{"product_id":"fc-770a-aera-fc-7700-series-analog-mass-flow-controller","title":"FC-770A AERA FC-7700 Series Analog Mass Flow Controller","description":"\u003ch3\u003e\u003cstrong\u003eAERA FC-770A | Analog Flow Control for Semiconductor Gas Systems\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe \u003cstrong\u003eFC-770A\u003c\/strong\u003e is an analog mass flow controller from the AERA FC-7700 Series. It is designed for precise flow regulation in semiconductor process equipment using compatible non-corrosive gases.\u003c\/p\u003e\n\u003cp\u003eIts 3-digit analog design combines a compact installation footprint with a 20-pin card-edge electrical connection. The controller accepts a 0–5 VDC command and provides a corresponding analog output.\u003c\/p\u003e\n\u003cp\u003eWith full-scale ranges from 10 sccm to 5 slm, the FC-770A supports different gas delivery requirements. Its elastomer-sealed construction is intended for applications where the process gas and sealing materials are compatible.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e01 | Control Performance at a Glance\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eFlow range:\u003c\/strong\u003e 10 sccm to 5 slm, depending on the configured full-scale range.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eAccuracy:\u003c\/strong\u003e ≤ ±1% of full scale.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eRepeatability:\u003c\/strong\u003e ≤ ±0.2% of full scale.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eLinearity:\u003c\/strong\u003e ≤ ±0.5% of full scale.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eControl range:\u003c\/strong\u003e 2–100% of full scale.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eZero stability:\u003c\/strong\u003e Less than 0.5% of full-scale flow over one year.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eResponse:\u003c\/strong\u003e Less than 2 seconds for flow settling between set points.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e\u003cstrong\u003eEngineering note:\u003c\/strong\u003e Accuracy and repeatability are specified as percentages of full scale, not percentages of the instantaneous reading. This distinction matters when selecting a low-flow range. For example, a 1% FS accuracy specification represents a larger absolute flow deviation at a 5 slm range than at a 500 sccm range.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e02 | Gas Path and Sealing Construction\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe wetted construction uses stainless steel 316(L), PTFE, and magnetic stainless steel. Elastomer seals are available in fluoroelastomer or chloroprene rubber configurations.\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eWetted materials:\u003c\/strong\u003e Stainless steel 316(L), PTFE, and magnetic stainless.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSeal materials:\u003c\/strong\u003e Fluoroelastomer or chloroprene rubber.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eValve mechanism:\u003c\/strong\u003e Solenoid valve.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eValve position:\u003c\/strong\u003e Normally open.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eLeak integrity:\u003c\/strong\u003e Maximum 1 × 10\u003csup\u003e-6\u003c\/sup\u003e atm-cc\/sec (He).\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eHeating:\u003c\/strong\u003e Standard unheated configuration.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eSeal selection should follow the actual process gas, temperature, and cleaning requirements. Do not assume that one elastomer option is suitable for every gas. Oxygen service requires separate compatibility and cleanliness verification.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e03 | Pressure Conditions and Installation Envelope\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003ePressure conditions must be evaluated separately during system design. The differential pressure requirement is not interchangeable with the inlet pressure rating.\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eRequired differential pressure:\u003c\/strong\u003e 7–40 psiD.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eNormal operating pressure:\u003c\/strong\u003e 70 psig.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eMaximum inlet pressure:\u003c\/strong\u003e 140 psig.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eOperating temperature:\u003c\/strong\u003e 5–45°C (41–113°F).\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eDimensions (H × W × D):\u003c\/strong\u003e 122 × 32 × 124 mm.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eWeight:\u003c\/strong\u003e 1.0 kg (2.2 lb).\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eConfirm the available pressure drop across the controller under actual operating conditions. A suitable inlet pressure alone does not guarantee the required differential pressure. Also verify that downstream pressure changes will not compromise the available control margin.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e04 | Analog Interface and Electrical Requirements\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe FC-770A uses a 0–5 VDC analog command and output interface. Electrical integration requires a compatible AERA 20-pin card-edge connector.\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eCommand signal:\u003c\/strong\u003e 0–5 VDC.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eOutput signal:\u003c\/strong\u003e 0–5 VDC.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eConnector:\u003c\/strong\u003e AERA 20-pin card-edge connector.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePositive supply:\u003c\/strong\u003e +15 VDC ±2%, 25 mA.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eNegative supply:\u003c\/strong\u003e -15 VDC ±2%, 180 mA.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eMaximum power consumption:\u003c\/strong\u003e 3.1 W.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eBefore connecting the controller, check the host equipment's pin assignment and signal reference. Do not rely on connector shape alone to establish electrical compatibility. Verify supply polarity, grounding, command scaling, and output scaling against the applicable wiring documentation.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e05 | Where the FC-770A Fits in a Process\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThis model is intended for semiconductor equipment requiring analog gas flow regulation. Typical applications include:\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eCVD:\u003c\/strong\u003e Regulating compatible process gas delivery to deposition chambers.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePVD:\u003c\/strong\u003e Controlling gas flow used in physical vapor deposition systems.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eEtching:\u003c\/strong\u003e Managing non-corrosive gas flow in compatible process configurations.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eDiffusion:\u003c\/strong\u003e Supporting controlled gas delivery during thermal processing.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eIon implantation:\u003c\/strong\u003e Providing analog flow control in supporting gas systems.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSputtering:\u003c\/strong\u003e Regulating compatible gas feeds for sputtering equipment.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eGas compatibility must be confirmed for each application. The listed material construction does not establish universal compatibility with every process gas.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e06 | Selection and Commissioning Checks\u003c\/strong\u003e\u003c\/h3\u003e\n\u003col\u003e\n\u003cli\u003e\n\u003cstrong\u003eConfirm the full-scale range.\u003c\/strong\u003e Match the configured range to the required process flow. Avoid selecting a range substantially larger than the normal operating demand.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eVerify gas calibration.\u003c\/strong\u003e Confirm the calibration gas and gas correction requirements before comparing indicated flow with the process target.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCheck pressure conditions.\u003c\/strong\u003e Confirm the differential pressure remains within the specified 7–40 psiD requirement.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eInspect the electrical interface.\u003c\/strong\u003e Verify the 20-pin connector, ±15 VDC supply, analog signal wiring, and signal reference.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eReview seal compatibility.\u003c\/strong\u003e Confirm the installed elastomer type is suitable for the intended gas and operating environment.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCheck the valve response.\u003c\/strong\u003e Verify the flow settles correctly after set-point changes under the actual pressure and gas conditions.\u003c\/li\u003e\n\u003c\/ol\u003e\n\u003ch3\u003e\u003cstrong\u003e07 | Technical Specifications\u003c\/strong\u003e\u003c\/h3\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eParameter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSpecification\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eModel\u003c\/td\u003e\n\u003ctd\u003eFC-770A\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eBrand\u003c\/td\u003e\n\u003ctd\u003eAERA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSeries\u003c\/td\u003e\n\u003ctd\u003eFC-7700 Series\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eProduct type\u003c\/td\u003e\n\u003ctd\u003e3-digit analog mass flow controller\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFull-scale flow range\u003c\/td\u003e\n\u003ctd\u003e10 sccm to 5 slm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eGas service\u003c\/td\u003e\n\u003ctd\u003eInert gases; verify individual gas compatibility\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAccuracy\u003c\/td\u003e\n\u003ctd\u003e≤ ±1% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eRepeatability\u003c\/td\u003e\n\u003ctd\u003e≤ ±0.2% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eLinearity\u003c\/td\u003e\n\u003ctd\u003e≤ ±0.5% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eResponse time\u003c\/td\u003e\n\u003ctd\u003e\u0026lt; 2 seconds flow-settling time between set points\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eControl range\u003c\/td\u003e\n\u003ctd\u003e2–100% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eZero stability\u003c\/td\u003e\n\u003ctd\u003e\u0026lt; 0.5% FS over one year\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eDifferential pressure\u003c\/td\u003e\n\u003ctd\u003e7–40 psiD\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eNormal operating pressure\u003c\/td\u003e\n\u003ctd\u003e70 psig\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMaximum inlet pressure\u003c\/td\u003e\n\u003ctd\u003e140 psig\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eWetted materials\u003c\/td\u003e\n\u003ctd\u003eStainless steel 316(L), PTFE, magnetic stainless\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSeal materials\u003c\/td\u003e\n\u003ctd\u003eFluoroelastomer or chloroprene rubber\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eValve type\u003c\/td\u003e\n\u003ctd\u003eSolenoid, normally open\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eLeak integrity\u003c\/td\u003e\n\u003ctd\u003e1 × 10\u003csup\u003e-6\u003c\/sup\u003e atm-cc\/sec (He) maximum\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAnalog command\u003c\/td\u003e\n\u003ctd\u003e0–5 VDC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAnalog output\u003c\/td\u003e\n\u003ctd\u003e0–5 VDC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eElectrical connector\u003c\/td\u003e\n\u003ctd\u003eAERA 20-pin card-edge connector\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePower supply\u003c\/td\u003e\n\u003ctd\u003e+15 VDC ±2%, 25 mA; -15 VDC ±2%, 180 mA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMaximum power\u003c\/td\u003e\n\u003ctd\u003e3.1 W\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOperating temperature\u003c\/td\u003e\n\u003ctd\u003e5–45°C (41–113°F)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHeated option\u003c\/td\u003e\n\u003ctd\u003eNo; standard unheated version\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eDimensions (H × W × D)\u003c\/td\u003e\n\u003ctd\u003e122 × 32 × 124 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eWeight\u003c\/td\u003e\n\u003ctd\u003e1.0 kg (2.2 lb)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eCompliance\u003c\/td\u003e\n\u003ctd\u003eRoHS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003ch3\u003e\u003cstrong\u003e08 | Frequently Asked Questions\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003e\u003cstrong\u003eQ1: Can the FC-770A be installed as a direct replacement for another analog MFC?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eNot automatically. Check the mounting dimensions, gas connections, full-scale range, connector pinout, supply requirements, and analog signal scaling. Two controllers with similar footprints may use different electrical assignments or calibration data. Complete these checks before installation.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ2: What should be checked if the displayed flow does not match the process flow reference?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eFirst, confirm that both instruments use the same engineering units and reference conditions. Then check the gas calibration, full-scale range, pressure conditions, and analog output scaling. A difference in gas calibration can produce a consistent offset even when the controller operates normally.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ3: Why can flow become unstable after a gas line or regulator is changed?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eA regulator change can alter the pressure available across the controller. Check upstream pressure stability, downstream backpressure, regulator capacity, and line restrictions. Confirm that the differential pressure remains within the required range before adjusting the control system.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ4: What does the normally-open valve configuration mean during a power interruption?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eThe valve is specified as normally open. Its mechanical default position is therefore open when the actuating power is removed. Consider this behavior in the equipment's gas isolation and safety design. Do not treat the controller as a fail-closed shutoff device.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ5: How should a replacement unit be verified before returning equipment to production?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eCompare the replacement's range, gas calibration, seal material, connector wiring, and power requirements with the installed configuration. After installation, perform a leak check and verify zero output, several flow set points, and response stability. Follow the equipment manufacturer's approved commissioning procedure before releasing the gas system.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e9 | Ordering Information\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eWhen requesting an AERA FC-770A, provide the complete model number and available configuration details. Include the required full-scale flow range, process gas, seal material, pressure conditions, and connector requirements.\u003c\/p\u003e\n\u003cp\u003eFor replacement or retrofit projects, photographs of the nameplate and electrical connector can help verify the configuration before ordering.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eContact us for pricing, availability, and technical assistance for the AERA FC-770A.\u003c\/strong\u003e\u003c\/p\u003e","brand":"AERA","offers":[{"title":"Default Title","offer_id":68027813396662,"sku":"FC-770A","price":148.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7863\/8774\/files\/FC-770AC.jpg?v=1794282753","url":"https:\/\/www.plcsparehub.com\/products\/fc-770a-aera-fc-7700-series-analog-mass-flow-controller","provider":"Global PLC Spare Hub","version":"1.0","type":"link"}