{"product_id":"e28h11tde2b-mks-instruments-600-series-etch-pressure-transducer","title":"E28H11TDE2B MKS Instruments 600 Series Etch Pressure Transducer","description":" \u003ch3\u003e\u003cb\u003eMKS Instruments E28H11TDE2B – 100°C Heated Etch Baratron Sensor\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong\u003eE28H11TDE2B\u003c\/strong\u003e is a 100°C heated absolute pressure sensor from the \u003cstrong\u003eMKS Instruments E28H 600 Series\u003c\/strong\u003e. It uses capacitance diaphragm technology to measure low absolute pressures with high repeatability.\u003c\/p\u003e\n\n\u003cp\u003eDesigned for semiconductor etch applications, this sensor maintains a controlled sensor temperature to support stable pressure measurement. Its integrated patented etch baffle features a sump design that helps protect the sensing area in demanding process environments.\u003c\/p\u003e\n\n\u003cp\u003eThe unit provides a 0–10 VDC analog output and has no built-in trip points. A heater status LED provides a local indication of heater operation. The NW16 ISO-KF fitting supports connection to compatible vacuum lines.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e01 | Configuration Breakdown\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe ordering code identifies the sensor family, pressure range, fitting, electrical connection, and configuration options. The following breakdown is based on the supplied configuration information. Calibration-related suffix definitions require confirmation against the official MKS ordering code documentation.\u003c\/p\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003cth\u003eCode Segment\u003c\/th\u003e\n\u003cth\u003eConfiguration\u003c\/th\u003e\n\u003cth\u003eSupplied Interpretation\u003c\/th\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eE28H\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eProduct family\u003c\/td\u003e\n\u003ctd\u003e100°C heated E28H etch Baratron sensor\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003e11T\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003ePressure range\u003c\/td\u003e\n\u003ctd\u003e10 Torr full scale\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eD\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eFitting\u003c\/td\u003e\n\u003ctd\u003eNW16 ISO-KF connection\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eE\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eConfiguration option\u003c\/td\u003e\n\u003ctd\u003eSupplied code description associates this segment with accuracy and calibration options. Exact meaning requires confirmation.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003e2\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eElectrical connector\u003c\/td\u003e\n\u003ctd\u003e15-pin D-sub with thread locks\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eB\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eCalibration option\u003c\/td\u003e\n\u003ctd\u003eSupplied code description indicates horizontal calibration, conflicting with the product specification stating vertical calibration.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003cp\u003e\u003cstrong\u003eConfiguration verification:\u003c\/strong\u003e The supplied technical specification states vertical calibration. The suffix explanation identifies horizontal calibration for the E and B segments. These details are inconsistent and should be checked against the manufacturer's complete ordering record before replacement or installation.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e02 | Measurement Performance\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003cth\u003eParameter\u003c\/th\u003e\n\u003cth\u003eSpecification\u003c\/th\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMeasurement Type\u003c\/td\u003e\n\u003ctd\u003eAbsolute pressure\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFull Scale Range\u003c\/td\u003e\n\u003ctd\u003e10 Torr\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSensor Temperature\u003c\/td\u003e\n\u003ctd\u003eControlled at 100°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAccuracy\u003c\/td\u003e\n\u003ctd\u003e0.25% of Reading, including non-linearity, hysteresis, and non-repeatability\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eResolution\u003c\/td\u003e\n\u003ctd\u003e0.001% of Full Scale\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eWarm-up Time\u003c\/td\u003e\n\u003ctd\u003e2 hours\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eCalibration Orientation\u003c\/td\u003e\n\u003ctd\u003eVertical, according to the supplied technical specification\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHeater Status\u003c\/td\u003e\n\u003ctd\u003eLED indicator\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eTrip Points\u003c\/td\u003e\n\u003ctd\u003eNone; analog output only\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003ch3\u003e\u003cb\u003e03 | Electrical Interface and Signal Output\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003cth\u003eParameter\u003c\/th\u003e\n\u003cth\u003eSpecification\u003c\/th\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePower Supply\u003c\/td\u003e\n\u003ctd\u003e±15 VDC, ±5%\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMaximum Current\u003c\/td\u003e\n\u003ctd\u003e0.60 A\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAnalog Output\u003c\/td\u003e\n\u003ctd\u003e0 to +10 VDC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOutput Load\u003c\/td\u003e\n\u003ctd\u003eGreater than 10 kΩ\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eConnector\u003c\/td\u003e\n\u003ctd\u003e15-pin D-sub with thread locks\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSignal Type\u003c\/td\u003e\n\u003ctd\u003eAnalog voltage output\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003cp\u003eThe 0–10 VDC output allows connection to compatible process monitoring and control equipment. Confirm the receiving instrument's input range and grounding requirements before wiring.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e04 | Vacuum Connection and Sensor Construction\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003cth\u003eParameter\u003c\/th\u003e\n\u003cth\u003eSpecification\u003c\/th\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFitting\u003c\/td\u003e\n\u003ctd\u003eNW16 ISO-KF\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eWetted Materials\u003c\/td\u003e\n\u003ctd\u003eInconel\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eInternal Volume\u003c\/td\u003e\n\u003ctd\u003e6.3 cc\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOverpressure Limit\u003c\/td\u003e\n\u003ctd\u003e45 psia (310 kPa) or 120% of Full Scale, whichever is greater\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eEtch Baffle\u003c\/td\u003e\n\u003ctd\u003eIntegrated patented sump design\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePatent Reference\u003c\/td\u003e\n\u003ctd\u003eUS Patent No. 5,822,685\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003cp\u003eThe integrated sump-style etch baffle is designed for etch process environments. Inconel wetted construction provides the specified material interface for process exposure. Process compatibility should still be evaluated against the actual gas chemistry and operating conditions.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e05 | Thermal and Mechanical Data\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003cth\u003eParameter\u003c\/th\u003e\n\u003cth\u003eSpecification\u003c\/th\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOperating Temperature\u003c\/td\u003e\n\u003ctd\u003e15 to 40°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eZero Temperature Coefficient\u003c\/td\u003e\n\u003ctd\u003e0.002% FS\/°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSpan Temperature Coefficient\u003c\/td\u003e\n\u003ctd\u003e0.02% of Reading\/°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eDiameter\u003c\/td\u003e\n\u003ctd\u003e3.15 in (80.0 mm)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eBody Height\u003c\/td\u003e\n\u003ctd\u003e3.87 in (98.4 mm)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eStem Length\u003c\/td\u003e\n\u003ctd\u003e1.38 in (35.1 mm)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003ch3\u003e\u003cb\u003e06 | Engineering Selection and Installation Notes\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003ePressure range:\u003c\/strong\u003e Confirm that the 10 Torr full-scale range matches the process pressure window. Avoid selecting a range solely from the maximum system pressure.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eMounting orientation:\u003c\/strong\u003e Verify the required calibration orientation before installation. The supplied specification states vertical calibration.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eHeater operation:\u003c\/strong\u003e Allow approximately two hours for warm-up before relying on measurement performance.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eElectrical compatibility:\u003c\/strong\u003e Check the ±15 VDC supply, current capacity, 0–10 VDC input, and 15-pin connector arrangement.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eVacuum interface:\u003c\/strong\u003e Confirm that the system uses an NW16 ISO-KF connection and that the sealing components are compatible.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eProcess exposure:\u003c\/strong\u003e Review gas chemistry, deposits, and cleaning procedures before using the sensor in an etch chamber.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ch3\u003e\u003cb\u003e07 | Replacement Compatibility\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe E28H11TDE2B is specified as interchangeable with earlier MKS Baratron manometer families, including:\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003eMKS 128 Series\u003c\/li\u003e\n\u003cli\u003eMKS 628A Series\u003c\/li\u003e\n\u003cli\u003eMKS 628B Series\u003c\/li\u003e\n\u003cli\u003eMKS 628D Series\u003c\/li\u003e\n\u003cli\u003eMKS E28B Series\u003c\/li\u003e\n\u003cli\u003eMKS E28D Series\u003c\/li\u003e\n\u003cli\u003eMKS E28F Series\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eInterchangeability should not be treated as automatic plug-and-play compatibility. Before replacing an installed unit, compare the pressure range, fitting, mounting orientation, connector pinout, power supply, output signal, and calibration requirements.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e08 | Compliance and Supply Information\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eManufacturer:\u003c\/strong\u003e MKS Instruments\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSeries:\u003c\/strong\u003e E28H \/ 600 Series\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eModel:\u003c\/strong\u003e E28H11TDE2B\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCompliance:\u003c\/strong\u003e CE compliant\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCondition:\u003c\/strong\u003e New \u0026amp; Original in Factory Packing\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eWarranty:\u003c\/strong\u003e Factory Warranty: 12 Months\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eShipping:\u003c\/strong\u003e FedEx, UPS, and DHL available\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ch3\u003e\u003cb\u003e09 | Global PLC Spare HUB Engineering Insight\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003eWhen selecting the E28H11TDE2B, engineers should pay particular attention to its heated sensor design and installation orientation. The 100°C controlled sensor temperature, 10 Torr measurement range, and 0–10 VDC output define its main integration requirements.\u003c\/p\u003e\n\n\u003cp\u003eThe integrated etch baffle is an important configuration feature for semiconductor process applications. For replacement projects, verify the complete model code and electrical interface rather than relying on the series name alone. The calibration-orientation discrepancy in the supplied suffix description should also be resolved before ordering.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e10 | Frequently Asked Questions\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ1: What information should be provided when requesting a replacement quotation?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eProvide the complete model number, equipment application, pressure range, fitting type, connector details, and a photo of the installed nameplate. These details help verify the required configuration before shipment.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ2: Can this sensor be installed in a system that currently uses a different Baratron model?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003ePotentially. The listed legacy families are identified as interchangeable, but the actual installation must be checked for mechanical, electrical, and calibration compatibility. A matching pressure range alone is not sufficient.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ3: What should be checked if the pressure reading drifts after installation?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eCheck warm-up time, mounting orientation, supply stability, grounding, process contamination, and the receiving instrument's input configuration. Compare the output against a suitable reference before adjusting system controls.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ4: Is a 10 Torr sensor suitable for every low-pressure etch process?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eNo. The correct range depends on the normal operating pressure, process transients, and required measurement resolution. Review the expected pressure window and control-system requirements before selecting the range.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ5: Does the E28H11TDE2B provide relay alarms for pressure limits?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eNo. The supplied specification identifies this model as analog-output only, with no trip points. If the application requires independent alarm switching, use a compatible external controller or monitoring system.\u003c\/p\u003e","brand":"MKS Instruments","offers":[{"title":"Default Title","offer_id":68020349173942,"sku":"E28H11TDE2B","price":196.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7863\/8774\/files\/E28H11TDE2B_1.jpg?v=1794209087","url":"https:\/\/www.plcsparehub.com\/products\/e28h11tde2b-mks-instruments-600-series-etch-pressure-transducer","provider":"Global PLC Spare Hub","version":"1.0","type":"link"}