{"title":"Aera","description":"\u003cp\u003eThe Aera® series by Hitachi Metals \/ Advanced Energy delivers high-precision mass flow controllers (MFCs) and mass flow meters (MFMs) tailored for semiconductor, CVD\/PVD thin-film deposition, and industrial vacuum coating processes. Built around micro-bore thermal mass sensors and 316L stainless steel gas-wetted flow paths, this portfolio ensures ultra-fast response times (≤1s) with low RF interference susceptibility and minimal long-term zero drift. From economical elastomer-sealed models (FC-R7700) to high-integrity, metal-sealed architectures (FC-R7800) and advanced multi-gas digital platforms (FC-DR980 \/ HG200 \/ Transformer®), Aera devices accommodate wide dynamic flow ranges from 10 SCCM up to 200 SLM. Designed for drop-in compatibility with VCR® metal-gasket fittings, standard D-Sub pinouts, and fieldbus protocol communications, our stock provides reliable gas metering and tight dynamic valve control for mission-critical industrial spares replacement.  \u003c\/p\u003e","products":[{"product_id":"fc-d980-aera-fc-d980-series-multi-gas-mass-flow-controller","title":"FC-D980 AERA FC-D980 Series Multi-Gas Mass Flow Controller","description":" \u003ch3\u003e\u003cstrong\u003eAERA FC-D980 Digital Mass Flow Controller\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong\u003eAERA FC-D980\u003c\/strong\u003e is a digital mass flow controller designed for accurate gas delivery in semiconductor process equipment. It combines a \u003cstrong\u003epiezoelectric control valve\u003c\/strong\u003e, an all-metal sealing structure, and programmable multi-gas calibration. Its digital architecture supports repeatable flow control across multiple gas types and measurement ranges.\u003c\/p\u003e\n\n\u003cp\u003eThe FC-D980 Series covers full-scale flow ranges from \u003cstrong\u003e3 sccm to 5 slm\u003c\/strong\u003e, expressed as nitrogen-equivalent flow. It provides analog control and monitoring alongside RS-485 communication. This configuration suits process systems that require precise gas regulation, stable low-flow operation, and clean gas-contact surfaces.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e01 | Flow Control Performance\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe FC-D980 maintains specified accuracy across its operating range. Its performance profile supports both higher-flow operation and lower setpoints.\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eFull-scale flow range:\u003c\/strong\u003e 3 sccm to 5 slm, multi-range, N2 equivalent\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eAccuracy from 25% to 100% FS:\u003c\/strong\u003e Within ±1% of set point\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eAccuracy from 2% to 25% FS:\u003c\/strong\u003e Within ±0.25% of full scale\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eRepeatability:\u003c\/strong\u003e Within ±0.2% of full scale\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eControl range:\u003c\/strong\u003e 2% to 100% FS\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eResponse time:\u003c\/strong\u003e Less than 1 second to within ±2% of set point\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eActual-flow settling time:\u003c\/strong\u003e 0.5 second between set points\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eZero stability:\u003c\/strong\u003e Less than 0.5% of full-scale flow over one year\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eAccuracy references change with the operating range. Engineers should therefore evaluate the required flow setpoint against the selected full-scale range. A suitable range helps maintain the required control resolution without unnecessarily oversizing the controller.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e02 | Programmable Gas Calibration\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe FC-D980 supports multi-gas operation through field-programmable calibration. It can store up to \u003cstrong\u003eeight gas configurations\u003c\/strong\u003e, with up to \u003cstrong\u003e11 calibration points per gas\u003c\/strong\u003e.\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003eSupports multiple gas types through programmable gas calibration\u003c\/li\u003e\n\u003cli\u003eStores up to eight gas configurations\u003c\/li\u003e\n\u003cli\u003eProvides up to 11 calibration points for each stored gas\u003c\/li\u003e\n\u003cli\u003eSupports multiple full-scale ranges within the product series\u003c\/li\u003e\n\u003cli\u003eUses nitrogen-equivalent flow as the stated reference for flow range\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eWhen configuring a gas recipe, confirm that the selected gas and calibration data match the actual process requirement. Do not assume that changing the gas selection alone validates every process condition. Verify the applicable calibration, pressure conditions, and full-scale range before commissioning.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e03 | Clean Gas Path and Metal-Sealed Construction\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eGas-contact material selection is important in semiconductor equipment. The FC-D980 uses \u003cstrong\u003edouble VAR type 316L stainless steel\u003c\/strong\u003e for its wetted construction. Gas-contact surfaces receive electropolishing and ultra-cleaning to a stated surface finish of \u003cstrong\u003e1 Ra (0.025 μm)\u003c\/strong\u003e.\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eWetted material:\u003c\/strong\u003e Double VAR type 316L stainless steel\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSurface treatment:\u003c\/strong\u003e Electropolished and ultra-cleaned\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSurface finish:\u003c\/strong\u003e 1 Ra (0.025 μm)\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSeal construction:\u003c\/strong\u003e All-metal seals\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eLeak integrity:\u003c\/strong\u003e 1 × 10\u003csup\u003e-10\u003c\/sup\u003e atm-cc\/sec He maximum\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eThe all-metal sealing arrangement avoids elastomer seals in the specified gas-wetted sealing structure. This design is relevant when evaluating gas compatibility, contamination control, and leak integrity in clean process systems.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e04 | Piezoelectric Valve and Pressure Limits\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eA piezoelectric valve regulates gas flow in response to the controller's demand signal. The FC-D980 is available with a \u003cstrong\u003enormally-open or normally-closed valve configuration\u003c\/strong\u003e. Confirm the required valve behavior when selecting the unit for a specific process or equipment design.\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eValve type:\u003c\/strong\u003e Piezoelectric\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eAvailable valve action:\u003c\/strong\u003e Normally open or normally closed\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eOperating differential pressure:\u003c\/strong\u003e 7 to 40 psiD (49 to 275 kPaD)\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eMaximum operating pressure:\u003c\/strong\u003e 70 psig (490 kPaG)\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eProof pressure:\u003c\/strong\u003e 140 psig (981 kPaG)\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eHeated configuration:\u003c\/strong\u003e Standard unheated version\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eOperating differential pressure and maximum inlet pressure describe different conditions. Check both values against the actual gas supply and downstream process pressure. The proof-pressure rating is not a normal operating target.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e05 | Electrical Interface and Control Integration\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe FC-D980 combines analog signals with digital communication for equipment integration. Its electrical interface supports analog setpoint and flow output signals, together with an RS-485 connection.\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eAnalog input:\u003c\/strong\u003e 0 to 5 VDC\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eAnalog output:\u003c\/strong\u003e 0 to 5 VDC\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eDigital communication:\u003c\/strong\u003e RS-485\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eRS-232 support:\u003c\/strong\u003e Available through a converter\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eConnector:\u003c\/strong\u003e 20-pin Honda connector\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePositive supply:\u003c\/strong\u003e +15 VDC ±2%, 120 mA minimum\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eNegative supply:\u003c\/strong\u003e -15 VDC ±2%, 50 mA minimum\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eMaximum power consumption:\u003c\/strong\u003e 1.3 W\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eBefore connecting the controller, verify the equipment-side pin assignment and power supply capacity. Confirm analog signal scaling and communication settings against the system configuration. The RS-232 connection requires a suitable converter rather than a direct assumption of native RS-232 support.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e06 | Mechanical and Environmental Data\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003ctable\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eParameter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSpecification\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eModel\u003c\/td\u003e\n\u003ctd\u003eFC-D980\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eManufacturer\u003c\/td\u003e\n\u003ctd\u003eAERA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eProduct series\u003c\/td\u003e\n\u003ctd\u003eFC-D980 Series\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eProduct type\u003c\/td\u003e\n\u003ctd\u003eDigital piezoelectric metal-sealed mass flow controller\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eDimensions (H × W × D)\u003c\/td\u003e\n\u003ctd\u003e129 × 38 × 124 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePort-to-port dimension\u003c\/td\u003e\n\u003ctd\u003e124 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eWeight\u003c\/td\u003e\n\u003ctd\u003e1.0 kg (2.2 lb)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOperating temperature\u003c\/td\u003e\n\u003ctd\u003e5 to 45°C (41 to 113°F)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHeated option\u003c\/td\u003e\n\u003ctd\u003eNo; standard unheated version\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eCompliance\u003c\/td\u003e\n\u003ctd\u003eRoHS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSettling-time reference\u003c\/td\u003e\n\u003ctd\u003eSEMI E17-91\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/table\u003e\n\n\u003cp\u003eUse the stated outline dimensions when checking equipment-panel clearance and mounting space. Confirm the mechanical interface and port arrangement against the applicable outline drawing before preparing gas lines.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e07 | Semiconductor Process Applications\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe FC-D980 is intended for gas delivery applications in semiconductor manufacturing equipment. Its programmable calibration and metal-sealed gas path support integration into systems that require controlled gas flow.\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eChemical Vapor Deposition (CVD):\u003c\/strong\u003e Regulates process-gas delivery to deposition equipment.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePhysical Vapor Deposition (PVD):\u003c\/strong\u003e Supports controlled gas supply for deposition processes.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePlasma etching:\u003c\/strong\u003e Controls gas flow for process-gas delivery.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eDiffusion:\u003c\/strong\u003e Supports repeatable gas delivery in thermal process equipment.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eIon implantation:\u003c\/strong\u003e Provides controlled gas flow within applicable equipment configurations.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSputtering:\u003c\/strong\u003e Supports gas regulation in sputtering process systems.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ch3\u003e\u003cstrong\u003e08 | Engineering Checks Before Installation\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003col\u003e\n\u003cli\u003e\n\u003cstrong\u003eConfirm the flow range:\u003c\/strong\u003e Match the selected full-scale range to the process flow requirement. Check the required setpoint against the 2% to 100% FS control range.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eVerify gas calibration:\u003c\/strong\u003e Confirm the stored gas selection and calibration data before introducing process gas.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCheck pressure conditions:\u003c\/strong\u003e Keep differential pressure within 7 to 40 psiD and operating pressure within the stated maximum.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eInspect gas connections:\u003c\/strong\u003e Maintain clean connection practices to protect the electropolished gas path from contamination.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eVerify electrical compatibility:\u003c\/strong\u003e Check the ±15 VDC supply, 20-pin connector, analog signals, and RS-485 interface.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eConfirm valve action:\u003c\/strong\u003e Select the normally-open or normally-closed configuration that matches the equipment design.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eValidate flow response:\u003c\/strong\u003e Check settling behavior under the actual gas, pressure, and system conditions after installation.\u003c\/li\u003e\n\u003c\/ol\u003e\n\n\u003ch3\u003e\u003cstrong\u003e09 | Maintenance and Process Diagnostics\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eStable flow control depends on the gas supply, pressure conditions, electrical signals, and calibration configuration. When measured flow differs from the commanded setpoint, check the complete delivery path before replacing the controller.\u003c\/p\u003e\n\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eFlow offset:\u003c\/strong\u003e Compare the commanded setpoint with the measured output and verify the selected gas calibration.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSlow settling:\u003c\/strong\u003e Check upstream pressure stability, downstream restrictions, and gas-line volume.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eUnstable readings:\u003c\/strong\u003e Inspect supply voltage, grounding, signal wiring, and pressure fluctuations.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCommunication faults:\u003c\/strong\u003e Verify RS-485 wiring and the host communication configuration.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eUnexpected valve behavior:\u003c\/strong\u003e Confirm whether the installed unit uses normally-open or normally-closed valve action.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eLong-term drift:\u003c\/strong\u003e Review zero stability and calibration history before changing process setpoints.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eThe FC-D980 includes multiple alarm and diagnostic functions. Use the applicable equipment documentation to interpret diagnostic indications and determine corrective actions. Avoid opening or modifying the gas-control assembly without an approved service procedure.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003e10 | Frequently Asked Questions\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ1: How should engineers select the full-scale range for a process with changing flow demand?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eChoose a range that covers the highest expected process demand while keeping normal operating points within the specified control range. If the process spends most of its time near the lower limit, review the accuracy specification for the 2% to 25% FS region. For recipes with significantly different flow requirements, evaluate whether separate ranges are necessary.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ2: What should be checked when a gas recipe is changed in the controller?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eVerify the selected gas identity, stored calibration, and applicable calibration points. Also confirm the gas supply pressure and process requirements. A gas selection change should not replace a system-level verification of flow performance.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ3: Why can the installed controller show different settling behavior from the stated specification?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eThe stated response time describes controller performance under defined test conditions. Actual system behavior can also depend on upstream pressure stability, downstream volume, tubing restrictions, and the process gas. Check these conditions before treating a longer system settling time as a controller fault.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ4: What is the practical difference between normally-open and normally-closed valve configurations?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eThe distinction describes the valve's default mechanical state when its actuating power is removed. Engineers should select the configuration according to the equipment's gas isolation and process safety design. Confirm the required behavior with the system designer rather than assuming both versions respond identically during a power interruption.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ5: What information should be prepared when replacing an FC-D980 in existing equipment?\u003c\/strong\u003e\u003c\/p\u003e\n\n\u003cp\u003eRecord the full-scale flow range, gas calibration, valve action, operating pressure, connector pinout, analog signal scaling, and communication requirements. Also compare the port-to-port dimension and mechanical outline with the installed unit. These checks help identify configuration differences before the replacement enters service.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cstrong\u003eProduct Summary\u003c\/strong\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong\u003eAERA FC-D980\u003c\/strong\u003e combines digital multi-gas calibration, piezoelectric flow regulation, and an all-metal gas sealing structure. Its 3 sccm to 5 slm range, 0 to 5 VDC analog interface, and RS-485 communication support semiconductor gas delivery systems. For equipment selection, confirm the required gas calibration, full-scale range, pressure conditions, valve action, and electrical configuration.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eContact us for FC-D980 product information, configuration verification, and a quotation.\u003c\/strong\u003e\u003c\/p\u003e","brand":"AERA","offers":[{"title":"Default Title","offer_id":68027805892790,"sku":"FC-D980","price":118.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7863\/8774\/files\/FC-D980_3.jpg?v=1794282312"},{"product_id":"fc-r7700-aera-analog-gas-flow-controller-fc-r7700-series","title":"FC-R7700 AERA Analog Gas Flow Controller | FC-R7700 Series","description":"\n\u003ch3\u003e\u003cb\u003eFC-R7700 | AERA Analog Mass Flow Controller\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe \u003cstrong\u003e\u003cspan style=\"color: #0070C0;\"\u003eAERA FC-R7700\u003c\/span\u003e\u003c\/strong\u003e is an economical analog mass flow controller designed for precise delivery of inert and other non-corrosive gases. It combines an elastomer-sealed gas path, solenoid control valve, and 0–5 VDC analog interface in a compact package.\u003c\/p\u003e\n\n\u003cp\u003eWith full-scale flow options from 10 sccm to 5 slm, the FC-R7700 supports gas-flow regulation in semiconductor process equipment, vacuum systems, and industrial coating applications. Its standard, unheated construction provides a practical solution for applications that do not require temperature-controlled gas delivery.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eEngineering focus:\u003c\/strong\u003e The unit provides ±1% FS accuracy, ±0.2% FS repeatability, and a control range of 2–100% FS. These specifications support stable setpoint control across a broad operating range when the gas, pressure, and installation conditions match the selected configuration.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e01 | Performance at a Glance\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003ctable\u003e\n  \u003ctr\u003e\n\u003cth\u003eParameter\u003c\/th\u003e\n\u003cth\u003eSpecification\u003c\/th\u003e\n\u003c\/tr\u003e\n  \u003ctr\u003e\n\u003ctd\u003eManufacturer\u003c\/td\u003e\n\u003ctd\u003eAERA\u003c\/td\u003e\n\u003c\/tr\u003e\n  \u003ctr\u003e\n\u003ctd\u003eModel\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eFC-R7700\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n  \u003ctr\u003e\n\u003ctd\u003eSeries\u003c\/td\u003e\n\u003ctd\u003eFC-R7700 Series\u003c\/td\u003e\n\u003c\/tr\u003e\n  \u003ctr\u003e\n\u003ctd\u003eProduct Type\u003c\/td\u003e\n\u003ctd\u003eAnalog Mass Flow Controller (MFC)\u003c\/td\u003e\n\u003c\/tr\u003e\n  \u003ctr\u003e\n\u003ctd\u003eFull-Scale Flow Range\u003c\/td\u003e\n\u003ctd\u003e10 sccm to 5 slm\u003c\/td\u003e\n\u003c\/tr\u003e\n  \u003ctr\u003e\n\u003ctd\u003eAccuracy\u003c\/td\u003e\n\u003ctd\u003e≤ ±1% of full scale\u003c\/td\u003e\n\u003c\/tr\u003e\n  \u003ctr\u003e\n\u003ctd\u003eRepeatability\u003c\/td\u003e\n\u003ctd\u003e≤ ±0.2% of full scale\u003c\/td\u003e\n\u003c\/tr\u003e\n  \u003ctr\u003e\n\u003ctd\u003eLinearity\u003c\/td\u003e\n\u003ctd\u003e≤ ±0.5% of full scale\u003c\/td\u003e\n\u003c\/tr\u003e\n  \u003ctr\u003e\n\u003ctd\u003eControl Range\u003c\/td\u003e\n\u003ctd\u003e2–100% of full scale\u003c\/td\u003e\n\u003c\/tr\u003e\n  \u003ctr\u003e\n\u003ctd\u003eResponse Time\u003c\/td\u003e\n\u003ctd\u003eLess than 2 seconds to settle within ±2% FS between setpoints\u003c\/td\u003e\n\u003c\/tr\u003e\n  \u003ctr\u003e\n\u003ctd\u003eZero Stability\u003c\/td\u003e\n\u003ctd\u003eLess than 0.5% FS over one year\u003c\/td\u003e\n\u003c\/tr\u003e\n  \u003ctr\u003e\n\u003ctd\u003eOperating Temperature\u003c\/td\u003e\n\u003ctd\u003e5 to 45°C (41 to 113°F)\u003c\/td\u003e\n\u003c\/tr\u003e\n  \u003ctr\u003e\n\u003ctd\u003eHeating Configuration\u003c\/td\u003e\n\u003ctd\u003eStandard unheated version\u003c\/td\u003e\n\u003c\/tr\u003e\n  \u003ctr\u003e\n\u003ctd\u003eWeight\u003c\/td\u003e\n\u003ctd\u003eApproximately 1.0 kg (2.2 lb)\u003c\/td\u003e\n\u003c\/tr\u003e\n  \u003ctr\u003e\n\u003ctd\u003eCompliance\u003c\/td\u003e\n\u003ctd\u003eRoHS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/table\u003e\n\n\u003ch3\u003e\u003cb\u003e02 | Control Architecture and Gas Compatibility\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe FC-R7700 uses an analog command and feedback arrangement. A 0–5 VDC input sets the target flow, while the analog output provides the corresponding flow signal to the host controller or process equipment.\u003c\/p\u003e\n\n\u003cul\u003e\n  \u003cli\u003e\n\u003cstrong\u003eCommand signal:\u003c\/strong\u003e 0–5 VDC analog input.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eFeedback signal:\u003c\/strong\u003e 0–5 VDC analog output.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eElectrical connector:\u003c\/strong\u003e AERA 9-pin D connector.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eValve mechanism:\u003c\/strong\u003e Solenoid valve.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eValve configuration:\u003c\/strong\u003e Normally open or normally closed, depending on the ordered version.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eGas compatibility:\u003c\/strong\u003e Inert and non-corrosive gases, including nitrogen, oxygen, and argon, subject to the specified gas configuration.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003e\u003cstrong\u003eSelection note:\u003c\/strong\u003e Confirm the gas calibration and valve configuration before ordering. Oxygen service requires confirmation of material cleanliness and application suitability. Do not assume that every standard configuration is approved for every gas.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e03 | Gas Path Materials and Pressure Envelope\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003ctable\u003e\n  \u003ctr\u003e\n\u003cth\u003eItem\u003c\/th\u003e\n\u003cth\u003eDetails\u003c\/th\u003e\n\u003c\/tr\u003e\n  \u003ctr\u003e\n\u003ctd\u003eWetted Body Materials\u003c\/td\u003e\n\u003ctd\u003e316\/316L stainless steel, PTFE, and magnetic stainless steel\u003c\/td\u003e\n\u003c\/tr\u003e\n  \u003ctr\u003e\n\u003ctd\u003eSeal Materials\u003c\/td\u003e\n\u003ctd\u003eFluoroelastomer or chloroprene rubber\u003c\/td\u003e\n\u003c\/tr\u003e\n  \u003ctr\u003e\n\u003ctd\u003eSeal Design\u003c\/td\u003e\n\u003ctd\u003eElastomer-sealed\u003c\/td\u003e\n\u003c\/tr\u003e\n  \u003ctr\u003e\n\u003ctd\u003eOperating Differential Pressure\u003c\/td\u003e\n\u003ctd\u003e7–40 psiD\u003c\/td\u003e\n\u003c\/tr\u003e\n  \u003ctr\u003e\n\u003ctd\u003eNormal Operating Pressure\u003c\/td\u003e\n\u003ctd\u003e70 psig\u003c\/td\u003e\n\u003c\/tr\u003e\n  \u003ctr\u003e\n\u003ctd\u003eMaximum Inlet Pressure\u003c\/td\u003e\n\u003ctd\u003e140 psig\u003c\/td\u003e\n\u003c\/tr\u003e\n  \u003ctr\u003e\n\u003ctd\u003eHelium Leak Rate\u003c\/td\u003e\n\u003ctd\u003e≤ 1 × 10⁻⁶ atm·cc\/sec; also specified as ≤ 1 × 10⁻⁷ Pa·m³\/sec\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/table\u003e\n\n\u003cp\u003eThe elastomer seal design offers an economical option for compatible non-corrosive gas systems. Seal selection matters because fluoroelastomer and chloroprene rubber have different chemical and temperature compatibility limits.\u003c\/p\u003e\n\n\u003cp\u003eThe specified differential pressure is the pressure difference required across the controller. It is not interchangeable with the inlet pressure rating. Maintain the required differential pressure under actual process flow conditions.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e04 | Electrical and Mechanical Integration\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003ctable\u003e\n  \u003ctr\u003e\n\u003cth\u003eIntegration Item\u003c\/th\u003e\n\u003cth\u003eSpecification\u003c\/th\u003e\n\u003c\/tr\u003e\n  \u003ctr\u003e\n\u003ctd\u003ePower Supply\u003c\/td\u003e\n\u003ctd\u003e+15 VDC ±2% at 25 mA\u003c\/td\u003e\n\u003c\/tr\u003e\n  \u003ctr\u003e\n\u003ctd\u003eNegative Supply\u003c\/td\u003e\n\u003ctd\u003e−15 VDC ±2% at 180 mA\u003c\/td\u003e\n\u003c\/tr\u003e\n  \u003ctr\u003e\n\u003ctd\u003eMaximum Power\u003c\/td\u003e\n\u003ctd\u003e3.1 W\u003c\/td\u003e\n\u003c\/tr\u003e\n  \u003ctr\u003e\n\u003ctd\u003eSignal Interface\u003c\/td\u003e\n\u003ctd\u003e0–5 VDC command and output\u003c\/td\u003e\n\u003c\/tr\u003e\n  \u003ctr\u003e\n\u003ctd\u003eConnector\u003c\/td\u003e\n\u003ctd\u003eAERA 9-pin D connector\u003c\/td\u003e\n\u003c\/tr\u003e\n  \u003ctr\u003e\n\u003ctd\u003eDimensions (H × W × D)\u003c\/td\u003e\n\u003ctd\u003e119 × 32 × 124 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n  \u003ctr\u003e\n\u003ctd\u003ePort-to-Port Dimension\u003c\/td\u003e\n\u003ctd\u003e124 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n  \u003ctr\u003e\n\u003ctd\u003eBody Width\u003c\/td\u003e\n\u003ctd\u003e32 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n  \u003ctr\u003e\n\u003ctd\u003eOverall Height\u003c\/td\u003e\n\u003ctd\u003e119 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/table\u003e\n\n\u003cp\u003eBefore installation, check the available mounting space, gas-line alignment, connector access, and power supply capacity. Verify the actual connector pin assignment against the equipment documentation before wiring.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e05 | Where the FC-R7700 Fits\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n  \u003cli\u003e\n\u003cstrong\u003eSemiconductor fabrication:\u003c\/strong\u003e Gas delivery for CVD, PVD, etching, diffusion, ion implantation, and sputtering equipment.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eFlat-panel display production:\u003c\/strong\u003e Flow regulation in compatible process-gas supply systems.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eData storage manufacturing:\u003c\/strong\u003e Gas control for deposition and coating processes.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eIndustrial vacuum equipment:\u003c\/strong\u003e Controlled gas injection in non-corrosive gas applications.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eIndustrial coating:\u003c\/strong\u003e Flow management for compatible inert-gas processes.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ch3\u003e\u003cb\u003e06 | Installation and Commissioning Checklist\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003col\u003e\n  \u003cli\u003e\n\u003cstrong\u003eConfirm the model configuration.\u003c\/strong\u003e Match the full-scale flow, gas calibration, seal material, valve action, and connection type to the process requirements.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eInspect the gas lines.\u003c\/strong\u003e Remove particles, moisture, oil, and other contaminants that could affect the flow path or valve operation.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eCheck pressure conditions.\u003c\/strong\u003e Maintain 7–40 psiD differential pressure and verify that the inlet pressure stays within the 140 psig maximum.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eVerify electrical supplies.\u003c\/strong\u003e Provide the specified positive and negative DC rails. Confirm polarity and supply stability before connecting the unit.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eCheck analog signals.\u003c\/strong\u003e Confirm the 0–5 VDC command and output ranges, grounding arrangement, and connector pin assignment.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003ePerform a zero and flow check.\u003c\/strong\u003e Follow the equipment manufacturer's procedure and use a suitable calibrated reference instrument.\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eValidate process response.\u003c\/strong\u003e Test representative setpoint changes and confirm that the measured flow settles within the required process tolerance.\u003c\/li\u003e\n\u003c\/ol\u003e\n\n\u003cp\u003eFor troubleshooting, first check gas supply pressure, downstream restrictions, electrical rails, signal wiring, and gas calibration. Unexpected flow readings can result from an incorrect gas factor or an unsuitable pressure differential, not necessarily a failed controller.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e07 | Replacement and Selection Considerations\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003eThe FC-R7700 is described as compatible with VCR, VCO, and Swagelok-style connection options and as suitable for replacement of selected products from other brands. However, connection style alone does not establish drop-in compatibility.\u003c\/p\u003e\n\n\u003cul\u003e\n  \u003cli\u003eMatch the full-scale flow range and gas calibration.\u003c\/li\u003e\n  \u003cli\u003eCheck the process gas against the wetted materials and elastomer seal.\u003c\/li\u003e\n  \u003cli\u003eVerify inlet pressure and available differential pressure.\u003c\/li\u003e\n  \u003cli\u003eConfirm port size, fitting type, orientation, and port-to-port dimensions.\u003c\/li\u003e\n  \u003cli\u003eCompare the analog signal range, connector, pinout, and supply requirements.\u003c\/li\u003e\n  \u003cli\u003eConfirm normally-open or normally-closed valve action.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eFor cross-brand replacement, compare the complete mechanical and electrical interface before removing the existing unit. A similar flow range does not guarantee equivalent calibration or control behavior.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e08 | Supply, Packaging and Warranty\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cul\u003e\n  \u003cli\u003e\n\u003cstrong\u003eProduct Condition:\u003c\/strong\u003e New \u0026amp; Original in Factory Packing\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eFactory Warranty:\u003c\/strong\u003e 12 Months\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eShipping Options:\u003c\/strong\u003e FedEx, UPS, and DHL\u003c\/li\u003e\n  \u003cli\u003e\n\u003cstrong\u003eDocumentation:\u003c\/strong\u003e Model and configuration confirmation available upon request.\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003cp\u003eContact our sales team with the required flow range, process gas, connection type, and valve action. This information helps confirm the correct FC-R7700 configuration before shipment.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e09 | Global PLC Spare HUB – Engineering Insight\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003eWhen selecting the FC-R7700, engineers should evaluate the minimum controllable flow rather than relying only on the maximum flow rating. Its 2–100% FS control range gives a nominal lower control boundary of 0.2 sccm for a 10 sccm model, or 0.1 slm for a 5 slm model.\u003c\/p\u003e\n\n\u003cp\u003eAccuracy is specified as a percentage of full scale, not of the instantaneous reading. For example, a 5 slm configuration with ±1% FS accuracy has a stated accuracy band of ±0.05 slm. This distinction is important when the process operates near the lower end of the range.\u003c\/p\u003e\n\n\u003cp\u003eThe elastomer seal is another key selection factor. Confirm the exact seal compound and gas compatibility, especially for oxygen or specialty process applications. For replacement projects, verify the analog interface, pressure differential, fitting geometry, and valve fail position before installation.\u003c\/p\u003e\n\n\u003ch3\u003e\u003cb\u003e10 | Frequently Asked Questions\u003c\/b\u003e\u003c\/h3\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ1. How should I choose between a 10 sccm and a 5 slm full-scale model?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eStart with the normal process flow, then check peak demand and minimum operating flow. Avoid choosing a much larger range than necessary because the usable control span and absolute full-scale accuracy may affect low-flow process control.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ2. Why can the indicated flow differ from the actual process flow after changing gases?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eMass flow controllers rely on gas-specific calibration. A controller calibrated for nitrogen may not report accurate flow for argon or oxygen without the correct gas calibration. Confirm the gas configuration before commissioning.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ3. Can the FC-R7700 replace a different manufacturer's analog MFC without changing the control system?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eNot automatically. Compare command and feedback scaling, connector pinout, supply rails, full-scale range, gas calibration, and valve action. Mechanical fitting compatibility alone is insufficient for a reliable replacement.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ4. What should I investigate if the controller cannot reach its flow setpoint?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eCheck the differential pressure across the unit first. Then inspect upstream filters, downstream restrictions, gas supply capacity, signal scaling, and calibration. A pressure drop outside the specified operating window can limit achievable flow.\u003c\/p\u003e\n\n\u003cp\u003e\u003cstrong\u003eQ5. When should I select normally-open instead of normally-closed valve action?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eBase the choice on the process safety design and the required gas behavior after loss of electrical power. Confirm the equipment's shutdown philosophy and the actual valve configuration before ordering. Do not infer fail position from the model family alone.\u003c\/p\u003e\n","brand":"AERA","offers":[{"title":"Default Title","offer_id":68027807400118,"sku":"FC-R7700","price":136.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7863\/8774\/files\/FC-R7700_2.jpg?v=1794282520"},{"product_id":"fc-d982-aera-high-flow-piezoelectric-mfc-metal-sealed-digital-controller","title":"FC-D982 AERA High-Flow Piezoelectric MFC Metal-Sealed Digital Controller","description":"\u003ch3\u003e\u003cstrong\u003eFC-D982 | AERA | FC-D980 Series High-Flow Digital Mass Flow Controller\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe \u003cspan style=\"color: #1673b9;\"\u003e\u003cstrong\u003eAERA FC-D982\u003c\/strong\u003e\u003c\/span\u003e is a high-flow digital mass flow controller designed for semiconductor gas delivery and process equipment. It belongs to the \u003cspan style=\"color: #1673b9;\"\u003e\u003cstrong\u003eFC-D980 Series\u003c\/strong\u003e\u003c\/span\u003e, which combines digital control, piezoelectric actuation, and all-metal sealing.\u003c\/p\u003e\n\u003cp\u003eWith a full-scale capacity of 30–50 slm, the FC-D982 serves applications that require higher gas throughput. Its double VAR type 316L stainless steel construction supports demanding ultra-clean gas systems. Engineers can select standard 1\/4-inch or 3\/8-inch VCR connections according to the installation configuration.\u003c\/p\u003e\n\u003cp\u003eThe controller also supports field-programmable multi-gas operation. It stores up to eight gases, with up to 11 calibration points per gas. This configuration gives process engineers greater flexibility when managing different gas recipes.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e01 | Model Positioning: High-Flow FC-D980 Configuration\u003c\/strong\u003e\u003c\/h3\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eManufacturer\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eAERA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eModel\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cspan style=\"color: #1673b9;\"\u003e\u003cstrong\u003eFC-D982\u003c\/strong\u003e\u003c\/span\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eProduct Family\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eFC-D980 Series\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eProduct Type\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eDigital Mass Flow Controller (MFC)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eControl Technology\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eDigital control with piezoelectric valve\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eFlow Capacity\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e30–50 slm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eGas Configuration\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eField-programmable multi-gas\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSealing Design\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eAll-metal seals\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eConnection Options\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1\/4-inch or 3\/8-inch VCR\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003ch3\u003e\u003cstrong\u003e02 | Measurement Performance: Accuracy Across the Operating Range\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe FC-D982 specifies accuracy in two separate flow regions. Engineers should use the appropriate reference basis when calculating process uncertainty.\u003c\/p\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eFull-Scale Flow Range\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e30–50 slm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eAccuracy at 25–100% FS\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eWithin ±1% of setpoint\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eAccuracy at 2–25% FS\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eWithin ±0.25% of full scale\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eRepeatability\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eWithin ±0.2% of full scale\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eResponse Time\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eLess than 1 second to within ±2% of setpoint\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eControl Range\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e2–100% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eZero Stability\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eLess than 0.5% FS over one year\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003e\u003cstrong\u003ePerformance interpretation:\u003c\/strong\u003e The accuracy specification changes its reference basis at 25% FS. The upper operating region uses setpoint-based accuracy. The lower region uses full-scale-based accuracy.\u003c\/p\u003e\n\u003cp\u003eFor example, a 50 slm configuration has a lower-region accuracy specification referenced to 50 slm full scale. Engineers should not interpret ±0.25% FS as ±0.25% of the commanded flow.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e03 | Gas Management: Flexible Multi-Gas Configuration\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe digital architecture supports multiple gas configurations within one controller.\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eGas storage:\u003c\/strong\u003e Stores up to eight gas configurations.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCalibration data:\u003c\/strong\u003e Supports up to 11 calibration points per gas.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eGas selection:\u003c\/strong\u003e Allows field-programmable gas configuration.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eProcess flexibility:\u003c\/strong\u003e Supports equipment that uses multiple gas recipes.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eGas selection and calibration data must match the actual process gas. Do not assume that one gas calibration automatically provides accurate measurement for another gas.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e04 | Wetted Construction: Ultra-Clean Gas Path\u003c\/strong\u003e\u003c\/h3\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eWetted Material\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eDouble VAR type 316L stainless steel\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSurface Treatment\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eElectropolished and ultra-cleaned\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSurface Finish\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1 Ra (0.025 µm), as specified\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eSealing Method\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eAll-metal seals\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eFitting Options\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1\/4-inch or 3\/8-inch VCR\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eHelium Leak Rate\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1 × 10⁻¹⁰ atm·cc\/sec maximum\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003eThe double VAR 316L construction and electropolished surface support clean gas delivery. Metal sealing avoids reliance on elastomer seals in the specified gas-wetted sealing configuration.\u003c\/p\u003e\n\u003cp\u003eBefore installation, verify the gas compatibility of all wetted components. Stainless steel and metal seals do not guarantee compatibility with every corrosive gas or process condition.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e05 | Pressure and Environmental Operating Window\u003c\/strong\u003e\u003c\/h3\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eOperating Differential Pressure\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e28–40 psiD (194–275 kPaD)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eMaximum Operating Pressure\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e70 psig (490 kPaG)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eProof Pressure\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e140 psig (981 kPaG)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eOperating Temperature\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e5–45°C (41–113°F)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eHeated Configuration\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eNo; standard unheated version\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003eMaintain the specified differential pressure during operation. The maximum operating pressure and proof pressure describe different limits. Proof pressure does not represent an allowable continuous operating condition.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e06 | Electrical Control and Valve Architecture\u003c\/strong\u003e\u003c\/h3\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eAnalog Setpoint\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e0–5 VDC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eAnalog Output\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e0–5 VDC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eDigital Interface\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eRS-485\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eConnector\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e20-pin Honda connector\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePositive Supply\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e+15 VDC ±2%, 120 mA minimum\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eNegative Supply\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e−15 VDC ±2%, 50 mA minimum\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eMaximum Power\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1.3 W\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eValve Technology\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003ePiezoelectric actuator\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eValve Configuration\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003eNormally open or normally closed\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003eThe specified valve configuration can be normally open or normally closed. Confirm the actual valve option before connecting the controller to a process gas supply.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e07 | Mechanical Envelope and Installation Interface\u003c\/strong\u003e\u003c\/h3\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eHeight\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e142 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eWidth\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e38 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eDepth\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e183.8 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003ePort-to-Port Dimension\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e183.8 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eWeight\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e1.8 kg (3.9 lb)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003cp\u003eCheck the outline drawing before modifying the gas panel. Confirm port orientation, service clearance, fitting size, and mounting position. The 3\/8-inch VCR option may affect the required installation space.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e08 | Semiconductor Process Applications\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eCVD:\u003c\/strong\u003e Controls process gas delivery in chemical vapor deposition equipment.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePVD:\u003c\/strong\u003e Supports gas-flow control in physical vapor deposition systems.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eEtching:\u003c\/strong\u003e Provides controlled gas delivery for plasma etch processes.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eDiffusion:\u003c\/strong\u003e Supports gas supply in semiconductor thermal processing equipment.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eIon implantation:\u003c\/strong\u003e Provides flow control for compatible gas delivery systems.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSputtering:\u003c\/strong\u003e Supports gas regulation in sputtering process equipment.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ch3\u003e\u003cstrong\u003e09 | Commissioning and Maintenance: Practical Checks\u003c\/strong\u003e\u003c\/h3\u003e\n\u003col\u003e\n\u003cli\u003e\n\u003cstrong\u003eVerify the full-scale range.\u003c\/strong\u003e Confirm that the installed unit matches the process flow requirement.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCheck the gas selection.\u003c\/strong\u003e Confirm the programmed gas and calibration data before applying a setpoint.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eConfirm the valve option.\u003c\/strong\u003e Identify normally open or normally closed operation from the unit configuration.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eInspect the VCR connections.\u003c\/strong\u003e Match the fitting size and sealing hardware to the gas panel.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCheck pressure conditions.\u003c\/strong\u003e Maintain the required differential pressure during flow verification.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eValidate electrical signals.\u003c\/strong\u003e Confirm supply polarity, analog scaling, and RS-485 communication.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eVerify zero stability.\u003c\/strong\u003e Check zero output under the manufacturer's specified conditions before evaluating low-flow performance.\u003c\/li\u003e\n\u003c\/ol\u003e\n\u003cp\u003eFor process troubleshooting, separate gas-supply problems from controller-related problems. Check inlet pressure, outlet pressure, gas selection, and signal scaling before adjusting the flow-control system.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e10 | Compliance and Product Identification\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eRoHS:\u003c\/strong\u003e Compliant as specified.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSEMI reference:\u003c\/strong\u003e SEMI E17-91.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSeries architecture:\u003c\/strong\u003e Digital, piezoelectric, metal-sealed FC-D980 family.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eConfiguration:\u003c\/strong\u003e Standard unheated version.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eConfirm the applicable compliance documentation and product revision before using the unit in a regulated equipment qualification process.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e11 | Frequently Asked Questions\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003e\u003cstrong\u003eQ1: What is the practical difference between a 30 slm and a 50 slm configuration?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eThe selected full-scale range determines the measurement and control span. A 30 slm unit may suit a process with lower maximum demand. A 50 slm unit provides greater capacity when the recipe requires higher flow. Compare actual operating points rather than selecting solely by maximum process demand.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ2: Can the stored gas configurations be changed during equipment operation?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eThe controller supports field-programmable gas configurations. However, the safe procedure for changing gases depends on the equipment control system and process recipe. Confirm the gas-selection command, transition sequence, and interlocks before implementing changes during production.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ3: How should engineers evaluate low-flow performance during acceptance testing?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eUse a calibrated reference instrument with suitable uncertainty at the intended test point. Stabilize gas pressure and temperature first. Then compare readings against the full-scale-based accuracy limit applicable below 25% FS. Avoid using the upper-range accuracy formula for low-flow acceptance.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ4: What could cause unstable readings after replacing the gas panel fittings?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eCheck fitting alignment, VCR sealing surfaces, gas leakage, and mechanical stress on the controller ports. Also verify that the replacement fittings match the original connection dimensions. A leak or installation strain can affect process stability even when the electrical interface remains correct.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ5: How should maintenance teams assess long-term zero drift?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eRecord zero readings under consistent gas isolation, pressure, and environmental conditions. Compare results over time against the specified annual zero stability. If the reading changes unexpectedly, inspect leakage, residual gas, contamination, and the test setup before concluding that the controller requires recalibration.\u003cstrong\u003e\u003c\/strong\u003e\u003c\/p\u003e","brand":"AERA","offers":[{"title":"Default Title","offer_id":68027810644150,"sku":"FC-D982","price":147.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7863\/8774\/files\/FC-D982.jpg?v=1794282663"},{"product_id":"fc-770a-aera-fc-7700-series-analog-mass-flow-controller","title":"FC-770A AERA FC-7700 Series Analog Mass Flow Controller","description":"\u003ch3\u003e\u003cstrong\u003eAERA FC-770A | Analog Flow Control for Semiconductor Gas Systems\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe \u003cstrong\u003eFC-770A\u003c\/strong\u003e is an analog mass flow controller from the AERA FC-7700 Series. It is designed for precise flow regulation in semiconductor process equipment using compatible non-corrosive gases.\u003c\/p\u003e\n\u003cp\u003eIts 3-digit analog design combines a compact installation footprint with a 20-pin card-edge electrical connection. The controller accepts a 0–5 VDC command and provides a corresponding analog output.\u003c\/p\u003e\n\u003cp\u003eWith full-scale ranges from 10 sccm to 5 slm, the FC-770A supports different gas delivery requirements. Its elastomer-sealed construction is intended for applications where the process gas and sealing materials are compatible.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e01 | Control Performance at a Glance\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eFlow range:\u003c\/strong\u003e 10 sccm to 5 slm, depending on the configured full-scale range.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eAccuracy:\u003c\/strong\u003e ≤ ±1% of full scale.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eRepeatability:\u003c\/strong\u003e ≤ ±0.2% of full scale.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eLinearity:\u003c\/strong\u003e ≤ ±0.5% of full scale.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eControl range:\u003c\/strong\u003e 2–100% of full scale.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eZero stability:\u003c\/strong\u003e Less than 0.5% of full-scale flow over one year.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eResponse:\u003c\/strong\u003e Less than 2 seconds for flow settling between set points.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e\u003cstrong\u003eEngineering note:\u003c\/strong\u003e Accuracy and repeatability are specified as percentages of full scale, not percentages of the instantaneous reading. This distinction matters when selecting a low-flow range. For example, a 1% FS accuracy specification represents a larger absolute flow deviation at a 5 slm range than at a 500 sccm range.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e02 | Gas Path and Sealing Construction\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe wetted construction uses stainless steel 316(L), PTFE, and magnetic stainless steel. Elastomer seals are available in fluoroelastomer or chloroprene rubber configurations.\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eWetted materials:\u003c\/strong\u003e Stainless steel 316(L), PTFE, and magnetic stainless.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSeal materials:\u003c\/strong\u003e Fluoroelastomer or chloroprene rubber.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eValve mechanism:\u003c\/strong\u003e Solenoid valve.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eValve position:\u003c\/strong\u003e Normally open.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eLeak integrity:\u003c\/strong\u003e Maximum 1 × 10\u003csup\u003e-6\u003c\/sup\u003e atm-cc\/sec (He).\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eHeating:\u003c\/strong\u003e Standard unheated configuration.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eSeal selection should follow the actual process gas, temperature, and cleaning requirements. Do not assume that one elastomer option is suitable for every gas. Oxygen service requires separate compatibility and cleanliness verification.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e03 | Pressure Conditions and Installation Envelope\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003ePressure conditions must be evaluated separately during system design. The differential pressure requirement is not interchangeable with the inlet pressure rating.\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eRequired differential pressure:\u003c\/strong\u003e 7–40 psiD.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eNormal operating pressure:\u003c\/strong\u003e 70 psig.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eMaximum inlet pressure:\u003c\/strong\u003e 140 psig.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eOperating temperature:\u003c\/strong\u003e 5–45°C (41–113°F).\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eDimensions (H × W × D):\u003c\/strong\u003e 122 × 32 × 124 mm.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eWeight:\u003c\/strong\u003e 1.0 kg (2.2 lb).\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eConfirm the available pressure drop across the controller under actual operating conditions. A suitable inlet pressure alone does not guarantee the required differential pressure. Also verify that downstream pressure changes will not compromise the available control margin.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e04 | Analog Interface and Electrical Requirements\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThe FC-770A uses a 0–5 VDC analog command and output interface. Electrical integration requires a compatible AERA 20-pin card-edge connector.\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eCommand signal:\u003c\/strong\u003e 0–5 VDC.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eOutput signal:\u003c\/strong\u003e 0–5 VDC.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eConnector:\u003c\/strong\u003e AERA 20-pin card-edge connector.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePositive supply:\u003c\/strong\u003e +15 VDC ±2%, 25 mA.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eNegative supply:\u003c\/strong\u003e -15 VDC ±2%, 180 mA.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eMaximum power consumption:\u003c\/strong\u003e 3.1 W.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eBefore connecting the controller, check the host equipment's pin assignment and signal reference. Do not rely on connector shape alone to establish electrical compatibility. Verify supply polarity, grounding, command scaling, and output scaling against the applicable wiring documentation.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e05 | Where the FC-770A Fits in a Process\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eThis model is intended for semiconductor equipment requiring analog gas flow regulation. Typical applications include:\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eCVD:\u003c\/strong\u003e Regulating compatible process gas delivery to deposition chambers.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePVD:\u003c\/strong\u003e Controlling gas flow used in physical vapor deposition systems.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eEtching:\u003c\/strong\u003e Managing non-corrosive gas flow in compatible process configurations.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eDiffusion:\u003c\/strong\u003e Supporting controlled gas delivery during thermal processing.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eIon implantation:\u003c\/strong\u003e Providing analog flow control in supporting gas systems.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eSputtering:\u003c\/strong\u003e Regulating compatible gas feeds for sputtering equipment.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eGas compatibility must be confirmed for each application. The listed material construction does not establish universal compatibility with every process gas.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e06 | Selection and Commissioning Checks\u003c\/strong\u003e\u003c\/h3\u003e\n\u003col\u003e\n\u003cli\u003e\n\u003cstrong\u003eConfirm the full-scale range.\u003c\/strong\u003e Match the configured range to the required process flow. Avoid selecting a range substantially larger than the normal operating demand.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eVerify gas calibration.\u003c\/strong\u003e Confirm the calibration gas and gas correction requirements before comparing indicated flow with the process target.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCheck pressure conditions.\u003c\/strong\u003e Confirm the differential pressure remains within the specified 7–40 psiD requirement.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eInspect the electrical interface.\u003c\/strong\u003e Verify the 20-pin connector, ±15 VDC supply, analog signal wiring, and signal reference.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eReview seal compatibility.\u003c\/strong\u003e Confirm the installed elastomer type is suitable for the intended gas and operating environment.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eCheck the valve response.\u003c\/strong\u003e Verify the flow settles correctly after set-point changes under the actual pressure and gas conditions.\u003c\/li\u003e\n\u003c\/ol\u003e\n\u003ch3\u003e\u003cstrong\u003e07 | Technical Specifications\u003c\/strong\u003e\u003c\/h3\u003e\n\u003ctable\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd\u003e\u003cstrong\u003eParameter\u003c\/strong\u003e\u003c\/td\u003e\n\u003ctd\u003e\u003cstrong\u003eSpecification\u003c\/strong\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eModel\u003c\/td\u003e\n\u003ctd\u003eFC-770A\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eBrand\u003c\/td\u003e\n\u003ctd\u003eAERA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSeries\u003c\/td\u003e\n\u003ctd\u003eFC-7700 Series\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eProduct type\u003c\/td\u003e\n\u003ctd\u003e3-digit analog mass flow controller\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFull-scale flow range\u003c\/td\u003e\n\u003ctd\u003e10 sccm to 5 slm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eGas service\u003c\/td\u003e\n\u003ctd\u003eInert gases; verify individual gas compatibility\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAccuracy\u003c\/td\u003e\n\u003ctd\u003e≤ ±1% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eRepeatability\u003c\/td\u003e\n\u003ctd\u003e≤ ±0.2% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eLinearity\u003c\/td\u003e\n\u003ctd\u003e≤ ±0.5% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eResponse time\u003c\/td\u003e\n\u003ctd\u003e\u0026lt; 2 seconds flow-settling time between set points\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eControl range\u003c\/td\u003e\n\u003ctd\u003e2–100% FS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eZero stability\u003c\/td\u003e\n\u003ctd\u003e\u0026lt; 0.5% FS over one year\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eDifferential pressure\u003c\/td\u003e\n\u003ctd\u003e7–40 psiD\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eNormal operating pressure\u003c\/td\u003e\n\u003ctd\u003e70 psig\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMaximum inlet pressure\u003c\/td\u003e\n\u003ctd\u003e140 psig\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eWetted materials\u003c\/td\u003e\n\u003ctd\u003eStainless steel 316(L), PTFE, magnetic stainless\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eSeal materials\u003c\/td\u003e\n\u003ctd\u003eFluoroelastomer or chloroprene rubber\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eValve type\u003c\/td\u003e\n\u003ctd\u003eSolenoid, normally open\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eLeak integrity\u003c\/td\u003e\n\u003ctd\u003e1 × 10\u003csup\u003e-6\u003c\/sup\u003e atm-cc\/sec (He) maximum\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAnalog command\u003c\/td\u003e\n\u003ctd\u003e0–5 VDC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eAnalog output\u003c\/td\u003e\n\u003ctd\u003e0–5 VDC\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eElectrical connector\u003c\/td\u003e\n\u003ctd\u003eAERA 20-pin card-edge connector\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePower supply\u003c\/td\u003e\n\u003ctd\u003e+15 VDC ±2%, 25 mA; -15 VDC ±2%, 180 mA\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eMaximum power\u003c\/td\u003e\n\u003ctd\u003e3.1 W\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eOperating temperature\u003c\/td\u003e\n\u003ctd\u003e5–45°C (41–113°F)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eHeated option\u003c\/td\u003e\n\u003ctd\u003eNo; standard unheated version\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eDimensions (H × W × D)\u003c\/td\u003e\n\u003ctd\u003e122 × 32 × 124 mm\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eWeight\u003c\/td\u003e\n\u003ctd\u003e1.0 kg (2.2 lb)\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eCompliance\u003c\/td\u003e\n\u003ctd\u003eRoHS\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003ch3\u003e\u003cstrong\u003e08 | Frequently Asked Questions\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003e\u003cstrong\u003eQ1: Can the FC-770A be installed as a direct replacement for another analog MFC?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eNot automatically. Check the mounting dimensions, gas connections, full-scale range, connector pinout, supply requirements, and analog signal scaling. Two controllers with similar footprints may use different electrical assignments or calibration data. Complete these checks before installation.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ2: What should be checked if the displayed flow does not match the process flow reference?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eFirst, confirm that both instruments use the same engineering units and reference conditions. Then check the gas calibration, full-scale range, pressure conditions, and analog output scaling. A difference in gas calibration can produce a consistent offset even when the controller operates normally.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ3: Why can flow become unstable after a gas line or regulator is changed?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eA regulator change can alter the pressure available across the controller. Check upstream pressure stability, downstream backpressure, regulator capacity, and line restrictions. Confirm that the differential pressure remains within the required range before adjusting the control system.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ4: What does the normally-open valve configuration mean during a power interruption?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eThe valve is specified as normally open. Its mechanical default position is therefore open when the actuating power is removed. Consider this behavior in the equipment's gas isolation and safety design. Do not treat the controller as a fail-closed shutoff device.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eQ5: How should a replacement unit be verified before returning equipment to production?\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eCompare the replacement's range, gas calibration, seal material, connector wiring, and power requirements with the installed configuration. After installation, perform a leak check and verify zero output, several flow set points, and response stability. Follow the equipment manufacturer's approved commissioning procedure before releasing the gas system.\u003c\/p\u003e\n\u003ch3\u003e\u003cstrong\u003e9 | Ordering Information\u003c\/strong\u003e\u003c\/h3\u003e\n\u003cp\u003eWhen requesting an AERA FC-770A, provide the complete model number and available configuration details. Include the required full-scale flow range, process gas, seal material, pressure conditions, and connector requirements.\u003c\/p\u003e\n\u003cp\u003eFor replacement or retrofit projects, photographs of the nameplate and electrical connector can help verify the configuration before ordering.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eContact us for pricing, availability, and technical assistance for the AERA FC-770A.\u003c\/strong\u003e\u003c\/p\u003e","brand":"AERA","offers":[{"title":"Default Title","offer_id":68027813396662,"sku":"FC-770A","price":148.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0722\/7863\/8774\/files\/FC-770AC.jpg?v=1794282753"}],"url":"https:\/\/www.plcsparehub.com\/collections\/aera.oembed","provider":"Global PLC Spare Hub","version":"1.0","type":"link"}