{"title":"HORIBA","description":"\u003cp\u003eThe HORIBA industrial instrumentation and process control portfolio delivers ultra-precise gas and liquid flow management alongside high-accuracy analytical solutions for semiconductor, chemical, and continuous emission monitoring environments. This specialized collection features industry-leading STEC mass flow controllers (MFCs)—including the digital SEC-Z500X, SEC-E, and pressure-insensitive Criterion series—utilizing piezo-actuated valves and high-speed thermal sensor technology for sub-second flow response. For continuous process diagnostics, our inventory includes HORIBA VA-5000 multi-component gas analyzers, NDIR chemical monitors, optical emission spectrometers, and inline liquid concentration meters. Engineered with corrosion-resistant 316L stainless steel wetted paths, multi-gas\/multi-range digital switching, and high-speed Ethernet\/DeviceNet protocols, these genuine HORIBA spares provide strict process repeatability, minimal zero-drift, and high reliability across critical semiconductor fab and industrial automation loops.   \u003c\/p\u003e","products":[{"product_id":"horiba-sec-z514mgx-z500-series-digital-mass-flow-controller","title":"HORIBA SEC-Z514MGX Z500 Series Digital Mass Flow Controller","description":"\n\u003ch3\u003e\u003cstrong\u003eProduct Overview\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong\u003e\u003cspan style=\"color: #0000FF;\"\u003eHORIBA SEC-Z514MGX\u003c\/span\u003e\u003c\/strong\u003e is a digital mass flow controller from the \u003cstrong\u003e\u003cspan style=\"color: #0000FF;\"\u003eZ500 Series\u003c\/span\u003e\u003c\/strong\u003e. It provides precise gas flow regulation for semiconductor manufacturing and industrial process systems.\u003c\/p\u003e\n\n\u003cp\u003eThis model combines thermal mass flow measurement with an integrated control valve. Its variable PID control system delivers a full-scale response within one second. Engineers can use it to maintain stable gas delivery during process transitions.\u003c\/p\u003e\n\n\u003cp\u003eThe \u003cstrong\u003eSEC-Z514MGX\u003c\/strong\u003e supports DeviceNet communication and a 24 VDC power supply. Its wetted components use polished 316L stainless steel. These features support reliable operation in demanding gas delivery environments.\u003c\/p\u003e\n\n\u003cp\u003eHORIBA also offers the \u003cstrong\u003eSEF-Z514MGX\u003c\/strong\u003e as the corresponding mass flow meter configuration. The SEC model regulates flow, while the SEF model measures flow without integrated control valve regulation.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003eTechnical Specifications\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eBrand\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eHORIBA STEC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSeries\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eZ500 Series \/ Z500X\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eController Model\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSEC-Z514MGX\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eMeter Model\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSEF-Z514MGX\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eProduct Type\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eDigital Mass Flow Controller \/ Mass Flow Meter\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eCommunication\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eDeviceNet Protocol\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePower Supply\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e24 VDC, 4.0 VA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eWetted Materials\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003ePolished 316L Stainless Steel\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eOperating Temperature\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e5 to 50°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eRecommended Temperature\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e15 to 45°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eStandard Fitting\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1\/4-inch VCR equivalent\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eMounting Orientation\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eFree orientation\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003ch3\u003e\u003cstrong\u003eFlow Range and Measurement Performance\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong\u003eSEC-Z514MGX\u003c\/strong\u003e supports multiple nitrogen-equivalent full-scale flow configurations. Actual flow capacity depends on the selected range and process gas.\u003c\/p\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003cth\u003e\u003cstrong\u003eRange Code\u003c\/strong\u003e\u003c\/th\u003e\n\u003cth\u003e\u003cstrong\u003eN2 Equivalent Full Scale\u003c\/strong\u003e\u003c\/th\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e#R01\u003c\/td\u003e\n\u003ctd\u003e10 SCCM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e#R1.5\u003c\/td\u003e\n\u003ctd\u003e17.5 SCCM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e#01\u003c\/td\u003e\n\u003ctd\u003e30 SCCM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e#1.5\u003c\/td\u003e\n\u003ctd\u003e55 SCCM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e#02\u003c\/td\u003e\n\u003ctd\u003e100 SCCM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e#2.5\u003c\/td\u003e\n\u003ctd\u003e175 SCCM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e#03\u003c\/td\u003e\n\u003ctd\u003e300 SCCM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e#3.5\u003c\/td\u003e\n\u003ctd\u003e550 SCCM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e#04\u003c\/td\u003e\n\u003ctd\u003e1 SLM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e#4.5\u003c\/td\u003e\n\u003ctd\u003e1.75 SLM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e#05\u003c\/td\u003e\n\u003ctd\u003e3 SLM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e#5.5\u003c\/td\u003e\n\u003ctd\u003e5.5 SLM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e#06\u003c\/td\u003e\n\u003ctd\u003e10 SLM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003cp\u003e\u003cstrong\u003eMeasurement and Control Characteristics\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eControl Range:\u003c\/strong\u003e 2–100% of full scale.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eMeasurement Range:\u003c\/strong\u003e 0–100% of full scale for the SEF meter.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eAccuracy Above 25% F.S.:\u003c\/strong\u003e ±1.0% of setpoint.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eAccuracy At or Below 25% F.S.:\u003c\/strong\u003e ±0.25% of full scale.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eResponse Time:\u003c\/strong\u003e ≤1 second across the full flow range.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eLinearity:\u003c\/strong\u003e ≤±0.5% of full scale.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eRepeatability:\u003c\/strong\u003e ≤±0.2% of full scale.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eClosed-Valve Leakage:\u003c\/strong\u003e ≤2% of full scale.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ch3\u003e\u003cstrong\u003ePressure and Environmental Ratings\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eOperating Differential Pressure\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e50–300 kPa(d)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eHigh-Flow Differential Pressure\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e100–300 kPa(d) for #5.5 and #06\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSEF Differential Pressure\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e≤300 kPa(d)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eMaximum Operating Pressure\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e450 kPa(g)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePressure Resistance\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1000 kPa(g)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eHelium Leak Integrity\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e≤5 × 10⁻¹² Pa·m³\/s\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003cp\u003e\u003cstrong\u003eEngineering Note:\u003c\/strong\u003e The differential pressure requirements vary by flow range. Verify upstream and downstream pressure conditions before installation.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003eElectrical and Communication Features\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eDigital Interface:\u003c\/strong\u003e DeviceNet protocol.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePower Input:\u003c\/strong\u003e 24 VDC.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePower Consumption:\u003c\/strong\u003e 4.0 VA.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eControl Method:\u003c\/strong\u003e Variable PID control.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eValve Configuration:\u003c\/strong\u003e Normally open or normally closed.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eThe supplied configuration determines the available communication and electrical options. Confirm the complete model code before integrating the unit with a PLC or gas delivery controller.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003eModel Configuration Breakdown\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe SEC-Z514MGX model code identifies the product family and configuration. The following options require confirmation against the manufacturer's complete ordering information.\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eSEC:\u003c\/strong\u003e Mass flow controller configuration.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSEF:\u003c\/strong\u003e Mass flow meter configuration.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eZ514MGX:\u003c\/strong\u003e Model designation within the Z500 family.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eFlow Range:\u003c\/strong\u003e Selected through the corresponding range configuration.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eValve Action:\u003c\/strong\u003e Normally open (O) or normally closed (C).\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eFitting:\u003c\/strong\u003e Standard 1\/4-inch VCR equivalent.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eOptional fitting configurations include 1.125-inch IGS and 1.5-inch IGS. Confirm the selected fitting and valve action before ordering.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003eInstallation Guidelines\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003col\u003e\n\u003cli\u003e\n\u003cstrong\u003eVerify the Model:\u003c\/strong\u003e Check the model code, gas type, flow range, and valve action.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eInspect Connections:\u003c\/strong\u003e Examine the fittings and sealing surfaces before assembly.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eConfirm Gas Compatibility:\u003c\/strong\u003e Verify wetted material compatibility with the process gas.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCheck Pressure:\u003c\/strong\u003e Maintain the specified differential pressure during operation.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eConnect Power:\u003c\/strong\u003e Provide a regulated 24 VDC supply within the equipment requirements.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eConnect DeviceNet:\u003c\/strong\u003e Verify network wiring, node address, and communication settings.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCheck Gas Lines:\u003c\/strong\u003e Perform an appropriate leak test before introducing process gas.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eStart Operation:\u003c\/strong\u003e Apply the approved startup procedure and inspect flow stability.\u003c\/li\u003e\n\u003c\/ol\u003e\n\n\u003ch3\u003e\u003cstrong\u003eCommissioning and Maintenance\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eProper commissioning helps maintain measurement accuracy and stable gas delivery. Engineers should verify the following conditions:\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003eConfirm the correct gas conversion and full-scale range.\u003c\/li\u003e\n\u003cli\u003eCheck zero-flow readings before applying the process gas.\u003c\/li\u003e\n\u003cli\u003eVerify the DeviceNet connection and controller communication.\u003c\/li\u003e\n\u003cli\u003eCompare actual flow readings with a suitable reference instrument.\u003c\/li\u003e\n\u003cli\u003eInspect pressure stability during low-flow and high-flow operation.\u003c\/li\u003e\n\u003cli\u003eCheck valve response when changing flow setpoints.\u003c\/li\u003e\n\u003cli\u003eInspect fittings and seals during scheduled maintenance.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eDo not adjust PID parameters without reviewing the application requirements. Avoid introducing contamination during gas-line maintenance. Follow the manufacturer's procedures for calibration and internal servicing.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003eSystem Compatibility and Application\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong\u003eHORIBA SEC-Z514MGX\u003c\/strong\u003e supports gas flow control systems that require DeviceNet communication and compatible 24 VDC power.\u003c\/p\u003e\n\n\u003cp\u003eTypical application areas include:\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eSemiconductor Manufacturing:\u003c\/strong\u003e Precise gas delivery for process chambers and gas panels.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eThin-Film Deposition:\u003c\/strong\u003e Stable gas flow during deposition processes.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eEtching Systems:\u003c\/strong\u003e Controlled delivery of compatible process gases.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eIndustrial Gas Systems:\u003c\/strong\u003e Flow regulation in automated gas distribution equipment.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eResearch Equipment:\u003c\/strong\u003e Gas measurement and control in laboratory process systems.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eBefore system integration, verify the PLC interface, DeviceNet configuration, gas compatibility, fitting dimensions, and pressure requirements. RS-485 and analog interfaces depend on the specific product configuration. Do not assume their availability on every SEC-Z514MGX unit.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003eCertifications and Compliance\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe supplied technical information identifies DeviceNet communication and ODVA-conforming power requirements. It does not establish specific safety or hazardous-area certifications.\u003c\/p\u003e\n\n\u003cp\u003eRequest the applicable manufacturer's declaration and product documentation when your installation requires regulatory approval. Verify the exact configuration before specifying compliance requirements.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003ePackage Contents\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n\u003cli\u003e1 × HORIBA SEC-Z514MGX Digital Mass Flow Controller, according to the ordered configuration.\u003c\/li\u003e\n\u003cli\u003eProduct identification and model information.\u003c\/li\u003e\n\u003cli\u003eStandard accessories, only when included in the confirmed order.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eFor the SEF-Z514MGX configuration, the supplied unit is a mass flow meter. Confirm the package contents and accessories with the supplier before purchase.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003eFrequently Asked Questions\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ1: What is the difference between SEC-Z514MGX and SEF-Z514MGX?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eThe SEC-Z514MGX combines mass flow measurement with an integrated control valve. The SEF-Z514MGX measures mass flow without providing the same integrated flow regulation function.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ2: How should engineers select the correct flow range?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eFirst, identify the process gas and required operating flow. Then select a nitrogen-equivalent full-scale range that accommodates normal operating conditions. Avoid choosing a range that places most operating points near the minimum control limit.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ3: Why can actual flow differ from the nitrogen-equivalent rating?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eThe listed ranges use nitrogen as the reference gas. Different gases have different physical properties and conversion requirements. Engineers should confirm the correct gas calibration before commissioning.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ4: What should engineers check when the controller responds slowly?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eStart by checking differential pressure and gas supply stability. Next, inspect DeviceNet communication and the requested setpoint. Confirm the selected gas configuration and verify that the process line has no restrictions. These checks help isolate pneumatic and control-related problems.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ5: Can the SEC-Z514MGX connect directly to any PLC?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eNo. The PLC must support a compatible DeviceNet interface or use an appropriate network gateway. Engineers should also verify node addressing, communication parameters, power requirements, and control data mapping.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ6: How should buyers choose between normally open and normally closed valves?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eConsider the required gas-line behavior during power loss or control interruption. Normally open and normally closed configurations provide different default valve positions. Select the option that matches the process safety philosophy and equipment design.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ7: What information should buyers provide when requesting a quotation?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eProvide the complete model number, process gas, required full-scale flow, valve action, fitting type, and communication interface. Also specify the operating pressure and temperature. These details help prevent configuration mismatches.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003eWhy Choose Global PLC Spare HUB?\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eGlobal PLC Spare HUB supports industrial automation users with component selection and sourcing assistance.\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eTechnical Support:\u003c\/strong\u003e Assistance with model identification and configuration checks.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eProduct Sourcing:\u003c\/strong\u003e Support for industrial control and process instrumentation requirements.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003e12-Month Warranty:\u003c\/strong\u003e Warranty coverage according to the confirmed sales terms.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eShipping Options:\u003c\/strong\u003e International shipping through FedEx, UPS, and DHL.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eDispatch Arrangement:\u003c\/strong\u003e Typical shipping arrangement within 24–48 hours, subject to stock confirmation and order processing.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003e\u003cstrong\u003eRequest a Quote Today\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eLooking for the \u003cstrong\u003eHORIBA SEC-Z514MGX\u003c\/strong\u003e or \u003cstrong\u003eSEF-Z514MGX\u003c\/strong\u003e? Contact Global PLC Spare HUB with your required gas, flow range, and connection details. Our team can assist with model verification and quotation inquiries.\u003c\/p\u003e\n","brand":"HORIBA","offers":[{"title":"Default Title","offer_id":68018403934390,"sku":"SEC-Z514MGX","price":203.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7863\/8774\/files\/SEC-Z517_1.jpg?v=1794203423"},{"product_id":"horiba-stec-sef-z514kx-mass-flow-meter-sec-z500x-series","title":"HORIBA STEC SEF-Z514KX Mass Flow Meter SEC-Z500X Series","description":"\n\u003ch3\u003e\u003cb\u003eProduct Overview\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong style=\"color:#1677b8;\"\u003eHORIBA STEC SEF-Z514KX\u003c\/strong\u003e is a digital mass flow meter for precise gas flow measurement. It belongs to the SEC-Z500X series and supports configurable multi-gas applications.\u003c\/p\u003e\n\n\u003cp\u003eThe instrument measures gas flow across a full-scale range of \u003cstrong\u003e1\/2 SCCM\u003c\/strong\u003e. Its digital architecture provides stable measurement and reliable communication through the \u003cstrong\u003eDeviceNet interface\u003c\/strong\u003e.\u003c\/p\u003e\n\n\u003cp\u003eThe SEF-Z514KX supports different gas types and measurement ranges through dedicated configuration software. Users can select MR\/MG numbers based on the gas type and required flow range. The software also provides N2 conversion for inspection measurements using nitrogen gas.\u003c\/p\u003e\n\n\u003cp\u003eIts polished 316L stainless steel wetted components support demanding gas delivery systems. The instrument offers flexible installation and integration into industrial gas control equipment.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003eTechnical Specifications\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003ctable\u003e\n  \u003ctbody\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eManufacturer\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eHORIBA STEC\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eModel\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong style=\"color:#1677b8;\"\u003eSEF-Z514KX\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSeries\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eSEC-Z500X\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eProduct Type\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eDigital Mass Flow Meter\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eRelated Controller Model\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eSEC-Z514KX\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eFull-Scale Flow Rate\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1\/2 SCCM (N2 conversion flow rate)\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eFlow Measurement Range\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e0–100% F.S.\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eFlow Control Range\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e2–100% F.S. (related SEC controller specification)\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eAccuracy\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e±1.0% F.S.\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eLinearity\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e≤ ±0.5% F.S.\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eRepeatability\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e≤ ±0.2% F.S.\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eResponse Time\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e≤ 1 second across the full flow range\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eOperating Temperature\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e5 to 50°C\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eRecommended Temperature\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e15 to 45°C\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eOperating Differential Pressure\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e≤ 300 kPa(d)\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eMaximum Operating Pressure\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e450 kPa(g)\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePressure Resistance\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1000 kPa(g)\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eLeak Integrity\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e≤ 5 × 10⁻¹² Pa·m³\/s (He)\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eDigital Communication\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eDeviceNet™ Protocol\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eWetted Materials\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e316L stainless steel, polished surface\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePower Supply\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eDC 24 V, 4.0 VA\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eStandard Connection\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1\/4-inch VCR equivalent\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eOptional Connections\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1.125-inch IGS \/ 1.5-inch IGS\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eValve Configuration\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eO: Normally Open \/ C: Normally Closed (related controller option)\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eMounting Orientation\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eFree orientation\u003c\/td\u003e\n\u003c\/tr\u003e\n  \u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003ch3\u003e\u003cb\u003eKey Features and Engineering Advantages\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n  \u003cli\u003e\n\u003cstrong\u003eConfigurable Gas Measurement:\u003c\/strong\u003e Supports multiple gas types and measurement ranges through dedicated software.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eLow-Flow Measurement:\u003c\/strong\u003e Provides a 1\/2 SCCM full-scale N2 conversion range.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eFast Response:\u003c\/strong\u003e Achieves a response time of one second or less.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eMeasurement Stability:\u003c\/strong\u003e Provides ±0.2% F.S. repeatability and ±0.5% F.S. linearity.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eDigital Communication:\u003c\/strong\u003e Supports DeviceNet integration with compatible control systems.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eCorrosion-Resistant Wetted Parts:\u003c\/strong\u003e Uses polished 316L stainless steel for gas-contact surfaces.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eHigh Leak Integrity:\u003c\/strong\u003e Meets the specified helium leak rate of 5 × 10⁻¹² Pa·m³\/s or less.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eFlexible Installation:\u003c\/strong\u003e Supports different mounting orientations and connection configurations.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ch3\u003e\u003cb\u003eConfiguration Software and Gas Selection\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong\u003eHORIBA STEC configuration software\u003c\/strong\u003e simplifies gas and range selection. Users enter the gas type and required flow range. The software then identifies the appropriate MR\/MG numbers.\u003c\/p\u003e\n\n\u003cp\u003eThe software also includes an N2 conversion function. This function supports flow measurements with nitrogen during receiving inspections.\u003c\/p\u003e\n\n\u003cp\u003eHORIBA STEC offers software operation seminars for users. Contact an authorized HORIBA STEC representative for training information.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003eInstallation Guidelines\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n  \u003cli\u003eVerify the model number and gas configuration before installation.\u003c\/li\u003e\n  \u003cli\u003eConfirm the process gas matches the selected MR\/MG configuration.\u003c\/li\u003e\n  \u003cli\u003eCheck the connection type against the installed gas line.\u003c\/li\u003e\n  \u003cli\u003eUse compatible VCR or specified IGS connection components.\u003c\/li\u003e\n  \u003cli\u003eKeep gas lines clean and free from moisture or particles.\u003c\/li\u003e\n  \u003cli\u003eObserve the specified pressure and temperature limits.\u003c\/li\u003e\n  \u003cli\u003eConnect the DeviceNet network using compatible communication hardware.\u003c\/li\u003e\n  \u003cli\u003eVerify the 24 VDC supply before energizing the instrument.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ch3\u003e\u003cb\u003eCommissioning and Maintenance\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003eCorrect configuration is essential for accurate gas flow measurement. Follow these engineering checks during commissioning:\u003c\/p\u003e\n\n\u003cul\u003e\n  \u003cli\u003e\n\u003cstrong\u003eGas Configuration:\u003c\/strong\u003e Confirm the selected gas type and MR\/MG number.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eRange Verification:\u003c\/strong\u003e Check the full-scale value against the process requirement.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003ePressure Check:\u003c\/strong\u003e Verify differential and operating pressure conditions.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eCommunication Test:\u003c\/strong\u003e Confirm DeviceNet communication with the host controller.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eZero Verification:\u003c\/strong\u003e Check the zero-flow output under stable process conditions.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eLeak Inspection:\u003c\/strong\u003e Inspect all gas connections after installation.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003ePeriodic Inspection:\u003c\/strong\u003e Review measurement stability and process connections.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eUse approved procedures for cleaning and servicing gas-contact components. Avoid unauthorized changes to factory calibration parameters.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003eCompatibility and Integration\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n  \u003cli\u003e\n\u003cstrong\u003eRelated Series:\u003c\/strong\u003e HORIBA STEC SEC-Z500X.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eRelated Model:\u003c\/strong\u003e SEC-Z514KX mass flow controller.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eNetwork Interface:\u003c\/strong\u003e DeviceNet-compatible communication systems.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eConfiguration:\u003c\/strong\u003e HORIBA STEC gas and range configuration software.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003ePower:\u003c\/strong\u003e Compatible 24 VDC supply conforming to ODVA standards.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eProcess Connections:\u003c\/strong\u003e 1\/4-inch VCR equivalent, with specified IGS options.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eVerify the communication configuration, connector pinout, gas calibration, and process fittings before system integration. Do not assume compatibility based only on the series name.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003eSoftware and Communication Accessories\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe configuration setup may require the following accessories:\u003c\/p\u003e\n\n\u003ctable\u003e\n  \u003ctbody\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eComputer\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eWindows-based PC for configuration software.\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eConfiguration Software\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eHORIBA STEC software for gas and range selection.\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eCommunications Converter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eSerial communication converter for RS-485 connections.\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eConversion Adapter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eCA-DP9RJ45 conversion adapter.\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eRS232C Cable\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eConnects the PC to the communications converter.\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eLAN Cable\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eSupports SEC-Z500X communication connections.\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eUSB Serial Converter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eRequired for computers without a serial port.\u003c\/td\u003e\n\u003c\/tr\u003e\n    \u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eLabel Printer\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eOptional accessory for configuration identification.\u003c\/td\u003e\n\u003c\/tr\u003e\n  \u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003cp\u003e\u003cstrong\u003eSoftware Operating System:\u003c\/strong\u003e Japanese or English Windows 2000, XP, or Vista. These are the operating systems specified in the supplied documentation. Confirm software compatibility before using a modern PC.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003eCertifications and Compliance\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n  \u003cli\u003e\n\u003cstrong\u003eCommunication Standard:\u003c\/strong\u003e DeviceNet™ protocol.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003ePower Standard:\u003c\/strong\u003e ODVA-compliant 24 VDC supply requirements.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eWetted Material:\u003c\/strong\u003e 316L stainless steel.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eAgency Approvals:\u003c\/strong\u003e No specific hazardous-area or safety certification appears in the supplied specifications.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eRequest the applicable manufacturer documentation when your project requires specific regulatory approvals.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003ePackaging and Supply Information\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n  \u003cli\u003eHORIBA STEC SEF-Z514KX mass flow meter.\u003c\/li\u003e\n  \u003cli\u003eStandard product identification and manufacturer documentation, subject to supply configuration.\u003c\/li\u003e\n  \u003cli\u003eConfiguration accessories and communication cables require separate confirmation.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003e\u003cstrong\u003eProduct Condition:\u003c\/strong\u003e New \u0026amp; Original in Factory Packing.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eWarranty:\u003c\/strong\u003e Factory Warranty: 12 Months.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eShipping:\u003c\/strong\u003e FedEx, UPS, and DHL international delivery options.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eLead Time:\u003c\/strong\u003e Contact our sales team for current stock and shipping arrangements.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003eGlobal PLC Spare HUB Review\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong style=\"color:#1677b8;\"\u003eHORIBA STEC SEF-Z514KX\u003c\/strong\u003e suits low-flow gas measurement applications requiring configurable gas ranges. Its DeviceNet interface supports integration with industrial automation networks.\u003c\/p\u003e\n\n\u003cp\u003eEngineers should verify gas calibration and full-scale selection before ordering. The related SEC-Z514KX controller has separate valve and control specifications. Confirm the required instrument type before selecting either model.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003eFrequently Asked Questions (FAQ)\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003e\u003cstrong\u003e1. What is the main function of the HORIBA STEC SEF-Z514KX?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eThe SEF-Z514KX measures gas mass flow within its configured measurement range. It supports low-flow applications and DeviceNet communication.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003e2. What is the difference between SEF-Z514KX and SEC-Z514KX?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eThe SEF-Z514KX is a mass flow meter. The SEC-Z514KX is a mass flow controller with an integrated control valve. Select the meter for monitoring and the controller for active flow regulation.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003e3. How should engineers select the correct gas configuration?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eFirst, identify the process gas and required flow range. Then verify the corresponding MR\/MG number through HORIBA STEC configuration software. Incorrect gas selection can cause measurement errors.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003e4. What should buyers check before ordering this model?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eConfirm the 1\/2 SCCM full-scale range, gas type, connection size, DeviceNet requirements, and operating pressure. Also verify whether the application requires a meter or controller. These checks help prevent installation and compatibility issues.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003e5. Can the SEF-Z514KX connect directly to a modern industrial PC?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eDeviceNet integration requires compatible network hardware and software. The documented configuration software also lists legacy Windows operating systems and serial communication accessories. Confirm current PC and converter compatibility before commissioning.\u003c\/p\u003e","brand":"HORIBA","offers":[{"title":"Default Title","offer_id":68018803310774,"sku":"SEF-Z514KX","price":163.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7863\/8774\/files\/SEC-Z562MGX_1.jpg?v=1794204424"},{"product_id":"horiba-sef-z514mgx-digital-gas-flow-meter-with-devicenet","title":"HORIBA SEF-Z514MGX Digital Gas Flow Meter with DeviceNet","description":"\n\u003ch3\u003e\u003cstrong\u003eProduct Overview\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003e\u003cstrong\u003eHORIBA STEC SEF-Z514MGX\u003c\/strong\u003e is a digital mass flow meter from the \u003cstrong\u003eSEC-Z500X \/ SEF-Z500X Series\u003c\/strong\u003e. It measures gas flow rates in semiconductor process equipment and precision gas delivery systems.\u003c\/p\u003e\n\n\u003cp\u003eThe device uses digital flow measurement technology and supports \u003cstrong\u003eDeviceNet™ communication\u003c\/strong\u003e. Its multi-range and multi-gas configuration supports different process gas requirements.\u003c\/p\u003e\n\n\u003cp\u003eThe \u003cstrong\u003eSEF-Z514MGX\u003c\/strong\u003e provides a 0–100% full-scale measurement range. Its response time reaches 1 second across the specified flow range. The polished 316L stainless steel gas path supports clean gas delivery applications.\u003c\/p\u003e\n\n\u003cp\u003eEngineers can select different full-scale ranges through the MR\/MG configuration. Special software allows users to change gas types and full-scale settings. This flexibility simplifies equipment configuration and process integration.\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eManufacturer:\u003c\/strong\u003e HORIBA STEC\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eProduct Series:\u003c\/strong\u003e SEC-Z500X \/ SEF-Z500X\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eModel:\u003c\/strong\u003e SEF-Z514MGX\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eProduct Type:\u003c\/strong\u003e Digital Mass Flow Meter\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCommunication:\u003c\/strong\u003e DeviceNet™ Protocol\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eMeasurement Range:\u003c\/strong\u003e 0–100% F.S.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eMaximum Listed Full Scale:\u003c\/strong\u003e 10 SLM\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eWetted Material:\u003c\/strong\u003e Polished 316L Stainless Steel\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ch3\u003e\u003cstrong\u003eTechnical Specifications\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003ctable\u003e\n\u003ctr\u003e\n\u003cth\u003eParameter\u003c\/th\u003e\n\u003cth\u003eSpecification\u003c\/th\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eManufacturer\u003c\/td\u003e\n\u003ctd\u003eHORIBA STEC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eModel\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSEF-Z514MGX\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSeries\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSEC-Z500X \/ SEF-Z500X\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eProduct Type\u003c\/td\u003e\n\u003ctd\u003eDigital Mass Flow Meter\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMeasurement Principle\u003c\/td\u003e\n\u003ctd\u003eThermal Mass Flow Measurement\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFull-Scale Flow Rate\u003c\/td\u003e\n\u003ctd\u003e10 SCCM to 10 SLM, depending on MR\/MG configuration\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMeasurement Range\u003c\/td\u003e\n\u003ctd\u003e0–100% F.S.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAccuracy\u003c\/td\u003e\n\u003ctd\u003e±1.0% S.P. above 25% F.S.; ±0.25% F.S. at or below 25% F.S.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eResponse Time\u003c\/td\u003e\n\u003ctd\u003e≤ 1 second\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eLinearity\u003c\/td\u003e\n\u003ctd\u003e≤ ±0.5% F.S.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eRepeatability\u003c\/td\u003e\n\u003ctd\u003e≤ ±0.2% F.S.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOperating Temperature\u003c\/td\u003e\n\u003ctd\u003e5 to 50°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eRecommended Temperature\u003c\/td\u003e\n\u003ctd\u003e15 to 45°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOperating Differential Pressure\u003c\/td\u003e\n\u003ctd\u003e≤ 300 kPa(d)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMaximum Operating Pressure\u003c\/td\u003e\n\u003ctd\u003e450 kPa(g)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePressure Resistance\u003c\/td\u003e\n\u003ctd\u003e1000 kPa(g)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eLeak Integrity\u003c\/td\u003e\n\u003ctd\u003e≤ 5 × 10⁻¹² Pa·m³\/s (He)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eDigital Interface\u003c\/td\u003e\n\u003ctd\u003eDeviceNet™ Protocol\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePower Supply\u003c\/td\u003e\n\u003ctd\u003eDC 24 V\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePower Consumption\u003c\/td\u003e\n\u003ctd\u003e4.0 VA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eWetted Materials\u003c\/td\u003e\n\u003ctd\u003ePolished 316L Stainless Steel\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eStandard Fitting\u003c\/td\u003e\n\u003ctd\u003e1\/4-inch VCR equivalent\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOptional Fittings\u003c\/td\u003e\n\u003ctd\u003e1.125-inch IGS \/ 1.5-inch IGS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMounting Orientation\u003c\/td\u003e\n\u003ctd\u003eAny orientation\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/table\u003e\n\n\u003ch3\u003e\u003cstrong\u003eFull-Scale Flow Range Configuration\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong\u003eSEF-Z514MGX\u003c\/strong\u003e supports multiple nitrogen-equivalent full-scale configurations. The MR\/MG code determines the applicable measurement range.\u003c\/p\u003e\n\n\u003ctable\u003e\n\u003ctr\u003e\n\u003cth\u003eMR\/MG Code\u003c\/th\u003e\n\u003cth\u003eN₂ Full-Scale Flow Rate\u003c\/th\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e#R01\u003c\/td\u003e\n\u003ctd\u003e10 SCCM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e#R1.5\u003c\/td\u003e\n\u003ctd\u003e17.5 SCCM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e#01\u003c\/td\u003e\n\u003ctd\u003e30 SCCM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e#1.5\u003c\/td\u003e\n\u003ctd\u003e55 SCCM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e#02\u003c\/td\u003e\n\u003ctd\u003e100 SCCM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e#2.5\u003c\/td\u003e\n\u003ctd\u003e175 SCCM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e#03\u003c\/td\u003e\n\u003ctd\u003e300 SCCM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e#3.5\u003c\/td\u003e\n\u003ctd\u003e550 SCCM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e#04\u003c\/td\u003e\n\u003ctd\u003e1 SLM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e#4.5\u003c\/td\u003e\n\u003ctd\u003e1.75 SLM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e#05\u003c\/td\u003e\n\u003ctd\u003e3 SLM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e#5.5\u003c\/td\u003e\n\u003ctd\u003e5.5 SLM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e#06\u003c\/td\u003e\n\u003ctd\u003e10 SLM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/table\u003e\n\n\u003cp\u003e\u003cstrong\u003eConfiguration Note:\u003c\/strong\u003e These values represent nitrogen-equivalent full-scale rates. Confirm the installed MR\/MG code before ordering.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003eMeasurement Performance and Engineering Features\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eMeasurement Accuracy:\u003c\/strong\u003e The specified accuracy supports precise gas flow monitoring. It follows the SEMI E56-1296 accuracy framework.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eFast Response:\u003c\/strong\u003e The response time remains within 1 second across the specified flow range. This supports dynamic process monitoring.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eMeasurement Stability:\u003c\/strong\u003e Linearity reaches ±0.5% F.S. Repeatability reaches ±0.2% F.S.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eMulti-Gas Configuration:\u003c\/strong\u003e Special software supports gas-type and full-scale setting changes. Verify gas compatibility before changing configuration.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePressure Integrity:\u003c\/strong\u003e The specified pressure resistance reaches 1000 kPa(g). The maximum operating pressure remains 450 kPa(g).\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eClean Gas Path:\u003c\/strong\u003e Polished 316L stainless steel contacts the process gas. This construction suits semiconductor gas delivery systems.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eDigital Integration:\u003c\/strong\u003e DeviceNet™ provides communication with compatible industrial control networks. ODVA conformity supports standardized network integration.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ch3\u003e\u003cstrong\u003eInstallation Guide\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eCorrect installation protects measurement accuracy and maintains gas delivery stability. Follow these engineering recommendations during equipment integration.\u003c\/p\u003e\n\n\u003col\u003e\n\u003cli\u003e\n\u003cstrong\u003eCheck the Model:\u003c\/strong\u003e Confirm the SEF-Z514MGX model and its MR\/MG flow range.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eVerify Gas Compatibility:\u003c\/strong\u003e Confirm gas type, material compatibility, and process cleanliness.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eInspect Connections:\u003c\/strong\u003e Check the 1\/4-inch VCR-equivalent fittings before installation.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePrepare the Pipeline:\u003c\/strong\u003e Remove particles, moisture, and contamination from the gas line.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eInstall the Meter:\u003c\/strong\u003e Connect the process fittings using suitable installation procedures. The unit supports any mounting orientation.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCheck Pressure Conditions:\u003c\/strong\u003e Keep differential pressure within the specified operating limits.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eConnect Power:\u003c\/strong\u003e Provide a compatible 24 VDC supply. Verify the electrical connections before energizing.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eConnect DeviceNet:\u003c\/strong\u003e Wire the communication interface according to the network design.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePerform Leak Testing:\u003c\/strong\u003e Check all process connections before introducing the operating gas.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eVerify Measurement:\u003c\/strong\u003e Compare the indicated flow against a suitable reference instrument.\u003c\/li\u003e\n\u003c\/ol\u003e\n\n\u003ch3\u003e\u003cstrong\u003eCommissioning and Maintenance\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eProper commissioning helps engineers establish stable gas flow measurements. Use the following checks during startup and routine maintenance.\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eInitial Configuration:\u003c\/strong\u003e Verify the gas type and MR\/MG full-scale setting.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePower Verification:\u003c\/strong\u003e Confirm stable 24 VDC power and correct electrical polarity.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eNetwork Verification:\u003c\/strong\u003e Check DeviceNet node settings and communication status.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eZero-Flow Inspection:\u003c\/strong\u003e Verify the zero-flow reading under suitable process conditions.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eReference Comparison:\u003c\/strong\u003e Compare measurements against a calibrated reference instrument.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePressure Monitoring:\u003c\/strong\u003e Check upstream and downstream pressure conditions.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eLeak Inspection:\u003c\/strong\u003e Inspect fittings and connections during scheduled maintenance.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eConfiguration Control:\u003c\/strong\u003e Record changes to gas type and full-scale settings.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003e\u003cstrong\u003eMaintenance Recommendation:\u003c\/strong\u003e Avoid unauthorized internal adjustments. Follow HORIBA STEC procedures for calibration and servicing.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003eCompatibility and Application Notes\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong\u003eHORIBA STEC SEF-Z514MGX\u003c\/strong\u003e supports gas flow measurement in precision gas delivery applications.\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003eSemiconductor manufacturing gas supply systems\u003c\/li\u003e\n\u003cli\u003eThin-film deposition and process gas monitoring\u003c\/li\u003e\n\u003cli\u003eVacuum process equipment gas delivery systems\u003c\/li\u003e\n\u003cli\u003eGas distribution panels and supply modules\u003c\/li\u003e\n\u003cli\u003eIndustrial process gas monitoring equipment\u003c\/li\u003e\n\u003cli\u003eDeviceNet-compatible automation systems\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003e\u003cstrong\u003eImportant Compatibility Considerations:\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003eMatch the gas type and full-scale range with the process requirements.\u003c\/li\u003e\n\u003cli\u003eConfirm the DeviceNet interface before connecting the control network.\u003c\/li\u003e\n\u003cli\u003eCheck the available power supply and network specifications.\u003c\/li\u003e\n\u003cli\u003eVerify fitting dimensions before replacing an installed flow meter.\u003c\/li\u003e\n\u003cli\u003eDo not assume SEC controller functions exist in the SEF meter.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003e\u003cstrong\u003eModel Distinction:\u003c\/strong\u003e SEF-Z514MGX is the mass flow meter model. SEC-Z514MGX is the corresponding mass flow controller model. The controller includes flow-control functionality, while the meter measures flow.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003eCertifications and Standards\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eCommunication Standard:\u003c\/strong\u003e DeviceNet™ Protocol.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eNetwork Conformity:\u003c\/strong\u003e ODVA-conformant communication model.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eAccuracy Framework:\u003c\/strong\u003e SEMI E56-1296.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eElectrical Supply:\u003c\/strong\u003e ODVA-compliant 24 VDC power specification.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eSpecific product safety certificates and regional approvals require confirmation against the supplied unit documentation. Please request supporting documents when your project requires additional certification.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003ePackage Contents\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n\u003cli\u003e1 × HORIBA STEC SEF-Z514MGX Digital Mass Flow Meter\u003c\/li\u003e\n\u003cli\u003e1 × Standard product identification label\u003c\/li\u003e\n\u003cli\u003eProduct documentation, subject to the supplied package configuration\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003e\u003cstrong\u003eNote:\u003c\/strong\u003e Fittings, cables, connectors, and accessories depend on the confirmed order configuration. Please verify the packing list before purchase.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003eFrequently Asked Questions (FAQ)\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ1: What is the difference between SEF-Z514MGX and SEC-Z514MGX?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eA:\u003c\/strong\u003e SEF-Z514MGX measures gas mass flow. SEC-Z514MGX provides mass flow measurement and control. Select the SEF model for measurement applications.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ2: What flow ranges does the SEF-Z514MGX support?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eA:\u003c\/strong\u003e Its nitrogen-equivalent full-scale options range from 10 SCCM to 10 SLM. The MR\/MG code identifies the selected range.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ3: Can engineers change the gas type after installation?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eA:\u003c\/strong\u003e Yes, special software supports gas-type and full-scale setting changes. Confirm the gas conversion data before modifying process settings.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ4: Does the SEF-Z514MGX support DeviceNet communication?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eA:\u003c\/strong\u003e Yes, this model supports DeviceNet™ communication. Check network configuration and electrical requirements before integration.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ5: What should engineers check before replacing an existing flow meter?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eA:\u003c\/strong\u003e Compare the model, gas type, full-scale range, fittings, pressure conditions, and communication interface. Matching only the external dimensions may cause measurement errors.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ6: How should buyers select the correct MR\/MG flow range?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eA:\u003c\/strong\u003e Select a range that covers the normal operating flow. Avoid choosing an unnecessarily large full-scale range. Low operating percentages can reduce effective measurement resolution.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ7: Can the SEF-Z514MGX directly regulate gas flow?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eA:\u003c\/strong\u003e No, the SEF model functions as a mass flow meter. Choose the SEC-Z514MGX when the application requires an integrated control valve.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ8: What causes unstable flow readings during commissioning?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eA:\u003c\/strong\u003e Incorrect gas settings, unstable pressure, contamination, and electrical interference can affect measurements. Check these conditions before replacing the instrument.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ9: Can the meter operate in any mounting orientation?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eA:\u003c\/strong\u003e Yes, the specified mounting orientation is unrestricted. Maintain clean gas connections and follow the installation requirements.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ10: What information should buyers provide when requesting a quotation?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eA:\u003c\/strong\u003e Provide the complete model, MR\/MG code, gas type, required flow range, fitting type, and DeviceNet requirements. These details help confirm the correct configuration.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003eOrdering Information and Technical Support\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eWe supply industrial automation components for semiconductor equipment and precision gas control applications.\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eBrand:\u003c\/strong\u003e HORIBA STEC\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eModel:\u003c\/strong\u003e SEF-Z514MGX\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSeries:\u003c\/strong\u003e SEC-Z500X \/ SEF-Z500X\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eProduct:\u003c\/strong\u003e Digital Mass Flow Meter\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eWarranty:\u003c\/strong\u003e 12 months\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eShipping:\u003c\/strong\u003e FedEx, DHL, and UPS options\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eProduct Condition:\u003c\/strong\u003e New and original, subject to order confirmation\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eContact our sales team for pricing, lead time, configuration verification, and technical assistance. Please include your required MR\/MG code and gas specifications with your inquiry.\u003c\/p\u003e\n","brand":"HORIBA","offers":[{"title":"Default Title","offer_id":68018806063286,"sku":"SEF-Z514MGX","price":196.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7863\/8774\/files\/SEC-Z514.jpg?v=1794204520"},{"product_id":"sef-z524mgxn-horiba-stec-z500-devicenet-gas-flow-meter","title":"SEF-Z524MGXN HORIBA STEC Z500 DeviceNet Gas Flow Meter","description":"\u003ch3\u003e\u003cstrong\u003eProduct Overview\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003e\u003cstrong\u003e\u003cspan style=\"color: #1a73e8;\"\u003eHORIBA STEC SEF-Z524MGXN\u003c\/span\u003e\u003c\/strong\u003e is a digital mass flow meter designed for precise gas flow measurement in semiconductor equipment.\u003c\/p\u003e\n\u003cp\u003eIt belongs to the \u003cstrong\u003e\u003cspan style=\"color: #1a73e8;\"\u003eHORIBA STEC SEC-Z500 \/ SEF-Z500 Series\u003c\/span\u003e\u003c\/strong\u003e. The device uses a digital \u003cstrong\u003eDeviceNet communication interface\u003c\/strong\u003e for equipment integration.\u003c\/p\u003e\n\u003cp\u003eThe SEF configuration measures gas flow without an integrated control valve. It provides real-time flow measurement across its configured full-scale range.\u003c\/p\u003e\n\u003cp\u003eIts 316L stainless steel wetted components support clean gas delivery systems. The polished internal surfaces suit demanding semiconductor process environments.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eKey Product Highlights:\u003c\/strong\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eProduct Type:\u003c\/strong\u003e Digital Mass Flow Meter (MFM)\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eModel:\u003c\/strong\u003e \u003cspan style=\"color: #1a73e8;\"\u003e\u003cstrong\u003eSEF-Z524MGXN\u003c\/strong\u003e\u003c\/span\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSeries:\u003c\/strong\u003e \u003cspan style=\"color: #1a73e8;\"\u003e\u003cstrong\u003eHORIBA STEC Z500\u003c\/strong\u003e\u003c\/span\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCommunication:\u003c\/strong\u003e DeviceNet Digital Interface\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eMeasurement Range:\u003c\/strong\u003e 0–100% of configured Full Scale\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eAccuracy:\u003c\/strong\u003e ±1.0% S.P. above 25% F.S.; ±0.25% F.S. at or below 25% F.S.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eResponse Time:\u003c\/strong\u003e ≤1 second\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eWetted Material:\u003c\/strong\u003e Polished 316L Stainless Steel\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePower Supply:\u003c\/strong\u003e DC 24 V, 4.0 VA\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ch3\u003e\u003cstrong\u003eTechnical Specifications\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003e\u003cstrong\u003eProduct Identification\u003c\/strong\u003e\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eBrand\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eHORIBA STEC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eModel\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003e\u003cspan style=\"color: #1a73e8;\"\u003eSEF-Z524MGXN\u003c\/span\u003e\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSeries\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eSEC-Z500 \/ SEF-Z500\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eProduct Type\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eDigital Mass Flow Meter (MFM)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eMeasurement Principle\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eThermal Mass Flow Measurement\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eCommunication Protocol\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eDeviceNet\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003e\u003cstrong\u003eFlow Measurement Performance\u003c\/strong\u003e\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eMeasurement Range\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e0–100% F.S.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eN₂ Conversion Flow Rate\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e22 \/ 30 \/ 50 SLM, depending on MR\/MG configuration\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eAccuracy\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e±1.0% S.P. above 25% F.S.; ±0.25% F.S. at or below 25% F.S.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eLinearity\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e≤ ±0.5% F.S.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eRepeatability\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e≤ ±0.2% F.S.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eResponse Time\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e≤ 1 second over the full measurement range\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eResolution\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eNot specified in the available model documentation\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eFrequency Response\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eNot separately specified; response time is ≤1 second\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003e\u003cstrong\u003eOperating Conditions and Mechanical Specifications\u003c\/strong\u003e\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eOperating Temperature\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e5 to 50°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eRecommended Temperature\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e15 to 45°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eOperating Differential Pressure\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e≤300 kPa(d) for SEF configuration\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eMaximum Operating Pressure\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e450 kPa(g)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePressure Resistance\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1,000 kPa(g)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eLeak Integrity\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e≤5 × 10⁻¹² Pa·m³\/s (He)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eWetted Material\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003ePolished 316L Stainless Steel\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eStandard Fitting\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1\/4-inch VCR equivalent\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eOptional Fitting\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1.125-inch IGS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eMounting Orientation\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eAny orientation\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003e\u003cstrong\u003eElectrical and Communication Specifications\u003c\/strong\u003e\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eDigital Interface\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eDeviceNet Protocol\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePower Supply\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eDC 24 V\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePower Consumption\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e4.0 VA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePower Standard\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eConforms to ODVA-related requirements\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eControl Valve\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eNot applicable; SEF is a mass flow meter\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003ch3\u003e\u003cstrong\u003eMeasurement Performance and Engineering Value\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003e\u003cstrong\u003e1. Accurate Gas Flow Measurement\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eThe SEF-Z524MGXN measures gas flow across 0–100% of its configured full-scale range.\u003c\/p\u003e\n\u003cp\u003eIts specified accuracy supports process monitoring and gas delivery verification. Engineers can use flow feedback to evaluate gas supply stability.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003e2. Stable Measurement Repeatability\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eRepeatability reaches ≤ ±0.2% F.S. This helps maintain consistent measurement results during repeated process cycles.\u003c\/p\u003e\n\u003cp\u003eLinearity remains within ±0.5% F.S. These characteristics support reliable flow monitoring in semiconductor production equipment.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003e3. Fast Measurement Response\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eThe specified response time is ≤1 second across the measurement range. This supports timely monitoring of changing gas flow conditions.\u003c\/p\u003e\n\u003cp\u003eThe actual system response also depends on piping volume, gas properties, and upstream pressure stability.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003e4. Clean Gas Path Construction\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003ePolished 316L stainless steel forms the wetted flow path. This material supports clean gas handling and chemical process compatibility.\u003c\/p\u003e\n\u003cp\u003eThe specified helium leak integrity is ≤5 × 10⁻¹² Pa·m³\/s. This specification helps evaluate sealing performance in gas delivery installations.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003eInstallation Guidelines\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eMounting Position:\u003c\/strong\u003e The unit supports installation in any orientation.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eGas Compatibility:\u003c\/strong\u003e Confirm the configured gas type before installation.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eFlow Direction:\u003c\/strong\u003e Follow the directional markings on the instrument body.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePipeline Connection:\u003c\/strong\u003e Match the fitting type and size before assembly.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSealing:\u003c\/strong\u003e Use compatible sealing components for the selected gas service.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePressure:\u003c\/strong\u003e Keep operating pressure within the specified limits.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eTemperature:\u003c\/strong\u003e Maintain ambient conditions between 5 and 50°C.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eElectrical Supply:\u003c\/strong\u003e Provide a suitable regulated 24 VDC supply.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eGrounding:\u003c\/strong\u003e Follow the equipment grounding and DeviceNet installation requirements.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eContamination Control:\u003c\/strong\u003e Keep the gas connections clean during installation.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e\u003cstrong\u003eImportant:\u003c\/strong\u003e Avoid applying excessive mechanical stress to the fittings. Confirm leak integrity before introducing process gases.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003eCommissioning, Diagnostics and Maintenance\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003e\u003cstrong\u003eInitial Commissioning\u003c\/strong\u003e\u003c\/p\u003e\n\u003col\u003e\n\u003cli\u003eVerify the complete model number and gas configuration.\u003c\/li\u003e\n\u003cli\u003eCheck the flow range against the equipment process requirements.\u003c\/li\u003e\n\u003cli\u003eConfirm the 24 VDC supply and electrical connections.\u003c\/li\u003e\n\u003cli\u003eCheck DeviceNet node configuration and network communication.\u003c\/li\u003e\n\u003cli\u003eVerify the gas supply pressure and differential pressure.\u003c\/li\u003e\n\u003cli\u003eIntroduce the specified gas under approved operating conditions.\u003c\/li\u003e\n\u003cli\u003eCompare the indicated flow against a suitable reference instrument.\u003c\/li\u003e\n\u003c\/ol\u003e\n\u003cp\u003e\u003cstrong\u003eMaintenance Recommendations\u003c\/strong\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eInspect gas fittings for leakage during scheduled maintenance.\u003c\/li\u003e\n\u003cli\u003eMonitor flow readings for unexpected deviations.\u003c\/li\u003e\n\u003cli\u003eCheck network communication when readings become unavailable.\u003c\/li\u003e\n\u003cli\u003eReview operating pressure when measurement stability changes.\u003c\/li\u003e\n\u003cli\u003eFollow HORIBA procedures for calibration and servicing.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eThe SEF model does not provide an integrated control valve. External gas regulation must meet the process requirements.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003eCompatibility and Model Selection\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003e\u003cstrong\u003e1. SEF vs. SEC Model Identification\u003c\/strong\u003e\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eModel\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eProduct Function\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eMain Application\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003e\u003cspan style=\"color: #1a73e8;\"\u003eSEF-Z524MGXN\u003c\/span\u003e\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eMass Flow Meter\u003c\/td\u003e\n\u003ctd\u003eGas flow measurement\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003e\u003cspan style=\"color: #1a73e8;\"\u003eSEC-Z524MGXN\u003c\/span\u003e\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eMass Flow Controller\u003c\/td\u003e\n\u003ctd\u003eGas flow measurement and control\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003eThe SEF model measures flow without an integrated control valve. The SEC model adds active flow regulation.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003e2. Full-Scale Range Selection\u003c\/strong\u003e\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eMR\/MG Configuration\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eN₂ Conversion Flow Rate\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e#6.5\u003c\/td\u003e\n\u003ctd\u003e22 SLM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e#07\u003c\/td\u003e\n\u003ctd\u003e30 SLM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e#08\u003c\/td\u003e\n\u003ctd\u003e50 SLM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003eThese values represent nitrogen conversion flow rates. Confirm the actual gas calibration and full-scale configuration before ordering.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003e3. Gas and Connection Compatibility\u003c\/strong\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eConfirm the gas type and corresponding calibration data.\u003c\/li\u003e\n\u003cli\u003eVerify the required full-scale flow range.\u003c\/li\u003e\n\u003cli\u003eMatch the DeviceNet interface with the equipment network.\u003c\/li\u003e\n\u003cli\u003eCheck whether the installation requires 1\/4-inch VCR or 1.125-inch IGS.\u003c\/li\u003e\n\u003cli\u003eConfirm the actual connector and wiring configuration.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e\u003cstrong\u003e4. Replacement and Cross-Reference Verification\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eSome equipment references list ASM part numbers 1110-705-01 and 1120-949-01.\u003c\/p\u003e\n\u003cp\u003eThese references require verification against the original equipment configuration. Do not assume direct interchangeability from the part number alone.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003eEnvironmental and Electrical Considerations\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eOperating Environment:\u003c\/strong\u003e 5–50°C ambient temperature.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eRecommended Environment:\u003c\/strong\u003e 15–45°C for normal operation.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePressure Resistance:\u003c\/strong\u003e 1,000 kPa(g) specified pressure resistance.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eGas Sealing:\u003c\/strong\u003e Helium leak integrity ≤5 × 10⁻¹² Pa·m³\/s.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eElectrical Noise:\u003c\/strong\u003e Follow DeviceNet cable routing and grounding practices.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eEMC Immunity:\u003c\/strong\u003e Specific immunity test levels require confirmation from the manufacturer.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eIngress Protection:\u003c\/strong\u003e Not specified in the available model information.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eResolution:\u003c\/strong\u003e Confirm the digital output resolution with the manufacturer.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ch3\u003e\u003cstrong\u003eCertifications and Compliance\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eCommunication:\u003c\/strong\u003e DeviceNet protocol.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eElectrical Requirements:\u003c\/strong\u003e 24 VDC, 4.0 VA.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eODVA:\u003c\/strong\u003e The specified power requirements reference ODVA standards.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eDeviceNet compatibility does not independently confirm product certification. Verify applicable regional approvals and certificates for the exact configuration.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003ePackage Contents\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003e1 × HORIBA STEC SEF-Z524MGXN Mass Flow Meter, according to the ordered configuration.\u003c\/li\u003e\n\u003cli\u003eProduct identification and configuration information, when supplied.\u003c\/li\u003e\n\u003cli\u003eAdditional accessories or documentation, subject to the order agreement.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eConnection cables, fittings, and calibration certificates require separate confirmation. Please contact us to verify the actual package contents before ordering.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003eFrequently Asked Questions\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003e\u003cstrong\u003eQ1: What is the main difference between SEF-Z524MGXN and SEC-Z524MGXN?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eSEF-Z524MGXN is a mass flow meter. It measures gas flow without an integrated control valve.\u003c\/p\u003e\n\u003cp\u003eSEC-Z524MGXN is a mass flow controller. It measures and actively regulates gas flow.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ2: How do I identify the correct full-scale flow range?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eCheck the MR\/MG configuration and gas calibration information. Common nitrogen conversion ranges include 22, 30, and 50 SLM.\u003c\/p\u003e\n\u003cp\u003eDo not select a replacement using the model prefix alone. Verify the original instrument's complete configuration.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ3: Can SEF-Z524MGXN directly replace another DeviceNet mass flow meter?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eNot necessarily. Check the gas type, full-scale range, fittings, power supply, and communication configuration.\u003c\/p\u003e\n\u003cp\u003eAlso verify the equipment mounting dimensions and connector pin assignments. These details can affect replacement compatibility.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ4: What should engineers check when the flow reading becomes unstable?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eStart by checking upstream pressure and gas supply stability. Inspect the fittings for leakage and verify the gas configuration.\u003c\/p\u003e\n\u003cp\u003eNext, check the 24 VDC supply and DeviceNet communication. Compare the reading with an appropriate reference instrument.\u003c\/p\u003e\n\u003cp\u003eA fluctuating reading does not automatically indicate an instrument failure. Investigate the complete gas delivery system first.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ5: What information should buyers provide when requesting a replacement?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eProvide the complete model number, serial number, gas type, and full-scale flow range.\u003c\/p\u003e\n\u003cp\u003eAlso provide the connection type and DeviceNet requirements. A clear nameplate photograph helps confirm the correct configuration.\u003c\/p\u003e\n\u003cp\u003eFor equipment replacements, provide the original part number and installation details. This reduces ordering errors and compatibility risks.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003eWhy Choose Ubest Automation?\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eUbest Automation supplies industrial automation components for semiconductor and process control applications.\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eProduct Supply:\u003c\/strong\u003e Support for HORIBA STEC mass flow meters and controllers.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eConfiguration Verification:\u003c\/strong\u003e Assistance with model numbers and technical specifications.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePre-Shipment Testing:\u003c\/strong\u003e Functional checks before dispatch, subject to product availability and test requirements.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eWarranty:\u003c\/strong\u003e 12-month warranty for applicable products.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eShipping:\u003c\/strong\u003e International delivery through DHL, FedEx, and UPS.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eTechnical Support:\u003c\/strong\u003e Assistance with product identification and replacement selection.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e\u003cstrong\u003eContact Ubest Automation for pricing, availability, and technical verification.\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eEmail:\u003c\/strong\u003e sales@ubestplc.com\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eWebsite:\u003c\/strong\u003e \u003ca href=\"https:\/\/www.ubestplc.com\"\u003ewww.ubestplc.com\u003c\/a\u003e\u003c\/p\u003e","brand":"HORIBA","offers":[{"title":"Default Title","offer_id":68018806554806,"sku":"SEF-Z524MGXN","price":203.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7863\/8774\/files\/SEC-E531_1.jpg?v=1794204630"},{"product_id":"sec-z512-sec-z500x-horiba-stec-multi-gas-mass-flow-controller","title":"SEC-Z512 SEC-Z500X HORIBA STEC Multi-Gas Mass Flow Controller","description":"\u003ch3\u003e\u003cstrong\u003eHORIBA STEC SEC-Z512 | Multi-Gas Digital Mass Flow Controller\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe \u003cstrong\u003e\u003cspan style=\"color: #1565c0;\"\u003eHORIBA STEC SEC-Z512\u003c\/span\u003e\u003c\/strong\u003e is a precision digital mass flow controller from the \u003cstrong\u003e\u003cspan style=\"color: #1565c0;\"\u003eSEC-Z500X Series\u003c\/span\u003e\u003c\/strong\u003e. It regulates process gas delivery in semiconductor manufacturing and advanced industrial applications.\u003c\/p\u003e\n\u003cp\u003eIts compact design combines thermal mass flow measurement with piezoelectric valve control. The controller supports multiple gas types and selectable full-scale flow ranges. Engineers can reconfigure compatible gas and range settings on-site.\u003c\/p\u003e\n\u003cp\u003eThe \u003cstrong\u003eSEC-Z512\u003c\/strong\u003e provides a response time of ≤1 second (T98). Its analog interface supports voltage-based setpoint and measurement signals. The RS-485 F-Net interface provides an additional digital communication option.\u003c\/p\u003e\n\u003cp\u003eWith polished SUS316L wetted surfaces and 1\/4-inch VCR connections, this model suits precision gas delivery assemblies. Typical installations include semiconductor gas panels, CVD equipment, etching systems, and deposition processes.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e01 | Engineering Identity \u0026amp; Performance Profile\u003c\/strong\u003e\u003c\/h3\u003e\n\u003ctable style=\"width: 99.9421%; height: 196px;\"\u003e\n\u003ctbody\u003e\n\u003ctr style=\"height: 19.6px;\"\u003e\n\u003ctd style=\"width: 28.1396%; height: 19.6px;\"\u003e\u003cstrong\u003eManufacturer\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 69.9475%; height: 19.6px;\"\u003eHORIBA STEC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.6px;\"\u003e\n\u003ctd style=\"width: 28.1396%; height: 19.6px;\"\u003e\u003cstrong\u003eModel\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 69.9475%; height: 19.6px;\"\u003e\u003cstrong\u003eSEC-Z512\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.6px;\"\u003e\n\u003ctd style=\"width: 28.1396%; height: 19.6px;\"\u003e\u003cstrong\u003eProduct Family\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 69.9475%; height: 19.6px;\"\u003eSEC-Z500X Series\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.6px;\"\u003e\n\u003ctd style=\"width: 28.1396%; height: 19.6px;\"\u003e\u003cstrong\u003eProduct Category\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 69.9475%; height: 19.6px;\"\u003eDigital Mass Flow Controller (MFC)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.6px;\"\u003e\n\u003ctd style=\"width: 28.1396%; height: 19.6px;\"\u003e\u003cstrong\u003eControl Technology\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 69.9475%; height: 19.6px;\"\u003eThermal Mass Flow Measurement with Piezoelectric Actuation\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.6px;\"\u003e\n\u003ctd style=\"width: 28.1396%; height: 19.6px;\"\u003e\u003cstrong\u003eFlow Configuration\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 69.9475%; height: 19.6px;\"\u003eMulti-gas \/ Multi-range\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.6px;\"\u003e\n\u003ctd style=\"width: 28.1396%; height: 19.6px;\"\u003e\u003cstrong\u003eCommunication\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 69.9475%; height: 19.6px;\"\u003eAnalog Voltage \/ RS-485 F-Net\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.6px;\"\u003e\n\u003ctd style=\"width: 28.1396%; height: 19.6px;\"\u003e\u003cstrong\u003eHeating Configuration\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 69.9475%; height: 19.6px;\"\u003eStandard Unheated Version\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.6px;\"\u003e\n\u003ctd style=\"width: 28.1396%; height: 19.6px;\"\u003e\u003cstrong\u003eValve Options\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 69.9475%; height: 19.6px;\"\u003eNormally Open \/ Normally Closed\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr style=\"height: 19.6px;\"\u003e\n\u003ctd style=\"width: 28.1396%; height: 19.6px;\"\u003e\u003cstrong\u003eInstallation Connection\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd style=\"width: 69.9475%; height: 19.6px;\"\u003e1\/4-inch VCR Male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003ch3\u003e\u003cstrong\u003e02 | Flow Control Envelope\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe \u003cstrong\u003eSEC-Z512\u003c\/strong\u003e supports nitrogen-equivalent full-scale ranges from 10 SCCM to 5.5 SLM. The selected MR\/MG configuration determines the available capacity.\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003cth\u003e\u003cstrong\u003ePerformance Item\u003c\/strong\u003e\u003c\/th\u003e\n\u003cth\u003e\u003cstrong\u003eSpecification\u003c\/strong\u003e\u003c\/th\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFull-Scale Flow Range\u003c\/td\u003e\n\u003ctd\u003e10 SCCM–5.5 SLM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eControl Range\u003c\/td\u003e\n\u003ctd\u003e2–100% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAccuracy Above 25% FS\u003c\/td\u003e\n\u003ctd\u003e±1.0% S.P.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAccuracy At or Below 25% FS\u003c\/td\u003e\n\u003ctd\u003e±0.25% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eRepeatability\u003c\/td\u003e\n\u003ctd\u003e±0.2% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eLinearity\u003c\/td\u003e\n\u003ctd\u003e±0.5% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eResponse Time\u003c\/td\u003e\n\u003ctd\u003e≤1 second (T98)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003e\u003cstrong\u003eEngineering Interpretation:\u003c\/strong\u003e The accuracy specification changes with the operating point. Above 25% FS, accuracy references the setpoint. At lower flow rates, the specification references full scale.\u003c\/p\u003e\n\u003cp\u003eFor low-flow applications, engineers should evaluate absolute full-scale accuracy rather than relying only on percentage-of-setpoint accuracy.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e03 | Gas Compatibility \u0026amp; Reconfiguration\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe \u003cstrong\u003eSEC-Z512\u003c\/strong\u003e supports multiple process gases through compatible gas-specific configurations.\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eInert Gases:\u003c\/strong\u003e Nitrogen (N2), Argon (Ar), Helium (He), and Hydrogen (H2).\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eOxidizing Gases:\u003c\/strong\u003e Oxygen (O2) and Nitrous-free process configurations as specified by the selected gas setup.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eEtching Gases:\u003c\/strong\u003e Sulfur Hexafluoride (SF6), Carbon Tetrafluoride (CF4), and Nitrogen Trifluoride (NF3).\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eDeposition Gases:\u003c\/strong\u003e Silane (SiH4), Phosphine (PH3), Tungsten Hexafluoride (WF6), and Hydrogen Bromide (HBr).\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eOther Process Gases:\u003c\/strong\u003e Carbon Monoxide (CO), Ethylene (C2H4), and Hexafluoroethane (C2F6).\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eMulti-gas capability does not mean unrestricted gas interchangeability. Each gas requires a compatible calibration and configuration. Verify wetted-material compatibility and seal selection before changing process gases.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e04 | Electrical Architecture \u0026amp; Signal Integration\u003c\/strong\u003e\u003c\/h3\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSetpoint Signal\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e0.1–5 VDC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eMeasurement Output\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e0–5 VDC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eDigital Communication\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eRS-485 F-Net Protocol\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eCommunication Speed\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e38,400 bps\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eConnector Interfaces\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eD-Sub 9-pin and RJ-45\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePositive Supply\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e+15 VDC ±5%, 150 mA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eNegative Supply\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e-15 VDC ±5%, 150 mA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003eThe analog interface supports conventional voltage-based control architectures. The RS-485 interface provides digital communication through the F-Net protocol.\u003c\/p\u003e\n\u003cp\u003eBefore connecting the controller, verify the connector pinout and signal reference. Do not assume standard Modbus RTU compatibility from the RS-485 electrical interface alone.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e05 | Mechanical Construction \u0026amp; Process Boundaries\u003c\/strong\u003e\u003c\/h3\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eBody Dimensions\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e126 × 64 × 29 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eDimension Order\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eHeight × Width × Thickness\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eStandard Connection\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1\/4-inch VCR Male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eWetted Material\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eSUS316L Stainless Steel\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eInternal Surface\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eElectropolished \/ Polished Standard\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSeal Options\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eMetal or Elastomer\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eActuator\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003ePiezoelectric\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eOperating Temperature\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e5–50°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eRecommended Temperature\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e15–45°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eMaximum Operating Pressure\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e450 kPa(g)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eOperating Differential Pressure\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e50–300 kPa(d)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePressure Resistance\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1000 kPa(g)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eHelium Leak Integrity\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e≤5 × 10⁻¹² Pa·m³\/s\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003eThe SUS316L flow path supports controlled gas handling in semiconductor equipment. The specified helium leak integrity supports demanding gas-line integrity requirements.\u003c\/p\u003e\n\u003cp\u003eThe metal or elastomer seal selection must match the process gas and operating conditions. Confirm the exact seal configuration before procurement.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e06 | Installation \u0026amp; Commissioning Considerations\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003e\u003cstrong\u003eMechanical Installation\u003c\/strong\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eCheck the mounting space against the 126 × 64 × 29 mm envelope.\u003c\/li\u003e\n\u003cli\u003eConfirm 1\/4-inch VCR male connections at the installation interface.\u003c\/li\u003e\n\u003cli\u003eInspect sealing surfaces for scratches and particle contamination.\u003c\/li\u003e\n\u003cli\u003eUse compatible fittings and follow the specified connection torque.\u003c\/li\u003e\n\u003cli\u003eMaintain the required upstream and downstream pressure conditions.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e\u003cstrong\u003eElectrical Commissioning\u003c\/strong\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eProvide stable positive and negative 15 VDC supplies.\u003c\/li\u003e\n\u003cli\u003eVerify supply polarity and voltage before energizing the unit.\u003c\/li\u003e\n\u003cli\u003eMatch the PLC analog output to the 0.1–5 VDC setpoint range.\u003c\/li\u003e\n\u003cli\u003eScale the 0–5 VDC measurement signal correctly in the control system.\u003c\/li\u003e\n\u003cli\u003eConfigure RS-485 communication at 38,400 bps when using F-Net.\u003c\/li\u003e\n\u003cli\u003eCheck connector pin assignments before applying power.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e\u003cstrong\u003eInitial Process Verification\u003c\/strong\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eConfirm the selected gas and full-scale range.\u003c\/li\u003e\n\u003cli\u003eCheck the pressure differential under actual operating conditions.\u003c\/li\u003e\n\u003cli\u003eVerify the zero-flow output before introducing process gas.\u003c\/li\u003e\n\u003cli\u003eApply several setpoints and observe the measured response.\u003c\/li\u003e\n\u003cli\u003eCompare readings against an appropriate calibrated reference instrument.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ch3\u003e\u003cstrong\u003e07 | Diagnostic Notes for Process Engineers\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003e\u003cstrong\u003eUnstable Flow at Low Setpoints\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eCheck whether the operating point approaches the lower control limit. Inspect supply pressure fluctuations and downstream pressure changes. Confirm the selected gas calibration before adjusting the control system.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eAnalog Reading Does Not Match the Reference Instrument\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eVerify the PLC input scaling and signal reference. Check the 0–5 VDC measurement range. Confirm that the reference instrument uses the same gas and compatible flow conditions.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eRS-485 Communication Failure\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eInspect the wiring, connector pinout, and network configuration. Confirm the 38,400 bps communication setting. Also verify F-Net protocol compatibility at the host controller.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eSlow Flow Stabilization\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eInspect the differential pressure and gas supply stability first. Then check for restrictions, incorrect gas settings, or unsuitable process-line conditions. Avoid changing controller tuning without manufacturer guidance.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e08 | Standards \u0026amp; Compliance\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eRoHS:\u003c\/strong\u003e RoHS compliance is specified for the product.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSEMI:\u003c\/strong\u003e SEMI E56-0309 is listed in the supplied product information.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eVerify the applicable manufacturer's declaration and exact product configuration when project specifications require formal compliance documentation.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e09 | Package \u0026amp; Procurement Verification\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eConfirm the following items against the purchase order before shipment:\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eHORIBA STEC SEC-Z512 mass flow controller.\u003c\/li\u003e\n\u003cli\u003eConfirmed full-scale flow range and gas calibration.\u003c\/li\u003e\n\u003cli\u003eSelected normally open or normally closed valve configuration.\u003c\/li\u003e\n\u003cli\u003eSpecified metal or elastomer seal arrangement.\u003c\/li\u003e\n\u003cli\u003eRequired electrical interface and connector configuration.\u003c\/li\u003e\n\u003cli\u003eProduct identification and applicable technical documentation.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003ePower cables, communication cables, fittings, and additional accessories require separate confirmation. Do not assume their inclusion unless the quotation specifies them.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e10 | Professional FAQ: Selection, Integration \u0026amp; Field Experience\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003e\u003cstrong\u003eQ1: How should engineers evaluate the SEC-Z512 for a multi-gas gas panel?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eStart with the actual gas list and required flow ranges. Check whether each gas has an approved calibration configuration. Then review seal compatibility, pressure requirements, and valve behavior. A shared controller platform does not eliminate gas-specific configuration requirements.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ2: What causes a flow offset after replacing an existing MFC?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eCommon causes include different gas calibration, incorrect analog scaling, and pressure differences. Engineers should compare the replacement unit's full-scale range and signal characteristics with the original installation. Recheck zero-flow output before returning the gas panel to production.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ3: How can engineers reduce flow instability during recipe transitions?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eReview the pressure regulator response and gas-line volume. Check whether the upstream supply can maintain stable differential pressure during rapid demand changes. Use the controller's response specification as a reference, not as a guarantee of total system settling time.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ4: What should buyers verify when selecting metal or elastomer seals?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eEvaluate chemical compatibility, operating pressure, temperature, and contamination requirements. Reactive gases require particular attention to seal compatibility. Confirm the approved seal material for every intended process gas before finalizing the order.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ5: When should an engineer choose analog control instead of F-Net communication?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eAnalog control suits systems with established voltage-based I\/O and straightforward setpoint integration. F-Net suits installations that require digital communication and centralized parameter exchange. Check the host controller's protocol support and maintenance requirements before selecting the interface.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003eHORIBA STEC SEC-Z512 | Technical Sourcing Support\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eGlobal PLC Spare HUB assists industrial users with model identification and instrumentation sourcing. We support technical inquiries involving HORIBA mass flow controllers and semiconductor process equipment.\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eModel Verification:\u003c\/strong\u003e Check flow range, gas type, valve action, and electrical configuration.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eTechnical Assistance:\u003c\/strong\u003e Review connection, pressure, and integration requirements.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eWarranty:\u003c\/strong\u003e 12-month warranty according to confirmed sales terms.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eShipping:\u003c\/strong\u003e FedEx, UPS, and DHL shipping options.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eDispatch:\u003c\/strong\u003e Typical arrangement within 24–48 hours, subject to stock and order confirmation.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e\u003cstrong\u003eRequest a Quote for SEC-Z512\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eSend us your required gas type, full-scale flow rate, seal preference, and interface requirements. Our team can help verify the \u003cstrong\u003eHORIBA STEC SEC-Z512\u003c\/strong\u003e configuration and prepare a quotation for your application.\u003c\/p\u003e","brand":"HORIBA","offers":[{"title":"Default Title","offer_id":68018807537846,"sku":"SEC-Z512","price":196.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7863\/8774\/files\/SEC-Z512_2.jpg?v=1794204836"},{"product_id":"sef-z524mgx-horiba-stec-sec-z500x-digital-mass-flow-meter","title":"SEF-Z524MGX HORIBA STEC SEC-Z500X Digital Mass Flow Meter","description":"\n\u003ch3\u003e\u003cb\u003eSEF-Z524MGX | High-Capacity Gas Measurement Platform\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003e\u003cstrong\u003eHORIBA STEC SEF-Z524MGX\u003c\/strong\u003e is a digital mass flow meter from the \u003cstrong\u003eSEC-Z500X series\u003c\/strong\u003e. It measures gas flow without an integrated control valve. Its architecture supports multi-gas and multi-range measurement in industrial gas delivery systems.\u003c\/p\u003e\n\n\u003cp\u003eThis model supports several full-scale configurations through selectable MR\/MG numbers. Available N2 conversion ranges include 22 SLM, 30 SLM, and 50 SLM. Engineers can select the appropriate range according to process requirements.\u003c\/p\u003e\n\n\u003cp\u003eThe instrument combines DeviceNet communication, precision flow measurement, and polished 316L stainless steel wetted components. Its compact measurement architecture suits semiconductor equipment and precision gas supply applications.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e01. Measurement Architecture \u0026amp; Configuration Matrix\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003cth\u003eConfiguration Item\u003c\/th\u003e\n\u003cth\u003eAvailable Specification\u003c\/th\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eManufacturer\u003c\/td\u003e\n\u003ctd\u003eHORIBA STEC, Japan\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eModel Number\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSEF-Z524MGX\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eProduct Family\u003c\/td\u003e\n\u003ctd\u003eSEC-Z500X Series\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eInstrument Classification\u003c\/td\u003e\n\u003ctd\u003eDigital Mass Flow Meter\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eRelated Controller\u003c\/td\u003e\n\u003ctd\u003eSEC-Z524MGX\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFlow Measurement Principle\u003c\/td\u003e\n\u003ctd\u003eMass flow measurement\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eControl Valve\u003c\/td\u003e\n\u003ctd\u003eNot included in the SEF meter configuration\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFull-Scale Configuration\u003c\/td\u003e\n\u003ctd\u003eMR\/MG selectable ranges\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMR\/MG #6.5\u003c\/td\u003e\n\u003ctd\u003e22 SLM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMR\/MG #07\u003c\/td\u003e\n\u003ctd\u003e30 SLM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMR\/MG #08\u003c\/td\u003e\n\u003ctd\u003e50 SLM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFlow Measurement Range\u003c\/td\u003e\n\u003ctd\u003e0–100% F.S.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eGas Conversion Reference\u003c\/td\u003e\n\u003ctd\u003eN2 conversion flow rate\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003ch3\u003e\u003cb\u003e02. Measurement Performance \u0026amp; Operating Limits\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003cth\u003ePerformance Parameter\u003c\/th\u003e\n\u003cth\u003eTechnical Specification\u003c\/th\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMeasurement Accuracy Above 25% F.S.\u003c\/td\u003e\n\u003ctd\u003e±1.0% S.P.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMeasurement Accuracy At or Below 25% F.S.\u003c\/td\u003e\n\u003ctd\u003e±0.25% F.S.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eLinearity\u003c\/td\u003e\n\u003ctd\u003e≤ ±0.5% F.S.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eRepeatability\u003c\/td\u003e\n\u003ctd\u003e≤ ±0.2% F.S.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eResponse Time\u003c\/td\u003e\n\u003ctd\u003e≤ 1 second across the full flow range\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOperating Temperature\u003c\/td\u003e\n\u003ctd\u003e5 to 50°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eRecommended Temperature\u003c\/td\u003e\n\u003ctd\u003e15 to 45°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOperating Differential Pressure\u003c\/td\u003e\n\u003ctd\u003e≤ 300 kPa(d) for SEF configuration\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMaximum Operating Pressure\u003c\/td\u003e\n\u003ctd\u003e450 kPa(g)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePressure Resistance\u003c\/td\u003e\n\u003ctd\u003e1000 kPa(g)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHelium Leak Integrity\u003c\/td\u003e\n\u003ctd\u003e≤ 5 × 10⁻¹² Pa·m³\/s\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003cp\u003e\u003cstrong\u003eEngineering Note:\u003c\/strong\u003e F.S. means full scale. S.P. means set point. Confirm the applicable accuracy specification when evaluating low-flow measurement performance.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e03. Mechanical Construction \u0026amp; Electrical Interface\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eWetted Material\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e316L stainless steel\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSurface Finish\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003ePolished wetted surfaces\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eStandard Process Connection\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1.5-inch IGS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eOptional Connections\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1\/4-inch VCR equivalent \/ 1.125-inch IGS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eCommunication Protocol\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eDeviceNet™\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePower Supply\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eDC 24 V\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePower Consumption\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e4.0 VA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePower Standard\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eConforming to ODVA standards\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eMounting Orientation\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eFlexible orientation\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003ch3\u003e\u003cb\u003e04. Gas Configuration \u0026amp; Application Flexibility\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe SEC-Z500X platform supports multiple gas and measurement range configurations. Dedicated configuration software helps engineers identify suitable MR\/MG numbers.\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eGas Selection:\u003c\/strong\u003e Enter the process gas type into the configuration software.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eRange Selection:\u003c\/strong\u003e Specify the required full-scale flow rate.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eMR\/MG Identification:\u003c\/strong\u003e Select the corresponding configuration number.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eN2 Conversion:\u003c\/strong\u003e Use the nitrogen conversion function during receiving inspections.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eConfiguration Verification:\u003c\/strong\u003e Confirm the selected gas and range before commissioning.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eHORIBA STEC also provides software operation seminars. Contact a HORIBA STEC representative for training information and software support.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e05. Installation \u0026amp; Commissioning Recommendations\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003eProper installation helps maintain measurement accuracy and process stability. Engineers should verify the following items before startup.\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eProcess Compatibility:\u003c\/strong\u003e Confirm the gas type and configured flow range.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eConnection Inspection:\u003c\/strong\u003e Match the 1.5-inch IGS fitting with the process piping.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eClean Gas Lines:\u003c\/strong\u003e Remove particles and contaminants before connecting the instrument.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePressure Verification:\u003c\/strong\u003e Maintain differential pressure within the specified operating limits.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eTemperature Control:\u003c\/strong\u003e Prefer the recommended 15–45°C operating range.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eElectrical Wiring:\u003c\/strong\u003e Verify 24 VDC power and DeviceNet wiring.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eLeak Testing:\u003c\/strong\u003e Inspect process connections using an approved leak-testing procedure.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eInitial Verification:\u003c\/strong\u003e Check zero-flow readings and measurement stability.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ch3\u003e\u003cb\u003e06. Maintenance \u0026amp; Diagnostic Considerations\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n\u003cli\u003eMonitor measurement deviations during normal production.\u003c\/li\u003e\n\u003cli\u003eCompare actual readings against the configured full-scale range.\u003c\/li\u003e\n\u003cli\u003eCheck DeviceNet communication status when readings become unavailable.\u003c\/li\u003e\n\u003cli\u003eInspect gas fittings when unexpected pressure changes occur.\u003c\/li\u003e\n\u003cli\u003eReview gas configuration after changing the process gas.\u003c\/li\u003e\n\u003cli\u003eFollow manufacturer procedures for calibration and internal servicing.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eUnverified gas configurations can affect measurement accuracy. Avoid changing calibration parameters without authorized technical procedures.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e07. System Integration \u0026amp; Model Selection\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003cth\u003eModel \/ Component\u003c\/th\u003e\n\u003cth\u003eFunction\u003c\/th\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSEF-Z524MGX\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eMass flow measurement without an integrated control valve\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSEC-Z524MGX\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eMass flow regulation with an integrated control valve\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSEC-Z500X Series\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003ePlatform for configurable gas flow measurement and control\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eDeviceNet Network\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eDigital communication with compatible automation equipment\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003e24 VDC Supply\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eElectrical power for the instrument\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003cp\u003eFor measurement-only applications, select the SEF configuration. For applications requiring active flow regulation, evaluate the corresponding SEC controller.\u003c\/p\u003e\n\n\u003cp\u003eBefore replacement, verify the MR\/MG number, gas calibration, process fitting, electrical connector, and communication settings. Similar model numbers do not guarantee direct interchangeability.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e08. Compliance \u0026amp; Documentation\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eCommunication:\u003c\/strong\u003e DeviceNet™ protocol.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePower Requirements:\u003c\/strong\u003e ODVA-standard 24 VDC supply.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eWetted Construction:\u003c\/strong\u003e Polished 316L stainless steel.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePressure Integrity:\u003c\/strong\u003e Specified helium leak integrity and pressure resistance.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eRegulatory Approvals:\u003c\/strong\u003e Specific hazardous-area and safety certifications require confirmation from manufacturer documentation.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ch3\u003e\u003cb\u003e09. Packaging \u0026amp; Commercial Supply\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n\u003cli\u003eHORIBA STEC SEF-Z524MGX mass flow meter.\u003c\/li\u003e\n\u003cli\u003eProduct identification and applicable manufacturer documentation, subject to supply configuration.\u003c\/li\u003e\n\u003cli\u003eAdditional communication accessories require separate confirmation.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003e\u003cstrong\u003eProduct Condition:\u003c\/strong\u003e New \u0026amp; Original in Factory Packing.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eWarranty:\u003c\/strong\u003e Factory Warranty: 12 Months.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eShipping Options:\u003c\/strong\u003e FedEx, UPS, and DHL.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eAvailability:\u003c\/strong\u003e Contact our sales team for current stock and delivery schedules.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e10. Global PLC Spare HUB | Engineering Review\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong\u003eSEF-Z524MGX\u003c\/strong\u003e addresses gas measurement requirements across several high-flow configurations. Its 22, 30, and 50 SLM options provide practical range selection for different process conditions.\u003c\/p\u003e\n\n\u003cp\u003eDeviceNet communication simplifies integration with compatible automation networks. The polished 316L stainless steel gas path supports demanding industrial gas applications.\u003c\/p\u003e\n\n\u003cp\u003eFrom an engineering perspective, range selection deserves particular attention. A suitable full-scale configuration helps maintain measurement resolution and operating accuracy. Engineers should also verify gas conversion data before accepting replacement equipment.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e11. Technical FAQ | Selection, Integration \u0026amp; Field Experience\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003e\u003cstrong\u003e1. How does full-scale selection affect measurement performance?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eFull-scale selection determines the instrument's measurement span. An unnecessarily large range can reduce useful measurement utilization. Select a range that accommodates normal operating flow and expected process peaks.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003e2. What should engineers consider when replacing an existing gas flow instrument?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eCheck the original gas calibration, MR\/MG number, process connection, pressure conditions, and communication configuration. Mechanical compatibility alone does not establish measurement equivalence. Confirm these parameters before approving a replacement.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003e3. Why can actual flow readings differ after changing the process gas?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eDifferent gases have different physical properties. The instrument requires the correct gas-specific configuration. Engineers should verify the gas selection and conversion settings before comparing measurement results.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003e4. How should engineers investigate unstable readings during operation?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eStart by checking gas supply pressure and process stability. Then inspect connections for leakage and review DeviceNet communication. Also verify that the configured measurement range matches actual operating conditions.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003e5. Is the 50 SLM configuration always the best choice for a new installation?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eNo. The highest range does not automatically provide the best measurement performance. Evaluate normal flow, peak demand, process variation, and required accuracy. Confirm the appropriate MR\/MG configuration with the manufacturer before purchasing.\u003c\/p\u003e\n","brand":"HORIBA","offers":[{"title":"Default Title","offer_id":68018816581814,"sku":"SEF-Z524MGX","price":198.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7863\/8774\/files\/SEC-Z562MGX_1_a0fd0e54-a08b-4ee4-89a5-cce1a5c085b8.jpg?v=1794205236"},{"product_id":"sec-z522-horiba-stec-sec-z500x-high-accuracy-mass-flow-controller","title":"SEC-Z522 HORIBA STEC SEC-Z500X High-Accuracy Mass Flow Controller","description":"\u003ch3\u003e\u003cstrong\u003eHORIBA STEC SEC-Z522 | Medium-Flow Precision Control Platform\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong\u003e\u003cspan style=\"color: #1677b8;\"\u003eSEC-Z522\u003c\/span\u003e\u003c\/strong\u003e is a medium-flow Mass Flow Controller (MFC) from the \u003cstrong\u003eHORIBA STEC SEC-Z500X Digital\/Analog Series\u003c\/strong\u003e. It regulates process gas delivery through precision flow measurement and piezoelectric valve control.\u003c\/p\u003e\n\n\u003cp\u003eIts specified full-scale range covers \u003cstrong\u003e22 to 50 SLM\u003c\/strong\u003e, based on nitrogen-equivalent flow and the applicable MR\/MG #6.5–#08 configurations. The controller supports multi-gas and multi-range operation for semiconductor process equipment.\u003c\/p\u003e\n\n\u003cp\u003eThe design combines analog setpoint control with digital RS-485 F-Net communication. Its response time reaches T98 within one second across the specified full-flow range. This performance supports process sequences that require controlled gas delivery and repeatable flow transitions.\u003c\/p\u003e\n\n\u003cp\u003eThe standard configuration uses an unheated construction and SUS316L wetted surfaces. A 1\/4-inch VCR male connection supports integration into compatible high-purity gas delivery assemblies.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e01 | Performance Profile and Flow Accuracy\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe SEC-Z522 provides a 2–100% FS control range. Its accuracy specification uses separate limits for higher-flow and lower-flow operating regions.\u003c\/p\u003e\n\n\u003ctable\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePerformance Parameter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSpecification\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eManufacturer\u003c\/td\u003e\n\u003ctd\u003eHORIBA STEC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eModel\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSEC-Z522\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eProduct Series\u003c\/td\u003e\n\u003ctd\u003eSEC-Z500X Digital\/Analog\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eProduct Type\u003c\/td\u003e\n\u003ctd\u003eMass Flow Controller (MFC)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFull-Scale Flow Range\u003c\/td\u003e\n\u003ctd\u003e22–50 SLM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eReference Gas\u003c\/td\u003e\n\u003ctd\u003eN2 equivalent\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eApplicable Configuration\u003c\/td\u003e\n\u003ctd\u003eMR\/MG #6.5–#08\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAccuracy Above 25% FS\u003c\/td\u003e\n\u003ctd\u003e±1.0% S.P.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAccuracy At or Below 25% FS\u003c\/td\u003e\n\u003ctd\u003e±0.25% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eRepeatability\u003c\/td\u003e\n\u003ctd\u003e±0.2% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eLinearity\u003c\/td\u003e\n\u003ctd\u003e±0.5% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eResponse Time\u003c\/td\u003e\n\u003ctd\u003e≤1 second (T98)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eControl Range\u003c\/td\u003e\n\u003ctd\u003e2–100% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/table\u003e\n\n\u003cp\u003e\u003cstrong\u003eEngineering Interpretation:\u003c\/strong\u003e Accuracy depends on the operating point. Above 25% FS, the specification references setpoint percentage. At or below 25% FS, it references full scale. Engineers should use the correct reference when calculating allowable flow deviation.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e02 | Gas Compatibility and Process Conditions\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThis controller supports multiple process gases and corresponding flow-range configurations. Gas selection must match the calibrated instrument specification.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eSpecified gas examples:\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003eNitrogen (N2)\u003c\/li\u003e\n\u003cli\u003eArgon (Ar)\u003c\/li\u003e\n\u003cli\u003eHydrogen (H2)\u003c\/li\u003e\n\u003cli\u003eHelium (He)\u003c\/li\u003e\n\u003cli\u003eSulfur Hexafluoride (SF6)\u003c\/li\u003e\n\u003cli\u003eHydrogen Bromide (HBr)\u003c\/li\u003e\n\u003cli\u003eTungsten Hexafluoride (WF6)\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ctable\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eProcess Parameter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSpecification\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOperating Differential Pressure\u003c\/td\u003e\n\u003ctd\u003e200–300 kPa(d)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMaximum Operating Pressure\u003c\/td\u003e\n\u003ctd\u003e450 kPa(g)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePressure Resistance\u003c\/td\u003e\n\u003ctd\u003e1000 kPa(g)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOperating Temperature\u003c\/td\u003e\n\u003ctd\u003e5–50°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eRecommended Temperature\u003c\/td\u003e\n\u003ctd\u003e15–45°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHeated Configuration\u003c\/td\u003e\n\u003ctd\u003eUnheated standard version\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/table\u003e\n\n\u003cp\u003e\u003cstrong\u003eGas Selection Note:\u003c\/strong\u003e N2-equivalent flow does not establish identical calibration for every gas. Confirm the actual gas, full-scale range, and factory calibration before installation.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e03 | Valve Technology and Wetted Construction\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe SEC-Z522 uses a \u003cstrong\u003epiezoelectric actuator\u003c\/strong\u003e for proportional valve control. The available valve configuration includes normally open and normally closed options.\u003c\/p\u003e\n\n\u003ctable\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eComponent\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eConstruction or Configuration\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eValve Actuator\u003c\/td\u003e\n\u003ctd\u003ePiezoelectric\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eValve Configuration\u003c\/td\u003e\n\u003ctd\u003eNormally open or normally closed\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eWetted Material\u003c\/td\u003e\n\u003ctd\u003eSUS316L stainless steel\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eInternal Surface\u003c\/td\u003e\n\u003ctd\u003ePolished inner surface, standard\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSeal Options\u003c\/td\u003e\n\u003ctd\u003eMetal or elastomer\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eStandard Thermal Configuration\u003c\/td\u003e\n\u003ctd\u003eUnheated\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eLeak Integrity\u003c\/td\u003e\n\u003ctd\u003e≤5 × 10⁻¹² Pa·m³\/s (He)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/table\u003e\n\n\u003cp\u003eThe polished SUS316L flow path supports high-purity gas handling requirements. Seal selection requires careful review of gas chemistry, operating pressure, and process compatibility.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e04 | Electrical Interface and Communication Architecture\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe instrument supports both analog signal integration and digital communication. Engineers can select the appropriate interface according to the host controller and equipment architecture.\u003c\/p\u003e\n\n\u003ctable\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eElectrical Parameter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSpecification\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAnalog Setpoint\u003c\/td\u003e\n\u003ctd\u003e0.1–5 VDC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAnalog Output\u003c\/td\u003e\n\u003ctd\u003e0–5 VDC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eDigital Interface\u003c\/td\u003e\n\u003ctd\u003eRS-485\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eCommunication Protocol\u003c\/td\u003e\n\u003ctd\u003eF-Net\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eCommunication Speed\u003c\/td\u003e\n\u003ctd\u003e38,400 bps\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eConnector Interfaces\u003c\/td\u003e\n\u003ctd\u003eD-Sub 9-pin and RJ-45\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePositive Supply\u003c\/td\u003e\n\u003ctd\u003e+15 VDC ±5%, 150 mA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eNegative Supply\u003c\/td\u003e\n\u003ctd\u003e-15 VDC ±5%, 150 mA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/table\u003e\n\n\u003cp\u003e\u003cstrong\u003eIntegration Considerations:\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003eVerify analog output compatibility with the host controller input.\u003c\/li\u003e\n\u003cli\u003eCheck the analog setpoint range before connecting the control signal.\u003c\/li\u003e\n\u003cli\u003eConfirm RS-485 wiring polarity and F-Net communication settings.\u003c\/li\u003e\n\u003cli\u003eVerify connector pin assignments against the applicable wiring documentation.\u003c\/li\u003e\n\u003cli\u003eCheck positive and negative supply rails under operating conditions.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ch3\u003e\u003cstrong\u003e05 | Mechanical Envelope and Process Connection\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe compact body supports installation in semiconductor gas distribution equipment. Its extended fitting distance requires attention during manifold and piping layout design.\u003c\/p\u003e\n\n\u003ctable\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eMechanical Parameter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSpecification\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHeight\u003c\/td\u003e\n\u003ctd\u003e126 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eWidth\u003c\/td\u003e\n\u003ctd\u003e64 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eThickness\u003c\/td\u003e\n\u003ctd\u003e29 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOverall Dimensions\u003c\/td\u003e\n\u003ctd\u003e126 × 64 × 29 mm (H × W × T)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eProcess Connection\u003c\/td\u003e\n\u003ctd\u003e1\/4-inch VCR male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFitting Distance\u003c\/td\u003e\n\u003ctd\u003e124 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/table\u003e\n\n\u003cp\u003eCheck the available installation space before selecting the mounting position. Confirm fitting alignment and connection clearance during gas panel design.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e06 | Semiconductor Process Applications\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong\u003eHORIBA STEC SEC-Z522\u003c\/strong\u003e addresses medium-flow gas delivery requirements in semiconductor manufacturing equipment.\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eChemical Vapor Deposition (CVD):\u003c\/strong\u003e Regulates process gas delivery according to equipment recipes.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eEtching Systems:\u003c\/strong\u003e Controls compatible process gases during defined etching sequences.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eBulk Gas Panels:\u003c\/strong\u003e Supports controlled distribution of selected process gases.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eGas Delivery Assemblies:\u003c\/strong\u003e Provides analog and digital interfaces for equipment integration.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eMulti-Gas Processes:\u003c\/strong\u003e Supports specified gas configurations when calibration and material compatibility are confirmed.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ch3\u003e\u003cstrong\u003e07 | Installation and Commissioning Checklist\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eCorrect installation requires coordinated mechanical, electrical, and gas-system checks.\u003c\/p\u003e\n\n\u003col\u003e\n\u003cli\u003eVerify the complete model number and calibrated gas configuration.\u003c\/li\u003e\n\u003cli\u003eConfirm the required full-scale flow range.\u003c\/li\u003e\n\u003cli\u003eCheck upstream and downstream pressure conditions.\u003c\/li\u003e\n\u003cli\u003eInspect the SUS316L wetted surfaces and specified seal configuration.\u003c\/li\u003e\n\u003cli\u003eVerify 1\/4-inch VCR male connection compatibility.\u003c\/li\u003e\n\u003cli\u003eConfirm the available 124 mm fitting distance.\u003c\/li\u003e\n\u003cli\u003eConnect the required ±15 VDC power supplies.\u003c\/li\u003e\n\u003cli\u003eCheck analog signal wiring or RS-485 communication settings.\u003c\/li\u003e\n\u003cli\u003eIntroduce the specified process gas under approved operating conditions.\u003c\/li\u003e\n\u003cli\u003eVerify flow response and setpoint tracking before production operation.\u003c\/li\u003e\n\u003c\/ol\u003e\n\n\u003cp\u003eUse suitable high-purity gas handling procedures during installation. Follow the equipment manufacturer's instructions for leak testing and process-line purging.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e08 | Maintenance and Troubleshooting Considerations\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eRoutine maintenance should focus on flow stability, gas compatibility, electrical integrity, and process-line cleanliness.\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eFlow deviation:\u003c\/strong\u003e Check actual gas selection, pressure conditions, and calibration configuration.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSlow response:\u003c\/strong\u003e Inspect supply stability, process pressure, and communication settings.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eUnstable readings:\u003c\/strong\u003e Check grounding, signal wiring, gas supply fluctuations, and electrical noise.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCommunication failure:\u003c\/strong\u003e Verify RS-485 polarity, baud rate, F-Net settings, and connector condition.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eLeak concerns:\u003c\/strong\u003e Inspect VCR connections and compatible sealing components using approved procedures.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eTemperature variation:\u003c\/strong\u003e Maintain the recommended 15–45°C environment whenever practical.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eDo not change gas calibration or valve configuration without confirming the applicable manufacturer specifications.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e09 | Compliance and Product Standards\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eRoHS:\u003c\/strong\u003e RoHS compliant.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eIndustry Standards:\u003c\/strong\u003e SEMI standards.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eSpecific SEMI standard numbers and individual certification references were not provided. Confirm the applicable compliance documents for the intended equipment and installation.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e10 | Frequently Asked Questions\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ1: How does the 2–100% FS control range affect process recipe configuration?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eThe specified range defines the available control span relative to the configured full-scale value. Recipe engineers should check the minimum operating setpoint against the required process flow. Avoid assuming that every gas configuration provides identical usable flow limits.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ2: Why should engineers verify the seal material before introducing HBr or WF6?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eGas chemistry can affect sealing materials and long-term leak integrity. Confirm chemical compatibility for the selected metal or elastomer seal. Also review moisture exposure and the approved gas handling procedure before commissioning.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ3: What could cause a flow deviation after replacing an existing controller?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eCommon investigation points include an incorrect gas calibration, mismatched full-scale range, different pressure conditions, and signal scaling errors. Compare the replacement configuration with the original instrument records before changing process parameters.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ4: When should an engineer choose RS-485 instead of analog control?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eRS-485 suits equipment architectures that require digital communication through F-Net. Analog control suits systems with compatible voltage-based setpoint and feedback interfaces. Check the host controller architecture and communication requirements before selecting the connection method.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ5: What practical checks help prevent installation problems in a semiconductor gas panel?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eReview fitting clearance, VCR alignment, gas purity, pressure differential, and electrical connector access. Confirm the 124 mm fitting distance during mechanical design. Also verify the selected gas calibration and valve configuration before introducing process gases.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e11 | Procurement and Technical Support\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eGlobal PLC Spare HUB supports industrial automation and semiconductor process equipment spare-part sourcing.\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eModel Verification:\u003c\/strong\u003e Assistance with part number and configuration identification.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eTechnical Support:\u003c\/strong\u003e Help reviewing flow range, gas selection, and interface specifications.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eWarranty:\u003c\/strong\u003e 12-month warranty coverage.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eShipping:\u003c\/strong\u003e DHL, FedEx, and UPS international shipping options.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eOrder Processing:\u003c\/strong\u003e Typically 24–48 hours after order confirmation.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eContact our team for pricing, availability, and technical assistance regarding the \u003cstrong\u003e\u003cspan style=\"color: #1677b8;\"\u003eHORIBA STEC SEC-Z522\u003c\/span\u003e SEC-Z500X Mass Flow Controller\u003c\/strong\u003e.\u003c\/p\u003e","brand":"HORIBA","offers":[{"title":"Default Title","offer_id":68027777220790,"sku":"SEC-Z522","price":145.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7863\/8774\/files\/SEC-Z522_1.jpg?v=1794280927"},{"product_id":"sec-z514-horiba-stec-digital-mass-flow-controller-sec-z500x-devicenet-series","title":"SEC-Z514 HORIBA STEC Digital Mass Flow Controller | SEC-Z500X DeviceNet Series","description":"\n\u003ch3\u003e\u003cb\u003eSEC-Z514 | DeviceNet Mass Flow Control for Semiconductor Gas Systems\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong\u003e\u003cspan style=\"color: #0070C0;\"\u003eHORIBA STEC SEC-Z514\u003c\/span\u003e\u003c\/strong\u003e is a digital mass flow controller from the \u003cstrong\u003eSEC-Z500X DeviceNet Series\u003c\/strong\u003e. It regulates gas flow in semiconductor manufacturing equipment and precision gas delivery systems.\u003c\/p\u003e\n\n\u003cp\u003eThe controller combines multi-gas capability with DeviceNet digital communication. It supports selectable full-scale flow ranges from \u003cstrong\u003e10 SCCM to 5.5 SLM\u003c\/strong\u003e, based on N2-equivalent flow specifications.\u003c\/p\u003e\n\n\u003cp\u003eIts piezoelectric control valve provides accurate flow regulation. The controller achieves ±1.0% S.P. accuracy above 25% FS and ±0.25% FS at lower flow conditions.\u003c\/p\u003e\n\n\u003cp\u003eThe compact housing measures \u003cstrong\u003e126 × 64 × 29 mm\u003c\/strong\u003e. Its DeviceNet interface supports selectable communication speeds for integration into compatible fieldbus architectures.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e01 | Performance and Configuration Data\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eManufacturer\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eHORIBA STEC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eModel\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003e\u003cspan style=\"color: #0070C0;\"\u003eSEC-Z514\u003c\/span\u003e\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eProduct Series\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eSEC-Z500X (DeviceNet)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eProduct Type\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eDigital Mass Flow Controller (MFC)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eFull-Scale Flow Range\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e10 SCCM to 5.5 SLM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eFlow Reference\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eN2 equivalent\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eFlow Range Selection\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eMR \/ MG selectable\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eControl Range\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e2% to 100% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eAccuracy Above 25% FS\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e±1.0% S.P.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eAccuracy At or Below 25% FS\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e±0.25% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eRepeatability\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e±0.2% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eLinearity\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e±0.5% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eResponse Time\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e≤1 second (T98, full flow range)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eValve Technology\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003ePiezoelectric actuator\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eValve Configuration\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eNormally open or normally closed\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eHeated Configuration\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eStandard unheated version\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003ch3\u003e\u003cb\u003e02 | Gas Handling and Pressure Conditions\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong\u003eSEC-Z514\u003c\/strong\u003e supports multiple process gases. Engineers must select the correct gas configuration and flow range for each application.\u003c\/p\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSupported Gas Types\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eN2, Ar, H2, He, O2, SF6, HBr, WF6, and others\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eOperating Differential Pressure\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e50–300 kPa(d)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eMaximum Operating Pressure\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e450 kPa(g)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePressure Resistance\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1,000 kPa(g)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eWetted Materials\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eSUS316L stainless steel\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eInternal Surface\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003ePolished stainless steel, standard configuration\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSeal Options\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eMetal or elastomer\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eLeak Integrity\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e≤5 × 10⁻¹² Pa·m³\/s (He)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003cp\u003e\u003cstrong\u003eGas compatibility note:\u003c\/strong\u003e Confirm the specified gas, seal material, and pressure conditions before ordering. Do not assume identical performance across all gas configurations.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e03 | DeviceNet Communication and Electrical Interface\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eCommunication Protocol:\u003c\/strong\u003e DeviceNet™ digital fieldbus.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eNetwork Conformance:\u003c\/strong\u003e ODVA conformance tested.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eConnector:\u003c\/strong\u003e Micro-connector.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSelectable Baud Rates:\u003c\/strong\u003e 125, 250, and 500 kbps.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePower Supply:\u003c\/strong\u003e 24 VDC.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePower Consumption:\u003c\/strong\u003e 4.0 VA.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eElectrical Standard:\u003c\/strong\u003e ODVA standard.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eDeviceNet communication supports digital integration with compatible equipment controllers. Engineers can incorporate the flow controller into networked gas delivery architectures.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e04 | Mechanical Design and Environmental Limits\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eDimensions\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e126 × 64 × 29 mm (H × W × T)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eConnection Type\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1\/4-inch VCR male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eOperating Temperature\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e5°C to 50°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eRecommended Temperature\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e15°C to 45°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eHeating Configuration\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eUnheated\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003cul\u003e\n\u003cli\u003eCompact dimensions support installation in space-limited gas panels.\u003c\/li\u003e\n\u003cli\u003eSUS316L wetted surfaces support demanding gas delivery applications.\u003c\/li\u003e\n\u003cli\u003ePolished internal surfaces suit precision gas handling requirements.\u003c\/li\u003e\n\u003cli\u003eVCR connections provide a defined interface for compatible gas piping.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ch3\u003e\u003cb\u003e05 | Engineering Advantages and Functional Value\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePrecision Flow Regulation\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eSpecified accuracy supports controlled gas delivery in semiconductor processes.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eMulti-Gas Capability\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eSupports different process gases through suitable gas-specific configurations.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eDigital Fieldbus Integration\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eDeviceNet communication supports network-based equipment control.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eFast Flow Response\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eT98 response reaches one second or less across the full flow range.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eCompact Installation\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eThe compact body helps optimize gas panel space.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eFlexible Valve Selection\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eNormally open and normally closed actuator configurations are available.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eGas Path Material Options\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eMetal and elastomer seals support different configuration requirements.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003ch3\u003e\u003cb\u003e06 | Semiconductor and Industrial Applications\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eSemiconductor Manufacturing:\u003c\/strong\u003e Controls process gas delivery in compatible production equipment.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eGas Panels:\u003c\/strong\u003e Regulates gas flow within precision gas distribution assemblies.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eTool Gas Delivery:\u003c\/strong\u003e Supports controlled gas supply to semiconductor process tools.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eDeviceNet Equipment Networks:\u003c\/strong\u003e Integrates flow control into fieldbus-based automation systems.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSpecialty Gas Systems:\u003c\/strong\u003e Supports selected gases through appropriate material and calibration configurations.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ch3\u003e\u003cb\u003e07 | Installation and Commissioning Procedure\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003col\u003e\n\u003cli\u003e\n\u003cstrong\u003eVerify the Gas Configuration:\u003c\/strong\u003e Confirm gas type, full-scale range, and MR\/MG selection.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eInspect Mechanical Connections:\u003c\/strong\u003e Check the 1\/4-inch VCR interface and sealing surfaces.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eConfirm Material Compatibility:\u003c\/strong\u003e Match wetted materials and seals with the process gas.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCheck Pressure Conditions:\u003c\/strong\u003e Keep differential and operating pressure within specified limits.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eConnect Electrical Power:\u003c\/strong\u003e Verify the 24 VDC supply and 4.0 VA power requirement.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eConfigure DeviceNet:\u003c\/strong\u003e Select the required baud rate and verify network settings.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCheck Valve Configuration:\u003c\/strong\u003e Confirm normally open or normally closed operation.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePerform Leak Testing:\u003c\/strong\u003e Follow the equipment manufacturer's approved gas system procedure.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eVerify Flow Performance:\u003c\/strong\u003e Compare actual flow readings with the specified operating range.\u003c\/li\u003e\n\u003c\/ol\u003e\n\n\u003ch3\u003e\u003cb\u003e08 | Maintenance and Diagnostic Recommendations\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eFlow Verification:\u003c\/strong\u003e Compare measured flow against a suitable calibrated reference instrument.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eZero Stability:\u003c\/strong\u003e Check the zero-flow condition before evaluating measurement deviations.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePressure Monitoring:\u003c\/strong\u003e Verify upstream and downstream pressure conditions.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eNetwork Diagnostics:\u003c\/strong\u003e Check DeviceNet communication status and baud-rate consistency.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eValve Assessment:\u003c\/strong\u003e Investigate unstable flow, slow response, or abnormal control behavior.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eLeak Inspection:\u003c\/strong\u003e Check gas connections after installation and maintenance.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCalibration Management:\u003c\/strong\u003e Follow the applicable HORIBA STEC calibration procedures.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ch3\u003e\u003cb\u003e09 | Compatibility and Selection Checklist\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong\u003e\u003cspan style=\"color: #0070C0;\"\u003eSEC-Z514\u003c\/span\u003e\u003c\/strong\u003e requires configuration matching before system integration. Engineers should evaluate the complete gas delivery circuit.\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003eConfirm the SEC-Z500X DeviceNet product family.\u003c\/li\u003e\n\u003cli\u003eMatch the required gas type and N2-equivalent full-scale range.\u003c\/li\u003e\n\u003cli\u003eVerify the MR\/MG range selection.\u003c\/li\u003e\n\u003cli\u003eCheck the 1\/4-inch VCR male connection.\u003c\/li\u003e\n\u003cli\u003eChoose the correct metal or elastomer seal option.\u003c\/li\u003e\n\u003cli\u003eConfirm the normally open or normally closed valve configuration.\u003c\/li\u003e\n\u003cli\u003eVerify the DeviceNet baud rate and network architecture.\u003c\/li\u003e\n\u003cli\u003eCheck available 24 VDC power capacity.\u003c\/li\u003e\n\u003cli\u003eConfirm operating pressure and temperature requirements.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ch3\u003e\u003cb\u003e10 | Standards, Compliance and Quality Information\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eRoHS:\u003c\/strong\u003e RoHS compliant.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eODVA:\u003c\/strong\u003e DeviceNet conformance tested.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSEMI:\u003c\/strong\u003e SEMI standards compliance indicated in the supplied specifications.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eConfirm the applicable SEMI standard numbers and certification documents for project approval. ODVA conformance testing relates to the DeviceNet interface. It does not establish every system-level certification.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e11 | Product Supply and Packaging\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eManufacturer:\u003c\/strong\u003e HORIBA STEC\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eModel:\u003c\/strong\u003e \u003cstrong\u003e\u003cspan style=\"color: #0070C0;\"\u003eSEC-Z514\u003c\/span\u003e\u003c\/strong\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSeries:\u003c\/strong\u003e SEC-Z500X DeviceNet\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eProduct Type:\u003c\/strong\u003e Digital Mass Flow Controller\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCondition:\u003c\/strong\u003e New \u0026amp; Original in Factory Packing\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eWarranty:\u003c\/strong\u003e Factory Warranty: 12 Months\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eShipping:\u003c\/strong\u003e FedEx, UPS, and DHL available\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003e\u003cstrong\u003eStandard Package:\u003c\/strong\u003e One SEC-Z514 mass flow controller. Seal options, connection accessories, and other configuration-specific items require order confirmation.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e12 | Global PLC Spare HUB – Engineering Insight\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong\u003e\u003cspan style=\"color: #0070C0;\"\u003eHORIBA STEC SEC-Z514\u003c\/span\u003e\u003c\/strong\u003e combines precision flow regulation with DeviceNet communication. Its performance specifications support engineering evaluation for semiconductor gas delivery applications.\u003c\/p\u003e\n\n\u003cp\u003eOne important selection consideration involves the difference between accuracy expressed as a percentage of setpoint and accuracy expressed as a percentage of full scale. Engineers should evaluate both specifications across the intended operating range.\u003c\/p\u003e\n\n\u003cp\u003eAt low flow settings, the ±0.25% FS specification becomes particularly important. The 2% FS lower control limit also deserves attention during process design.\u003c\/p\u003e\n\n\u003cp\u003eGas compatibility requires more than selecting a nominal flow range. Gas properties, seal materials, pressure differential, and calibration configuration all affect the final selection.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e13 | Frequently Asked Questions\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ1: Why should engineers distinguish setpoint accuracy from full-scale accuracy?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eThese specifications use different reference values. Setpoint accuracy relates to the commanded flow. Full-scale accuracy relates to the controller's rated range. This distinction helps engineers assess actual flow deviation at different operating points.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ2: What should be considered when selecting an unheated flow controller?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eEvaluate the process gas, ambient temperature, condensation risk, and installation conditions. Some specialty gases require specific temperature management. Confirm process suitability before choosing the standard unheated configuration.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ3: How can a DeviceNet network issue affect gas flow control?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eCommunication faults can interrupt command transmission or equipment status monitoring. Check network termination, node addressing, baud-rate settings, and power distribution. Also verify the equipment's configured communication fault response.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ4: Why is the seal material important in semiconductor gas delivery systems?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eSeal compatibility affects chemical resistance and leak integrity. Certain process gases require specific sealing materials. Confirm gas compatibility and manufacturer recommendations before finalizing the order.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ5: What information should purchasers provide when requesting an SEC-Z514 quotation?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eProvide the gas type, full-scale flow range, MR\/MG selection, seal material, valve configuration, and DeviceNet requirements. Include operating pressure and connection details. These parameters help suppliers identify the correct configuration and reduce ordering errors.\u003c\/p\u003e\n","brand":"HORIBA","offers":[{"title":"Default Title","offer_id":68027778531510,"sku":"SEC-Z514","price":178.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7863\/8774\/files\/SEC-Z514_2b0c7d0f-a9ec-4c51-bb13-ab1cb133018b.jpg?v=1794281014"},{"product_id":"sec-z524-horiba-stec-mass-flow-controller-sec-z500x-devicenet-series","title":"SEC-Z524 HORIBA STEC Mass Flow Controller | SEC-Z500X DeviceNet Series","description":"\u003ch3\u003e\u003cstrong\u003eProduct Overview | Semiconductor Gas Flow Control\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003e\u003cspan style=\"color: #1673b9;\"\u003e\u003cstrong\u003eSEC-Z524\u003c\/strong\u003e\u003c\/span\u003e is a DeviceNet-compatible mass flow controller manufactured by \u003cstrong\u003eHORIBA STEC\u003c\/strong\u003e. It belongs to the \u003cstrong\u003eSEC-Z500X Series\u003c\/strong\u003e and supports medium-to-high flow gas delivery applications.\u003c\/p\u003e\n\u003cp\u003eThis model provides a full-scale flow range of \u003cstrong\u003e22 to 50 SLM\u003c\/strong\u003e, based on nitrogen equivalent specifications. Its thermal mass flow control architecture supports precise gas delivery in semiconductor manufacturing equipment.\u003c\/p\u003e\n\u003cp\u003eThe integrated piezoelectric actuator regulates gas flow through an electronically controlled valve. DeviceNet communication connects the controller to compatible automation networks.\u003c\/p\u003e\n\u003cp\u003eIts multi-gas and multi-range configuration supports different process gas requirements. The extended \u003cstrong\u003e124 mm fitting distance\u003c\/strong\u003e also provides an important mechanical reference for gas panel integration.\u003c\/p\u003e\n\u003cp\u003eTypical applications include CVD systems, plasma etching equipment, and semiconductor bulk gas delivery panels. Engineers can select the appropriate configuration according to gas properties, operating pressure, flow range, and connection requirements.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003eProduct Identification \u0026amp; Engineering Specifications\u003c\/strong\u003e\u003c\/h3\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eManufacturer\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eHORIBA STEC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eModel\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan style=\"color: #1673b9;\"\u003e\u003cstrong\u003eSEC-Z524\u003c\/strong\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eProduct Series\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eSEC-Z500X\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eCommunication Version\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eDeviceNet\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eProduct Type\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eMass Flow Controller (MFC)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eFlow Classification\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eMedium-Flow MFC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eFull-Scale Flow Range\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e22–50 SLM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eReference Gas\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eNitrogen Equivalent (N2)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eRange Configuration\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eMR\/MG #6.5–#08\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eControl Range\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e2–100% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eValve Technology\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003ePiezoelectric Actuator\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eValve Configuration\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eNormally Open or Normally Closed\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eHeating Configuration\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eStandard Unheated Version\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePower Supply\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e24 VDC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePower Consumption\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e4.0 VA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eElectrical Connector\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eMicro-Connector\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eWetted Materials\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eSUS316L Stainless Steel\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eInternal Surface\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eStandard Polished Finish\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSeal Options\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eMetal or Elastomer\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eFitting Connection\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1\/4-inch VCR\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eFitting Distance\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e124 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eOverall Dimensions\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e126 × 64 × 29 mm (H × W × T)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003ch3\u003e\u003cstrong\u003e01 | Flow Measurement and Control Performance\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe controller regulates gas delivery across a specified 2–100% full-scale operating range. Its accuracy specifications use different reference conditions above and below 25% of full scale.\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePerformance Parameter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSpecification\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFull-Scale Flow\u003c\/td\u003e\n\u003ctd\u003e22–50 SLM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eControl Range\u003c\/td\u003e\n\u003ctd\u003e2–100% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAccuracy Above 25% FS\u003c\/td\u003e\n\u003ctd\u003e±1.0% S.P.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAccuracy at or Below 25% FS\u003c\/td\u003e\n\u003ctd\u003e±0.25% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eRepeatability\u003c\/td\u003e\n\u003ctd\u003e±0.2% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eLinearity\u003c\/td\u003e\n\u003ctd\u003e±0.5% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eResponse Time\u003c\/td\u003e\n\u003ctd\u003e≤1 second (T98, full flow range)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003e\u003cstrong\u003eMeasurement Interpretation:\u003c\/strong\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eAccuracy:\u003c\/strong\u003e Describes flow measurement deviation under the specified reference conditions.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eRepeatability:\u003c\/strong\u003e Indicates consistency across repeated measurements.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eLinearity:\u003c\/strong\u003e Describes deviation from the specified linear response.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eResponse Time:\u003c\/strong\u003e T98 represents the time required to reach 98% of the final flow response.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eControl Range:\u003c\/strong\u003e Defines the specified operating span relative to full-scale flow.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eEngineers should use the appropriate accuracy equation for each operating region. Do not treat percentage of setpoint and percentage of full scale as interchangeable values.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e02 | Multi-Gas Compatibility and Process Selection\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe \u003cspan style=\"color: #1673b9;\"\u003e\u003cstrong\u003eSEC-Z524\u003c\/strong\u003e\u003c\/span\u003e supports multi-gas configurations for semiconductor gas delivery systems. Its listed gas applications include:\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eGas Category\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSpecified Gas Examples\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eInert Gases\u003c\/td\u003e\n\u003ctd\u003eN2, Ar, He\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eReactive Gases\u003c\/td\u003e\n\u003ctd\u003eH2\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSpecialty Gases\u003c\/td\u003e\n\u003ctd\u003eSF6, HBr, WF6\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003eAdditional gas configurations may be available according to the selected calibration and wetted-material requirements.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eGas Selection Considerations:\u003c\/strong\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eConfirm the exact gas composition before ordering.\u003c\/li\u003e\n\u003cli\u003eVerify the gas-specific calibration and full-scale range.\u003c\/li\u003e\n\u003cli\u003eConsider gas density, thermal properties, and operating conditions.\u003c\/li\u003e\n\u003cli\u003eCheck chemical compatibility with SUS316L and the selected seals.\u003c\/li\u003e\n\u003cli\u003eConfirm process cleanliness requirements for semiconductor applications.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e\u003cstrong\u003eImportant:\u003c\/strong\u003e Nitrogen-equivalent flow ratings do not automatically represent identical actual flow rates for other gases. Use the correct gas calibration and conversion data for process calculations.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e03 | DeviceNet Communication and Electrical Integration\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe \u003cspan style=\"color: #1673b9;\"\u003e\u003cstrong\u003eSEC-Z500X DeviceNet\u003c\/strong\u003e\u003c\/span\u003e configuration supports communication with compatible industrial automation networks.\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eCommunication Parameter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSpecification\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eNetwork Protocol\u003c\/td\u003e\n\u003ctd\u003eDeviceNet\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eConformance\u003c\/td\u003e\n\u003ctd\u003eODVA Conformant\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eBaud Rate\u003c\/td\u003e\n\u003ctd\u003e125 \/ 250 \/ 500 kbps\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eElectrical Connector\u003c\/td\u003e\n\u003ctd\u003eMicro-Connector\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSupply Voltage\u003c\/td\u003e\n\u003ctd\u003e24 VDC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePower Consumption\u003c\/td\u003e\n\u003ctd\u003e4.0 VA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003e\u003cstrong\u003eNetwork Integration Checklist:\u003c\/strong\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eConfirm the DeviceNet master supports the required device profile.\u003c\/li\u003e\n\u003cli\u003eSet the network baud rate to match the existing bus configuration.\u003c\/li\u003e\n\u003cli\u003eConfigure the correct node address and communication parameters.\u003c\/li\u003e\n\u003cli\u003eVerify the DeviceNet cable and connector pin assignments.\u003c\/li\u003e\n\u003cli\u003eCheck the 24 VDC supply before network commissioning.\u003c\/li\u003e\n\u003cli\u003eVerify device communication and process data exchange.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eODVA conformance supports integration with compatible DeviceNet equipment. Confirm the controller configuration and available device description files before commissioning.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e04 | Pressure Conditions and Gas Circuit Integrity\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eStable pressure conditions are essential for repeatable flow regulation. Engineers should evaluate differential pressure and maximum operating pressure separately.\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePressure Parameter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSpecification\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOperating Differential Pressure\u003c\/td\u003e\n\u003ctd\u003e200–300 kPa(d)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMaximum Operating Pressure\u003c\/td\u003e\n\u003ctd\u003e450 kPa(g)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePressure Resistance\u003c\/td\u003e\n\u003ctd\u003e1000 kPa(g)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHelium Leak Integrity\u003c\/td\u003e\n\u003ctd\u003e≤5 × 10⁻¹² Pa·m³\/s\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003e\u003cstrong\u003eProcess Engineering Notes:\u003c\/strong\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eMaintain the specified operating differential pressure.\u003c\/li\u003e\n\u003cli\u003eCheck upstream supply pressure stability.\u003c\/li\u003e\n\u003cli\u003eEvaluate downstream pressure and exhaust conditions.\u003c\/li\u003e\n\u003cli\u003ePrevent pressure fluctuations during flow calibration.\u003c\/li\u003e\n\u003cli\u003eVerify gas line cleanliness before installation.\u003c\/li\u003e\n\u003cli\u003eConfirm leak integrity after gas connection work.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eThe specified helium leak rate provides an important reference for gas circuit integrity. Follow the approved leak-testing procedure for the complete installation.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e05 | Wetted Materials, Seals and Mechanical Connections\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe gas-contacting construction uses SUS316L stainless steel with a polished internal surface as standard. Seal selection depends on the process gas and chemical compatibility requirements.\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eComponent\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eConstruction\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eWetted Body\u003c\/td\u003e\n\u003ctd\u003eSUS316L Stainless Steel\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eInternal Surface\u003c\/td\u003e\n\u003ctd\u003ePolished Standard Finish\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSeal Options\u003c\/td\u003e\n\u003ctd\u003eMetal or Elastomer\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eGas Connection\u003c\/td\u003e\n\u003ctd\u003e1\/4-inch VCR\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFitting Distance\u003c\/td\u003e\n\u003ctd\u003e124 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOverall Dimensions\u003c\/td\u003e\n\u003ctd\u003e126 × 64 × 29 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003e\u003cstrong\u003eMechanical Installation Considerations:\u003c\/strong\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eCheck the 124 mm fitting distance against the gas panel layout.\u003c\/li\u003e\n\u003cli\u003eVerify the 1\/4-inch VCR connection specification.\u003c\/li\u003e\n\u003cli\u003eSelect seals according to gas compatibility requirements.\u003c\/li\u003e\n\u003cli\u003ePrevent particle contamination during connection work.\u003c\/li\u003e\n\u003cli\u003eAvoid excessive mechanical stress on the fitting interfaces.\u003c\/li\u003e\n\u003cli\u003eFollow the applicable VCR assembly and tightening procedure.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eThe extended fitting distance is an important selection dimension. Confirm the actual mating connection geometry before modifying an existing gas panel.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e06 | Temperature and Installation Environment\u003c\/strong\u003e\u003c\/h3\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eEnvironmental Parameter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSpecification\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOperating Temperature\u003c\/td\u003e\n\u003ctd\u003e5°C to 50°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eRecommended Temperature\u003c\/td\u003e\n\u003ctd\u003e15°C to 45°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHeating Configuration\u003c\/td\u003e\n\u003ctd\u003eUnheated Standard Version\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003eThe standard configuration does not include a heating option. Maintain the recommended ambient temperature when process stability is important.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eInstallation Recommendations:\u003c\/strong\u003e\u003c\/p\u003e\n\u003col\u003e\n\u003cli\u003eVerify the installation location and available mounting space.\u003c\/li\u003e\n\u003cli\u003eConfirm gas compatibility and selected flow range.\u003c\/li\u003e\n\u003cli\u003eInspect the internal gas circuit and connection surfaces.\u003c\/li\u003e\n\u003cli\u003eInstall the VCR fittings using approved procedures.\u003c\/li\u003e\n\u003cli\u003eConnect the 24 VDC supply and DeviceNet interface.\u003c\/li\u003e\n\u003cli\u003eCheck the network configuration before enabling process flow.\u003c\/li\u003e\n\u003cli\u003ePerform leak testing before introducing process gases.\u003c\/li\u003e\n\u003cli\u003eVerify flow response under the specified pressure conditions.\u003c\/li\u003e\n\u003c\/ol\u003e\n\u003ch3\u003e\u003cstrong\u003e07 | Valve Control and Functional Configuration\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe controller uses a piezoelectric actuator for valve operation. The specified configuration allows normally open or normally closed valve arrangements.\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eActuator Technology:\u003c\/strong\u003e Piezoelectric.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eValve Options:\u003c\/strong\u003e Normally Open or Normally Closed.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eControl Function:\u003c\/strong\u003e Electronic regulation of gas flow.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eHeating:\u003c\/strong\u003e Not included in the standard configuration.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e\u003cstrong\u003eSelection Advice:\u003c\/strong\u003e Confirm the required valve configuration before ordering. Normally open and normally closed arrangements can produce different process responses during power loss or system shutdown.\u003c\/p\u003e\n\u003cp\u003eDo not assume the valve's fail position without checking the exact model configuration and manufacturer's documentation.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e08 | Commissioning, Calibration and Maintenance\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eProper commissioning establishes a reliable baseline for semiconductor gas delivery. Verify electrical, mechanical, pneumatic, and communication conditions before production operation.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eCommissioning Procedure:\u003c\/strong\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eConfirm the complete model and gas calibration configuration.\u003c\/li\u003e\n\u003cli\u003eVerify supply voltage and electrical connector wiring.\u003c\/li\u003e\n\u003cli\u003eCheck DeviceNet node configuration and baud rate.\u003c\/li\u003e\n\u003cli\u003eConfirm the operating pressure differential.\u003c\/li\u003e\n\u003cli\u003ePerform helium leak testing where required.\u003c\/li\u003e\n\u003cli\u003eCheck zero-flow behavior before applying flow commands.\u003c\/li\u003e\n\u003cli\u003eCompare indicated flow with the specified reference conditions.\u003c\/li\u003e\n\u003cli\u003eRecord operating pressure and flow performance.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e\u003cstrong\u003eMaintenance Recommendations:\u003c\/strong\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eMonitor zero-flow stability during routine operation.\u003c\/li\u003e\n\u003cli\u003eInvestigate unexpected deviations from established flow readings.\u003c\/li\u003e\n\u003cli\u003eInspect gas connections for leakage after maintenance.\u003c\/li\u003e\n\u003cli\u003eCheck network communication for intermittent faults.\u003c\/li\u003e\n\u003cli\u003eReview gas purity and upstream filtration conditions.\u003c\/li\u003e\n\u003cli\u003eVerify seal compatibility when changing process gases.\u003c\/li\u003e\n\u003cli\u003eFollow HORIBA STEC service procedures for internal maintenance.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eCalibration intervals should follow the process accuracy requirements and equipment maintenance plan. Do not change calibration parameters without the correct gas-specific reference data.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e09 | Compliance and Industry Applications\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe supplied specifications identify the following compliance and integration references:\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eRoHS:\u003c\/strong\u003e RoHS compliant.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eDeviceNet:\u003c\/strong\u003e ODVA conformance.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSEMI:\u003c\/strong\u003e SEMI standards compliance as specified.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e\u003cstrong\u003eTypical Industrial Applications:\u003c\/strong\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eCVD Equipment:\u003c\/strong\u003e Controlled gas delivery for chemical vapor deposition processes.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eEtching Systems:\u003c\/strong\u003e Gas flow regulation in semiconductor etch equipment.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eBulk Gas Panels:\u003c\/strong\u003e Medium-flow gas supply and distribution.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eGas Cabinets:\u003c\/strong\u003e Automated specialty gas delivery systems.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSemiconductor Manufacturing:\u003c\/strong\u003e DeviceNet-based process gas control.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eVerify the exact applicable SEMI requirements and compliance documentation for the intended equipment installation.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e10 | Compatibility and Purchasing Verification\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eBefore selecting \u003cspan style=\"color: #1673b9;\"\u003e\u003cstrong\u003eSEC-Z524\u003c\/strong\u003e\u003c\/span\u003e, engineers should verify the following configuration details.\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSelection Item\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eVerification Requirement\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eModel\u003c\/td\u003e\n\u003ctd\u003eSEC-Z524\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSeries\u003c\/td\u003e\n\u003ctd\u003eSEC-Z500X DeviceNet\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFlow Range\u003c\/td\u003e\n\u003ctd\u003e22–50 SLM, N2 equivalent\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eGas Calibration\u003c\/td\u003e\n\u003ctd\u003eMatch the actual process gas\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eRange Code\u003c\/td\u003e\n\u003ctd\u003eConfirm MR\/MG #6.5–#08 configuration\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eCommunication\u003c\/td\u003e\n\u003ctd\u003eDeviceNet protocol\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eBaud Rate\u003c\/td\u003e\n\u003ctd\u003e125 \/ 250 \/ 500 kbps\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePressure\u003c\/td\u003e\n\u003ctd\u003eConfirm operating differential pressure\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSeal Material\u003c\/td\u003e\n\u003ctd\u003eMetal or elastomer, according to gas compatibility\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eValve Configuration\u003c\/td\u003e\n\u003ctd\u003eNormally open or normally closed\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eConnection\u003c\/td\u003e\n\u003ctd\u003e1\/4-inch VCR, 124 mm fitting distance\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003e\u003cstrong\u003eReplacement Considerations:\u003c\/strong\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eDo not substitute based on flow range alone.\u003c\/li\u003e\n\u003cli\u003eMatch the actual gas calibration and range configuration.\u003c\/li\u003e\n\u003cli\u003eVerify DeviceNet communication compatibility.\u003c\/li\u003e\n\u003cli\u003eCheck valve configuration and power requirements.\u003c\/li\u003e\n\u003cli\u003eConfirm mechanical connection dimensions.\u003c\/li\u003e\n\u003cli\u003eReview wetted materials and seal compatibility.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eTwo controllers with identical nominal flow ranges may have different gas calibrations, valve configurations, and electrical interfaces. Verify the complete ordering configuration before replacement.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e11 | Packaging and Supply Information\u003c\/strong\u003e\u003c\/h3\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eItem\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eDescription\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eManufacturer\u003c\/td\u003e\n\u003ctd\u003eHORIBA STEC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eModel\u003c\/td\u003e\n\u003ctd\u003eSEC-Z524\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSeries\u003c\/td\u003e\n\u003ctd\u003eSEC-Z500X DeviceNet\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eProduct Type\u003c\/td\u003e\n\u003ctd\u003eMass Flow Controller\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSupply Quantity\u003c\/td\u003e\n\u003ctd\u003e1 Unit\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAccessories\u003c\/td\u003e\n\u003ctd\u003eConfirm separately with supplier\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003eConfirm the gas calibration, fitting configuration, valve arrangement, and supplied accessories before placing an order.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003eFrequently Asked Questions\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003e\u003cstrong\u003eQ1: Can engineers transfer an existing gas calibration from another MFC to this controller?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eNot automatically. Gas calibration depends on the controller configuration and reference conditions. Verify the specified gas, range code, and calibration data. Never assume identical flow readings across different gas configurations.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ2: What can cause unstable readings when the gas supply remains constant?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003ePotential causes include upstream pressure fluctuations, gas contamination, temperature variation, incorrect gas selection, and unstable downstream conditions. Compare actual pressure measurements with the commissioning baseline before changing controller settings.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ3: How should engineers evaluate a controller installed in a high-purity gas system?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eReview wetted materials, seal compatibility, internal surface finish, and leak integrity. Also assess gas purity, connection cleanliness, and contamination risks during installation. Follow the facility's semiconductor gas handling procedures.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ4: What should technicians check when DeviceNet communication works but flow commands produce unexpected results?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eCheck the configured gas range, engineering units, process data mapping, and flow command scaling. Then verify the physical gas supply and differential pressure. Network communication alone does not confirm correct process configuration.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ5: How should buyers choose between normally open and normally closed valve configurations?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eEvaluate the required gas isolation strategy during power loss, shutdown, and emergency conditions. Review the system safety design and the consequences of each valve position. Confirm the exact actuator configuration before purchasing.\u003cstrong\u003e\u003c\/strong\u003e\u003c\/p\u003e","brand":"HORIBA","offers":[{"title":"Default Title","offer_id":68027779809462,"sku":"SEC-Z524","price":201.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7863\/8774\/files\/SEC-Z524_2.jpg?v=1794281146"},{"product_id":"sec-z517-horiba-stec-sec-z500x-ethercat-mass-flow-controller","title":"SEC-Z517 HORIBA STEC SEC-Z500X EtherCAT Mass Flow Controller","description":"\u003ch3\u003e\u003cstrong\u003eHORIBA STEC SEC-Z517 | SEC-Z500X EtherCAT Mass Flow Controller\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong\u003e\u003cspan style=\"color:#1565C0;\"\u003eSEC-Z517\u003c\/span\u003e\u003c\/strong\u003e from \u003cstrong\u003eHORIBA STEC\u003c\/strong\u003e is a digital mass flow controller within the \u003cstrong\u003eSEC-Z500X EtherCAT Series\u003c\/strong\u003e. It regulates process gas flow through high-speed digital communication and precision piezoelectric valve control.\u003c\/p\u003e\n\n\u003cp\u003eThis model targets semiconductor manufacturing equipment requiring fast gas delivery and repeatable flow regulation. Its EtherCAT interface supports integration with real-time equipment control architectures.\u003c\/p\u003e\n\n\u003cp\u003eThe controller covers full-scale flow ranges from \u003cstrong\u003e10 SCCM to 5.5 SLM\u003c\/strong\u003e. Its multi-gas and multi-range configuration supports different process gas requirements.\u003c\/p\u003e\n\n\u003cp\u003eWith a response time of \u003cstrong\u003eT98 ≤1 second\u003c\/strong\u003e, the SEC-Z517 supports rapid flow adjustments. Its low-flow accuracy specification also supports applications requiring precise gas delivery.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e01. Product Identity \u0026amp; Configuration\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eManufacturer\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eHORIBA STEC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eModel\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003e\u003cspan style=\"color:#1565C0;\"\u003eSEC-Z517\u003c\/span\u003e\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eProduct Series\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eSEC-Z500X\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eCommunication Version\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eEtherCAT\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eProduct Type\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eDigital Mass Flow Controller (MFC)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eControl Element\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003ePiezoelectric Actuator Valve\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eGas Configuration\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eMulti-Gas \/ Multi-Range\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eHeating Configuration\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eStandard Unheated Version\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eElectrical Supply\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e24 VDC, 6.8 VA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003ch3\u003e\u003cstrong\u003e02. Flow Measurement \u0026amp; Control Performance\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eFlow accuracy and response speed directly affect process gas delivery. The following specifications define the SEC-Z517 control performance.\u003c\/p\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eParameter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSpecification\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFull-Scale Flow Range\u003c\/td\u003e\n\u003ctd\u003e10 SCCM to 5.5 SLM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eReference Gas\u003c\/td\u003e\n\u003ctd\u003eN2 equivalent\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eRange Configuration\u003c\/td\u003e\n\u003ctd\u003eMR \/ MG selectable\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eControl Range\u003c\/td\u003e\n\u003ctd\u003e2% to 100% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eTurndown Ratio\u003c\/td\u003e\n\u003ctd\u003e50:1\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAccuracy Above 25% FS\u003c\/td\u003e\n\u003ctd\u003e±1.0% of setpoint\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAccuracy at or Below 25% FS\u003c\/td\u003e\n\u003ctd\u003e±0.25% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eRepeatability\u003c\/td\u003e\n\u003ctd\u003e±0.2% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eLinearity\u003c\/td\u003e\n\u003ctd\u003e±0.5% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eResponse Time\u003c\/td\u003e\n\u003ctd\u003e≤1 second, T98\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003cp\u003e\u003cstrong\u003eEngineering Interpretation\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eLow-Flow Accuracy:\u003c\/strong\u003e The ±0.25% FS specification applies at setpoints of 25% FS or below.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eNormal Operating Range:\u003c\/strong\u003e Above 25% FS, accuracy changes to ±1.0% of setpoint.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eRepeatability:\u003c\/strong\u003e ±0.2% FS supports consistent flow regulation across repeated operating cycles.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eLinearity:\u003c\/strong\u003e ±0.5% FS describes deviation from the specified linear flow relationship.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eResponse:\u003c\/strong\u003e T98 ≤1 second indicates the specified full-range response performance.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003e\u003cstrong\u003eSelection Tip:\u003c\/strong\u003e Evaluate accuracy using the actual operating setpoint. Do not compare percentage-of-setpoint accuracy directly with percentage-of-full-scale accuracy.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e03. Gas Compatibility \u0026amp; Process Wetted Construction\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong\u003e\u003cspan style=\"color:#1565C0;\"\u003eSEC-Z517\u003c\/span\u003e\u003c\/strong\u003e supports multiple process gases through selectable gas and range configurations.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eSpecified Gas Compatibility\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003eNitrogen (N2)\u003c\/li\u003e\n\u003cli\u003eArgon (Ar)\u003c\/li\u003e\n\u003cli\u003eHydrogen (H2)\u003c\/li\u003e\n\u003cli\u003eHelium (He)\u003c\/li\u003e\n\u003cli\u003eOxygen (O2)\u003c\/li\u003e\n\u003cli\u003eSulfur Hexafluoride (SF6)\u003c\/li\u003e\n\u003cli\u003eHydrogen Bromide (HBr)\u003c\/li\u003e\n\u003cli\u003eTungsten Hexafluoride (WF6)\u003c\/li\u003e\n\u003cli\u003eOther supported gases subject to configuration\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003e\u003cstrong\u003eWetted Materials \u0026amp; Sealing\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eWetted Material\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eSUS316L Stainless Steel\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eInternal Surface\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003ePolished finish, standard\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSeal Options\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eMetal or elastomer\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eValve Technology\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003ePiezoelectric actuator\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eValve Configuration\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eNormally open or normally closed\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eLeak Integrity\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e≤5 × 10⁻¹² Pa·m³\/s (He)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003cp\u003e\u003cstrong\u003eProcess Engineering Consideration:\u003c\/strong\u003e Gas compatibility depends on the selected wetted materials and seal configuration. Confirm chemical compatibility before ordering corrosive or reactive gas applications.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e04. Pressure \u0026amp; Operating Conditions\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eStable gas delivery requires suitable differential pressure and sufficient upstream pressure control.\u003c\/p\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eOperating Parameter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSpecified Value\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOperating Differential Pressure\u003c\/td\u003e\n\u003ctd\u003e50–300 kPa(d)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMaximum Operating Pressure\u003c\/td\u003e\n\u003ctd\u003e450 kPa(g)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePressure Resistance\u003c\/td\u003e\n\u003ctd\u003e1000 kPa(g)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOperating Temperature\u003c\/td\u003e\n\u003ctd\u003e5°C to 50°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eRecommended Temperature\u003c\/td\u003e\n\u003ctd\u003e15°C to 45°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHeated Function\u003c\/td\u003e\n\u003ctd\u003eNot included in standard configuration\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003cp\u003e\u003cstrong\u003eImportant Pressure Distinction:\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003eDifferential pressure represents the pressure difference across the controller.\u003c\/li\u003e\n\u003cli\u003eMaximum operating pressure specifies the permitted operating pressure limit.\u003c\/li\u003e\n\u003cli\u003ePressure resistance describes a separate pressure withstand rating.\u003c\/li\u003e\n\u003cli\u003eDo not use the pressure resistance value as a continuous operating pressure.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ch3\u003e\u003cstrong\u003e05. EtherCAT Communication \u0026amp; Electrical Interface\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong\u003eSEC-Z500X EtherCAT Series\u003c\/strong\u003e uses digital communication for integration with automated semiconductor equipment.\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eProtocol:\u003c\/strong\u003e EtherCAT® industrial Ethernet communication.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eNetwork Ports:\u003c\/strong\u003e IN and OUT RJ-45 interfaces.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eConformance:\u003c\/strong\u003e EtherCAT Technology Group (ETG) conformant.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePower Supply:\u003c\/strong\u003e DC 24 V.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePower Consumption:\u003c\/strong\u003e 6.8 VA.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003e\u003cstrong\u003eIntegration Considerations\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003eConnect the IN port to the upstream EtherCAT network device.\u003c\/li\u003e\n\u003cli\u003eUse the OUT port according to the network topology.\u003c\/li\u003e\n\u003cli\u003eVerify EtherCAT device recognition during commissioning.\u003c\/li\u003e\n\u003cli\u003eConfirm the controller's process configuration before enabling flow control.\u003c\/li\u003e\n\u003cli\u003eCheck communication status before diagnosing process-side flow deviations.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eThe wider body accommodates the EtherCAT electronic configuration. Confirm mechanical clearance when replacing equipment within existing gas panels.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e06. Mechanical Dimensions \u0026amp; Installation Interface\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eOverall Height\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e126 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eOverall Width\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e82 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eOverall Thickness\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e29 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eDimensional Order\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eH × W × T\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eGas Connection\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1\/4-inch VCR male\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eFitting Distance\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e124 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003cp\u003e\u003cstrong\u003eInstallation Checklist\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003col\u003e\n\u003cli\u003eConfirm the mounting space and fitting center distance.\u003c\/li\u003e\n\u003cli\u003eVerify the 1\/4-inch VCR male connection requirements.\u003c\/li\u003e\n\u003cli\u003eCheck gas line cleanliness before connecting the controller.\u003c\/li\u003e\n\u003cli\u003eConfirm the selected seal material matches the process gas.\u003c\/li\u003e\n\u003cli\u003eVerify upstream and downstream pressure conditions.\u003c\/li\u003e\n\u003cli\u003eConnect the 24 VDC supply and EtherCAT network correctly.\u003c\/li\u003e\n\u003cli\u003eCheck for external leakage before introducing process gas.\u003c\/li\u003e\n\u003cli\u003eVerify the configured gas type and flow range.\u003c\/li\u003e\n\u003c\/ol\u003e\n\n\u003cp\u003eFollow the applicable HORIBA STEC installation instructions and semiconductor gas handling procedures. Use qualified personnel for hazardous gas connections.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e07. Semiconductor Process Applications\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong\u003e\u003cspan style=\"color:#1565C0;\"\u003eHORIBA STEC SEC-Z517\u003c\/span\u003e\u003c\/strong\u003e targets equipment requiring digital gas flow control and fast communication.\u003c\/p\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eApplication\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eEngineering Requirement\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSemiconductor Etching\u003c\/td\u003e\n\u003ctd\u003ePrecise process gas delivery and rapid flow adjustment.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eThin-Film Deposition\u003c\/td\u003e\n\u003ctd\u003eRepeatable gas flow during process recipe execution.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAdvanced Process Equipment\u003c\/td\u003e\n\u003ctd\u003eEtherCAT integration with real-time control architectures.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMulti-Gas Delivery Systems\u003c\/td\u003e\n\u003ctd\u003eSelectable gas configurations for different process recipes.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAutomated Gas Panels\u003c\/td\u003e\n\u003ctd\u003eDigital communication and compact installation interfaces.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003ch3\u003e\u003cstrong\u003e08. Compliance \u0026amp; Product Standards\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eRoHS:\u003c\/strong\u003e RoHS compliant.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eEtherCAT:\u003c\/strong\u003e EtherCAT Technology Group conformance.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSemiconductor Standards:\u003c\/strong\u003e SEMI standards compliance as specified for the product.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eConfirm the applicable SEMI standard numbers and certification documents against the exact product configuration. Do not assume additional safety or hazardous-area approvals.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e09. Configuration Verification Before Purchasing\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eOrdering the correct flow controller requires more than matching the model number. Process gas, flow range, pressure, and communication configuration affect selection.\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eModel:\u003c\/strong\u003e Confirm SEC-Z517.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSeries:\u003c\/strong\u003e Confirm SEC-Z500X EtherCAT version.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eGas Type:\u003c\/strong\u003e Specify the actual process gas.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eFull-Scale Range:\u003c\/strong\u003e Confirm the required SCCM or SLM range.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eRange Selection:\u003c\/strong\u003e Verify the MR\/MG configuration.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eValve Type:\u003c\/strong\u003e Confirm normally open or normally closed operation.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSeal Material:\u003c\/strong\u003e Select metal or compatible elastomer.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eFittings:\u003c\/strong\u003e Verify 1\/4-inch VCR male connections.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePressure:\u003c\/strong\u003e Confirm differential and maximum operating pressure.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCommunication:\u003c\/strong\u003e Confirm EtherCAT compatibility with the host controller.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003e\u003cstrong\u003ePurchasing Advice:\u003c\/strong\u003e Request the complete configuration details before ordering. Two controllers with similar flow ranges may have different gas, seal, and valve configurations.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e10. Frequently Asked Questions\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ1: How does gas selection affect the SEC-Z517 flow measurement?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eDifferent gases have different physical properties and flow characteristics. The controller requires the correct gas configuration for accurate flow regulation. Do not assume an N2-equivalent range provides identical actual flow performance for every gas. Confirm the gas-specific calibration and configuration before commissioning.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ2: What happens if the operating differential pressure falls below 50 kPa(d)?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eThe specified operating differential pressure range starts at 50 kPa(d). Insufficient differential pressure can prevent the controller from achieving the requested flow. Check upstream supply pressure, downstream backpressure, and restrictions in the gas line before changing the controller.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ3: Why should engineers check the normally open or normally closed valve configuration?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eThe valve's default mechanical state affects gas shutoff behavior during certain power or control conditions. The correct selection depends on the equipment safety design. Verify the specified valve configuration against the gas panel's shutdown philosophy. Do not assume both configurations provide identical fail-safe behavior.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ4: Can the SEC-Z517 replace an existing analog mass flow controller directly?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eNot necessarily. The SEC-Z517 uses EtherCAT communication and RJ-45 network interfaces. An analog controller may use different electrical connections and control signals. Check the host controller, network topology, mounting dimensions, gas fittings, and process configuration before replacement.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ5: What should engineers investigate when the displayed flow fluctuates despite stable pressure?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eStart by checking gas purity, upstream regulation, and downstream restrictions. Inspect fittings for contamination or leakage. Then verify the gas configuration, flow range, and EtherCAT communication status. Compare actual operating conditions with the specified accuracy and repeatability limits before suspecting internal valve failure.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e11. Product Supply \u0026amp; Technical Support\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eLooking for the \u003cstrong\u003e\u003cspan style=\"color:#1565C0;\"\u003eHORIBA STEC SEC-Z517\u003c\/span\u003e\u003c\/strong\u003e EtherCAT Mass Flow Controller?\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eBrand:\u003c\/strong\u003e HORIBA STEC\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eModel:\u003c\/strong\u003e SEC-Z517\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSeries:\u003c\/strong\u003e SEC-Z500X EtherCAT\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eProduct Type:\u003c\/strong\u003e Digital Mass Flow Controller\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eFlow Range:\u003c\/strong\u003e 10 SCCM to 5.5 SLM\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCommunication:\u003c\/strong\u003e EtherCAT\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eWarranty:\u003c\/strong\u003e 12 months, subject to sales terms.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eInspection:\u003c\/strong\u003e Product inspection before shipment.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eShipping:\u003c\/strong\u003e DHL, FedEx, UPS, and other supported carriers.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eContact our sales team for pricing, availability, and delivery information. Provide your gas type, required flow range, and fitting configuration for accurate model verification.\u003c\/p\u003e","brand":"HORIBA","offers":[{"title":"Default Title","offer_id":68027788361910,"sku":"SEC-Z517","price":125.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7863\/8774\/files\/SEC-Z517_1_9bd1206f-2993-4ecd-98e9-b9152ee53668.jpg?v=1794281282"},{"product_id":"sec-e431x-sec-e-series-horiba-stec-high-flow-gas-controller","title":"SEC-E431X SEC-E Series HORIBA STEC High-Flow Gas Controller","description":"\u003ch3\u003e\u003cstrong\u003eSEC-E431X | High-Flow Economy Gas Control Solution\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe \u003cstrong\u003e\u003cspan style=\"color: #1677b8;\"\u003eSEC-E431X\u003c\/span\u003e\u003c\/strong\u003e is an economy-type Mass Flow Controller from the \u003cstrong\u003eHORIBA STEC SEC-E Series\u003c\/strong\u003e. It uses a solenoid valve to regulate high-flow delivery of non-corrosive process gases.\u003c\/p\u003e\n\u003cp\u003eIts nitrogen-equivalent full-scale flow range covers \u003cstrong\u003e50 to 100 SLM\u003c\/strong\u003e. This configuration addresses gas distribution requirements in bulk gas panels and industrial process equipment.\u003c\/p\u003e\n\u003cp\u003eThe controller combines analog voltage control with a normally closed solenoid valve. Its standard unheated construction simplifies integration into compatible gas delivery assemblies. The design emphasizes practical flow regulation, straightforward electrical connections, and economical system configuration.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e01 | Product Configuration at a Glance\u003c\/strong\u003e\u003c\/h3\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eIdentification\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSpecification\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eManufacturer\u003c\/td\u003e\n\u003ctd\u003eHORIBA STEC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eModel\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSEC-E431X\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eProduct Series\u003c\/td\u003e\n\u003ctd\u003eSEC-E Economy Solenoid Valve\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eProduct Type\u003c\/td\u003e\n\u003ctd\u003eMass Flow Controller (MFC)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFull-Scale Flow Range\u003c\/td\u003e\n\u003ctd\u003e50–100 SLM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFlow Reference Gas\u003c\/td\u003e\n\u003ctd\u003eNitrogen equivalent\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eGas Compatibility\u003c\/td\u003e\n\u003ctd\u003eNon-corrosive gases\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHeating Configuration\u003c\/td\u003e\n\u003ctd\u003eStandard unheated version\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eValve Technology\u003c\/td\u003e\n\u003ctd\u003eSolenoid valve\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eValve State Without Power\u003c\/td\u003e\n\u003ctd\u003eNormally closed\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eProcess Connection\u003c\/td\u003e\n\u003ctd\u003e3\/8-inch Swagelok\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003ch3\u003e\u003cstrong\u003e02 | Flow Regulation and Measurement Performance\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe \u003cstrong\u003eSEC-E431X\u003c\/strong\u003e provides a 5–100% FS control range. Its accuracy and repeatability specifications define the expected flow regulation performance.\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePerformance Parameter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSpecification\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAccuracy\u003c\/td\u003e\n\u003ctd\u003e±1% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eRepeatability\u003c\/td\u003e\n\u003ctd\u003e±0.5% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eLinearity\u003c\/td\u003e\n\u003ctd\u003e±0.5% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eResponse Time\u003c\/td\u003e\n\u003ctd\u003e≤1 second, T98 typical\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eControl Range\u003c\/td\u003e\n\u003ctd\u003e5–100% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFull-Scale Flow\u003c\/td\u003e\n\u003ctd\u003e50–100 SLM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003e\u003cstrong\u003eEngineering Note:\u003c\/strong\u003e Accuracy and repeatability use full-scale references. Evaluate these specifications against the actual operating flow rather than assuming identical percentage-of-reading performance at every setpoint.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e03 | Pressure Envelope and Gas Compatibility\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThis instrument targets non-corrosive gas delivery. Engineers must verify gas compatibility and pressure conditions before selecting the unit.\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eProcess Condition\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSpecification\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOperating Differential Pressure\u003c\/td\u003e\n\u003ctd\u003e100–300 kPa(d)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMaximum Inlet Pressure\u003c\/td\u003e\n\u003ctd\u003e300 kPa(G)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePressure Resistance\u003c\/td\u003e\n\u003ctd\u003e1 MPa(G)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eCompatible Gas Category\u003c\/td\u003e\n\u003ctd\u003eNon-corrosive gases\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003eDo not interpret the pressure resistance rating as a continuous operating pressure. Keep the inlet and differential pressures within their respective operating limits.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e04 | Solenoid Valve and Wetted Material Design\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe valve assembly uses an electromagnetic solenoid mechanism. Its normally closed configuration provides a defined valve state when electrical power is removed.\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eComponent\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eMaterial or Configuration\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMain Wetted Material\u003c\/td\u003e\n\u003ctd\u003eSUS316 stainless steel\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSeal Material\u003c\/td\u003e\n\u003ctd\u003eFluorine rubber (Viton)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAdditional Material\u003c\/td\u003e\n\u003ctd\u003ePTFE\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMagnetic Component\u003c\/td\u003e\n\u003ctd\u003eMagnetic stainless steel\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSeal Options\u003c\/td\u003e\n\u003ctd\u003eFluorine rubber \/ PTFE\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eValve Type\u003c\/td\u003e\n\u003ctd\u003eSolenoid\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePower-Off Valve State\u003c\/td\u003e\n\u003ctd\u003eNormally closed\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eLeak Integrity\u003c\/td\u003e\n\u003ctd\u003e≤1 × 10⁻⁹ Pa·m³\/s (He)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003eCheck the chemical compatibility of Viton, PTFE, and stainless steel with the selected gas. Do not assume compatibility with corrosive or reactive process media.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e05 | Analog Control and Electrical Requirements\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe electrical interface uses analog voltage signals. This arrangement supports integration with compatible gas control systems and equipment controllers.\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eElectrical Parameter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSpecification\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSetpoint Signal\u003c\/td\u003e\n\u003ctd\u003e0.25–5 VDC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFlow Output Signal\u003c\/td\u003e\n\u003ctd\u003e0–5 VDC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eElectrical Connector\u003c\/td\u003e\n\u003ctd\u003eD-Sub connector\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePositive Power Supply\u003c\/td\u003e\n\u003ctd\u003e+15 VDC ±5%, 50 mA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eNegative Power Supply\u003c\/td\u003e\n\u003ctd\u003e-15 VDC ±5%, 200 mA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePower Consumption\u003c\/td\u003e\n\u003ctd\u003e3.9 VA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003e\u003cstrong\u003eControl Integration Checklist:\u003c\/strong\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eVerify the host controller supports the specified analog voltage ranges.\u003c\/li\u003e\n\u003cli\u003eCheck the positive and negative supply rails before connection.\u003c\/li\u003e\n\u003cli\u003eConfirm D-Sub connector pin assignments using the applicable wiring documentation.\u003c\/li\u003e\n\u003cli\u003eCheck signal grounding and cable routing to reduce electrical interference.\u003c\/li\u003e\n\u003cli\u003eVerify the PLC or equipment controller scaling against the selected full-scale range.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ch3\u003e\u003cstrong\u003e06 | Mechanical Dimensions and Piping Interface\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe compact housing supports installation in high-flow gas distribution assemblies. The 3\/8-inch Swagelok connection requires suitable manifold and tubing compatibility.\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eMechanical Parameter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSpecification\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHeight\u003c\/td\u003e\n\u003ctd\u003e125 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eWidth\u003c\/td\u003e\n\u003ctd\u003e86 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eThickness\u003c\/td\u003e\n\u003ctd\u003e41 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOverall Dimensions\u003c\/td\u003e\n\u003ctd\u003e125 × 86 × 41 mm (H × W × T)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFitting Distance\u003c\/td\u003e\n\u003ctd\u003e142 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eProcess Connection\u003c\/td\u003e\n\u003ctd\u003e3\/8-inch Swagelok\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003eReserve adequate space for tubing installation and connector access. Check fitting alignment before finalizing the gas panel layout.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e07 | Operating Temperature and Installation Conditions\u003c\/strong\u003e\u003c\/h3\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eTemperature Parameter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSpecification\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOperating Temperature\u003c\/td\u003e\n\u003ctd\u003e5–45°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAccuracy Guaranteed Range\u003c\/td\u003e\n\u003ctd\u003e15–35°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHeated Configuration\u003c\/td\u003e\n\u003ctd\u003eUnheated\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003eFor applications requiring the specified accuracy, maintain the instrument within 15–35°C. Temperature changes outside this guaranteed range may affect measurement performance.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e08 | Typical Industrial Applications\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe \u003cstrong\u003eHORIBA STEC SEC-E431X\u003c\/strong\u003e targets economical, high-flow gas regulation in compatible industrial installations.\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eBulk Gas Panels:\u003c\/strong\u003e Regulates non-corrosive gas distribution across high-flow supply systems.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSemiconductor Gas Delivery:\u003c\/strong\u003e Supports compatible process gas supply configurations.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eIndustrial Gas Cabinets:\u003c\/strong\u003e Provides analog-controlled flow regulation for equipment integration.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eProcess Gas Distribution:\u003c\/strong\u003e Handles selected gases within the specified pressure and material limits.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eHigh-Flow Equipment:\u003c\/strong\u003e Supports applications requiring 50–100 SLM nitrogen-equivalent capacity.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ch3\u003e\u003cstrong\u003e09 | Installation and Commissioning Procedure\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eProper installation requires coordinated checks of the gas circuit, electrical supply, and mechanical connections.\u003c\/p\u003e\n\u003col\u003e\n\u003cli\u003eConfirm the complete model number and full-scale flow configuration.\u003c\/li\u003e\n\u003cli\u003eVerify that the selected gas is non-corrosive and material-compatible.\u003c\/li\u003e\n\u003cli\u003eCheck the inlet pressure and operating differential pressure.\u003c\/li\u003e\n\u003cli\u003eInspect the 3\/8-inch Swagelok connection and tubing compatibility.\u003c\/li\u003e\n\u003cli\u003eConfirm the required 142 mm fitting distance.\u003c\/li\u003e\n\u003cli\u003eConnect the specified positive and negative DC supplies.\u003c\/li\u003e\n\u003cli\u003eWire the analog setpoint and output signals correctly.\u003c\/li\u003e\n\u003cli\u003ePerform the approved gas-line leak test.\u003c\/li\u003e\n\u003cli\u003eApply the setpoint and verify the measured flow response.\u003c\/li\u003e\n\u003cli\u003eConfirm stable operation before releasing the equipment for production.\u003c\/li\u003e\n\u003c\/ol\u003e\n\u003cp\u003eUse appropriate high-purity gas handling procedures where required. Follow the equipment manufacturer's instructions for connection, purging, and leak testing.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e10 | Maintenance and Troubleshooting Insights\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eRoutine maintenance should prioritize gas compatibility, pressure stability, electrical signal quality, and valve operation.\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eFlow instability:\u003c\/strong\u003e Check inlet pressure, differential pressure, and gas supply stability.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eUnexpected zero flow:\u003c\/strong\u003e Verify the setpoint, electrical supply, and normally closed valve state.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eIncorrect flow indication:\u003c\/strong\u003e Inspect analog output wiring and controller scaling.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSlow response:\u003c\/strong\u003e Review pressure conditions and process-line restrictions.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eExternal leakage:\u003c\/strong\u003e Inspect Swagelok connections and compatible sealing components.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eTemperature-related deviation:\u003c\/strong\u003e Check whether the installation remains within 15–35°C.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eInvestigate gas contamination and valve condition before adjusting process settings. Avoid unauthorized internal modifications.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e11 | Standards and Compliance\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eIndustry Standards:\u003c\/strong\u003e SEMI standards.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eProduct Configuration:\u003c\/strong\u003e Standard unheated version.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eSpecific SEMI standard numbers and individual certification references were not included in the supplied specifications. Confirm the applicable compliance documentation before equipment qualification.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e12 | Engineering FAQ\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003e\u003cstrong\u003eQ1: Why is a normally closed valve useful in gas delivery equipment?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eThe valve closes when electrical power is removed. This provides a defined power-off valve state. Engineers should still evaluate the complete gas system's safety design and required isolation devices.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ2: How should engineers interpret the 1 MPa pressure resistance rating?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003ePressure resistance describes a specified withstand condition, not the normal operating limit. The maximum inlet pressure remains 300 kPa(G). Always distinguish operating pressure from pressure resistance during equipment selection.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ3: Can this model replace a higher-accuracy mass flow controller directly?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eNot without reviewing the process requirements. Its accuracy is ±1% FS, and repeatability is ±0.5% FS. Compare these limits with the original instrument's specifications and the process tolerance before replacement.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ4: What causes different flow readings between two controllers with the same nominal capacity?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eGas calibration, pressure conditions, installation geometry, and signal scaling can produce different readings. Confirm the actual gas and full-scale configuration. Also check whether both instruments use the same reference conditions.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ5: What should procurement teams verify when sourcing this model for an existing gas panel?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eCheck the full model designation, 50–100 SLM capacity, 3\/8-inch Swagelok connection, fitting distance, and electrical interface. Confirm the normally closed valve configuration and seal materials. These details help avoid mechanical and control-system mismatches.\u003cstrong\u003e\u003c\/strong\u003e\u003c\/p\u003e","brand":"HORIBA","offers":[{"title":"Default Title","offer_id":68027793834166,"sku":"SEC-E431X","price":159.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7863\/8774\/files\/SEC-E431X_1.jpg?v=1794281614"},{"product_id":"sec-e441x-horiba-stec-economy-series-200-slm-gas-flow-control-mfc","title":"SEC-E441X HORIBA STEC Economy Series 200 SLM Gas Flow Control MFC","description":"\n\u003ch3\u003e\u003cb\u003eSEC-E441X | High-Flow Gas Control with Economy Solenoid Technology\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong\u003e\u003cspan style=\"color: #0070C0;\"\u003eHORIBA STEC SEC-E441X\u003c\/span\u003e\u003c\/strong\u003e is a high-flow mass flow controller from the \u003cstrong\u003eSEC-E Economy Solenoid Valve Series\u003c\/strong\u003e. It regulates non-corrosive gas flow in industrial gas delivery systems.\u003c\/p\u003e\n\n\u003cp\u003eIts maximum full-scale capacity reaches \u003cstrong\u003e200 SLM (N2 equivalent)\u003c\/strong\u003e. The solenoid valve design supports economical gas flow control for applications with high-volume supply requirements.\u003c\/p\u003e\n\n\u003cp\u003eThe controller uses an analog electrical interface for setpoint and flow output signals. Its normally closed valve provides a defined valve state when power is removed.\u003c\/p\u003e\n\n\u003cp\u003eWith SUS316 stainless steel wetted components and fluorine-based sealing materials, the \u003cstrong\u003eSEC-E441X\u003c\/strong\u003e supports integration into compatible bulk gas supply and pump purge systems.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e01 | Product Identity and Core Specifications\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eManufacturer\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eHORIBA STEC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eModel\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003e\u003cspan style=\"color: #0070C0;\"\u003eSEC-E441X\u003c\/span\u003e\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eProduct Series\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eSEC-E Economy Solenoid Valve Series\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eProduct Type\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eAnalog Mass Flow Controller (MFC)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eMaximum Full-Scale Flow\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e200 SLM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eFlow Reference Gas\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eN2 equivalent\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSupported Gas Category\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eNon-corrosive gases\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eControl Range\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e5% to 100% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eAccuracy\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e±1% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eRepeatability\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e±0.5% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eLinearity\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e±0.5% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eResponse Time\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e≤2 seconds (T98, typical)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eValve Technology\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eSolenoid valve\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePower-Off Valve State\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eNormally closed\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eHeating Configuration\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eStandard unheated version\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003ch3\u003e\u003cb\u003e02 | Gas Path Construction and Pressure Limits\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe gas-contact assembly combines stainless steel and polymer materials. These components support the specified non-corrosive gas applications.\u003c\/p\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eWetted Stainless Steel\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eSUS316 stainless steel\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eAdditional Wetted Materials\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eFluorine rubber, PTFE, magnetic stainless steel\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSeal Materials\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eFluorine rubber (Viton) \/ PTFE\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eOperating Differential Pressure\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e200–350 kPa(d)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eMaximum Inlet Pressure\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e350 kPa(G)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePressure Resistance\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1 MPa(G)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eHelium Leak Integrity\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e≤1 × 10⁻⁹ Pa·m³\/s\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003cp\u003e\u003cstrong\u003eMaterial selection note:\u003c\/strong\u003e Verify gas compatibility with the wetted materials and seals. Do not use this model for corrosive gases without explicit manufacturer approval.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e03 | Analog Control and Electrical Requirements\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSetpoint Signal\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e0.25–5 VDC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eFlow Output Signal\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e0–5 VDC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eElectrical Connector\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eD-Sub connector\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePositive Supply\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e+15 VDC ±5%, 50 mA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eNegative Supply\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e-15 VDC ±5%, 200 mA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePower Consumption\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e3.9 VA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003cul\u003e\n\u003cli\u003eThe analog setpoint provides an external flow command.\u003c\/li\u003e\n\u003cli\u003eThe voltage output represents the controller's flow signal.\u003c\/li\u003e\n\u003cli\u003eThe D-Sub interface connects the controller to compatible control equipment.\u003c\/li\u003e\n\u003cli\u003eThe bipolar power supply requires suitable positive and negative voltage rails.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ch3\u003e\u003cb\u003e04 | Operating Conditions and Performance Envelope\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eOperating Temperature\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e5°C to 45°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eAccuracy Guarantee Temperature\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e15°C to 35°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eStandard Configuration\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eUnheated\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eApplicable Gas Category\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eNon-corrosive gases\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003cp\u003eThe controller operates within a 5°C to 45°C temperature range. Its specified accuracy applies within the narrower 15°C to 35°C range.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e05 | Why Engineers Select the SEC-E441X\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003e200 SLM Flow Capacity:\u003c\/strong\u003e Handles high-volume gas delivery requirements within its specified configuration.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eEconomy Solenoid Design:\u003c\/strong\u003e Provides a cost-conscious approach to high-flow gas regulation.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eNormally Closed Valve:\u003c\/strong\u003e Closes the solenoid valve when electrical power is removed.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eAnalog Signal Interface:\u003c\/strong\u003e Supports voltage-based setpoint and flow monitoring.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eStainless Steel Gas Path:\u003c\/strong\u003e Uses SUS316 stainless steel and compatible sealing materials.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eDefined Pressure Envelope:\u003c\/strong\u003e Provides specified differential and inlet pressure limits for system design.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eHelium Leak Specification:\u003c\/strong\u003e Supports evaluation of gas-path sealing performance.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ch3\u003e\u003cb\u003e06 | High-Flow Application Scenarios\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eBulk Gas Supply\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eRegulates high-volume non-corrosive gas delivery in compatible supply systems.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePump Purge Systems\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eControls purge gas flow for suitable industrial and semiconductor equipment.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eGas Distribution Panels\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eProvides analog flow regulation within compatible gas delivery assemblies.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eIndustrial Gas Equipment\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eSupports high-flow gas supply where the specified materials and pressure limits apply.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eProcess Equipment\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eProvides voltage-controlled gas flow regulation for compatible machinery.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003ch3\u003e\u003cb\u003e07 | Installation and System Integration\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003col\u003e\n\u003cli\u003e\n\u003cstrong\u003eConfirm Gas Compatibility:\u003c\/strong\u003e Verify the process gas against the approved material and calibration configuration.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCheck Flow Capacity:\u003c\/strong\u003e Confirm that 200 SLM suits the required operating flow.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eVerify Pressure Conditions:\u003c\/strong\u003e Maintain the specified differential and inlet pressure limits.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eInspect Gas Connections:\u003c\/strong\u003e Confirm the connection specification before assembling the piping.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eConnect Analog Signals:\u003c\/strong\u003e Match the setpoint and output wiring with the equipment interface.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eVerify Power Rails:\u003c\/strong\u003e Check positive and negative supply voltages before energizing the unit.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eConfigure Control Logic:\u003c\/strong\u003e Match the PLC or controller scaling with the specified voltage ranges.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCheck Valve Operation:\u003c\/strong\u003e Verify normally closed behavior during power removal.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePerform Leak Testing:\u003c\/strong\u003e Follow approved procedures before introducing process gas.\u003c\/li\u003e\n\u003c\/ol\u003e\n\n\u003ch3\u003e\u003cb\u003e08 | Commissioning and Preventive Maintenance\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eZero-Flow Check:\u003c\/strong\u003e Verify the output under the manufacturer's specified zero-flow conditions.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSignal Calibration:\u003c\/strong\u003e Check the analog setpoint and feedback scaling.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eFlow Verification:\u003c\/strong\u003e Compare the output against a suitable calibrated flow reference.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePressure Monitoring:\u003c\/strong\u003e Check actual inlet and outlet pressure conditions.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eValve Inspection:\u003c\/strong\u003e Investigate delayed response or unstable flow behavior.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eLeak Inspection:\u003c\/strong\u003e Examine gas connections after installation and maintenance.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePower Inspection:\u003c\/strong\u003e Monitor both supply rails for voltage stability.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eEnvironmental Control:\u003c\/strong\u003e Maintain the recommended accuracy temperature range where precision is critical.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ch3\u003e\u003cb\u003e09 | Compatibility and Replacement Considerations\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong\u003e\u003cspan style=\"color: #0070C0;\"\u003eSEC-E441X\u003c\/span\u003e\u003c\/strong\u003e uses an analog interface and a normally closed solenoid valve. Replacement selection requires electrical, mechanical, and process compatibility checks.\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003eConfirm the SEC-E Economy Solenoid Valve Series designation.\u003c\/li\u003e\n\u003cli\u003eVerify the 200 SLM N2-equivalent full-scale configuration.\u003c\/li\u003e\n\u003cli\u003eMatch the process gas with the specified wetted materials.\u003c\/li\u003e\n\u003cli\u003eCheck the analog voltage ranges and D-Sub connector arrangement.\u003c\/li\u003e\n\u003cli\u003eConfirm the bipolar power supply requirements.\u003c\/li\u003e\n\u003cli\u003eVerify pressure conditions and gas connection dimensions.\u003c\/li\u003e\n\u003cli\u003eCheck the normally closed valve requirement.\u003c\/li\u003e\n\u003cli\u003eConfirm the accuracy requirements at the actual operating temperature.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003e\u003cstrong\u003eImportant:\u003c\/strong\u003e The supplied specifications identify a 3\/8-inch Swagelok connection as a key feature. Confirm the exact fitting configuration before ordering or replacing the unit.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e10 | Compliance and Technical Standards\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eSEMI Standards:\u003c\/strong\u003e Compliance with SEMI standards is indicated in the supplied product information.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eGas Compatibility:\u003c\/strong\u003e Specified for non-corrosive gas applications.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eLeak Integrity:\u003c\/strong\u003e Helium leak specification of ≤1 × 10⁻⁹ Pa·m³\/s.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eSpecific SEMI standard numbers and supporting certificates require manufacturer documentation. Verify project-specific compliance requirements before installation.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e11 | Ordering and Supply Information\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eBrand:\u003c\/strong\u003e HORIBA STEC\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eModel:\u003c\/strong\u003e \u003cstrong\u003e\u003cspan style=\"color: #0070C0;\"\u003eSEC-E441X\u003c\/span\u003e\u003c\/strong\u003e\n\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSeries:\u003c\/strong\u003e SEC-E Economy Solenoid Valve\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eProduct Type:\u003c\/strong\u003e High-Flow Mass Flow Controller\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eFull-Scale Capacity:\u003c\/strong\u003e 200 SLM, N2 equivalent\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCondition:\u003c\/strong\u003e New \u0026amp; Original in Factory Packing\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eWarranty:\u003c\/strong\u003e Factory Warranty: 12 Months\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eShipping:\u003c\/strong\u003e FedEx, UPS, and DHL available\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003e\u003cstrong\u003ePackage Contents:\u003c\/strong\u003e One SEC-E441X mass flow controller. Confirm connection accessories and other configuration-specific items before ordering.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e12 | Global PLC Spare HUB – Application Insight\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong\u003e\u003cspan style=\"color: #0070C0;\"\u003eHORIBA STEC SEC-E441X\u003c\/span\u003e\u003c\/strong\u003e targets high-flow applications that require economical analog gas regulation. Its 200 SLM capacity makes pressure management and upstream supply design important selection factors.\u003c\/p\u003e\n\n\u003cp\u003eEngineers should pay particular attention to the 5% FS lower control limit. At a 200 SLM full-scale setting, this represents a nominal lower control boundary of 10 SLM.\u003c\/p\u003e\n\n\u003cp\u003eThe accuracy specification uses full scale as its reference. At 200 SLM, ±1% FS corresponds to ±2 SLM under the specified accuracy conditions. This distinction matters when evaluating low-flow process requirements.\u003c\/p\u003e\n\n\u003cp\u003eThe normally closed solenoid valve also affects system behavior during power interruption. Engineers should evaluate the resulting gas isolation behavior within the complete equipment safety design.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e13 | Frequently Asked Questions\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ1: Is the SEC-E441X suitable for applications requiring very low flow rates?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eIts specified control range starts at 5% FS. For a 200 SLM configuration, this equals 10 SLM. Applications below this boundary require a different full-scale configuration or another suitable controller.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ2: How does the normally closed valve affect equipment shutdown design?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eThe valve closes when electrical power is removed. Engineers should consider this behavior when designing shutdown sequences and restart procedures. Verify whether additional isolation devices or safety measures are necessary.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ3: Can the controller connect directly to a PLC analog output and input?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eIts 0.25–5 VDC setpoint and 0–5 VDC output support compatible voltage interfaces. Check PLC signal ranges, common references, grounding, and D-Sub pin assignments. Do not assume direct wiring without checking the electrical documentation.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ4: Why can actual flow accuracy differ from the nominal ±1% FS specification?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eOperating temperature, gas calibration, pressure differential, and installation conditions can influence system performance. The stated accuracy guarantee applies from 15°C to 35°C. Use a suitable reference instrument during commissioning to verify actual performance.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ5: When should buyers choose a 200 SLM controller instead of a smaller model?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eChoose the full-scale range according to normal operating flow and required control margin. Avoid excessive oversizing because full-scale accuracy affects absolute flow deviation. For example, a 200 SLM model may not suit a process that normally operates below 10 SLM.\u003c\/p\u003e\n","brand":"HORIBA","offers":[{"title":"Default Title","offer_id":68027795964086,"sku":"SEC-E441X","price":148.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7863\/8774\/files\/SEC-E441X_1_696a870d-96e2-42d7-afc4-950fb3105104.jpg?v=1794281725"},{"product_id":"sec-8440f-horiba-stec-heated-mass-flow-controller-sec-8000f-series","title":"SEC-8440F HORIBA STEC Heated Mass Flow Controller SEC-8000F Series","description":"\u003ch3\u003e\u003cstrong\u003eSEC-8440F | HORIBA STEC | SEC-8000F High Temperature Digital Mass Flow Controller\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe \u003cspan style=\"color: #1673b9;\"\u003e\u003cstrong\u003eHORIBA STEC SEC-8440F\u003c\/strong\u003e\u003c\/span\u003e is a high-temperature digital mass flow controller designed for demanding semiconductor gas delivery systems. Its heated sensor section helps maintain stable measurement conditions when process gases tend to condense.\u003c\/p\u003e\n\u003cp\u003eWithin the \u003cspan style=\"color: #1673b9;\"\u003e\u003cstrong\u003eSEC-8000F Series\u003c\/strong\u003e\u003c\/span\u003e, this model combines thermal management, precision flow control, and digital communication. It supports applications involving corrosive or condensable gases, including metalorganic precursors and titanium tetrachloride (TiCl4).\u003c\/p\u003e\n\u003cp\u003eIts electropolished SUS316L wetted surfaces and metal seals support demanding gas-handling requirements. A piezoelectric control valve provides normally open operation when power is removed.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e01 | Engineering Configuration at a Glance\u003c\/strong\u003e\u003c\/h3\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eManufacturer\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eHORIBA STEC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eModel\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan style=\"color: #1673b9;\"\u003e\u003cstrong\u003eSEC-8440F\u003c\/strong\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eProduct Series\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eSEC-8000F High Temperature Digital\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eProduct Type\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eHeated Digital Mass Flow Controller (MFC)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSensor Configuration\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eHeated sensor section, HL or HM type\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eControl Valve\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003ePiezoelectric actuator, normally open when power is off\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eGas Connections\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1\/4-inch VCR\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eCommunication\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eAnalog interface and RS-485 F-Net\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eTypical Applications\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eMOCVD, ALD, and heated corrosive gas delivery\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003ch3\u003e\u003cstrong\u003e02 | Flow Performance and Measurement Characteristics\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe available full-scale ranges cover low-flow and higher-flow process configurations. Select the range according to the required gas flow and operating conditions.\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eFull-Scale Flow Options\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e5, 10, 20, 30, 50, 100, 200, 300, 500 SCCM; 1 and 2 SLM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eReference Gas\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eN2 equivalent\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eAccuracy\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e±1.0% S.P. above 30% FS; ±0.3% FS at or below 30% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eRepeatability\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e±0.2% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eResponse Time\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e≤1 second (T98)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eControl Range\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e2–100% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eLinearity\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e±0.5% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003e\u003cstrong\u003eEngineering note:\u003c\/strong\u003e Accuracy uses two different reference bases. Above 30% FS, it references the setpoint. At or below 30% FS, it references full scale. Do not treat these values as interchangeable during measurement uncertainty calculations.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e03 | Thermal Management and Gas-Wetted Construction\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eCondensation can affect flow measurement and restrict internal gas passages. The heated sensor section helps keep process gas above its condensation threshold.\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eHL Heated Type\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e80–100°C sensor section\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eHM Heated Type\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e100–120°C sensor section\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eValve Section\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e5–45°C ambient operating range\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eWetted Material\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eSUS316L stainless steel\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSurface Finish\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eElectropolished inner surface as standard\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSeal Construction\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eMetal seals\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eLeak Integrity\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e≤5 × 10⁻¹² Pa·m³\/s (He)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003eThe sensor heating configuration requires careful coordination with the process gas temperature profile. The heated section does not automatically guarantee that the complete upstream and downstream gas path remains condensation-free.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e04 | Electrical Interface and Control Architecture\u003c\/strong\u003e\u003c\/h3\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eAnalog Setpoint\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e0.1–5 VDC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eAnalog Output\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e0–5 VDC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eDigital Communication\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eRS-485, F-Net protocol\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eCommunication Speed\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e38,400 bps\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eConnectors\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eD-Sub 9-pin and RJ-45\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePositive Supply\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e+15 VDC ±5%, 150 mA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eNegative Supply\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e−15 VDC ±5%, 150 mA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eActuator\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003ePiezoelectric valve\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePower-Off Valve State\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eNormally open\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003eFor analog integration, confirm the controller's input and output scaling before commissioning. For digital integration, verify F-Net compatibility, RS-485 wiring, connector pin assignments, and host communication settings.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e05 | Process Integration: Where SEC-8440F Adds Value\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eMOCVD gas delivery:\u003c\/strong\u003e Supports controlled delivery of temperature-sensitive precursor gases.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eALD process systems:\u003c\/strong\u003e Helps manage gas flow where condensation can affect measurement stability.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eMetalorganic precursors:\u003c\/strong\u003e Heated sensing supports applications involving condensable process materials.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eTiCl4 delivery:\u003c\/strong\u003e Provides a heated measurement configuration for suitable process gas systems.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCorrosive gas handling:\u003c\/strong\u003e SUS316L wetted surfaces and metal seals support compatible gas-service configurations.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eAlways verify material compatibility against the actual gas composition, concentration, temperature, and pressure. A heated MFC does not replace the need for compatible upstream regulators, tubing, valves, and exhaust arrangements.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e06 | Installation and Commissioning Recommendations\u003c\/strong\u003e\u003c\/h3\u003e\n\u003col\u003e\n\u003cli\u003e\n\u003cstrong\u003eConfirm the gas configuration.\u003c\/strong\u003e Match the selected full-scale range to the process gas and required flow.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCheck the heated option.\u003c\/strong\u003e Verify whether the application requires HL or HM temperature settings.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eInspect the VCR connections.\u003c\/strong\u003e Use compatible fittings and follow the equipment manufacturer's sealing procedure.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eVerify the gas path.\u003c\/strong\u003e Review upstream and downstream temperatures to identify potential condensation points.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCheck the power rails.\u003c\/strong\u003e Confirm both +15 VDC and −15 VDC supplies before applying the setpoint.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eValidate the control interface.\u003c\/strong\u003e Confirm analog scaling or RS-485 F-Net communication before process operation.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePerform a controlled leak test.\u003c\/strong\u003e Follow the facility's approved procedure for the actual process gas.\u003c\/li\u003e\n\u003c\/ol\u003e\n\u003ch3\u003e\u003cstrong\u003e07 | Troubleshooting Insights for Process Engineers\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eUnexpected flow drift:\u003c\/strong\u003e Check gas temperature, pressure stability, and the possibility of condensation in unheated piping.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSlow flow response:\u003c\/strong\u003e Inspect gas supply stability, valve operating conditions, and upstream restrictions.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCommunication failure:\u003c\/strong\u003e Check RS-485 polarity, wiring continuity, host settings, and F-Net compatibility.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eIncorrect analog readings:\u003c\/strong\u003e Verify signal grounding, scaling, and the difference between setpoint and output ranges.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eAbnormal valve behavior:\u003c\/strong\u003e Remember that the valve is normally open when power is off. Include this state in shutdown and safety reviews.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eDo not expose the heated sensor section to process gas until the required thermal conditions are established. Follow the equipment manufacturer's approved warm-up and startup procedure.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e08 | Compliance and Product Handling\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003eRoHS compliant.\u003c\/li\u003e\n\u003cli\u003eDesigned with reference to applicable SEMI requirements.\u003c\/li\u003e\n\u003cli\u003eHelium leak integrity specification: ≤5 × 10⁻¹² Pa·m³\/s.\u003c\/li\u003e\n\u003cli\u003eUse appropriate handling procedures for corrosive, toxic, or condensable gases.\u003c\/li\u003e\n\u003cli\u003eConfirm the exact certification scope and applicable SEMI requirements against the supplied product documentation.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ch3\u003e\u003cstrong\u003e09 | Frequently Asked Questions\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003e\u003cstrong\u003eQ1: How should engineers select the correct full-scale range for a new process recipe?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eChoose a range that accommodates the maximum required flow while preserving useful control resolution. Avoid selecting an unnecessarily large range, especially for low-flow precursor dosing. Confirm the actual gas conversion and recipe operating points before final selection.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ2: Can this controller be installed directly beside an unheated gas line?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eNot without evaluating the complete thermal profile. A heated sensor section cannot prevent condensation in a colder upstream fitting or downstream pipe. Review every potential cold spot between the gas source and process chamber.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ3: What should technicians check when measured flow differs from an external reference instrument?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eFirst, verify gas identity, calibration basis, reference conditions, and pressure stability. Then check the reference instrument's uncertainty and installation position. Comparing different gas calibration factors can produce misleading conclusions.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ4: Does the normally open valve state provide process isolation during a power failure?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eNo. Normally open operation means the valve opens when power is removed. Engineers must assess the resulting gas flow path and provide independent isolation where the process safety design requires it.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ5: What information should buyers provide when requesting a replacement or equivalent unit?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eProvide the complete model number, full-scale range, HL or HM heating configuration, gas type, connection specification, and electrical interface. Include the existing system's communication requirements and installation constraints. These details help prevent configuration mismatches.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e10 | Supply and Ordering Information\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003e\u003cspan style=\"color: #1673b9;\"\u003e\u003cstrong\u003eHORIBA STEC SEC-8440F\u003c\/strong\u003e\u003c\/span\u003e is a specialized heated digital mass flow controller for demanding semiconductor gas applications.\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eBrand:\u003c\/strong\u003e HORIBA STEC\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eModel:\u003c\/strong\u003e SEC-8440F\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSeries:\u003c\/strong\u003e SEC-8000F High Temperature Digital\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eProduct Type:\u003c\/strong\u003e Heated Digital Mass Flow Controller\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eConfiguration Confirmation:\u003c\/strong\u003e Please specify flow range, gas type, and heating option.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eContact our team with your model and application requirements. We can help confirm the product configuration, interface, and availability before ordering.\u003c\/p\u003e","brand":"HORIBA","offers":[{"title":"Default Title","offer_id":68027797700790,"sku":"SEC-8440F","price":115.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7863\/8774\/files\/SEC-Z512KX_1_4bde9f9d-6b31-4957-8d51-ad3cd43a30ed.jpg?v=1794281860"},{"product_id":"sec-8470f-horiba-stec-high-temperature-mass-flow-controller","title":"SEC-8470F HORIBA STEC High Temperature Mass Flow Controller","description":"\u003ch3\u003e\u003cstrong\u003eHORIBA STEC SEC-8470F | SEC-8000F High Temperature Digital Mass Flow Controller\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong\u003e\u003cspan style=\"color:#1565C0;\"\u003eSEC-8470F\u003c\/span\u003e\u003c\/strong\u003e is a high-temperature digital mass flow controller from the \u003cstrong\u003eHORIBA STEC SEC-8000F Series\u003c\/strong\u003e. It regulates high-flow process gases in semiconductor manufacturing equipment.\u003c\/p\u003e\n\n\u003cp\u003eUnlike standard unheated mass flow controllers, this model incorporates a heated sensor section. The heating function helps manage gases that may condense or change behavior at lower temperatures.\u003c\/p\u003e\n\n\u003cp\u003eThe controller supports a nitrogen-equivalent full-scale flow rate of \u003cstrong\u003e150 SLM\u003c\/strong\u003e. Its sensor temperature options cover \u003cstrong\u003e80–120°C\u003c\/strong\u003e, depending on the selected configuration.\u003c\/p\u003e\n\n\u003cp\u003eThe unit combines a piezoelectric control valve, electropolished SUS316L wetted surfaces, and metal seals. Its electrical interfaces support analog control and RS-485 F-Net communication.\u003c\/p\u003e\n\n\u003cp\u003eThese characteristics make the \u003cstrong\u003eSEC-8470F\u003c\/strong\u003e suitable for high-flow gas delivery systems. Typical installations include large MOCVD reactors and heated bulk gas lines.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e01 | Product Architecture at a Glance\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eManufacturer\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eHORIBA STEC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eModel\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003e\u003cspan style=\"color:#1565C0;\"\u003eSEC-8470F\u003c\/span\u003e\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eProduct Series\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eSEC-8000F\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSeries Classification\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eHigh Temperature Digital\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eProduct Type\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eHeated Mass Flow Controller (MFC)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eFull-Scale Flow\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e150 SLM, N2 equivalent\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSensor Heating\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eYes\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eHeating Options\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eHL: 80–100°C; HM: 100–120°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eControl Valve\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003ePiezoelectric actuator\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eValve Default State\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eNormally open when power is off\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eCommunication\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eAnalog and RS-485 F-Net\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003ch3\u003e\u003cstrong\u003e02 | High-Flow Performance \u0026amp; Control Accuracy\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong\u003eSEC-8470F\u003c\/strong\u003e provides a 150 SLM full-scale flow capacity. Its control range covers 2% to 100% of full scale.\u003c\/p\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePerformance Parameter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSpecification\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFull-Scale Flow Rate\u003c\/td\u003e\n\u003ctd\u003e150 SLM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eReference Gas\u003c\/td\u003e\n\u003ctd\u003eNitrogen (N2) equivalent\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eControl Range\u003c\/td\u003e\n\u003ctd\u003e2%–100% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eTurndown Ratio\u003c\/td\u003e\n\u003ctd\u003e50:1\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAccuracy Above 30% FS\u003c\/td\u003e\n\u003ctd\u003e±1.0% of setpoint\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAccuracy at or Below 30% FS\u003c\/td\u003e\n\u003ctd\u003e±0.3% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eRepeatability\u003c\/td\u003e\n\u003ctd\u003e±0.3% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eLinearity\u003c\/td\u003e\n\u003ctd\u003e±0.5% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eResponse Time\u003c\/td\u003e\n\u003ctd\u003e≤1 second, T98\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003cp\u003e\u003cstrong\u003eEngineering Interpretation\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eHigh-Flow Capacity:\u003c\/strong\u003e The 150 SLM rating supports high-volume process gas delivery.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eLow-Setpoint Accuracy:\u003c\/strong\u003e The specification changes at the 30% FS threshold.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eRepeatability:\u003c\/strong\u003e ±0.3% FS describes consistency across repeated control operations.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eLinearity:\u003c\/strong\u003e ±0.5% FS describes deviation from the specified linear flow relationship.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eDynamic Response:\u003c\/strong\u003e T98 ≤1 second specifies the response performance.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eControl Range:\u003c\/strong\u003e The 2%–100% FS range provides a 50:1 turndown ratio.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003e\u003cstrong\u003ePractical Selection Example:\u003c\/strong\u003e At 150 SLM full scale, 30% FS equals 45 SLM. The low-setpoint accuracy specification applies at or below this threshold.\u003c\/p\u003e\n\n\u003cp\u003eDo not confuse percentage of setpoint with percentage of full scale. These accuracy references use different calculation bases.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e03 | Thermal Management for Process Gas Delivery\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe defining feature of the \u003cstrong\u003e\u003cspan style=\"color:#1565C0;\"\u003eSEC-8470F\u003c\/span\u003e\u003c\/strong\u003e is its heated sensor configuration. It supports applications involving corrosive or condensable process gases.\u003c\/p\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eThermal Section\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eTemperature Specification\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSensor Section – HL Type\u003c\/td\u003e\n\u003ctd\u003e80–100°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSensor Section – HM Type\u003c\/td\u003e\n\u003ctd\u003e100–120°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eValve Section\u003c\/td\u003e\n\u003ctd\u003e5–45°C\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHeating Configuration\u003c\/td\u003e\n\u003ctd\u003eHeated sensor section\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003cp\u003e\u003cstrong\u003eWhy Sensor Heating Matters\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003eHelps maintain the sensor above the condensation temperature of compatible process gases.\u003c\/li\u003e\n\u003cli\u003eReduces the risk of condensation inside the heated measurement section.\u003c\/li\u003e\n\u003cli\u003eSupports stable measurement conditions for suitable high-temperature gas applications.\u003c\/li\u003e\n\u003cli\u003eProvides different heating ranges for different process requirements.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003e\u003cstrong\u003eImportant Configuration Note:\u003c\/strong\u003e The sensor and valve sections have different temperature limits. The valve section must remain within 5–45°C.\u003c\/p\u003e\n\n\u003cp\u003eDo not assume the entire controller operates at 80–120°C. Verify the selected HL or HM configuration before installation.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e04 | Process Wetted Materials \u0026amp; Gas Compatibility\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eMaterial selection is important when handling corrosive, reactive, or condensable gases. The supplied construction specification identifies electropolished SUS316L stainless steel and metal seals.\u003c\/p\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eWetted Body Material\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eSUS316L stainless steel\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eInternal Surface Finish\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eElectropolished, standard\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSeal Material\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eMetal\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eLeak Integrity\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e≤5 × 10⁻¹² Pa·m³\/s (He)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eGas Application\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eHigh-temperature process gases\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eTypical Gas Conditions\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eCorrosive or condensable gases requiring heating\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003cp\u003e\u003cstrong\u003eMaterial Selection Considerations\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003eElectropolished surfaces support clean process gas contact.\u003c\/li\u003e\n\u003cli\u003eSUS316L provides a stainless steel wetted construction.\u003c\/li\u003e\n\u003cli\u003eMetal seals avoid reliance on standard elastomer sealing materials.\u003c\/li\u003e\n\u003cli\u003eHelium leak integrity supports demanding gas containment requirements.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003e\u003cstrong\u003eEngineering Warning:\u003c\/strong\u003e SUS316L and metal seals do not guarantee compatibility with every corrosive gas. Confirm chemical compatibility, gas purity requirements, and process temperature before selection.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e05 | Pressure Envelope \u0026amp; Gas Line Design\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eCorrect pressure conditions are essential for stable high-flow regulation. The following values define the supplied pressure specifications.\u003c\/p\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePressure Parameter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSpecification\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOperating Differential Pressure\u003c\/td\u003e\n\u003ctd\u003e50–300 kPa(d)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMaximum Operating Pressure\u003c\/td\u003e\n\u003ctd\u003e300 kPa(d)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePressure Resistance\u003c\/td\u003e\n\u003ctd\u003e1000 kPa(G)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003cp\u003e\u003cstrong\u003ePressure Design Notes\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003eMaintain the specified differential pressure during normal operation.\u003c\/li\u003e\n\u003cli\u003eCheck upstream supply pressure under actual flow conditions.\u003c\/li\u003e\n\u003cli\u003eEvaluate downstream backpressure and piping restrictions.\u003c\/li\u003e\n\u003cli\u003eKeep operating pressure within the manufacturer's permitted limits.\u003c\/li\u003e\n\u003cli\u003eDo not use the pressure resistance rating as a continuous operating limit.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eThe supplied pressure data uses different reference notations. Confirm the exact pressure definitions and test conditions against the manufacturer documentation before final engineering approval.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e06 | Electrical Interface \u0026amp; Control Integration\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong\u003eSEC-8000F Series\u003c\/strong\u003e supports analog process control and digital communication through its RS-485 F-Net interface.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eAnalog Interface\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSetpoint Signal\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e0.1–5 VDC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eFlow Output Signal\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e0–5 VDC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003cp\u003e\u003cstrong\u003eDigital Communication\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eCommunication Protocol\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eRS-485 F-Net\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eCommunication Speed\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e38,400 bps\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eConnector Interface\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eD-Sub 9-pin and RJ-45\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003cp\u003e\u003cstrong\u003ePower Supply Requirements\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePositive Supply\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e+15 VDC ±5%, 150 mA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eNegative Supply\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e-15 VDC ±5%, 150 mA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003cp\u003e\u003cstrong\u003eIntegration Considerations\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003eVerify the analog setpoint range before connecting the equipment controller.\u003c\/li\u003e\n\u003cli\u003eConfirm the output signal scaling within the host control system.\u003c\/li\u003e\n\u003cli\u003eCheck RS-485 wiring and communication parameters.\u003c\/li\u003e\n\u003cli\u003eConfirm the F-Net protocol implementation and device compatibility.\u003c\/li\u003e\n\u003cli\u003eVerify connector pin assignments against the applicable wiring documentation.\u003c\/li\u003e\n\u003cli\u003eCheck both positive and negative supply rails during commissioning.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003e\u003cstrong\u003eImportant:\u003c\/strong\u003e RS-485 describes the electrical communication interface. F-Net defines the specified communication protocol. Do not assume generic Modbus RTU compatibility.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e07 | Mechanical Connection \u0026amp; Installation\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong\u003eSEC-8470F\u003c\/strong\u003e uses a \u003cstrong\u003e1\/2-inch VCR connection\u003c\/strong\u003e for high-flow gas line integration.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eInstallation Checklist\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003col\u003e\n\u003cli\u003eConfirm the 1\/2-inch VCR connection specification.\u003c\/li\u003e\n\u003cli\u003eCheck the gas line cleanliness before installation.\u003c\/li\u003e\n\u003cli\u003eUse compatible metal gasket and fitting components.\u003c\/li\u003e\n\u003cli\u003eVerify the installation direction and flow path.\u003c\/li\u003e\n\u003cli\u003eCheck mounting arrangements and maintenance clearance.\u003c\/li\u003e\n\u003cli\u003eConfirm the sensor heating option before energization.\u003c\/li\u003e\n\u003cli\u003eMaintain the valve section within its specified temperature range.\u003c\/li\u003e\n\u003cli\u003eInspect all gas connections for leakage.\u003c\/li\u003e\n\u003cli\u003eVerify analog and RS-485 wiring before process startup.\u003c\/li\u003e\n\u003c\/ol\u003e\n\n\u003cp\u003eUse suitable VCR installation procedures and manufacturer-approved sealing components. Avoid contamination during connection assembly.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eReplacement Advice:\u003c\/strong\u003e Check the fitting size and center distance before replacing an existing controller. A matching flow rating does not guarantee mechanical interchangeability.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e08 | Process Applications \u0026amp; Equipment Integration\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong\u003e\u003cspan style=\"color:#1565C0;\"\u003eHORIBA STEC SEC-8470F\u003c\/span\u003e\u003c\/strong\u003e is intended for high-flow gas delivery where sensor heating is necessary.\u003c\/p\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eApplication\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eEngineering Requirement\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eLarge MOCVD Reactors\u003c\/td\u003e\n\u003ctd\u003eHigh-capacity process gas regulation.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHeated Bulk Gas Lines\u003c\/td\u003e\n\u003ctd\u003eTemperature-controlled gas measurement conditions.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eCorrosive Gas Delivery\u003c\/td\u003e\n\u003ctd\u003eCompatible wetted materials and metal sealing.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eCondensable Gas Systems\u003c\/td\u003e\n\u003ctd\u003eHeated sensor operation to manage condensation risk.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSemiconductor Gas Panels\u003c\/td\u003e\n\u003ctd\u003eHigh-flow control with analog and digital interfaces.\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003cp\u003eFor these applications, engineers should evaluate gas chemistry, flow demand, pressure stability, and thermal conditions together.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e09 | Compliance \u0026amp; Product Standards\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eRoHS:\u003c\/strong\u003e RoHS compliant.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eIndustry Standards:\u003c\/strong\u003e SEMI standards compliance.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eConfirm the applicable SEMI standard numbers and supporting declarations against the exact product documentation. Do not assume additional hazardous-area or safety certifications.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e10 | Configuration \u0026amp; Replacement Verification\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eBefore ordering the \u003cstrong\u003e\u003cspan style=\"color:#1565C0;\"\u003eSEC-8470F\u003c\/span\u003e\u003c\/strong\u003e, confirm the complete process configuration. The heating range, gas compatibility, and electrical interface affect replacement suitability.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003ePre-Purchase Verification\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eModel:\u003c\/strong\u003e SEC-8470F.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSeries:\u003c\/strong\u003e SEC-8000F High Temperature Digital.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eFlow Capacity:\u003c\/strong\u003e 150 SLM, N2 equivalent.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eHeating Type:\u003c\/strong\u003e HL or HM.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eGas Compatibility:\u003c\/strong\u003e Confirm the actual process gas.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSealing:\u003c\/strong\u003e Verify metal seal configuration.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eConnection:\u003c\/strong\u003e Confirm 1\/2-inch VCR fittings.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCommunication:\u003c\/strong\u003e Verify analog and RS-485 F-Net requirements.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePower:\u003c\/strong\u003e Confirm dual ±15 VDC supply availability.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eValve Behavior:\u003c\/strong\u003e Confirm normally open operation when power is off.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePressure:\u003c\/strong\u003e Check differential and maximum operating conditions.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003e\u003cstrong\u003eCritical Selection Point:\u003c\/strong\u003e Do not substitute an unheated MFC solely because it has the same nominal flow capacity. Heating capability is a functional requirement for the specified process conditions.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e11 | Five Professional Engineering FAQs\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ1: How should engineers choose between the HL and HM heating configurations?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eThe HL configuration covers 80–100°C. The HM configuration covers 100–120°C. Selection depends on the process gas temperature requirements and condensation characteristics. Engineers should evaluate the gas vapor behavior, line temperature, and process operating conditions before choosing either option.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ2: Why is the valve section limited to 5–45°C when the sensor reaches 120°C?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eThe sensor and valve sections have separate thermal operating limits. The heated design targets the measurement section rather than the entire assembly. Excessive valve-section temperature may affect its operating conditions. Maintain suitable thermal separation and cabinet ventilation during installation.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ3: What does normally open when power is off mean for gas system safety?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eThe piezoelectric valve has a normally open default state without power. Gas flow may therefore remain possible after power loss. Engineers must evaluate the upstream isolation valve and system shutdown sequence. Never rely on this controller alone for emergency gas isolation.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ4: How can engineers diagnose unstable flow after replacing the controller?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eFirst, verify the selected heating configuration and allow the sensor to reach its specified operating temperature. Then check the gas calibration, differential pressure, and setpoint scaling. Inspect the VCR connections and electrical supply rails. Finally, compare the analog output with the host controller reading.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ5: Can the SEC-8470F operate through RS-485 without using its analog interface?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eThe supplied specifications identify both analog signals and RS-485 F-Net communication. However, the available operating modes and command functions require confirmation from the communication manual. Check the host controller's F-Net support, device configuration, and wiring requirements before designing a digital-only connection.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e12 | Ordering Information \u0026amp; Technical Support\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eLooking for the \u003cstrong\u003e\u003cspan style=\"color:#1565C0;\"\u003eHORIBA STEC SEC-8470F\u003c\/span\u003e\u003c\/strong\u003e High Temperature Mass Flow Controller?\u003c\/p\u003e\n\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eBrand\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eHORIBA STEC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eModel\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eSEC-8470F\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSeries\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eSEC-8000F\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eProduct Type\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eHeated Digital Mass Flow Controller\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eFlow Capacity\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e150 SLM\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eHeating Range\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e80–120°C, configuration dependent\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eCommunication\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eAnalog \/ RS-485 F-Net\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eWarranty\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e12 months, subject to sales terms\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePre-Shipment Inspection\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eAvailable before delivery\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eShipping Options\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eDHL, FedEx, UPS, and other supported carriers\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\n\u003cp\u003eContact our sales team for current pricing, availability, and delivery information. Include your process gas, heating option, and connection requirements when requesting a quotation.\u003c\/p\u003e","brand":"HORIBA","offers":[{"title":"Default Title","offer_id":68027799240886,"sku":"SEC-8470F","price":125.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7863\/8774\/files\/SEC-N100.jpg?v=1794281953"}],"url":"https:\/\/www.plcsparehub.com\/collections\/horiba.oembed","provider":"Global PLC Spare Hub","version":"1.0","type":"link"}