoid using the upper-range accuracy formula for low-flow acceptance.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ4: What could cause unstable readings after replacing the gas panel fittings?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eCheck fitting alignment, VCR sealing surfaces, gas leakage, and mechanical stress on the controller ports. Also verify that the replacement fittings match the original connection dimensions. A leak or installation strain can affect process stability even when the electrical interface remains correct.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ5: How should maintenance teams assess long-term zero drift?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eRecord zero readings under consistent gas isolation, pressure, and environmental conditions. Compare results over time against the specified annual zero stability. If the reading changes unexpectedly, inspect leakage, residual gas, contamination, and the test setup before concluding that the controller requires recalibration.\u003cstrong\u003e\u003c\/strong\u003e\u003c\/p\u003e","brand":"AERA","offers":[{"title":"Default Title","offer_id":68027810644150,"sku":"FC-D982","price":147.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7863\/8774\/files\/FC-D982.jpg?v=1794282663","url":"https:\/\/www.plcsparehub.com\/products\/fc-d982-aera-high-flow-piezoelectric-mfc-metal-sealed-digital-controller","provider":"Global PLC Spare Hub","version":"1.0","type":"link"}