{"product_id":"901p-41010-0142-mks-901p-micropirani-loadlock-vacuum-transducer","title":"901P-41010-0142 MKS 901P MicroPirani Loadlock Vacuum Transducer","description":"\u003ch3\u003e\u003cstrong\u003e\u003cspan style=\"color: #0056b3;\"\u003e901P-41010-0142\u003c\/span\u003e MKS \u003cspan style=\"color: #0056b3;\"\u003e901P\u003c\/span\u003e MicroPirani™ \u0026amp; Piezo Loadlock Vacuum Pressure Transducer\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe \u003cstrong\u003e\u003cspan style=\"color: #0056b3;\"\u003e901P-41010-0142\u003c\/span\u003e\u003c\/strong\u003e is a dual-sensor MEMS vacuum pressure transducer engineered by \u003cstrong\u003eMKS Instruments\u003c\/strong\u003e for high-throughput semiconductor loadlock and atmospheric-to-high-vacuum chamber control. By combining a \u003cstrong\u003eMicroPirani™ thermal conductivity sensor\u003c\/strong\u003e with a \u003cstrong\u003eMEMS Piezo differential diaphragm\u003c\/strong\u003e, the \u003cstrong\u003e\u003cspan style=\"color: #0056b3;\"\u003e901P Series\u003c\/span\u003e\u003c\/strong\u003e eliminates the gas-composition dependency near atmospheric pressure that limits standalone Pirani gauges.\u003c\/p\u003e\n\u003cp\u003eThis integrated architecture delivers continuous absolute pressure measurement from \u003cstrong\u003e1.0 × 10\u003csup\u003e-5\u003c\/sup\u003e to 1500 Torr\u003c\/strong\u003e alongside true differential pressure monitoring from \u003cstrong\u003e-760 to +760 Torr\u003c\/strong\u003e for safe, rapid loadlock venting and roughing cycles.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003ePart Number \u0026amp; Configuration Architecture\u003c\/strong\u003e\u003c\/h3\u003e\n\u003ctable\u003e\n  \u003cthead\u003e\n    \u003ctr\u003e\n      \u003cth\u003e\u003cstrong\u003ePart Code Segment\u003c\/strong\u003e\u003c\/th\u003e\n      \u003cth\u003e\u003cstrong\u003eConfiguration Definition\u003c\/strong\u003e\u003c\/th\u003e\n      \u003cth\u003e\u003cstrong\u003eEngineering \u0026amp; Application Role\u003c\/strong\u003e\u003c\/th\u003e\n    \u003c\/tr\u003e\n  \u003c\/thead\u003e\n  \u003ctbody\u003e\n    \u003ctr\u003e\n      \u003ctd\u003e\u003cstrong\u003e\u003cspan style=\"color: #0056b3;\"\u003e901P\u003c\/span\u003e\u003c\/strong\u003e\u003c\/td\u003e\n      \u003ctd\u003eMKS 901P Loadlock Transducer Series\u003c\/td\u003e\n      \u003ctd\u003eDual MEMS MicroPirani™ + Piezo differential transducer platform for continuous vacuum-to-atmosphere control.\u003c\/td\u003e\n    \u003c\/tr\u003e\n    \u003ctr\u003e\n      \u003ctd\u003e\u003cstrong\u003e\u003cspan style=\"color: #0056b3;\"\u003e-41010\u003c\/span\u003e\u003c\/strong\u003e\u003c\/td\u003e\n      \u003ctd\u003eHardware Interface \u0026amp; Flange Configuration\u003c\/td\u003e\n      \u003ctd\u003eDefines the 304 stainless steel vacuum flange (such as compact KF16 with 2.8 cc internal volume), electrical connector, and communication bus profile.\u003c\/td\u003e\n    \u003c\/tr\u003e\n    \u003ctr\u003e\n      \u003ctd\u003e\u003cstrong\u003e\u003cspan style=\"color: #0056b3;\"\u003e-0142\u003c\/span\u003e\u003c\/strong\u003e\u003c\/td\u003e\n      \u003ctd\u003eFactory Firmware, Relay \u0026amp; Output Variant\u003c\/td\u003e\n      \u003ctd\u003eSpecifies OEM-tailored digital communication settings, analog scaling, and optional SPDT relay assignment.\u003c\/td\u003e\n    \u003c\/tr\u003e\n  \u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003ch3\u003e\u003cstrong\u003eMetrological Accuracy \u0026amp; Sensor Performance\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cul\u003e\n  \u003cli\u003e\n\u003cstrong\u003eMicroPirani™ Absolute Sensor (MEMS Thermal Conductivity):\u003c\/strong\u003e\n    \u003cul\u003e\n      \u003cli\u003e\n\u003cstrong\u003eTotal Measurement Span:\u003c\/strong\u003e 1.0 × 10\u003csup\u003e-5\u003c\/sup\u003e to 1500 Torr\u003c\/li\u003e\n      \u003cli\u003e\n\u003cstrong\u003e5 × 10\u003csup\u003e-4\u003c\/sup\u003e to 1 × 10\u003csup\u003e-3\u003c\/sup\u003e Torr:\u003c\/strong\u003e ±10% of reading\u003c\/li\u003e\n      \u003cli\u003e\n\u003cstrong\u003e1 × 10\u003csup\u003e-3\u003c\/sup\u003e to 100 Torr:\u003c\/strong\u003e ±5% of reading (±2% repeatability)\u003c\/li\u003e\n      \u003cli\u003e\n\u003cstrong\u003e100 Torr to Atmosphere:\u003c\/strong\u003e ±25% of reading (automatically compensated by Piezo sensor)\u003c\/li\u003e\n    \u003c\/ul\u003e\n  \u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003ePiezo Differential Sensor (MEMS Diaphragm):\u003c\/strong\u003e\n    \u003cul\u003e\n      \u003cli\u003e\n\u003cstrong\u003eTotal Differential Span:\u003c\/strong\u003e -760 to +760 Torr (Zero stability: ±0.1% of 760 Torr Full Scale)\u003c\/li\u003e\n      \u003cli\u003e\n\u003cstrong\u003e-760 to -100 Torr:\u003c\/strong\u003e ±1% of reading (±1% repeatability up to +10 Torr)\u003c\/li\u003e\n      \u003cli\u003e\n\u003cstrong\u003e-100 to -10 Torr:\u003c\/strong\u003e ±8% of reading\u003c\/li\u003e\n      \u003cli\u003e\n\u003cstrong\u003e-10 to +10 Torr:\u003c\/strong\u003e ±10% of reading\u003c\/li\u003e\n      \u003cli\u003e\n\u003cstrong\u003e+10 to 100 Torr:\u003c\/strong\u003e ±5% of reading\u003c\/li\u003e\n    \u003c\/ul\u003e\n  \u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ch3\u003e\u003cstrong\u003eElectrical, Mechanical \u0026amp; Environmental Specifications\u003c\/strong\u003e\u003c\/h3\u003e\n\u003ctable\u003e\n  \u003cthead\u003e\n    \u003ctr\u003e\n      \u003cth\u003e\u003cstrong\u003eSubsystem\u003c\/strong\u003e\u003c\/th\u003e\n      \u003cth\u003e\u003cstrong\u003eParameter\u003c\/strong\u003e\u003c\/th\u003e\n      \u003cth\u003e\u003cstrong\u003eVerified Technical Data\u003c\/strong\u003e\u003c\/th\u003e\n    \u003c\/tr\u003e\n  \u003c\/thead\u003e\n  \u003ctbody\u003e\n    \u003ctr\u003e\n      \u003ctd\u003e\u003cstrong\u003eDigital Interface\u003c\/strong\u003e\u003c\/td\u003e\n      \u003ctd\u003eProtocol \u0026amp; Baud Rate\u003c\/td\u003e\n      \u003ctd\u003e\n\u003cstrong\u003eRS485 \/ RS232\u003c\/strong\u003e (4800 to 230,400 Baud)\u003c\/td\u003e\n    \u003c\/tr\u003e\n    \u003ctr\u003e\n      \u003ctd\u003e\u003cstrong\u003eAnalog Outputs\u003c\/strong\u003e\u003c\/td\u003e\n      \u003ctd\u003eAbsolute \u0026amp; Differential\u003c\/td\u003e\n      \u003ctd\u003e\n\u003cstrong\u003e1 to 9 VDC\u003c\/strong\u003e (1 VDC\/decade, 16-bit, ≤100 Ω); Optional Output 2: \u003cstrong\u003e5 VDC = 0 Torr\u003c\/strong\u003e (12-bit)\u003c\/td\u003e\n    \u003c\/tr\u003e\n    \u003ctr\u003e\n      \u003ctd\u003e\u003cstrong\u003eControl Relays\u003c\/strong\u003e\u003c\/td\u003e\n      \u003ctd\u003eSet Points \u0026amp; Rating\u003c\/td\u003e\n      \u003ctd\u003eUp to \u003cstrong\u003e3 SPDT relays\u003c\/strong\u003e (optional); \u003cstrong\u003e1 A @ 30 VAC\/DC\u003c\/strong\u003e resistive; \u003cstrong\u003e≤100 msec\u003c\/strong\u003e response\u003c\/td\u003e\n    \u003c\/tr\u003e\n    \u003ctr\u003e\n      \u003ctd\u003e\u003cstrong\u003eSet Point Ranges\u003c\/strong\u003e\u003c\/td\u003e\n      \u003ctd\u003eTrigger Thresholds\u003c\/td\u003e\n      \u003ctd\u003eAbsolute: \u003cstrong\u003e5.0 × 10\u003csup\u003e-4\u003c\/sup\u003e to 1000 Torr\u003c\/strong\u003e; Differential: \u003cstrong\u003e-760 to +100 Torr\u003c\/strong\u003e\n\u003c\/td\u003e\n    \u003c\/tr\u003e\n    \u003ctr\u003e\n      \u003ctd\u003e\u003cstrong\u003eGas Calibration\u003c\/strong\u003e\u003c\/td\u003e\n      \u003ctd\u003eSupported Media\u003c\/td\u003e\n      \u003ctd\u003eAir, Argon, Helium, Nitrogen, H\u003csub\u003e2\u003c\/sub\u003e, H\u003csub\u003e2\u003c\/sub\u003eO vapor, CO\u003csub\u003e2\u003c\/sub\u003e, Xenon, Neon\u003c\/td\u003e\n    \u003c\/tr\u003e\n    \u003ctr\u003e\n      \u003ctd\u003e\u003cstrong\u003ePower Supply\u003c\/strong\u003e\u003c\/td\u003e\n      \u003ctd\u003eInput Voltage \u0026amp; Draw\u003c\/td\u003e\n      \u003ctd\u003e\n\u003cstrong\u003e9 to 30 VDC\u003c\/strong\u003e; \u0026lt; 1.2 W max (RS232\/RS485) \/ \u0026lt; 2 W max (EtherCAT variant)\u003c\/td\u003e\n    \u003c\/tr\u003e\n    \u003ctr\u003e\n      \u003ctd\u003e\u003cstrong\u003eWetted Materials\u003c\/strong\u003e\u003c\/td\u003e\n      \u003ctd\u003eSensor \u0026amp; Flange Construction\u003c\/td\u003e\n      \u003ctd\u003eSilicon, SiO\u003csub\u003e2\u003c\/sub\u003e, Si\u003csub\u003e3\u003c\/sub\u003eN\u003csub\u003e4\u003c\/sub\u003e, Gold, Low-Outgassing Epoxy, \u003cstrong\u003e304 Stainless Steel\u003c\/strong\u003e, \u003cstrong\u003eViton®\u003c\/strong\u003e\n\u003c\/td\u003e\n    \u003c\/tr\u003e\n    \u003ctr\u003e\n      \u003ctd\u003e\u003cstrong\u003ePhysical \u0026amp; Limits\u003c\/strong\u003e\u003c\/td\u003e\n      \u003ctd\u003eVolume, Mass \u0026amp; Overpressure\u003c\/td\u003e\n      \u003ctd\u003e\n\u003cstrong\u003e2.8 cc\u003c\/strong\u003e internal volume (KF16); \u003cstrong\u003e170 g\u003c\/strong\u003e weight; \u003cstrong\u003e1500 Torr\u003c\/strong\u003e absolute overpressure limit\u003c\/td\u003e\n    \u003c\/tr\u003e\n    \u003ctr\u003e\n      \u003ctd\u003e\u003cstrong\u003eThermal \u0026amp; Compliance\u003c\/strong\u003e\u003c\/td\u003e\n      \u003ctd\u003eOperating, Bakeout \u0026amp; Certs\u003c\/td\u003e\n      \u003ctd\u003e\n\u003cstrong\u003e0°C to 40°C\u003c\/strong\u003e operating; \u003cstrong\u003e85°C\u003c\/strong\u003e max non-operating bakeout; \u003cstrong\u003eCE Compliant\u003c\/strong\u003e\n\u003c\/td\u003e\n    \u003c\/tr\u003e\n  \u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003ch3\u003e\u003cstrong\u003eWarranty Protection \u0026amp; Global Express Dispatch\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cul\u003e\n  \u003cli\u003e\n\u003cstrong\u003e12-Month Hardware Warranty:\u003c\/strong\u003e Every \u003cstrong\u003e\u003cspan style=\"color: #0056b3;\"\u003e901P-41010-0142\u003c\/span\u003e\u003c\/strong\u003e unit is backed by a full 12-month warranty protecting MEMS sensor responsiveness, digital bus communications, and zero-point stability.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eGlobal Air Courier Logistics:\u003c\/strong\u003e Packaged in cleanroom-grade ESD protection and dispatched worldwide via \u003cstrong\u003eFedEx, UPS, or DHL\u003c\/strong\u003e to support urgent fab maintenance schedules.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ch3\u003e\u003cstrong\u003eVacuum Engineering FAQ \u0026amp; Selection Guidance\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cul\u003e\n  \u003cli\u003e\n    \u003cp\u003e\u003cstrong\u003eQ: Why does combining a Piezo differential sensor with a MicroPirani™ eliminate loadlock door-interlock delays?\u003c\/strong\u003e\u003c\/p\u003e\n    \u003cp\u003eA: Standard thermal conductivity gauges lose sensitivity near 760 Torr and drift with ambient barometric changes, whereas the MEMS Piezo sensor measures exact differential pressure across the loadlock door for immediate, safe slit-valve or door actuation.\u003c\/p\u003e\n  \u003c\/li\u003e\n  \u003cli\u003e\n    \u003cp\u003e\u003cstrong\u003eQ: How do I configure gas-type compensation when switching loadlock purge gases from Nitrogen to Argon or Helium?\u003c\/strong\u003e\u003c\/p\u003e\n    \u003cp\u003eA: Send the calibration gas command over the RS485\/RS232 digital interface to load internal thermal conductivity curves for Argon, Helium, or CO\u003csub\u003e2\u003c\/sub\u003e, preventing false pressure readings during backfill.\u003c\/p\u003e\n  \u003c\/li\u003e\n  \u003cli\u003e\n    \u003cp\u003e\u003cstrong\u003eQ: What precaution must engineers observe during chamber bakeout cycles?\u003c\/strong\u003e\u003c\/p\u003e\n    \u003cp\u003eA: Keep transducer temperatures strictly at or below \u003cstrong\u003e85°C (185°F)\u003c\/strong\u003e with DC power disconnected, as exceeding this limit damages the internal MEMS electronics and Viton® seals.\u003c\/p\u003e\n  \u003c\/li\u003e\n  \u003cli\u003e\n    \u003cp\u003e\u003cstrong\u003eQ: When should I specify the 901P series over a single-sensor MicroPirani™ transducer?\u003c\/strong\u003e\u003c\/p\u003e\n    \u003cp\u003eA: Choose the \u003cstrong\u003e\u003cspan style=\"color: #0056b3;\"\u003e901P-41010-0142\u003c\/span\u003e\u003c\/strong\u003e whenever your process requires repeatable 1% accuracy between 100 Torr and atmosphere or differential pressure interlocks against local barometric fluctuations.\u003c\/p\u003e\n  \u003c\/li\u003e\n  \u003cli\u003e\n    \u003cp\u003e\u003cstrong\u003eQ: How can maintenance technicians verify sensor health without removing the gauge from the vacuum manifold?\u003c\/strong\u003e\u003c\/p\u003e\n    \u003cp\u003eA: Query the digital status registers via RS485\/RS232 to inspect transducer internal temperature, operating hours, zero-adjust offsets, and execute a remote LED and relay diagnostic test.\u003c\/p\u003e\n  \u003c\/li\u003e\n\u003c\/ul\u003e","brand":"MKS Instruments","offers":[{"title":"Default Title","offer_id":68058422804662,"sku":"901P-41010-0142","price":163.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7863\/8774\/files\/901P-41010-0142.jpg?v=1794548557","url":"https:\/\/www.plcsparehub.com\/products\/901p-41010-0142-mks-901p-micropirani-loadlock-vacuum-transducer","provider":"Global PLC Spare Hub","version":"1.0","type":"link"}