{"product_id":"631f11t8fh-mks-baratron-631f-heated-capacitance-manometer","title":"631F11T8FH MKS Baratron 631F Heated Capacitance Manometer","description":"\u003ch3\u003e\u003cstrong\u003e\u003cspan style=\"color: #0056b3;\"\u003e631F11T8FH\u003c\/span\u003e MKS Baratron® \u003cspan style=\"color: #0056b3;\"\u003e631F\u003c\/span\u003e Heated Absolute Capacitance Manometer\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe \u003cstrong\u003e\u003cspan style=\"color: #0056b3;\"\u003e631F11T8FH\u003c\/span\u003e\u003c\/strong\u003e is a self-contained, high-temperature Baratron® capacitance manometer built by \u003cstrong\u003eMKS Instruments\u003c\/strong\u003e for aggressive semiconductor vacuum processes. Operating at a stabilized internal sensor temperature of \u003cstrong\u003e150°C\u003c\/strong\u003e, it prevents process byproduct condensation during metal etching and nitride film chemical vapor deposition (CVD).\u003c\/p\u003e\n\u003cp\u003eIts compact, integrated electronics package reduces required tool footprint by at least \u003cstrong\u003e40%\u003c\/strong\u003e and eliminates noise-inducing interconnecting cables. Constructed with corrosion-resistant \u003cstrong\u003eInconel®\/Incoloy®\u003c\/strong\u003e wetted surfaces, the \u003cstrong\u003e\u003cspan style=\"color: #0056b3;\"\u003e631F\u003c\/span\u003e\u003c\/strong\u003e delivers 0.50% of Reading accuracy across a 10 Torr full-scale range.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003eModel Number Decoding \u0026amp; Configuration Tree\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eBase Product Family (\u003cspan style=\"color: #0056b3;\"\u003e631F\u003c\/span\u003e):\u003c\/strong\u003e MKS Baratron® Heated Absolute Capacitance Manometer\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eFull Scale Range (\u003cspan style=\"color: #0056b3;\"\u003e11\u003c\/span\u003e):\u003c\/strong\u003e 10 Torr Absolute Pressure\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePressure Unit (\u003cspan style=\"color: #0056b3;\"\u003eT\u003c\/span\u003e):\u003c\/strong\u003e Calibrated Output in Torr\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eVacuum Fitting (\u003cspan style=\"color: #0056b3;\"\u003e8\u003c\/span\u003e):\u003c\/strong\u003e 8 VCR Female (1\/2-inch Swagelok VCR Female with long tube stub)\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eMeasurement Accuracy (\u003cspan style=\"color: #0056b3;\"\u003eF\u003c\/span\u003e):\u003c\/strong\u003e 0.50% of Reading\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSensor Control Temperature (\u003cspan style=\"color: #0056b3;\"\u003eH\u003c\/span\u003e):\u003c\/strong\u003e Heated internally to \u003cstrong\u003e150°C\u003c\/strong\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ch3\u003e\u003cstrong\u003eTechnical Specifications Matrix\u003c\/strong\u003e\u003c\/h3\u003e\n\u003ctable\u003e\n\u003cthead\u003e\n\u003ctr\u003e\n\u003cth\u003e\u003cstrong\u003eDomain\u003c\/strong\u003e\u003c\/th\u003e\n\u003cth\u003e\u003cstrong\u003eParameter\u003c\/strong\u003e\u003c\/th\u003e\n\u003cth\u003e\u003cstrong\u003eEngineering Specification\u003c\/strong\u003e\u003c\/th\u003e\n\u003c\/tr\u003e\n\u003c\/thead\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eIdentification\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eBrand \u0026amp; Model\u003c\/td\u003e\n\u003ctd\u003e\n\u003cstrong\u003eMKS \u003cspan style=\"color: #0056b3;\"\u003e631F11T8FH\u003c\/span\u003e\u003c\/strong\u003e (\u003cstrong\u003e\u003cspan style=\"color: #0056b3;\"\u003e631F Series\u003c\/span\u003e\u003c\/strong\u003e)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eMeasurement\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eType \u0026amp; Full Scale\u003c\/td\u003e\n\u003ctd\u003eAbsolute Vacuum\/Pressure Transducer; \u003cstrong\u003e10 Torr\u003c\/strong\u003e Full Scale\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eMetrological Performance\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eAccuracy \u0026amp; Resolution\u003c\/td\u003e\n\u003ctd\u003e\n\u003cstrong\u003e0.50% of Reading\u003c\/strong\u003e accuracy; \u003cstrong\u003e0.01% of Full Scale\u003c\/strong\u003e resolution\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eThermal Stability\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eSensor Temp \u0026amp; Warm-up\u003c\/td\u003e\n\u003ctd\u003e\n\u003cstrong\u003e150°C\u003c\/strong\u003e internal control; \u003cstrong\u003e≤ 4 hours\u003c\/strong\u003e cold-start thermal stabilization\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eThermal Drift Coefficients\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eZero \u0026amp; Span Drift\u003c\/td\u003e\n\u003ctd\u003eZero: \u003cstrong\u003e0.004% FS\/°C\u003c\/strong\u003e; Span: \u003cstrong\u003e0.02% Reading\/°C\u003c\/strong\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eDynamic \u0026amp; Mechanical\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eResponse, Overpressure \u0026amp; Volume\u003c\/td\u003e\n\u003ctd\u003e\n\u003cstrong\u003e50 msec\u003c\/strong\u003e response; \u003cstrong\u003e45 psia\u003c\/strong\u003e overpressure limit; \u003cstrong\u003e6.3 cc\u003c\/strong\u003e internal volume\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eProcess Interface\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eFitting \u0026amp; Wetted Materials\u003c\/td\u003e\n\u003ctd\u003e\n\u003cstrong\u003e8 VCR Female\u003c\/strong\u003e; corrosion-resistant \u003cstrong\u003eInconel® or Incoloy®\u003c\/strong\u003e nickel alloys\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eElectrical \u0026amp; Signal\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003ePower, Output \u0026amp; Connector\u003c\/td\u003e\n\u003ctd\u003e\n\u003cstrong\u003e±15 VDC (±5%) @ 1.0 A max\u003c\/strong\u003e; \u003cstrong\u003e0–10 VDC\u003c\/strong\u003e analog output via \u003cstrong\u003e15-pin D-sub\u003c\/strong\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eControl Relays\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003ePressure \u0026amp; Heater Protection\u003c\/td\u003e\n\u003ctd\u003e\n\u003cstrong\u003e2 UL solid-state pressure trip relays\u003c\/strong\u003e (0.20 A @ 30 VDC); \u003cstrong\u003e1 UL heater relay\u003c\/strong\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eAmbient \u0026amp; Compliance\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eEnvironment \u0026amp; Standards\u003c\/td\u003e\n\u003ctd\u003e\n\u003cstrong\u003e15–50°C\u003c\/strong\u003e ambient (50 ft\/min airflow above 45°C); \u003cstrong\u003eCE Compliant\u003c\/strong\u003e\n\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003ch3\u003e\u003cstrong\u003eWarranty Coverage \u0026amp; Global Express Shipping\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003e12-Month Comprehensive Warranty:\u003c\/strong\u003e Every \u003cstrong\u003e\u003cspan style=\"color: #0056b3;\"\u003e631F11T8FH\u003c\/span\u003e\u003c\/strong\u003e unit carries a 12-month warranty covering sensor zero stability, heater regulation, and electronics integrity under specified process conditions.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eGlobal Air Freight Dispatch:\u003c\/strong\u003e Shipped worldwide in shock-isolated ESD packaging via \u003cstrong\u003eFedEx, UPS, or DHL\u003c\/strong\u003e to minimize semiconductor fab tool downtime.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ch3\u003e\u003cstrong\u003eSemiconductor Process FAQ \u0026amp; Selection Guidance\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cp\u003e\u003cstrong\u003eQ: How do I adjust the dual pressure trip relays without evacuating the process chamber?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eA: The Type 631F allows independent potentiometer adjustment at atmospheric pressure, eliminating auxiliary vacuum pump setups during tool commissioning.\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp\u003e\u003cstrong\u003eQ: Why is the 4-hour warm-up period mandatory before executing zero calibration?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eA: Re-zeroing prior to full 150°C thermal equilibrium across the Inconel® diaphragm introduces thermal expansion offsets that skew low-pressure readings.\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp\u003e\u003cstrong\u003eQ: When should engineers choose a 150°C heated model over an unheated capacitance manometer?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eA: Specify 150°C heating in nitride CVD or halogen metal etch lines where condensable ammonium salts or polymer precursors otherwise coat the diaphragm.\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp\u003e\u003cstrong\u003eQ: What cooling airflow is required when mounting this manometer inside a dense gas box?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eA: Provide at least 50 ft\/min of forced ambient airflow whenever enclosure temperatures reach 45°C to 50°C to prevent fail-safe over-temperature shutdowns.\u003c\/p\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cp\u003e\u003cstrong\u003eQ: Does a 45 psia atmospheric vent event permanently shift the 10 Torr span calibration?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eA: No, the welded Inconel® sensor withstands up to 45 psia overpressure without mechanical diaphragm deformation, preserving long-term repeatability across chamber vent cycles.\u003c\/p\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e\u003cimg src=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0722\/7863\/8774\/files\/631F.png?v=1794207379\" alt=\"\"\u003e\u003c\/p\u003e","brand":"MKS Instruments","offers":[{"title":"Default Title","offer_id":68057984336054,"sku":"631F11T8FH","price":223.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7863\/8774\/files\/631F13TBFP_2_6022cafe-de0e-4cbd-9ae5-de5d52533591.jpg?v=1794542501","url":"https:\/\/www.plcsparehub.com\/products\/631f11t8fh-mks-baratron-631f-heated-capacitance-manometer","provider":"Global PLC Spare Hub","version":"1.0","type":"link"}