{"product_id":"fc-d980-aera-fc-d980-series-multi-gas-mass-flow-controller","title":"FC-D980 AERA FC-D980 Series Multi-Gas Mass Flow Controller","description":" \u003ch3\u003e\u003cstrong\u003eAERA FC-D980 Digital Mass Flow Controller\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong\u003eAERA FC-D980\u003c\/strong\u003e is a digital mass flow controller designed for accurate gas delivery in semiconductor process equipment. It combines a \u003cstrong\u003epiezoelectric control valve\u003c\/strong\u003e, an all-metal sealing structure, and programmable multi-gas calibration. Its digital architecture supports repeatable flow control across multiple gas types and measurement ranges.\u003c\/p\u003e\n\n\u003cp\u003eThe FC-D980 Series covers full-scale flow ranges from \u003cstrong\u003e3 sccm to 5 slm\u003c\/strong\u003e, expressed as nitrogen-equivalent flow. It provides analog control and monitoring alongside RS-485 communication. This configuration suits process systems that require precise gas regulation, stable low-flow operation, and clean gas-contact surfaces.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e01 | Flow Control Performance\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe FC-D980 maintains specified accuracy across its operating range. Its performance profile supports both higher-flow operation and lower setpoints.\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eFull-scale flow range:\u003c\/strong\u003e 3 sccm to 5 slm, multi-range, N2 equivalent\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eAccuracy from 25% to 100% FS:\u003c\/strong\u003e Within ±1% of set point\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eAccuracy from 2% to 25% FS:\u003c\/strong\u003e Within ±0.25% of full scale\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eRepeatability:\u003c\/strong\u003e Within ±0.2% of full scale\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eControl range:\u003c\/strong\u003e 2% to 100% FS\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eResponse time:\u003c\/strong\u003e Less than 1 second to within ±2% of set point\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eActual-flow settling time:\u003c\/strong\u003e 0.5 second between set points\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eZero stability:\u003c\/strong\u003e Less than 0.5% of full-scale flow over one year\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eAccuracy references change with the operating range. Engineers should therefore evaluate the required flow setpoint against the selected full-scale range. A suitable range helps maintain the required control resolution without unnecessarily oversizing the controller.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e02 | Programmable Gas Calibration\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe FC-D980 supports multi-gas operation through field-programmable calibration. It can store up to \u003cstrong\u003eeight gas configurations\u003c\/strong\u003e, with up to \u003cstrong\u003e11 calibration points per gas\u003c\/strong\u003e.\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003eSupports multiple gas types through programmable gas calibration\u003c\/li\u003e\n\u003cli\u003eStores up to eight gas configurations\u003c\/li\u003e\n\u003cli\u003eProvides up to 11 calibration points for each stored gas\u003c\/li\u003e\n\u003cli\u003eSupports multiple full-scale ranges within the product series\u003c\/li\u003e\n\u003cli\u003eUses nitrogen-equivalent flow as the stated reference for flow range\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eWhen configuring a gas recipe, confirm that the selected gas and calibration data match the actual process requirement. Do not assume that changing the gas selection alone validates every process condition. Verify the applicable calibration, pressure conditions, and full-scale range before commissioning.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e03 | Clean Gas Path and Metal-Sealed Construction\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eGas-contact material selection is important in semiconductor equipment. The FC-D980 uses \u003cstrong\u003edouble VAR type 316L stainless steel\u003c\/strong\u003e for its wetted construction. Gas-contact surfaces receive electropolishing and ultra-cleaning to a stated surface finish of \u003cstrong\u003e1 Ra (0.025 μm)\u003c\/strong\u003e.\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eWetted material:\u003c\/strong\u003e Double VAR type 316L stainless steel\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSurface treatment:\u003c\/strong\u003e Electropolished and ultra-cleaned\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSurface finish:\u003c\/strong\u003e 1 Ra (0.025 μm)\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSeal construction:\u003c\/strong\u003e All-metal seals\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eLeak integrity:\u003c\/strong\u003e 1 × 10\u003csup\u003e-10\u003c\/sup\u003e atm-cc\/sec He maximum\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eThe all-metal sealing arrangement avoids elastomer seals in the specified gas-wetted sealing structure. This design is relevant when evaluating gas compatibility, contamination control, and leak integrity in clean process systems.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e04 | Piezoelectric Valve and Pressure Limits\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eA piezoelectric valve regulates gas flow in response to the controller's demand signal. The FC-D980 is available with a \u003cstrong\u003enormally-open or normally-closed valve configuration\u003c\/strong\u003e. Confirm the required valve behavior when selecting the unit for a specific process or equipment design.\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eValve type:\u003c\/strong\u003e Piezoelectric\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eAvailable valve action:\u003c\/strong\u003e Normally open or normally closed\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eOperating differential pressure:\u003c\/strong\u003e 7 to 40 psiD (49 to 275 kPaD)\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eMaximum operating pressure:\u003c\/strong\u003e 70 psig (490 kPaG)\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eProof pressure:\u003c\/strong\u003e 140 psig (981 kPaG)\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eHeated configuration:\u003c\/strong\u003e Standard unheated version\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eOperating differential pressure and maximum inlet pressure describe different conditions. Check both values against the actual gas supply and downstream process pressure. The proof-pressure rating is not a normal operating target.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e05 | Electrical Interface and Control Integration\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe FC-D980 combines analog signals with digital communication for equipment integration. Its electrical interface supports analog setpoint and flow output signals, together with an RS-485 connection.\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eAnalog input:\u003c\/strong\u003e 0 to 5 VDC\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eAnalog output:\u003c\/strong\u003e 0 to 5 VDC\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eDigital communication:\u003c\/strong\u003e RS-485\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eRS-232 support:\u003c\/strong\u003e Available through a converter\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eConnector:\u003c\/strong\u003e 20-pin Honda connector\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePositive supply:\u003c\/strong\u003e +15 VDC ±2%, 120 mA minimum\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eNegative supply:\u003c\/strong\u003e -15 VDC ±2%, 50 mA minimum\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eMaximum power consumption:\u003c\/strong\u003e 1.3 W\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eBefore connecting the controller, verify the equipment-side pin assignment and power supply capacity. Confirm analog signal scaling and communication settings against the system configuration. The RS-232 connection requires a suitable converter rather than a direct assumption of native RS-232 support.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e06 | Mechanical and Environmental Data\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003ctable\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eParameter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSpecification\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eModel\u003c\/td\u003e\n\u003ctd\u003eFC-D980\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eManufacturer\u003c\/td\u003e\n\u003ctd\u003eAERA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eProduct series\u003c\/td\u003e\n\u003ctd\u003eFC-D980 Series\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eProduct type\u003c\/td\u003e\n\u003ctd\u003eDigital piezoelectric metal-sealed mass flow controller\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eDimensions (H × W × D)\u003c\/td\u003e\n\u003ctd\u003e129 × 38 × 124 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePort-to-port dimension\u003c\/td\u003e\n\u003ctd\u003e124 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eWeight\u003c\/td\u003e\n\u003ctd\u003e1.0 kg (2.2 lb)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOperating temperature\u003c\/td\u003e\n\u003ctd\u003e5 to 45°C (41 to 113°F)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHeated option\u003c\/td\u003e\n\u003ctd\u003eNo; standard unheated version\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eCompliance\u003c\/td\u003e\n\u003ctd\u003eRoHS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSettling-time reference\u003c\/td\u003e\n\u003ctd\u003eSEMI E17-91\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/table\u003e\n\n\u003cp\u003eUse the stated outline dimensions when checking equipment-panel clearance and mounting space. Confirm the mechanical interface and port arrangement against the applicable outline drawing before preparing gas lines.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e07 | Semiconductor Process Applications\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe FC-D980 is intended for gas delivery applications in semiconductor manufacturing equipment. Its programmable calibration and metal-sealed gas path support integration into systems that require controlled gas flow.\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eChemical Vapor Deposition (CVD):\u003c\/strong\u003e Regulates process-gas delivery to deposition equipment.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePhysical Vapor Deposition (PVD):\u003c\/strong\u003e Supports controlled gas supply for deposition processes.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePlasma etching:\u003c\/strong\u003e Controls gas flow for process-gas delivery.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eDiffusion:\u003c\/strong\u003e Supports repeatable gas delivery in thermal process equipment.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eIon implantation:\u003c\/strong\u003e Provides controlled gas flow within applicable equipment configurations.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSputtering:\u003c\/strong\u003e Supports gas regulation in sputtering process systems.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ch3\u003e\u003cstrong\u003e08 | Engineering Checks Before Installation\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003col\u003e\n\u003cli\u003e\n\u003cstrong\u003eConfirm the flow range:\u003c\/strong\u003e Match the selected full-scale range to the process flow requirement. Check the required setpoint against the 2% to 100% FS control range.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eVerify gas calibration:\u003c\/strong\u003e Confirm the stored gas selection and calibration data before introducing process gas.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCheck pressure conditions:\u003c\/strong\u003e Keep differential pressure within 7 to 40 psiD and operating pressure within the stated maximum.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eInspect gas connections:\u003c\/strong\u003e Maintain clean connection practices to protect the electropolished gas path from contamination.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eVerify electrical compatibility:\u003c\/strong\u003e Check the ±15 VDC supply, 20-pin connector, analog signals, and RS-485 interface.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eConfirm valve action:\u003c\/strong\u003e Select the normally-open or normally-closed configuration that matches the equipment design.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eValidate flow response:\u003c\/strong\u003e Check settling behavior under the actual gas, pressure, and system conditions after installation.\u003c\/li\u003e\n\u003c\/ol\u003e\n\n\u003ch3\u003e\u003cstrong\u003e09 | Maintenance and Process Diagnostics\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eStable flow control depends on the gas supply, pressure conditions, electrical signals, and calibration configuration. When measured flow differs from the commanded setpoint, check the complete delivery path before replacing the controller.\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eFlow offset:\u003c\/strong\u003e Compare the commanded setpoint with the measured output and verify the selected gas calibration.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSlow settling:\u003c\/strong\u003e Check upstream pressure stability, downstream restrictions, and gas-line volume.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eUnstable readings:\u003c\/strong\u003e Inspect supply voltage, grounding, signal wiring, and pressure fluctuations.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCommunication faults:\u003c\/strong\u003e Verify RS-485 wiring and the host communication configuration.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eUnexpected valve behavior:\u003c\/strong\u003e Confirm whether the installed unit uses normally-open or normally-closed valve action.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eLong-term drift:\u003c\/strong\u003e Review zero stability and calibration history before changing process setpoints.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eThe FC-D980 includes multiple alarm and diagnostic functions. Use the applicable equipment documentation to interpret diagnostic indications and determine corrective actions. Avoid opening or modifying the gas-control assembly without an approved service procedure.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e10 | Frequently Asked Questions\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ1: How should engineers select the full-scale range for a process with changing flow demand?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eChoose a range that covers the highest expected process demand while keeping normal operating points within the specified control range. If the process spends most of its time near the lower limit, review the accuracy specification for the 2% to 25% FS region. For recipes with significantly different flow requirements, evaluate whether separate ranges are necessary.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ2: What should be checked when a gas recipe is changed in the controller?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eVerify the selected gas identity, stored calibration, and applicable calibration points. Also confirm the gas supply pressure and process requirements. A gas selection change should not replace a system-level verification of flow performance.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ3: Why can the installed controller show different settling behavior from the stated specification?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eThe stated response time describes controller performance under defined test conditions. Actual system behavior can also depend on upstream pressure stability, downstream volume, tubing restrictions, and the process gas. Check these conditions before treating a longer system settling time as a controller fault.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ4: What is the practical difference between normally-open and normally-closed valve configurations?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eThe distinction describes the valve's default mechanical state when its actuating power is removed. Engineers should select the configuration according to the equipment's gas isolation and process safety design. Confirm the required behavior with the system designer rather than assuming both versions respond identically during a power interruption.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ5: What information should be prepared when replacing an FC-D980 in existing equipment?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eRecord the full-scale flow range, gas calibration, valve action, operating pressure, connector pinout, analog signal scaling, and communication requirements. Also compare the port-to-port dimension and mechanical outline with the installed unit. These checks help identify configuration differences before the replacement enters service.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003eProduct Summary\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong\u003eAERA FC-D980\u003c\/strong\u003e combines digital multi-gas calibration, piezoelectric flow regulation, and an all-metal gas sealing structure. Its 3 sccm to 5 slm range, 0 to 5 VDC analog interface, and RS-485 communication support semiconductor gas delivery systems. For equipment selection, confirm the required gas calibration, full-scale range, pressure conditions, valve action, and electrical configuration.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eContact us for FC-D980 product information, configuration verification, and a quotation.\u003c\/strong\u003e\u003c\/p\u003e","brand":"AERA","offers":[{"title":"Default Title","offer_id":68027805892790,"sku":"FC-D980","price":118.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7863\/8774\/files\/FC-D980_3.jpg?v=1794282312","url":"https:\/\/www.plcsparehub.com\/products\/fc-d980-aera-fc-d980-series-multi-gas-mass-flow-controller","provider":"Global PLC Spare Hub","version":"1.0","type":"link"}