{"product_id":"e27h-1tbd5b-heated-etch-pressure-transducer-mks-e27h-0-1-torr","title":"E27H.1TBD5B Heated Etch Pressure Transducer – MKS E27H 0.1 Torr","description":"\u003ch3\u003e\u003cstrong\u003eMKS E27H.1TBD5B | Heated Etch Sensor Baratron\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003e\u003cstrong\u003e\u003cspan style=\"color: #1565c0;\"\u003eMKS Instruments E27H.1TBD5B\u003c\/span\u003e\u003c\/strong\u003e is a heated absolute pressure transducer designed for demanding semiconductor etch processes.\u003c\/p\u003e\n\u003cp\u003eIt belongs to the \u003cstrong\u003eE27H (600 Series)\u003c\/strong\u003e and features a dedicated etch sensor configuration. Its integrated sump helps manage process byproduct deposition inside the pressure sensing assembly.\u003c\/p\u003e\n\u003cp\u003eThe sensor operates at a controlled temperature of \u003cstrong\u003e45°C\u003c\/strong\u003e. This heated construction helps reduce condensation and deposition on sensitive internal surfaces.\u003c\/p\u003e\n\u003cp\u003eThis configuration provides a \u003cstrong\u003e0.1 Torr full-scale range\u003c\/strong\u003e with horizontal calibration. It combines a 0–10 VDC analog output, Inconel wetted materials, and an 8 VCR female process connection.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eKey Engineering Characteristics\u003c\/strong\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eManufacturer:\u003c\/strong\u003e MKS Instruments\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eComplete Model:\u003c\/strong\u003e \u003cspan style=\"color: #1565c0;\"\u003e\u003cstrong\u003eE27H.1TBD5B\u003c\/strong\u003e\u003c\/span\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eProduct Family:\u003c\/strong\u003e E27H, 600 Series\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eProduct Type:\u003c\/strong\u003e Heated Etch Sensor Baratron\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eMeasurement:\u003c\/strong\u003e Absolute Pressure\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eFull Scale:\u003c\/strong\u003e 0.1 Torr (approximately 13.3 Pa)\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSensor Temperature:\u003c\/strong\u003e 45°C\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCalibration Orientation:\u003c\/strong\u003e Horizontal\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eEtch Protection:\u003c\/strong\u003e Integrated Sump Etch Baffle\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eAccuracy:\u003c\/strong\u003e 0.15% of Reading\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eElectrical Output:\u003c\/strong\u003e 0–10 VDC\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eProcess Connection:\u003c\/strong\u003e 8 VCR Female\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ch3\u003e\u003cstrong\u003e01 | Configuration Breakdown – Decode the Complete Model\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe complete ordering code identifies the instrument's measurement range, process connection, calibration, electrical interface, and accuracy configuration.\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eModel Segment\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eConfiguration\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eEngineering Description\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eE27H\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eProduct Series\u003c\/td\u003e\n\u003ctd\u003eHeated etch sensor Baratron configuration\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003e.1T\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003ePressure Range\u003c\/td\u003e\n\u003ctd\u003e0.1 Torr full scale\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eB\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eProcess Fitting\u003c\/td\u003e\n\u003ctd\u003e8 VCR female connection\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eD\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eCalibration Option\u003c\/td\u003e\n\u003ctd\u003eHorizontal calibration, standard configuration\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003e5\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eElectrical Connector\u003c\/td\u003e\n\u003ctd\u003e15-pin D-sub with thread locks\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eB\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eAccuracy Grade\u003c\/td\u003e\n\u003ctd\u003e0.15% of Reading\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003e\u003cstrong\u003eConfiguration Interpretation:\u003c\/strong\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eE27H:\u003c\/strong\u003e Identifies the heated etch sensor product family.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003e.1T:\u003c\/strong\u003e Defines the 0.1 Torr measurement range.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eB:\u003c\/strong\u003e Specifies the 8 VCR female process connection.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eD:\u003c\/strong\u003e Identifies the horizontal calibration configuration.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003e5:\u003c\/strong\u003e Specifies the threaded 15-pin D-sub connector.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eB:\u003c\/strong\u003e Identifies the 0.15% reading accuracy grade.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eAlways verify the complete ordering code against the instrument nameplate. Confirm the suffix interpretation against the applicable MKS configuration documentation before ordering.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e02 | Pressure Measurement Specifications\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe instrument measures absolute pressure within a low-pressure range. Its measurement architecture supports process pressure monitoring in semiconductor etch equipment.\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eMeasurement Parameter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSpecification\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMeasurement Type\u003c\/td\u003e\n\u003ctd\u003eAbsolute Pressure\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFull-Scale Range\u003c\/td\u003e\n\u003ctd\u003e0.1 Torr\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eEquivalent Pressure\u003c\/td\u003e\n\u003ctd\u003eApproximately 13.3 Pa\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAccuracy\u003c\/td\u003e\n\u003ctd\u003e0.15% of Reading\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eResolution\u003c\/td\u003e\n\u003ctd\u003e0.001% of Full Scale\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eNon-Linearity\u003c\/td\u003e\n\u003ctd\u003eIncluded in specified accuracy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHysteresis\u003c\/td\u003e\n\u003ctd\u003eIncluded in specified accuracy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eNon-Repeatability\u003c\/td\u003e\n\u003ctd\u003eIncluded in specified accuracy\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eWarm-Up Time\u003c\/td\u003e\n\u003ctd\u003e4 Hours\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eCalibration Orientation\u003c\/td\u003e\n\u003ctd\u003eHorizontal\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003e\u003cstrong\u003eResolution Calculation:\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003e0.1 Torr × 0.001% = \u003cstrong\u003e0.000001 Torr\u003c\/strong\u003e.\u003c\/p\u003e\n\u003cp\u003eThis equals approximately 0.000133 Pa. Resolution does not represent absolute measurement accuracy.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eAccuracy Interpretation:\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eThe specified 0.15% accuracy applies to the pressure reading. It includes non-linearity, hysteresis, and non-repeatability.\u003c\/p\u003e\n\u003cp\u003eAt 0.05 Torr, the corresponding 0.15% accuracy value is 0.000075 Torr. This calculation represents the stated percentage of reading.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e03 | Heated Etch Sensor and Integrated Sump Technology\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe defining feature of this configuration is its integrated etch baffle and sump structure.\u003c\/p\u003e\n\u003cp\u003eEtch processes can generate reaction byproducts during plasma processing. Some byproducts may deposit on internal surfaces as process conditions change.\u003c\/p\u003e\n\u003cp\u003eAccumulated deposits can restrict pressure communication and affect long-term measurement reliability. The E27H configuration addresses this challenge through a dedicated etch sensor design.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eIntegrated Etch Baffle:\u003c\/strong\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eFeatures an integrated sump structure.\u003c\/li\u003e\n\u003cli\u003eUses a patented design, US Patent No. 5,822,685.\u003c\/li\u003e\n\u003cli\u003eHelps manage byproduct accumulation within the sensor assembly.\u003c\/li\u003e\n\u003cli\u003eSupports pressure measurement in demanding etch environments.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e\u003cstrong\u003e45°C Heated Sensor:\u003c\/strong\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eMaintains a controlled sensor temperature of 45°C.\u003c\/li\u003e\n\u003cli\u003eHelps reduce condensation of process byproducts.\u003c\/li\u003e\n\u003cli\u003eSupports more stable internal thermal conditions.\u003c\/li\u003e\n\u003cli\u003eReduces the risk of deposition affecting sensitive sensing surfaces.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e\u003cstrong\u003eEngineering Value:\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eThe sump and heated construction address different aspects of process contamination. The sump manages accumulated byproducts, while heating helps reduce condensation.\u003c\/p\u003e\n\u003cp\u003eActual service life depends on process chemistry, deposition rate, operating pressure, and maintenance conditions.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e04 | Thermal Performance and Environmental Limits\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThermal conditions influence low-pressure measurement stability. The following parameters define the operating environment and temperature sensitivity.\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eThermal Parameter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSpecification\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSensor Temperature\u003c\/td\u003e\n\u003ctd\u003e45°C Controlled\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAmbient Operating Temperature\u003c\/td\u003e\n\u003ctd\u003e15 to 40°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eWarm-Up Time\u003c\/td\u003e\n\u003ctd\u003e4 Hours\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eZero Temperature Coefficient\u003c\/td\u003e\n\u003ctd\u003e0.005% FS\/°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSpan Temperature Coefficient\u003c\/td\u003e\n\u003ctd\u003e0.02% of Reading\/°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003e\u003cstrong\u003eTemperature Management Recommendations:\u003c\/strong\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eMaintain ambient temperature between 15 and 40°C.\u003c\/li\u003e\n\u003cli\u003eAllow four hours for thermal stabilization after startup.\u003c\/li\u003e\n\u003cli\u003eAvoid sudden temperature changes around the sensor.\u003c\/li\u003e\n\u003cli\u003eCheck zero stability after the warm-up period.\u003c\/li\u003e\n\u003cli\u003eEvaluate span variation when ambient temperature changes.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eThe 45°C value refers to the controlled sensor temperature. It does not represent the permitted ambient temperature.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e05 | Electrical Interface and Analog Signal\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe instrument provides an analog voltage output for external pressure monitoring systems. Its 15-pin D-sub connector uses threaded locking hardware.\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eElectrical Parameter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSpecification\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePower Supply\u003c\/td\u003e\n\u003ctd\u003e±15 VDC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSupply Tolerance\u003c\/td\u003e\n\u003ctd\u003e±5%\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMaximum Current\u003c\/td\u003e\n\u003ctd\u003e0.25 A\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAnalog Output\u003c\/td\u003e\n\u003ctd\u003e0 to +10 VDC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOutput Load\u003c\/td\u003e\n\u003ctd\u003e\u0026gt;10 kΩ\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eConnector\u003c\/td\u003e\n\u003ctd\u003e15-pin D-sub\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eConnector Locking\u003c\/td\u003e\n\u003ctd\u003eThread Locks\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eTrip Points\u003c\/td\u003e\n\u003ctd\u003eNone\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHeater Status LED\u003c\/td\u003e\n\u003ctd\u003eNot Available\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003e\u003cstrong\u003eAnalog Scaling Reference\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eAssuming a linear 0–10 VDC output across the 0–0.1 Torr range:\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eOutput Voltage\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eEquivalent Pressure\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e0 V\u003c\/td\u003e\n\u003ctd\u003e0 Torr\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e2.5 V\u003c\/td\u003e\n\u003ctd\u003e0.025 Torr\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e5 V\u003c\/td\u003e\n\u003ctd\u003e0.05 Torr\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e7.5 V\u003c\/td\u003e\n\u003ctd\u003e0.075 Torr\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e10 V\u003c\/td\u003e\n\u003ctd\u003e0.1 Torr\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003eUse the manufacturer's transfer function for final system scaling. Confirm zero and span behavior during commissioning.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003ePLC and Control System Integration:\u003c\/strong\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eUse a compatible 0–10 V analog input channel.\u003c\/li\u003e\n\u003cli\u003eProvide the required bipolar ±15 VDC power supply.\u003c\/li\u003e\n\u003cli\u003eMaintain input impedance above 10 kΩ.\u003c\/li\u003e\n\u003cli\u003eVerify connector pin assignments before wiring.\u003c\/li\u003e\n\u003cli\u003eSecure the D-sub connector using its locking screws.\u003c\/li\u003e\n\u003cli\u003eCheck grounding and shielding arrangements.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ch3\u003e\u003cstrong\u003e06 | Process Connection and Mechanical Construction\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe pressure boundary uses Inconel wetted materials. The instrument features an 8 VCR female process connection.\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eMechanical Parameter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSpecification\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eWetted Materials\u003c\/td\u003e\n\u003ctd\u003eInconel\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eProcess Fitting\u003c\/td\u003e\n\u003ctd\u003e8 VCR Female\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eInternal Volume\u003c\/td\u003e\n\u003ctd\u003e6.3 cc\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eBody Diameter\u003c\/td\u003e\n\u003ctd\u003e3.15 in (80.0 mm)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eBody Height\u003c\/td\u003e\n\u003ctd\u003e3.87 in (98.4 mm)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eStem Length\u003c\/td\u003e\n\u003ctd\u003e1.38 in (35.1 mm)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMounting Calibration\u003c\/td\u003e\n\u003ctd\u003eHorizontal\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003e\u003cstrong\u003eInstallation Considerations:\u003c\/strong\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eConfirm the horizontal mounting orientation.\u003c\/li\u003e\n\u003cli\u003eCheck the available clearance around the sensor body.\u003c\/li\u003e\n\u003cli\u003eMatch the process connection with the existing VCR assembly.\u003c\/li\u003e\n\u003cli\u003eInspect sealing surfaces before installation.\u003c\/li\u003e\n\u003cli\u003ePrevent mechanical loading on the pressure connection.\u003c\/li\u003e\n\u003cli\u003eConfirm process material compatibility before operation.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ch3\u003e\u003cstrong\u003e07 | Installation and Commissioning Workflow\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003e\u003cstrong\u003eMechanical Preparation\u003c\/strong\u003e\u003c\/p\u003e\n\u003col\u003e\n\u003cli\u003eVerify the complete model and measurement range.\u003c\/li\u003e\n\u003cli\u003eConfirm the installation requires horizontal calibration.\u003c\/li\u003e\n\u003cli\u003eInspect the 8 VCR female fitting.\u003c\/li\u003e\n\u003cli\u003eCheck the process line for contamination.\u003c\/li\u003e\n\u003cli\u003eInstall suitable VCR sealing components.\u003c\/li\u003e\n\u003cli\u003eSecure the instrument without excessive mechanical stress.\u003c\/li\u003e\n\u003c\/ol\u003e\n\u003cp\u003e\u003cstrong\u003eElectrical Preparation\u003c\/strong\u003e\u003c\/p\u003e\n\u003col\u003e\n\u003cli\u003eVerify the ±15 VDC power supply.\u003c\/li\u003e\n\u003cli\u003eConfirm supply polarity and voltage tolerance.\u003c\/li\u003e\n\u003cli\u003eInspect the 15-pin D-sub connector.\u003c\/li\u003e\n\u003cli\u003eCheck the analog output wiring.\u003c\/li\u003e\n\u003cli\u003eVerify the receiving input impedance.\u003c\/li\u003e\n\u003cli\u003eSecure the connector locking screws.\u003c\/li\u003e\n\u003c\/ol\u003e\n\u003cp\u003e\u003cstrong\u003eCommissioning Sequence\u003c\/strong\u003e\u003c\/p\u003e\n\u003col\u003e\n\u003cli\u003eApply the specified power supply.\u003c\/li\u003e\n\u003cli\u003eAllow at least four hours for thermal stabilization.\u003c\/li\u003e\n\u003cli\u003eConfirm the ambient temperature remains within limits.\u003c\/li\u003e\n\u003cli\u003eCheck the zero output under suitable reference conditions.\u003c\/li\u003e\n\u003cli\u003eApply known pressure points using calibrated equipment.\u003c\/li\u003e\n\u003cli\u003eCompare measured output with expected values.\u003c\/li\u003e\n\u003cli\u003eVerify pressure scaling in the receiving control system.\u003c\/li\u003e\n\u003cli\u003eRecord the commissioning results for future reference.\u003c\/li\u003e\n\u003c\/ol\u003e\n\u003ch3\u003e\u003cstrong\u003e08 | Maintenance and Process Contamination Management\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eEtch applications require additional attention to process byproduct accumulation. Routine maintenance should consider both pressure performance and contamination conditions.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eRecommended Inspection Points:\u003c\/strong\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eMonitor pressure readings for gradual deviation.\u003c\/li\u003e\n\u003cli\u003eCheck process line conditions for excessive deposition.\u003c\/li\u003e\n\u003cli\u003eInspect external connections for leakage.\u003c\/li\u003e\n\u003cli\u003eVerify thermal stabilization after equipment startup.\u003c\/li\u003e\n\u003cli\u003eReview zero and span verification records.\u003c\/li\u003e\n\u003cli\u003eFollow MKS procedures for internal cleaning and servicing.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e\u003cstrong\u003eMaintenance Warning:\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eDo not open or mechanically clean the sensing assembly without approved service procedures. Incorrect handling can damage sensitive internal components.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e09 | Compatibility and Replacement Selection\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe E27H family supports replacement applications involving earlier Baratron manometer families, including 127, 627, and E27 configurations.\u003c\/p\u003e\n\u003cp\u003eThis interchangeability statement does not guarantee compatibility for every legacy installation.\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eLegacy Family\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eReplacement Verification\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e127 Series\u003c\/td\u003e\n\u003ctd\u003eCheck pressure range, mounting, and electrical interface.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e627 Series\u003c\/td\u003e\n\u003ctd\u003eVerify heating configuration and process connection.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eE27 Series\u003c\/td\u003e\n\u003ctd\u003eCompare sensor design, calibration, and signal requirements.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003e\u003cstrong\u003eBefore Ordering, Confirm:\u003c\/strong\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eOriginal pressure range and pressure measurement type.\u003c\/li\u003e\n\u003cli\u003eHorizontal calibration requirement.\u003c\/li\u003e\n\u003cli\u003eEtch process and byproduct exposure conditions.\u003c\/li\u003e\n\u003cli\u003e8 VCR female fitting compatibility.\u003c\/li\u003e\n\u003cli\u003e±15 VDC power availability.\u003c\/li\u003e\n\u003cli\u003e0–10 VDC analog input compatibility.\u003c\/li\u003e\n\u003cli\u003e15-pin D-sub connector and wiring configuration.\u003c\/li\u003e\n\u003cli\u003eRequired accuracy and thermal specifications.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eFor legacy equipment, compare the complete model codes rather than relying on family names alone.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e10 | Compliance, Packaging and Supply Terms\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003e\u003cstrong\u003eCompliance Information\u003c\/strong\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eCE compliant.\u003c\/li\u003e\n\u003cli\u003eManufacturer: MKS Instruments.\u003c\/li\u003e\n\u003cli\u003eProduct family: E27H, 600 Series.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eApplicable declarations and supporting documents depend on the supplied configuration.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eStandard Package Reference\u003c\/strong\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e1 × MKS Instruments E27H.1TBD5B Heated Etch Sensor Baratron.\u003c\/li\u003e\n\u003cli\u003eProduct identification information, where supplied.\u003c\/li\u003e\n\u003cli\u003eAdditional accessories and documentation, subject to order confirmation.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003ePower cables, mating connectors, and calibration certificates require separate confirmation.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eWarranty Terms\u003c\/strong\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eWarranty Period:\u003c\/strong\u003e 12 months for applicable products.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCoverage:\u003c\/strong\u003e Manufacturing or product quality issues covered by the agreed warranty terms.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSupport:\u003c\/strong\u003e Contact our sales team for inspection and warranty procedures.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eVerification:\u003c\/strong\u003e Warranty eligibility follows the confirmed order and supply agreement.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e\u003cstrong\u003eInternational Shipping\u003c\/strong\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eFedEx:\u003c\/strong\u003e International express delivery.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eUPS:\u003c\/strong\u003e International parcel and express services.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eDHL:\u003c\/strong\u003e International express delivery.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eShipping methods and dispatch schedules depend on stock status and destination.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e11 | Frequently Asked Questions\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003e\u003cstrong\u003eQ1: Why does an etch process require a dedicated pressure sensor design?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eEtch processes can generate reactive gases and solid byproducts. These materials may accumulate inside pressure sensing passages.\u003c\/p\u003e\n\u003cp\u003eA dedicated etch configuration helps manage deposition through its integrated sump and heated sensor design. This reduces contamination-related measurement risks.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ2: What is the engineering purpose of the integrated sump?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eThe integrated sump provides a designated area for managing process byproduct accumulation. It forms part of the patented etch baffle design.\u003c\/p\u003e\n\u003cp\u003eEngineers should still evaluate process chemistry and deposition rates. The sump does not eliminate every contamination or maintenance requirement.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ3: Can the instrument operate with an external Ethernet monitoring system?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eThe supplied electrical specification identifies a 0–10 VDC analog output through a 15-pin D-sub connector.\u003c\/p\u003e\n\u003cp\u003eExternal Ethernet monitoring requires a compatible PLC, data acquisition device, or communication gateway. Verify the exact communication options of the ordered configuration before integration.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ4: What should engineers investigate if pressure response becomes slower after extended etch operation?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eCheck the process pressure line for byproduct accumulation and possible restrictions. Review the pressure connection and system isolation valves.\u003c\/p\u003e\n\u003cp\u003eAlso verify thermal stabilization and compare the output against a calibrated reference. Do not immediately replace the sensor before checking the complete pressure path.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ5: How should buyers select between E27H and a standard heated Baratron?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eConsider the process chemistry and expected byproduct deposition first. Standard heated models may suit cleaner pressure measurement environments.\u003c\/p\u003e\n\u003cp\u003eThe E27H configuration offers an integrated etch baffle and sump for deposition-prone applications. Buyers should also confirm the 0.1 Torr range, horizontal calibration, and electrical configuration.\u003c\/p\u003e\n\u003cp\u003eFor replacement projects, provide the original nameplate and equipment model. This helps verify the correct configuration before purchase.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003eWhy Choose Ubest Automation?\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eUbest Automation supplies industrial instrumentation and automation components for semiconductor and process industries.\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eProduct Sourcing:\u003c\/strong\u003e Support for MKS Instruments pressure measurement products.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eModel Verification:\u003c\/strong\u003e Assistance with ordering codes and technical configurations.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePre-Shipment Inspection:\u003c\/strong\u003e Product checks before dispatch, subject to availability and testing requirements.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eWarranty:\u003c\/strong\u003e 12-month warranty for applicable products.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eGlobal Delivery:\u003c\/strong\u003e FedEx, UPS, and DHL shipping options.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eTechnical Support:\u003c\/strong\u003e Assistance with replacement identification and interface verification.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e\u003cstrong\u003eRequest a Quotation for MKS E27H.1TBD5B.\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eSend us the complete model number and equipment requirements. Our team can assist with configuration verification, pricing, and delivery arrangements.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eEmail:\u003c\/strong\u003e sales@ubestplc.com\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eWebsite:\u003c\/strong\u003e \u003ca href=\"https:\/\/www.ubestplc.com\"\u003ewww.ubestplc.com\u003c\/a\u003e\u003c\/p\u003e","brand":"MKS Instruments","offers":[{"title":"Default Title","offer_id":68020094959798,"sku":"E27H.1TBD5B","price":263.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7863\/8774\/files\/E27H.1TBD5B_1.jpg?v=1794208679","url":"https:\/\/www.plcsparehub.com\/products\/e27h-1tbd5b-heated-etch-pressure-transducer-mks-e27h-0-1-torr","provider":"Global PLC Spare Hub","version":"1.0","type":"link"}