{"product_id":"e28h-1tbf5b-mks-instruments-e28h-series-etch-sensor-baratron","title":"E28H.1TBF5B MKS Instruments E28H Series Etch Sensor Baratron","description":" \u003ch3\u003e\u003cstrong\u003eProduct Overview | E28H.1TBF5B Etch-Optimized Baratron\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003e\u003cstrong\u003e\u003cspan style=\"color: #1565C0;\"\u003eMKS Instruments E28H.1TBF5B\u003c\/span\u003e\u003c\/strong\u003e is a 100°C heated absolute capacitance manometer in the \u003cstrong\u003eE28H Series\u003c\/strong\u003e, part of the MKS 600 Series. It combines a low-pressure 0.1 Torr measurement range with an integrated etch baffle designed for demanding semiconductor process environments.\u003c\/p\u003e\n\n\u003cp\u003eThe sensor maintains its measuring element at a controlled temperature of 100°C. This thermal design supports stable pressure measurement in processes where corrosive gases and reaction by-products can affect exposed sensor surfaces. Its patented integrated sump helps limit deposition on the sensing diaphragm.\u003c\/p\u003e\n\n\u003cp\u003eThe instrument provides a 0 to +10 VDC analog output and uses a 15-pin D-sub connector with thread locks. It has no trip-point outputs or heater-status LED in the specified configuration.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003eEtch Process Design | Measurement Stability and Protection\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe E28H design addresses a practical challenge in semiconductor etch applications: process deposits can accumulate inside pressure measurement equipment and affect long-term performance.\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eIntegrated etch baffle:\u003c\/strong\u003e The patented sump structure helps manage process by-products before they reach the sensing diaphragm.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003e100°C temperature control:\u003c\/strong\u003e The heated sensor supports controlled measurement conditions during compatible etch processes.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eInconel wetted materials:\u003c\/strong\u003e The specified wetted construction is intended for demanding process gas environments. Confirm chemical compatibility against the actual gas mixture.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eLow-pressure measurement:\u003c\/strong\u003e The 0.1 Torr full-scale range supports applications requiring sensitive absolute-pressure monitoring.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eHorizontal calibration:\u003c\/strong\u003e The instrument is calibrated in a horizontal orientation. Installation should preserve the specified reference position.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ch3\u003e\u003cstrong\u003eTechnical Specifications\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003cth\u003eParameter\u003c\/th\u003e\n\u003cth\u003eSpecification\u003c\/th\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eManufacturer\u003c\/td\u003e\n\u003ctd\u003eMKS Instruments\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eModel\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eE28H.1TBF5B\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eProduct series\u003c\/td\u003e\n\u003ctd\u003eE28H \/ 600 Series\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eProduct type\u003c\/td\u003e\n\u003ctd\u003e100°C Heated Etch Sensor Baratron\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMeasurement type\u003c\/td\u003e\n\u003ctd\u003eAbsolute pressure\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFull-scale range\u003c\/td\u003e\n\u003ctd\u003e0.1 Torr\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSensor temperature\u003c\/td\u003e\n\u003ctd\u003eControlled at 100°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAccuracy\u003c\/td\u003e\n\u003ctd\u003e0.50% of reading, including non-linearity, hysteresis, and non-repeatability\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eResolution\u003c\/td\u003e\n\u003ctd\u003e0.001% of full scale\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eWarm-up time\u003c\/td\u003e\n\u003ctd\u003e4 hours\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eCalibration orientation\u003c\/td\u003e\n\u003ctd\u003eHorizontal\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePower supply\u003c\/td\u003e\n\u003ctd\u003e±15 VDC (±5%)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMaximum current\u003c\/td\u003e\n\u003ctd\u003e0.60 A\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAnalog output\u003c\/td\u003e\n\u003ctd\u003e0 to +10 VDC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOutput load\u003c\/td\u003e\n\u003ctd\u003eGreater than 10 kΩ\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eElectrical connector\u003c\/td\u003e\n\u003ctd\u003e15-pin D-sub with thread locks\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eTrip points\u003c\/td\u003e\n\u003ctd\u003eNone; analog output only\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHeater status LED\u003c\/td\u003e\n\u003ctd\u003eNot included\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOverpressure limit\u003c\/td\u003e\n\u003ctd\u003e45 psia (310 kPa) or 120% of full scale, whichever is greater\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eInternal volume\u003c\/td\u003e\n\u003ctd\u003e6.3 cc\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eProcess fitting\u003c\/td\u003e\n\u003ctd\u003e8 VCR female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eWetted materials\u003c\/td\u003e\n\u003ctd\u003eInconel\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOperating temperature\u003c\/td\u003e\n\u003ctd\u003e15 to 40°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eZero temperature coefficient\u003c\/td\u003e\n\u003ctd\u003e0.01% FS\/°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSpan temperature coefficient\u003c\/td\u003e\n\u003ctd\u003e0.02% of reading\/°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eDimensions\u003c\/td\u003e\n\u003ctd\u003eDiameter: 3.15 in (80.0 mm); body height: 3.87 in (98.4 mm); stem: 1.38 in (35.1 mm)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eCompliance\u003c\/td\u003e\n\u003ctd\u003eCE compliant\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003ch3\u003e\u003cstrong\u003eConfiguration Breakdown | E28H.1TBF5B\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe ordering code identifies the sensor family, measurement range, process connection, electrical interface, accuracy class, and calibration orientation.\u003c\/p\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003cth\u003eCode segment\u003c\/th\u003e\n\u003cth\u003eConfiguration\u003c\/th\u003e\n\u003cth\u003eEngineering interpretation\u003c\/th\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eE28H\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eEtch sensor model family\u003c\/td\u003e\n\u003ctd\u003e100°C heated e-Baratron absolute capacitance manometer with an integrated etch protection structure.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003e1T\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e0.1 Torr range\u003c\/td\u003e\n\u003ctd\u003eDefines the instrument's full-scale pressure range.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eB\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e8 VCR female\u003c\/td\u003e\n\u003ctd\u003eSpecifies the Swagelok-compatible 8 VCR female process connection.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eF\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e15-pin D-sub\u003c\/td\u003e\n\u003ctd\u003eAnalog electrical interface with thread-locking hardware.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003e5\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e0.50% reading accuracy\u003c\/td\u003e\n\u003ctd\u003eDefines the stated measurement accuracy class.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eB\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eHorizontal calibration\u003c\/td\u003e\n\u003ctd\u003eIdentifies the calibration orientation used for the instrument.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003cp\u003e\u003cstrong\u003eOrdering note:\u003c\/strong\u003e Verify the complete suffix against the instrument nameplate and the applicable MKS documentation before replacement. Matching the model family alone does not establish electrical, mechanical, or process compatibility.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003eInstallation and Commissioning Considerations\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eMounting orientation:\u003c\/strong\u003e Install the sensor in its specified horizontal calibration orientation. An incorrect mounting position can affect measurement performance.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eThermal stabilization:\u003c\/strong\u003e Allow approximately four hours for warm-up before relying on measurement readings. Avoid treating early startup values as stabilized process data.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePower verification:\u003c\/strong\u003e Confirm a regulated ±15 VDC supply within ±5% and ensure the circuit can support the maximum 0.60 A current requirement.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSignal integration:\u003c\/strong\u003e Configure the receiving controller or data acquisition channel for a 0 to +10 VDC analog signal. Check that its input impedance exceeds 10 kΩ.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eProcess connection:\u003c\/strong\u003e Confirm the 8 VCR female fitting matches the chamber port and mating hardware. Follow the applicable high-purity vacuum fitting procedures.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eGas compatibility:\u003c\/strong\u003e Review process chemistry and temperature conditions before exposing the Inconel wetted surfaces to corrosive gases.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ch3\u003e\u003cstrong\u003eMaintenance and Field Diagnostics\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eFor low-pressure etch applications, stable readings depend on more than sensor accuracy. Process deposits, installation conditions, electrical grounding, and thermal stabilization can all affect the measurement loop.\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eSlow response or pressure drift:\u003c\/strong\u003e Check for process-side contamination, changing chamber conditions, and incomplete thermal stabilization before adjusting the control system.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eUnexpected zero offset:\u003c\/strong\u003e Verify the installation orientation, supply voltage, signal reference, and actual chamber pressure conditions.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eUnstable analog signal:\u003c\/strong\u003e Inspect connector engagement, cable shielding, grounding, and controller input configuration.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eRepeated process-side contamination:\u003c\/strong\u003e Review etch chemistry, chamber cleaning intervals, and the condition of the integrated baffle. Do not assume the baffle eliminates all maintenance requirements.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eReplacement verification:\u003c\/strong\u003e Compare the complete suffix, fitting, output interface, calibration orientation, and pressure range before installing a replacement.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ch3\u003e\u003cstrong\u003eCompatibility and Replacement Guidance\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eMKS identifies the \u003cstrong\u003eE28H\u003c\/strong\u003e as interchangeable with earlier 128, 628A\/B\/D, and E28B\/D\/F Baratron manometers. This provides a useful starting point when evaluating legacy equipment replacement.\u003c\/p\u003e\n\n\u003cp\u003eHowever, interchangeability should be confirmed for the specific installation. Check the pressure range, process fitting, connector pinout, supply requirements, analog signal scaling, calibration orientation, and process material compatibility. A family-level replacement statement does not guarantee that every suffix configuration is a direct drop-in substitute.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003ePackage and Supply Information\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n\u003cli\u003eProduct: MKS Instruments E28H.1TBF5B Heated Etch Sensor Baratron\u003c\/li\u003e\n\u003cli\u003eConfiguration: 0.1 Torr, 8 VCR female, 15-pin D-sub, 0.50% reading accuracy, horizontal calibration\u003c\/li\u003e\n\u003cli\u003eWarranty: 12 months\u003c\/li\u003e\n\u003cli\u003eShipping methods: FedEx, UPS, or DHL\u003c\/li\u003e\n\u003cli\u003ePackage contents: Sensor unit and standard accessories supplied with the confirmed order configuration. Please confirm accessory requirements before ordering.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ch3\u003e\u003cstrong\u003eFrequently Asked Questions\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ1: What should engineers verify before replacing an older Baratron with this E28H model?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eCompare the full-scale range, process fitting, connector pinout, power supply, output scaling, and mounting orientation. Also confirm that the replacement suits the process gas chemistry. Do not rely on model-family interchangeability alone.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ2: Is a 0.1 Torr full-scale sensor suitable for every low-pressure etch chamber?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eNo. The selected range should cover the chamber's normal operating pressure and expected transients. A range that is too high may sacrifice useful signal resolution, while a range that is too low may expose the sensor to unsuitable pressure excursions. Review normal pressure, control limits, and upset conditions together.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ3: How should maintenance teams distinguish sensor problems from chamber process changes?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eCompare the Baratron output with an independent pressure reference or a verified chamber measurement. Check the analog loop and thermal stabilization first. If the electrical signal remains stable while the reference pressure changes, investigate the chamber and process conditions before condemning the sensor.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ4: What additional equipment is needed to use this model in a control system?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eThe receiving system needs a compatible ±15 VDC power source and a 0 to +10 VDC analog input with an impedance above 10 kΩ. Confirm the connector pin assignment and signal common requirements from the applicable wiring documentation before commissioning.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ5: When should a buyer choose an etch sensor rather than a standard heated Baratron?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eConsider an etch-specific design when process chemistry and reaction by-products create a meaningful risk of deposits around the sensing diaphragm. The integrated sump is intended to help manage this exposure. Selection should still account for gas compatibility, chamber cleaning practices, pressure range, and maintenance strategy.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003eWhy Source E28H.1TBF5B from Global PLC Spare HUB?\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eGlobal PLC Spare HUB supports industrial automation and semiconductor process equipment sourcing. We provide model and suffix verification to help reduce ordering errors in replacement projects.\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003e12-month warranty:\u003c\/strong\u003e Warranty coverage is provided according to the confirmed order terms.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eInternational shipping:\u003c\/strong\u003e FedEx, UPS, and DHL shipping options are available.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eTechnical order review:\u003c\/strong\u003e Confirm the range, fitting, connector, and calibration orientation before purchase.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eApplication support:\u003c\/strong\u003e Share your existing model and installation details for a replacement compatibility review.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eContact our team with the complete part number \u003cstrong\u003eE28H.1TBF5B\u003c\/strong\u003e for pricing, availability, and technical confirmation.\u003c\/p\u003e","brand":"MKS Instruments","offers":[{"title":"Default Title","offer_id":68020294680758,"sku":"E28H.1TBF5B","price":209.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7863\/8774\/files\/E28H.1TBF5B.jpg?v=1794208984","url":"https:\/\/www.plcsparehub.com\/products\/e28h-1tbf5b-mks-instruments-e28h-series-etch-sensor-baratron","provider":"Global PLC Spare Hub","version":"1.0","type":"link"}